| Patents for H01J 37 - Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof (46,866) |
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| 10/28/1980 | US4230515 Plasma etching apparatus |
| 10/28/1980 | CA1088575A1 Selected perfluoropolyether oils of very high purity and with a low volatility |
| 10/21/1980 | US4229655 Vacuum chamber for treating workpieces with beams |
| 10/21/1980 | CA1088218A1 Ion implantation apparatus with a cooled structure controlling the surface potential of a target surface |
| 10/15/1980 | EP0017472A1 Evacuable equipment containing a device for heat transfer and process for the manufacture of semi-conductor components using this equipment |
| 10/15/1980 | EP0017405A1 Method of treating a workpiece with an electron beam |
| 10/15/1980 | EP0017143A1 Microwave plasma etching apparatus |
| 10/14/1980 | US4228358 Wafer loading apparatus for beam treatment |
| 10/14/1980 | CA1087548A1 Apparatus for ion-nitriding |
| 10/07/1980 | US4227090 Electron beam microfabrication apparatus and method |
| 10/07/1980 | US4227080 Device for shifting frozen specimen, for use in scanning type electron microscope |
| 10/07/1980 | US4226897 Method of forming semiconducting materials and barriers |
| 10/01/1980 | EP0016603A1 A method for processing substrate materials by means of treating plasma |
| 10/01/1980 | EP0016579A1 Apparatus for mechanically clamping semiconductor wafer against pliable thermally conductive surface |
| 09/16/1980 | US4223224 Charged-particle beam optical apparatus including a damped supplemental oscillator for the specimen holder thereof |
| 09/16/1980 | US4223220 Method for electronically imaging the potential distribution in an electronic component and arrangement for implementing the method |
| 09/16/1980 | US4223199 Charged particle beam welding with beam deflection around weld pool retainers |
| 09/16/1980 | US4223048 Plasma enhanced chemical vapor processing of semiconductive wafers |
| 09/09/1980 | US4221972 Apparatus for the partial treatment of elongated articles by current intensive glow discharge |
| 09/09/1980 | US4221965 Scanning type electron microscope |
| 09/09/1980 | US4221652 Sputtering device |
| 09/09/1980 | US4221629 Electron beam evaporation device for vacuum evaporators |
| 09/03/1980 | EP0014819A1 Sputtering cathode and system for sputter-coating large area substrates |
| 09/02/1980 | US4220854 Method for the contactless measurement of the potential waveform in an electronic component and apparatus for implementing the method |
| 09/02/1980 | US4220853 Method for the contactless measurement of the potential waveform in an electronic component and arrangement for implementing the method |
| 09/02/1980 | CA1085073A1 Device which makes it possible to effect the programmed tracing of figures which have different shapes |
| 09/02/1980 | CA1085065A1 Apparatus for detecting registration marks on a target such as a semiconductor wafer |
| 08/26/1980 | US4219732 Magnetic electron lens |
| 08/26/1980 | US4219731 Method for detecting object picture by electron beam |
| 08/26/1980 | US4219730 Charge-particle energy analyzer |
| 08/26/1980 | US4219719 Method and apparatus for automatically positioning a workpiece relative to a scanning field or mask |
| 08/26/1980 | US4219397 Magnetron sputter apparatus |
| 08/20/1980 | EP0014304A1 Method and apparatus for the contactless measuring of the potential on an electronic element |
| 08/19/1980 | US4218621 Electron beam exposure apparatus |
| 08/19/1980 | US4218617 Micro-analysis processes using X-rays |
| 08/12/1980 | US4217641 Correction for polychromatic X-ray distortion in CT images |
| 08/12/1980 | US4217495 Electron microscope backscattered electron detectors |
| 08/12/1980 | CA1083526A1 Sputter-coating of glass sheets or other substrates |
| 08/06/1980 | EP0013876A1 Device for contactless potential measurement |
| 08/06/1980 | EP0013738A1 Method and apparatus for producing a high brightness electron beam |
| 07/23/1980 | EP0013644A1 Improvement in ion nitriding elongated hollow steel bodies |
| 07/23/1980 | EP0013483A1 Apparatus and Process for Plasma-etching |
| 07/22/1980 | US4214187 Ion source producing a dense flux of low energy ions |
| 07/22/1980 | US4214166 Magnetic lens system for corpuscular radiation equipment |
| 07/22/1980 | US4214163 Method and apparatus for correcting astigmatism in a scanning electron microscope or the like |
| 07/22/1980 | US4214162 Corpuscular beam microscope for ring segment focusing |
| 07/22/1980 | US4214159 Apparatus for analyzing samples by electromagnetic irradiation |
| 07/22/1980 | US4213844 Ion plating apparatus |
| 07/15/1980 | US4213053 Electron beam system with character projection capability |
| 07/15/1980 | CA1081656A1 Sputtering device and method of sputtering by means of such a device |
| 07/10/1980 | WO1980001363A1 Lpcvd systems having in situ plasma cleaning |
| 07/09/1980 | EP0012954A2 Bias sputter deposition apparatus and its method of use |
| 07/09/1980 | EP0012838A1 Ion source, especially for ion implantation apparatus |
| 07/09/1980 | EP0012765A1 Method of operating a raster-scan electron beam lithographic system. |
| 07/08/1980 | US4211924 Transmission-type scanning charged-particle beam microscope |
| 07/01/1980 | US4210806 High brightness electron probe beam and method |
| 06/24/1980 | US4209702 Multiple electron lens |
| 06/24/1980 | US4209701 Magnetic lens arrangement for corpuscular radiation equipment working under a vacuum |
| 06/24/1980 | US4209698 Transmission-type charged particle beam apparatus |
| 06/24/1980 | US4209552 Minimization of multipactoring |
| 06/24/1980 | US4209357 Plasma reactor apparatus |
| 06/24/1980 | CA1080369A1 Scanning electron microscope micrometer scale and method of fabricating same |
| 06/17/1980 | US4208240 With coherent light to produce change in reflected radiation, response signals determine end-point |
| 06/10/1980 | US4207489 Movable extraction electrode for an ion source |
| 06/10/1980 | US4207137 Method of controlling a plasma etching process by monitoring the impedance changes of the RF power |
| 06/03/1980 | US4206408 Procedures and equipment for studying surface phenomena through field effect, by means of an emission point |
| 06/03/1980 | US4206355 System for monitoring the position intensity uniformity and directivity of a beam of ionizing radiation |
| 06/03/1980 | US4206349 Electron microscope |
| 06/03/1980 | CA1078917A1 Two-directional fine adjusting device |
| 05/28/1980 | EP0011414A1 Process and apparatus for electron beam irradiation of surfaces |
| 05/28/1980 | EP0011387A1 Glow discharge heating devices |
| 05/27/1980 | US4205232 Arrangement for preventing the alteration of the primary beam by unwanted particles, such as sputter products, charged ions and electrons and their secondary processes |
| 05/27/1980 | US4205226 Auger electron spectroscopy |
| 05/27/1980 | US4204936 Method and apparatus for attaching a target to the cathode of a sputtering system |
| 05/13/1980 | CA1077437A1 Sputtering apparatus |
| 05/06/1980 | US4201654 Anode assisted sputter etch and deposition apparatus |
| 04/29/1980 | US4200805 Multicathode thermochemical processing oven |
| 04/29/1980 | US4200510 Assembly and method to extend useful life of sputtering targets |
| 04/29/1980 | US4199996 Precise feeding table apparatus |
| 04/29/1980 | CA1076657A1 Method and apparatus for projecting solids containing gaseous media into an arc discharge |
| 04/22/1980 | US4199689 Electron beam exposing method and electron beam apparatus |
| 04/22/1980 | US4199688 Apparatus for electron beam lithography |
| 04/22/1980 | US4199681 Method and apparatus for automatically focusing an electron beam in a scanning beam device |
| 04/16/1980 | EP0009562A1 Method and device for corpuscular-ray shadow-projection exposure |
| 04/15/1980 | US4198569 Electron beam exposure system |
| 04/15/1980 | US4198283 Magnetron sputtering target and cathode assembly |
| 04/08/1980 | US4197486 Control system for deflecting an electron beam |
| 04/08/1980 | US4197455 Metal vapor source with a regulatable flow and to an ion analyzer equipped with such a source |
| 04/02/1980 | EP0009049A1 Apparatus and method for fabricating microminiature devices. |
| 03/25/1980 | US4194962 Cathode for sputtering |
| 03/18/1980 | US4194123 Lithographic apparatus |
| 03/18/1980 | US4194116 Electron microscope or the like and method of use |
| 03/11/1980 | US4193070 Method and arrangement for controlling the electrical relationships of a current-intensive glow discharge |
| 03/11/1980 | US4192706 Gas-etching device |
| 03/11/1980 | CA1073561A1 Device for scanning a target with a beam of charged particles |
| 03/04/1980 | US4191916 Table positioning system including optical reference position measuring transducer |
| 03/04/1980 | US4191385 Vacuum-sealed gas-bearing assembly |
| 03/04/1980 | CA1073055A1 Electron-beam welding device for a vacuum enclosure |
| 03/04/1980 | CA1072913A1 Device for providing high-intensity ion or electron beam |
| 02/19/1980 | US4189641 Electron microscope |