| Patents for H01J 37 - Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof (46,866) |
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| 05/15/1985 | EP0140979A1 Alloy containing liquid metal ion species |
| 05/15/1985 | EP0140975A1 Reactive ion etching apparatus |
| 05/15/1985 | EP0140928A1 Ion implantation control system |
| 05/14/1985 | US4517465 Ion implantation control system |
| 05/14/1985 | US4517223 Method of making amorphous semiconductor alloys and devices using microwave energy |
| 05/14/1985 | US4517070 Magnetron sputtering cathode assembly and magnet assembly therefor |
| 05/14/1985 | US4516435 Precision manipulator heating and cooling apparatus for use in UHV systems with sample transfer capability |
| 05/09/1985 | WO1985002057A1 Process and installation for determining the focusing state of an image forming optical apparatus |
| 05/08/1985 | EP0140294A2 Plasma processing method and apparatus for carrying out the same |
| 05/08/1985 | EP0140130A2 Process and apparatus for preparing semiconductor layer |
| 05/08/1985 | EP0139835A2 Plasma reactor apparatus and method |
| 05/07/1985 | US4516146 Electron sources and equipment having electron sources |
| 05/07/1985 | US4516052 Dispenser for ion source |
| 05/07/1985 | US4516030 Scanning electron beam exposure system |
| 05/07/1985 | US4516029 E beam stage with below-stage X-Y drive |
| 05/07/1985 | US4516026 Scanning electron microscope assembly operating in situ |
| 05/07/1985 | US4515675 Magnetron cathode for cathodic evaportion apparatus |
| 05/07/1985 | US4515107 Apparatus for the manufacture of photovoltaic devices |
| 05/07/1985 | CA1186523A1 Coating of plant seeds |
| 05/02/1985 | EP0139377A1 Apparatus and methods for ion implantation |
| 05/02/1985 | EP0139325A1 Electron lithography apparatus |
| 04/30/1985 | US4514682 Secondary electron spectrometer for measuring voltages on a sample utilizing an electron probe |
| 04/30/1985 | US4514638 Electron-optical system with variable-shaped beam for generating and measuring microstructures |
| 04/30/1985 | US4514637 Atomic mass measurement system |
| 04/30/1985 | US4514634 Electron beam focussing |
| 04/30/1985 | US4514629 Scanning transmission electron microscopes |
| 04/30/1985 | US4514437 Apparatus for plasma assisted evaporation of thin films and corresponding method of deposition |
| 04/30/1985 | US4513684 Upstream cathode assembly |
| 04/25/1985 | WO1985001751A1 Method and apparatus for fabricating devices using reactive ion etching |
| 04/24/1985 | EP0138645A1 Procedure for measuring the depth of an ion-etching |
| 04/24/1985 | EP0138610A2 Electron detector |
| 04/24/1985 | EP0138250A2 Structure for increasing number of specimens viewed in an electron microscope |
| 04/23/1985 | US4513430 Missing or broken wafer sensor |
| 04/23/1985 | US4513203 Mask and system for mutually aligning objects in ray exposure systems |
| 04/23/1985 | US4513022 Process for amorphous silicon films |
| 04/23/1985 | US4513021 Plasma reactor with reduced chamber wall deposition |
| 04/23/1985 | US4512868 High speed dry etching of semiconductors |
| 04/23/1985 | US4512867 Method and apparatus for controlling plasma generation in vapor deposition |
| 04/23/1985 | US4512812 Method for reducing phosphorous contamination in a vacuum processing chamber |
| 04/23/1985 | US4512284 Glow discharge apparatus for use in coating a disc-shaped substrate |
| 04/23/1985 | US4512283 Plasma reactor sidewall shield |
| 04/23/1985 | CA1186067A1 Electron beam array lithography system employing multiple parallel array optics channels and method of operation |
| 04/23/1985 | CA1186021A1 Method and apparatus for surface hardening cams |
| 04/17/1985 | EP0137649A1 Apparatus and method for ion implantation |
| 04/16/1985 | US4511980 Electron beam exposure apparatus |
| 04/16/1985 | US4511870 Focussing solenoid, application thereof and a process for manufacturing same |
| 04/16/1985 | US4511593 Vapor deposition apparatus and method |
| 04/16/1985 | US4511451 Magnetron |
| 04/16/1985 | CA1185648A1 System and film gate for accurately imaging information on a film by a charged particle beam |
| 04/10/1985 | EP0136752A2 Electron image projector |
| 04/10/1985 | EP0136610A2 Samples holder for secondary ion mass spectroscopy (SIMS) and other high accuracy methods of analyzing particle rays, and method of operating it |
| 04/10/1985 | EP0136364A1 Method and apparatus for the selective and self-adjusting deposition of metal layers and application of this method |
| 04/09/1985 | US4510387 Ion micro-analysis |
| 04/09/1985 | US4510386 Thinning of specimens for examination under the electron microscope |
| 04/09/1985 | US4509451 Electron beam induced chemical vapor deposition |
| 04/09/1985 | CA1185106A1 Scanning electron microscope sample cooling device |
| 04/02/1985 | US4508967 Electronic optical apparatus comprising pyrolytic graphite elements |
| 04/02/1985 | US4508748 Manufacturing process for selenium photoreceptors |
| 04/02/1985 | US4508612 Eliminating undesirable depositing angles of atoms in vacuum chamber |
| 04/02/1985 | US4508554 Microwave energy; reaction of gaseous starting materials with end face |
| 04/02/1985 | US4508056 Target holder with mechanical scanning |
| 04/02/1985 | US4508053 Vacuum deposition apparatus for manufacturing selenium photoreceptors |
| 04/02/1985 | CA1239115A Sputtering apparatus and method |
| 04/02/1985 | CA1184880A1 Sputtering apparatus and method |
| 04/02/1985 | CA1184877A1 Method and apparatus for depositing conducting oxide on a substrate |
| 03/28/1985 | WO1985001389A1 Ion microbeam implanting apparatus |
| 03/28/1985 | WO1985001301A1 Sputtering apparatus |
| 03/27/1985 | EP0135366A1 System and method for ion implantation |
| 03/26/1985 | US4507559 Deflection structure for a corpuscular beam blanking system and method for operating same |
| 03/20/1985 | EP0134559A2 Cathodic sputtering apparatus |
| 03/20/1985 | EP0134399A2 Single axis combined ion and vapour source |
| 03/20/1985 | EP0134269A1 Electron beam projection lithography |
| 03/19/1985 | US4506296 Method and device for three-dimensional visualization from video signals, notably for electron microscopy |
| 03/19/1985 | US4506284 Electron sources and equipment having electron sources |
| 03/19/1985 | US4506154 Planar biaxial micropositioning stage |
| 03/19/1985 | US4505950 Method of manufacturing a multiple-layer, non-single-crystalline semiconductor on a substrate |
| 03/19/1985 | US4505949 Thin film deposition using plasma-generated source gas |
| 03/19/1985 | US4505948 Method of coating ceramics and quartz crucibles with material electrically transformed into a vapor phase |
| 03/19/1985 | US4505798 Magnetron sputtering apparatus |
| 03/19/1985 | CA1184239A1 Electron beam array alignment means |
| 03/12/1985 | US4504955 Low voltage operation of arc discharge devices |
| 03/12/1985 | US4504558 Method of compensating the proximity effect in electron beam projection systems |
| 03/12/1985 | US4504518 Method of making amorphous semiconductor alloys and devices using microwave energy |
| 03/12/1985 | US4504194 Air lock vacuum pumping methods and apparatus |
| 03/05/1985 | US4503334 Method of using an electron beam |
| 03/05/1985 | US4503329 Ion beam processing apparatus and method of correcting mask defects |
| 03/05/1985 | CA1183570A1 Off-axis electron gun |
| 02/28/1985 | WO1985000925A1 Rotatable sputtering apparatus |
| 02/27/1985 | EP0133452A2 Reactive ion etching method |
| 02/26/1985 | US4501766 Film depositing apparatus and a film depositing method |
| 02/19/1985 | US4500791 High stability electron beam generator for processing material |
| 02/19/1985 | US4500790 System for improving the uniformness of patterns generated by electron beam lithography |
| 02/19/1985 | US4500789 Electron beam exposing method |
| 02/19/1985 | US4500565 Photoreaction of gas with ligat |
| 02/19/1985 | US4500563 Semiconductive wafers; evacuable envelopes containing interleaved electrodes |
| 02/19/1985 | US4500409 Magnetron sputter coating source for both magnetic and non magnetic target materials |
| 02/19/1985 | US4500408 Apparatus for and method of controlling sputter coating |
| 02/19/1985 | US4499776 Vacuum sample introduction unit |
| 02/14/1985 | WO1985000693A1 Focused ion beam column |
| 02/13/1985 | EP0133016A2 Multi-gap magnetic image lens for charged particle beams |