| Patents for H01J 37 - Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof (46,866) |
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| 08/20/1986 | EP0191293A2 Back-scatter electrons detector |
| 08/19/1986 | US4607333 Electron beam exposure apparatus |
| 08/19/1986 | US4607167 Charged particle beam lithography machine incorporating localized vacuum envelope |
| 08/19/1986 | US4607166 Means for locating an ultra-precision positioning of a table |
| 08/19/1986 | US4606929 Method of ionized-plasma spraying and apparatus for performing same |
| 08/19/1986 | US4606806 Separate plasma discharges confined by separate electromagnetic fields |
| 08/19/1986 | US4606802 Planar magnetron sputtering with modified field configuration |
| 08/19/1986 | CA1210161A1 Electron beam peripheral patterning of integrated circuits |
| 08/19/1986 | CA1209953A1 Thin film deposition by sputtering |
| 08/14/1986 | WO1986004732A1 Secondary ion collection and transport system for ion microprobe |
| 08/14/1986 | WO1986004616A1 Spraying installation for reactive coating of a substrate with hard materials |
| 08/13/1986 | EP0190251A1 Method and apparatus for the micro-analysis or imaging of samples. |
| 08/12/1986 | US4605860 Apparatus for focusing a charged particle beam onto a specimen |
| 08/12/1986 | CA1209668A1 Current controller for heating stage on leitz microscope |
| 08/06/1986 | EP0189498A1 Field-emission scanning auger electron microscope |
| 08/06/1986 | CN85100610A Equipment for generating multiple metal and gas particles beams |
| 08/05/1986 | US4604523 Scannable-beam microscopes and image stores therefor |
| 08/05/1986 | US4604180 Target assembly capable of attaining a high step coverage ratio in a magnetron-type sputtering device |
| 07/30/1986 | EP0189210A2 Process for producing light and heat sources with an improved radiating capacity |
| 07/30/1986 | EP0188961A1 Apparatus for the very high resolution microanalysis of a solid sample |
| 07/29/1986 | US4602981 Monitoring technique for plasma etching |
| 07/29/1986 | CA1208763A1 Scan line type dynamic observation apparatus |
| 07/23/1986 | EP0188207A2 System for generating uniform gas flow in a plasma reactor chamber |
| 07/23/1986 | EP0188206A2 System for generating a substantially uniform plasma |
| 07/23/1986 | EP0187882A1 Process for the production of low-resistance contacts |
| 07/23/1986 | CN86100036A Field-emission scanning auger electron microscope |
| 07/22/1986 | US4602282 Measuring devices for two-dimensional photon-caused or corpuscular-ray-caused image signals |
| 07/22/1986 | US4602239 Spring tensioned wire resistance heater |
| 07/22/1986 | US4601971 Tunnel cathode mask for electron lithography and method for manufacturing and operating it |
| 07/22/1986 | US4601807 Reactor for plasma desmear of high aspect ratio hole |
| 07/22/1986 | US4601806 Magnetron cathode for sputtering ferromagnetic targets |
| 07/17/1986 | WO1986004183A1 Method and apparatus for spot shaping and blanking a focused beam |
| 07/16/1986 | EP0187226A2 Sputtering apparatus with film forming directivity |
| 07/15/1986 | US4600839 Small-dimension measurement system by scanning electron beam |
| 07/15/1986 | US4600563 Radio frequency, coils |
| 07/15/1986 | US4600492 Magnet driving method and device for same |
| 07/15/1986 | US4600490 Anode for magnetic sputtering |
| 07/15/1986 | US4600464 Plasma etching reactor with reduced plasma potential |
| 07/15/1986 | US4599971 Vapor deposition film forming apparatus |
| 07/09/1986 | EP0186865A2 Device for interrupting arc discharges in a gas discharge vessel |
| 07/09/1986 | EP0186851A2 Apparatus and method for composite image formation by scanning electron beam |
| 07/08/1986 | US4599516 Specimens rotating device |
| 07/08/1986 | US4598663 Apparatus for treating the inside surface of an article with an electric glow discharge |
| 07/03/1986 | WO1986003886A1 Triode plasma reactor with magnetic enhancement |
| 07/02/1986 | EP0186490A2 Method for operating a microscopical mapping system |
| 07/02/1986 | CA1206914A Sputtering cathode apparatus |
| 07/01/1986 | US4598231 Microwave ion source |
| 07/01/1986 | US4597847 Fringing magnetic field |
| 07/01/1986 | US4597844 Coating film and method and apparatus for producing the same |
| 06/24/1986 | US4596942 Field emission type electron gun |
| 06/24/1986 | US4596934 Electron beam apparatus with improved specimen holder |
| 06/24/1986 | US4596929 Three-stage secondary emission electron detection in electron microscopes |
| 06/24/1986 | US4596928 Method and apparatus for an atmospheric scanning electron microscope |
| 06/18/1986 | EP0184917A1 Plasma reactor vessel and process |
| 06/18/1986 | EP0184859A2 Electron beam line width measurement system |
| 06/18/1986 | EP0184812A2 High frequency plasma generation apparatus |
| 06/18/1986 | EP0184810A2 Method of detecting a focus defect of an electron microscope image |
| 06/18/1986 | EP0184792A1 Apparatus for recording and reproducing images produced by an electron microscope |
| 06/18/1986 | EP0184680A1 Detecting arrangement of a charged particle beam's target point |
| 06/17/1986 | US4595837 Method for preventing arcing in a device during ion-implantation |
| 06/17/1986 | US4595836 Alignment correction technique |
| 06/17/1986 | US4595819 Method and system for deflecting a focussed electron beam along a predetermined processing path |
| 06/17/1986 | US4595570 For irradiating surfaces of works with microwave discharge plasma within vacuum chamber |
| 06/17/1986 | US4595484 Cathode plate for mounting workpiece, three-plate anode arranged over cathode |
| 06/17/1986 | US4595483 Charging and coating stations |
| 06/17/1986 | US4595482 Comprises means for deriving a first signal indicative of the target erosion condition, and means responsive to first signal for controlling powers of plasma discharges |
| 06/17/1986 | US4595452 Method and apparatus for plasma etching |
| 06/17/1986 | CA1206119A1 Focusing magnetron sputtering apparatus |
| 06/11/1986 | EP0184220A2 Apparatus and method for carrying out dry etching |
| 06/11/1986 | EP0039688B1 Sextupole system for the correction of spherical aberration |
| 06/10/1986 | US4594554 Programmed control of electron beam power |
| 06/10/1986 | CN85102774A Method and structure of causing electrostatic 4-porlarity field by using closed boundary |
| 06/10/1986 | CA1205844A1 Electron emitter assembly |
| 06/04/1986 | EP0183561A2 Microwave plasma processing process and apparatus |
| 06/04/1986 | EP0183262A1 Method of recording and reproducing images produced by an electron microscope |
| 06/04/1986 | EP0183254A2 Plasma CVD apparatus and method for forming a diamond-like carbon film |
| 06/04/1986 | EP0183230A2 Method and apparatus for controlling the chemical-thermal treatment of work pieces in a flow discharge |
| 06/04/1986 | EP0183125A2 Positioning system |
| 06/03/1986 | US4593200 Scan controller for ion implanter device |
| 06/03/1986 | US4592894 Field emission chemical sensor for receptor/binder, such as antigen/antibody |
| 06/03/1986 | CA1205580A1 Quantitative compositional analyser for use with scanning electron microscopes |
| 05/28/1986 | EP0182665A2 Method of projecting a photoelectron image |
| 05/28/1986 | EP0182455A2 Paired electrodes for plasma chambers |
| 05/28/1986 | EP0182360A1 A system for continuously exposing desired patterns and their backgrounds on a target surface |
| 05/28/1986 | EP0182341A2 Method for recording and reproducing electron beam image information |
| 05/27/1986 | US4591754 Electron gun for brightness |
| 05/27/1986 | US4591753 Electron beam apparatus comprising a wire source |
| 05/27/1986 | US4591722 Low temperature stage for microanalysis |
| 05/27/1986 | US4590792 Microanalysis particle sampler |
| 05/21/1986 | EP0181507A1 Device for recording images produced by an electron microscope |
| 05/20/1986 | US4590382 Method of aligning two members utilizing marks provided thereon |
| 05/20/1986 | US4590380 Means for locating an ultra-precision positioning of a table |
| 05/20/1986 | US4590379 Achromatic deflector and quadrupole lens |
| 05/20/1986 | US4590042 Plasma reactor having slotted manifold |
| 05/20/1986 | CA1204700A1 Magnetron reactive bias sputtering method and apparatus |
| 05/14/1986 | EP0180723A1 Corpuscular beam device |
| 05/13/1986 | US4588952 Arc discharge abnormality detecting system |
| 05/13/1986 | US4588942 Thickness monitoring system for intermittently exposing a quartz crystal to a material to be deposited |
| 05/13/1986 | US4588928 Electron emission system |
| 05/13/1986 | US4588891 Scanning type electron microscope |