H01J 37 - Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof

Patents for H01J 37 - Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof (46,866)
11/1986
11/19/1986	CN86201415U 平行场空心阴极电子枪 Field parallel hollow cathode electron gun
11/19/1986	CN85103601A New structure for contact between metal and nonmetal in glow discharge cathode transmission
11/18/1986	US4623836 Sampling method for fast potential determination in electron beam mensuration
11/18/1986	US4623794 Particle beam blanking system
11/18/1986	US4623783 Method of displaying diffraction pattern by electron microscope
11/18/1986	US4623441 Paired electrodes for plasma chambers
11/18/1986	US4623417 Magnetron plasma reactor
11/18/1986	CA1214253A1 Upstream cathode assembly
11/12/1986	EP0200952A2 Monitoring technique for plasma etching
11/12/1986	EP0200893A1 Method for accentuating a portion of an object on a specimen surface scanned with the primary beam of a scanning microscope, and arrangements for carrying it out
11/12/1986	EP0118465B1 Low voltage operation of arc discharge devices
11/12/1986	CA1213852A Method of and apparatus for the coating of a substrate with material electrically transformed into a vapor phase
11/11/1986	US4622453 Electron beam gun mounting on a work chamber
11/11/1986	US4622122 Sputering
11/11/1986	US4622121 Apparatus for coating materials by cathode sputtering
11/11/1986	US4622094 Method of controlling dry etching by applying an AC voltage to the workpiece
11/06/1986	WO1986006416A1 Method and target for sputter depositing thin films
11/05/1986	EP0200651A1 Triode-type ion source with a single high frequency ionization chamber and with multiple magnetic confinement
11/05/1986	EP0200333A2 Ion beam processing method and apparatus
11/05/1986	EP0200133A2 Plasma etching reactor
11/05/1986	EP0200083A2 Apparatus for low-energy scanning electron beam lithography
11/05/1986	EP0200035A2 Electron beam source
11/04/1986	US4621371 Method of forming by projection an integrated circuit pattern on a semiconductor wafer
11/04/1986	US4620913 Electric arc vapor deposition method and apparatus
11/04/1986	US4620898 Ion beam sputter etching
11/04/1986	US4620893 Apparatus for the plasma treatment of disk-shaped substrates
10/1986
10/29/1986	EP0199585A2 Apparatus for depositing electrically conductive and/or electrically insulating material on a workpiece
10/29/1986	EP0199575A2 A vacuum system for a charged particle beam recording system
10/29/1986	EP0199573A2 Electronic mosaic imaging process
10/29/1986	EP0199167A2 Compound flow plasma reactor
10/29/1986	EP0198908A1 Focused substrate alteration
10/29/1986	EP0198907A1 Focused substrate alteration
10/28/1986	US4620103 Sample holder for mass analysis
10/28/1986	US4620102 Electron-impact type of ion source with double grid anode
10/28/1986	US4620081 Self-contained hot-hollow cathode gun source assembly
10/28/1986	US4619755 Sputtering system for cathode sputtering apparatus
10/28/1986	US4619030 Temperature control
10/23/1986	WO1986006210A1 Manufacture of liquid metal ion source
10/22/1986	EP0198604A1 Glow discharge deposition apparatus having confined plasma region
10/22/1986	EP0198459A2 Thin film forming method through sputtering and sputtering device
10/22/1986	EP0197936A1 Sputter deposition
10/21/1986	US4618767 Low-energy scanning transmission electron microscope
10/21/1986	US4618766 Automatically adjustable electron microscope
10/21/1986	US4618477 Uniform plasma for drill smear removal reactor
10/15/1986	EP0197770A2 Planar penning magnetron sputtering device
10/15/1986	EP0197668A2 External plasma gun
10/15/1986	EP0197579A1 Electron beam apparatus comprising an integrated anode/beam blanking unit
10/15/1986	EP0197362A1 Method making use of a scanning microscope to determine the points on a sample conducting a signal of a predetermined frequency
10/14/1986	US4617203 Corrosion resistant wetting
10/14/1986	US4617079 Improved low frequency etching, uniformity
10/14/1986	US4616597 Apparatus for making a plasma coating
10/14/1986	CA1212783A1 Suppression of molecular ions in secondary ion mass spectra
10/08/1986	EP0196958A2 Electron beam test probe for integrated-circuit testing
10/08/1986	EP0196710A1 Electron beam apparatus comprising an anode which is included in the cathode/Wehnelt cylinder unit
10/08/1986	EP0196534A1 Method and device making use of it to determine the signal frequencies at at least one point of a sample with the use of a scanning microscope
10/08/1986	EP0196531A1 Method for indirectly determining the intensity distribution of pulsed particle beams produced in a particle beam measuring instrument
10/07/1986	US4616363 Electron-beam furnace with magnetic stabilization
10/07/1986	US4615905 Method of depositing semiconductor films by free radical generation
10/07/1986	US4615761 Method of and apparatus for detecting an end point of plasma treatment
10/07/1986	US4615756 Dry etching apparatus
10/07/1986	US4615755 Wafer cooling and temperature control for a plasma etching system
10/07/1986	US4615299 Plasma CVD apparatus for making photoreceptor drum
10/07/1986	US4615298 Method of making non-crystalline semiconductor layer
10/07/1986	CA1212486A1 Method and apparatus for introducing normally solid materials into substrate surfaces
10/07/1986	CA1212356A1 Process gas introduction, confinement and evacuation system for glow discharge deposition apparatus
10/01/1986	EP0196252A1 Transport box
10/01/1986	EP0053620B1 Method and apparatus for material analysis
09/1986
09/30/1986	US4614872 Charged particle deflection
09/30/1986	US4614639 Electrode containing bore and sidewall each supply gas with radial flow
09/30/1986	CA1212169A1 Apparatus for the manufacture of photovoltaic devices
09/24/1986	EP0195349A2 Low-energy scanning transmission electron microscope
09/24/1986	EP0195052A1 A method of stabilising a plasma column produced by a multi-cathode generator
09/23/1986	US4613981 Method and apparatus for lithographic rotate and repeat processing
09/23/1986	CA1211867A1 Method and apparatus for fabricating devices with dc bias-controlled reactive ion etching
09/17/1986	EP0194570A2 Scanning corpuscular microscope with reduced Boersch effect
09/17/1986	EP0194323A1 Scanning tunneling microscope
09/16/1986	US4612432 Etching plasma generator diffusor and cap
09/16/1986	US4612077 Electrode for plasma etching system
09/09/1986	US4611330 Electron beam vaporizer
09/09/1986	US4611121 Magnet apparatus
09/09/1986	US4611120 Suppression of molecular ions in secondary ion mass spectra
09/09/1986	US4611119 Method of emphasizing a subject area in a scanning microscope
09/09/1986	US4610948 Lithography and photoprinting, positive resists
09/09/1986	US4610775 Method and apparatus for clearing short-circuited, high-voltage cathodes in a sputtering chamber
09/09/1986	US4610774 Target for sputtering
09/09/1986	US4610770 Microwaves, magnetism, plasma generation
09/02/1986	US4609809 Method and apparatus for correcting delicate wiring of IC device
09/02/1986	US4609564 High speed vapor deposition from electrode
09/02/1986	US4609428 Method and apparatus for microwave plasma anisotropic dry etching
09/02/1986	US4609426 Spectral emittance of gas plasma
09/02/1986	US4608943 Cathode assembly with localized profiling capabilities
09/02/1986	CA1210824A1 Apparatus and method for evaporation arc stabilization
08/1986
08/27/1986	EP0192478A2 Lamina recording apparatus
08/27/1986	EP0192294A1 Electron beam apparatus comprising a semiconductor electron emitter
08/26/1986	US4608493 Controlling the generation and focus of an electron beam
08/26/1986	US4608491 Electron beam instrument
08/26/1986	US4608332 Electron lithography mask manufacture
08/26/1986	US4607593 Apparatus for processing articles in a controlled environment
08/20/1986	EP0191440A1 Lithography apparatus for producing microstructures
08/20/1986	EP0191439A1 Linearly structured multiple aperture and beam blanking electrodes for the production of a multiplicity of individually blankable corpuscular beam probes in a lithography apparatus

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