| Patents for H01J 37 - Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof (46,866) |
|---|
| 10/22/1987 | WO1987006389A1 Semiconductor dopant vaporizer |
| 10/22/1987 | DE3613181A1 Process for producing trenches with adjustable steepness of the trench walls in semiconductor substrates consisting of silicon |
| 10/22/1987 | DE3612721A1 Apparatus for coating panes of glass using reactive cathode sputtering |
| 10/20/1987 | US4701623 Charged particle beam apparatus |
| 10/20/1987 | US4701620 Electron beam exposure apparatus |
| 10/20/1987 | US4701344 Film forming process |
| 10/20/1987 | US4701343 Method of depositing thin films using microwave energy |
| 10/20/1987 | US4701251 Apparatus for sputter coating discs |
| 10/14/1987 | EP0241447A1 Sputtering cathode |
| 10/14/1987 | EP0241060A1 Apparatus for energy-selective visualisation |
| 10/13/1987 | US4700315 Method and apparatus for controlling the glow discharge process |
| 10/13/1987 | US4700077 Ion beam implanter control system |
| 10/13/1987 | US4700075 Detector for back-scattered electrons |
| 10/13/1987 | US4700071 Method of recording and reproducing an electron microscope image |
| 10/13/1987 | US4699689 Removing charged particles from plasma, exposing photoresist to effluent and uv rad |
| 10/13/1987 | US4699555 Module positioning apparatus |
| 10/08/1987 | WO1987006053A1 Plasma-anode electron gun |
| 10/08/1987 | WO1987005948A1 Arc coating of refractory metal compounds |
| 10/07/1987 | EP0240369A1 Improved cathode and target design for a sputter coating apparatus |
| 10/07/1987 | EP0240173A2 Method and apparatus for producing neutral atomic and molecular beams |
| 10/07/1987 | CN86210073U Plasma imaging device |
| 10/06/1987 | US4698814 Arrangement for checking the parity of parity-bits containing bit groups |
| 10/06/1987 | US4698509 For controlling charged particle beam irridation of a workpiece |
| 10/06/1987 | US4698503 Focusing apparatus used in a transmission electron microscope |
| 10/06/1987 | US4698502 Field-emission scanning auger electron microscope |
| 10/06/1987 | US4698236 Augmented carbonaceous substrate alteration |
| 09/30/1987 | EP0239085A2 Device for micro-movement of objects |
| 09/29/1987 | US4697194 Lamina recording apparatus |
| 09/29/1987 | US4697086 Apparatus for implanting ion microbeam |
| 09/23/1987 | EP0238397A1 Electronic cyclotron resonance ion source with coaxial injection of electromagnetic waves |
| 09/22/1987 | US4695773 Field emission gun electrode geometry for improved focus stability |
| 09/22/1987 | US4695732 Electron lithography apparatus |
| 09/22/1987 | US4695725 Method of detecting a focus defect of an electron microscope image |
| 09/22/1987 | US4695700 Dual detector system for determining endpoint of plasma etch process |
| 09/22/1987 | CA1227288A1 Process for preparing semiconductor layer |
| 09/16/1987 | EP0237406A2 Electron beam testing of semiconductor wafers |
| 09/16/1987 | EP0237220A2 Method and apparatus for forming a film |
| 09/16/1987 | EP0237165A2 Treating work pieces with electro-magnetically scanned ion beams |
| 09/16/1987 | EP0237078A2 Downstream microwave plasma processing apparatus having an improved coupling structure between microwave and plasma |
| 09/16/1987 | EP0236807A2 Spectrometer objective for the corpuscular beam measuring technique |
| 09/16/1987 | EP0116083B1 Low voltage field emission electron gun |
| 09/15/1987 | US4694457 Methods of steering and focusing ion and electron beams |
| 09/15/1987 | US4694222 Ion plasma electron gun |
| 09/15/1987 | US4694178 Multiple channel electron beam optical column lithography system and method of operation |
| 09/15/1987 | US4694171 Electron microscope image focusing using instantaneous emission of stimulable phosphor sheet |
| 09/15/1987 | US4694170 Instrument for very high resolution ionic micro-analysis of a solid sample |
| 09/15/1987 | CA1226969A1 Electron image projector |
| 09/11/1987 | WO1987005438A1 Masked ion beam lithography system and method |
| 09/09/1987 | EP0236072A2 Ion beam implanter control system |
| 09/09/1987 | EP0235770A2 Device for the plasma processing of substrates in a high frequency excited plasma discharge |
| 09/08/1987 | US4692579 Electron beam lithography apparatus |
| 09/08/1987 | US4692230 Switching power among several targets |
| 09/08/1987 | US4691662 Dual plasma microwave apparatus and method for treating a surface |
| 09/08/1987 | EP0221056A4 Ion beam implant system. |
| 09/02/1987 | EP0234225A1 Method and arrangement for detecting secondary particles emitted from a specimen hit by a primary corpuscular beam |
| 09/01/1987 | US4691103 Microscope for non-differentiated phase image formation |
| 09/01/1987 | US4690744 Method of ion beam generation and an apparatus based on such method |
| 08/27/1987 | WO1987005150A1 Specimen chamber for scanning electron beam instruments |
| 08/25/1987 | US4689555 Method for the determination of points on a specimen carrying a specific signal frequency by use of a scanning microscope |
| 08/25/1987 | US4689112 Stripping or etching photoresist; supplying plasma gases uniformly |
| 08/25/1987 | CA1226075A1 Method and apparatus for exposing photoresist by using an electron beam and controlling its voltage and charge |
| 08/19/1987 | EP0233123A2 An improved apparatus for pulsing electron beams |
| 08/19/1987 | EP0233083A2 Ion beam arrangement |
| 08/19/1987 | EP0232790A1 Process and arrangement for measuring time-dependent signals with a corpuscular beam probe |
| 08/18/1987 | US4687940 Hybrid focused-flood ion beam system and method |
| 08/18/1987 | US4687939 Method and apparatus for forming film by ion beam |
| 08/18/1987 | US4687938 Ion source |
| 08/18/1987 | US4687931 Scanning electron microscope |
| 08/18/1987 | US4687930 Ion beam apparatus |
| 08/18/1987 | US4687902 Electron-beam welding apparatus |
| 08/18/1987 | US4687544 Method and apparatus for dry processing of substrates |
| 08/18/1987 | CA1225756A1 Automatically adjustable electron microscope |
| 08/13/1987 | WO1987004852A1 Variable frequency rfq linear accelerator |
| 08/13/1987 | WO1987004846A1 Electron beam memory system with ultra-compact, high current density electron gun |
| 08/13/1987 | DE3603726A1 Arrangement for etching or dusting a substrate |
| 08/12/1987 | EP0232056A2 Controlling charged particle beams |
| 08/12/1987 | EP0231247A1 Improvements in atom probes. |
| 08/11/1987 | US4686531 Capacitance height gage applied in reticle position detection system for electron beam lithography apparatus |
| 08/11/1987 | US4686466 Method for automatically setting the voltage resolution in particle beam measuring devices and apparatus for implementation thereof |
| 08/11/1987 | US4686414 Enhanced wetting of liquid metal alloy ion sources |
| 08/11/1987 | US4686113 Plasma confinement in a low pressure electrically grounded R.F. heated reactor and deposition method |
| 08/11/1987 | US4685999 Apparatus for plasma assisted etching |
| 08/11/1987 | CA1225364A1 Magnetron cathode sputtering apparatus |
| 08/11/1987 | CA1225229A1 Alloys for liquid metal ion sources |
| 08/05/1987 | EP0231164A2 Device for ion-projection apparatuses |
| 08/05/1987 | EP0231094A2 Charged particle beam generation |
| 08/05/1987 | EP0230652A1 Apparatus for creating a vacuum deposited alloy or composition and application of such an apparatus |
| 08/04/1987 | US4684848 Broad-beam electron source |
| 08/04/1987 | US4684809 Method of adjusting optical column in energy beam exposure system |
| 08/04/1987 | US4684808 Scanning system for a particle beam scanning apparatus |
| 08/04/1987 | US4684782 Control system for a charged particle beam apparatus |
| 08/04/1987 | US4684315 Frictionless supporting apparatus |
| 08/04/1987 | US4683838 Plasma treatment system |
| 07/30/1987 | EP0146595A4 Method and apparatus for introducing normally solid materials into substrate surfaces. |
| 07/29/1987 | EP0230290A2 Extraction grid for an ion source and method of manufacturing the same |
| 07/29/1987 | EP0229873A1 Conductive coated semiconductor electrostatic deflection plates |
| 07/28/1987 | US4683378 Apparatus for ion beam work |
| 07/28/1987 | US4683376 Opposing field spectrometer for electron beam mensuration technology |
| 07/28/1987 | US4683366 All electrostatic electron optical sub-system for variable electron beam spot shaping and method of operation |
| 07/28/1987 | US4682566 Evacuated equipment |