| Patents for H01J 37 - Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof (46,866) |
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| 07/28/1987 | CA1224852A1 E beam stage with below-stage x-y drive |
| 07/21/1987 | US4681221 Holder for plastic leaded chip carrier |
| 07/16/1987 | DE3700625A1 Device for increasing the availability of ion sources of the Rene-Bernas type |
| 07/15/1987 | EP0228901A2 Wafer transfer apparatus |
| 07/15/1987 | EP0228865A2 Magnetron-enhanced plasma etching process |
| 07/15/1987 | EP0228502A1 Electron beam test apparatus for electronic device and method for using the same |
| 07/15/1987 | EP0228394A1 An apparatus for coating substrates by plasma discharge. |
| 07/14/1987 | US4680507 Liquid metal ion source |
| 07/14/1987 | US4680474 Method and apparatus for improved ion dose accuracy |
| 07/14/1987 | US4680469 Focusing device for a television electron microscope |
| 07/14/1987 | US4680468 Particle detector |
| 07/08/1987 | EP0228318A1 Electron gun operating by secondary emission under ionic bombardment |
| 07/08/1987 | CN86106620A Microwave enhanced cvd system under magnetic field |
| 07/07/1987 | US4679007 Matching circuit for delivering radio frequency electromagnetic energy to a variable impedance load |
| 07/07/1987 | US4678988 Method and apparatus for spectral analysis of a signal at a measuring point |
| 07/07/1987 | US4678919 Electron beam exposure method and apparatus |
| 07/07/1987 | US4678644 Apparatus and method for plasma treatment of resin material |
| 07/02/1987 | DE3545350A1 Method and arrangement for suppressing the charging of a sample which is scanned by a corpuscular beam consisting of charged particles |
| 07/01/1987 | EP0227438A2 Magnetron sputter device having separate confining magnetic fields to separate targets and magnetically enhanced R.F. bias |
| 07/01/1987 | EP0227042A2 High voltage source providing continuously regulated output voltage, preferably for supplying low-power ion and electron beam machining and evaporating apparatuses |
| 07/01/1987 | EP0226913A2 Method and device for situating and/or displaying probe points carrying a characteristic time-dependent signal |
| 07/01/1987 | EP0226804A2 Goniometric stage |
| 06/30/1987 | US4677642 Apparatus and method for quiescent containerless processing of high temperature metals and alloys in low gravity |
| 06/30/1987 | US4677351 Circuit for preventing burn-in spots on the picture screen of a visual display |
| 06/30/1987 | US4677296 Apparatus and method for measuring lengths in a scanning particle microscope |
| 06/30/1987 | US4676195 Capacitance coupled type, electrode structure |
| 06/30/1987 | CA1223678A1 Low-energy scanning transmission electron microscope |
| 06/30/1987 | CA1223549A1 Method and apparatus for reactive vapour deposition of compounds of metal and semi-conductors |
| 06/24/1987 | EP0226494A2 Electron beam test probe system for analyzing integrated circuits |
| 06/24/1987 | EP0225969A1 Apparatus and method for controlling irradiation of electron beam at fixed position in electron beam tester system |
| 06/23/1987 | US4675602 Method for automatically setting an operating point given signal curve measurements with a particle beam measuring apparatus |
| 06/23/1987 | US4675530 Charge density detector for beam implantation |
| 06/23/1987 | US4675528 Method for measurement of spotsize and edgewidth in electron beam lithography |
| 06/23/1987 | US4675524 Scanning particle microscope with diminished boersch effect |
| 06/23/1987 | US4675072 Trench etch endpoint detection by LIF |
| 06/18/1987 | WO1987003739A1 Liquid metal ion source |
| 06/16/1987 | US4673988 Electronic mosaic imaging process |
| 06/16/1987 | US4673588 Device for coating a substrate by means of plasma-CVD or cathode sputtering |
| 06/16/1987 | US4673482 Sputtering apparatus |
| 06/16/1987 | US4673480 Electrostatic reflection takes place to confine the glow discharge within tunnel |
| 06/16/1987 | US4673477 Controlled vacuum arc material deposition, method and apparatus |
| 06/16/1987 | US4673456 Semiconductor etching or stripping |
| 06/16/1987 | US4673101 Evacuable chamber enclosing |
| 06/16/1987 | EP0225717A1 High current mass spectrometer using space charge lens |
| 06/16/1987 | EP0225680A1 Improved electric arc vapor deposition method |
| 06/09/1987 | US4672615 Ion and electron beam steering and focussing system |
| 06/09/1987 | US4672559 Method for operating a microscopical mapping system |
| 06/09/1987 | US4672210 For treating a semiconductor wafer |
| 06/09/1987 | US4672203 Two stage valve for use in pressure converter |
| 06/03/1987 | EP0224231A2 Method for manufacturing a thin film solar cell |
| 06/03/1987 | EP0223975A2 Diverter magnet arrangement for plasma processing system |
| 06/03/1987 | CN86105186A Plasma treatment arrangement |
| 06/02/1987 | US4670685 Liquid metal ion source and alloy for ion emission of multiple ionic species |
| 06/02/1987 | US4670652 Charged particle beam microprobe apparatus |
| 06/02/1987 | US4670651 Apparatus for performing the SNMS method |
| 06/02/1987 | US4670064 Generating high purity ions by non-thermal excimer laser processing |
| 05/27/1987 | CN86105432A Charged-particle-beam lithography |
| 05/26/1987 | US4668865 Scanning tunneling microscope |
| 05/26/1987 | US4668373 Target plate for cathode sputtering |
| 05/26/1987 | US4668366 Optical figuring by plasma assisted chemical transport and etching apparatus therefor |
| 05/26/1987 | US4668365 Apparatus and method for magnetron-enhanced plasma-assisted chemical vapor deposition |
| 05/26/1987 | US4668338 Magnetron-enhanced plasma etching process |
| 05/26/1987 | US4667620 Method and apparatus for making plastic containers having decreased gas permeability |
| 05/20/1987 | EP0222219A2 Device for the bombardment of a medium with an electron beam |
| 05/20/1987 | EP0221897A1 Ion implant using alkali or alkaline earth metal tetrafluoroborate as boron ion source |
| 05/20/1987 | CN86104365A Improved electric arc vapor deposition method and apparatus |
| 05/19/1987 | US4667111 Accelerator for ion implantation |
| 05/19/1987 | US4667110 Apparatus for holding an object by use of electrostatic attracting force |
| 05/19/1987 | US4667108 Impedance matched and thermally cooled deflection amplifiers for charged particle beam apparatus employing deflectors |
| 05/13/1987 | EP0221812A2 Apparatus and method for producing thin films with the aid of a plasma |
| 05/13/1987 | EP0221657A1 Charged-particle-beam lithography |
| 05/13/1987 | EP0221164A1 Method and apparatus for producing large volume magnetoplasmas. |
| 05/13/1987 | EP0221056A1 Ion beam implant system |
| 05/12/1987 | US4665315 Method and apparatus for in-situ plasma cleaning of electron beam optical systems |
| 05/12/1987 | US4665313 Apparatus and method for displaying hole-electron pair distributions induced by electron bombardment |
| 05/12/1987 | US4665297 High power electron gun |
| 05/12/1987 | US4664937 Method of depositing semiconductor films by free radical generation |
| 05/12/1987 | US4664890 Glow-discharge decomposition apparatus |
| 05/12/1987 | US4664769 Photoelectric enhanced plasma glow discharge system and method including radiation means |
| 05/12/1987 | US4664767 Plasma treating method and apparatus therefor |
| 05/12/1987 | US4664747 Surface processing apparatus utilizing local thermal equilibrium plasma and method of using same |
| 05/12/1987 | US4663944 Cryogenic sample stage for an ion microscope |
| 05/07/1987 | DE3635647A1 Plasma reactor for etching printed circuit boards or the like |
| 05/06/1987 | EP0220901A2 Apparatus for plasma assisted etching |
| 05/06/1987 | EP0220668A2 Charged particle beam lithography system |
| 05/06/1987 | EP0220481A2 Photoelectric enhanced plasma glow discharge system |
| 05/05/1987 | US4663525 Method for electron gun alignment in electron microscopes |
| 05/05/1987 | US4663511 Stereoscopic optical viewing system |
| 05/05/1987 | CA1221468A1 Plasma cathode electron beam generating system |
| 05/05/1987 | CA1221335A1 Rotatable sputtering apparatus |
| 04/28/1987 | US4661968 Beam exposure apparatus comprising a diaphragm drive for an object carrier |
| 04/28/1987 | US4661741 Miniature electron gun with focusing grid structure |
| 04/28/1987 | US4661712 Apparatus for scanning a high current ion beam with a constant angle of incidence |
| 04/28/1987 | US4661709 Modular all-electrostatic electron-optical column and assembly of said columns into an array and method of manufacture |
| 04/28/1987 | US4661702 Primary ion beam raster gating technique for secondary ion mass spectrometer system |
| 04/28/1987 | US4661233 Cathode/ground shield arrangement in a sputter coating apparatus |
| 04/28/1987 | US4661228 Apparatus and method for manufacturing planarized aluminum films |
| 04/28/1987 | US4661203 Low defect etching of patterns using plasma-stencil mask |
| 04/28/1987 | US4661196 Plasma etch movable substrate |
| 04/22/1987 | EP0218921A2 Alpha-type electron energy filter |