| Patents for H01J 37 - Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof (46,866) |
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| 04/12/1988 | US4737379 Plasma deposited coatings, and low temperature plasma method of making same |
| 04/07/1988 | WO1988002548A1 Ion implantation |
| 04/07/1988 | WO1988002546A1 Ion generation apparatus, thin film formation apparatus using the ion generation apparatus, and ion source |
| 04/06/1988 | EP0263032A1 Primary particle beam irradiation apparatus and method of irradiation thereof |
| 04/06/1988 | EP0262855A2 Production of pulsed electron beams |
| 04/06/1988 | EP0262365A2 Spectrometer-detector arrangement for quantitative potential measurements |
| 04/06/1988 | EP0262253A1 Micromechanical atomic force sensor head |
| 04/06/1988 | EP0262129A1 Procedure and device for providing an energy filtered charged particle image |
| 04/05/1988 | US4736107 Ion beam implanter scan control system |
| 04/05/1988 | US4736087 For the dry plasma processing of a single workpiece |
| 04/05/1988 | US4735881 Method for forming patterns by using a high-current-density electron beam |
| 04/05/1988 | US4735633 Method and system for vapor extraction from gases |
| 03/31/1988 | DE3730086A1 Microwave-plasma CVD appts. - with multi-element microwave inlet window having cavity resonance structure |
| 03/30/1988 | EP0261922A2 Electrode assembly and apparatus |
| 03/30/1988 | EP0261866A2 Improvements in and relating to charged particle beam scanning apparatus |
| 03/30/1988 | EP0261347A1 Sputtering apparatus |
| 03/30/1988 | EP0261198A1 Plasma-anode electron gun. |
| 03/29/1988 | US4734586 Foil changing apparatus |
| 03/29/1988 | US4734183 Sputtering cathode on the magnetron principle |
| 03/29/1988 | US4734158 Molecular beam etching system and method |
| 03/29/1988 | US4733746 Vacuum treating method and apparatus |
| 03/24/1988 | WO1988002180A1 Differential pressure electron beam system, method and gun |
| 03/24/1988 | WO1988002110A1 Point projection photoelectron microscope with hollow needle |
| 03/24/1988 | DE3727542A1 Device for forming a functional deposition layer by means of a microwave plasma deposition method |
| 03/23/1988 | EP0260734A1 Adjustable preparation mounting for a radiation beam apparatus |
| 03/23/1988 | EP0260630A2 Multiple alloy for the targets of cathodic sputtering devices, and its use |
| 03/22/1988 | US4733176 Method and apparatus for locating defects in an electrical circuit with a light beam |
| 03/22/1988 | US4733137 For powering a gaseous discharge device |
| 03/22/1988 | US4733134 Liquid metal ion source with pulse generator control |
| 03/22/1988 | US4733091 Systems and methods for ion implantation of semiconductor wafers |
| 03/22/1988 | US4733087 Ion beam treating apparatus |
| 03/22/1988 | US4733075 Stroboscopic scanning electron microscope |
| 03/22/1988 | US4733074 Sample surface structure measuring method |
| 03/22/1988 | US4732792 Method for treating surface of construction material for vacuum apparatus, and the material treated thereby and vacuum treatment apparatus having the treated material |
| 03/22/1988 | CA1234411A1 Semiconductor device for producing an electron beam |
| 03/16/1988 | EP0259961A2 Ion beam dosimetry |
| 03/16/1988 | EP0259934A1 Sputtering apparatus with a device for the measurement of a critical target depletion |
| 03/16/1988 | EP0259907A1 Electron detection with energy discrimination |
| 03/15/1988 | US4731540 Ion beam materials processing system with neutralization means and method |
| 03/15/1988 | US4731539 Glow discharging; alloying |
| 03/15/1988 | US4731538 Microchannel plate ion detector |
| 03/15/1988 | US4731537 Electron beam gun |
| 03/15/1988 | US4730661 Process and device for melting and remelting metals in particle form into strands, especially into slabs |
| 03/10/1988 | WO1988001749A1 Apparatus for restructuring a solid containing uniformly polarized electrons |
| 03/10/1988 | WO1988001731A1 Ion beam fast parallel scanning having dipole magnetic lens with nonuniform field |
| 03/10/1988 | WO1988001551A1 Beam position correction device |
| 03/09/1988 | EP0258383A1 Masked ion beam lithography system and method. |
| 03/02/1988 | EP0257770A1 Calorimetric dose monitor for ion implantation equipment |
| 03/02/1988 | EP0257694A1 Charged particles exposure apparatus having an optically deformable beam bounding diaphragm |
| 03/02/1988 | EP0257685A1 Method for altering patterns provided at a surface of a carrier and apparatus for carrying it out |
| 03/02/1988 | EP0257679A1 Method of beam centring |
| 03/02/1988 | EP0257528A1 Photo cathodes for electron image projection |
| 03/02/1988 | EP0257394A1 Electron beam apparatus |
| 03/02/1988 | EP0257305A2 Circuit arrangement for a position-sensitive radiation detector |
| 03/01/1988 | US4728850 Mounting means for mounting spiral wire cathodes |
| 03/01/1988 | US4728799 Height measurement and correction method for electron beam lithography system |
| 03/01/1988 | US4728797 Method for drawing a pattern by charged beam and its apparatus |
| 03/01/1988 | US4728790 Low-abberation spectrometer objective with high secondary electron acceptance |
| 03/01/1988 | US4727993 Wafer cassette having multi-directional access |
| 02/25/1988 | WO1988001435A1 Improvements in reactive ion etching apparatus |
| 02/25/1988 | WO1988001434A1 Movable specimen holder for a particle radiation microscope |
| 02/24/1988 | EP0256216A2 Trench etch endpoint detection by laser-induced fluorescence |
| 02/23/1988 | US4727293 Plasma generating apparatus using magnets and method |
| 02/23/1988 | US4727250 Apparatus for measuring the angular distribution of charged particles scattered by a sample surface |
| 02/23/1988 | US4727029 Placing speciman in inert gas atmosphere, ionization to activate surface |
| 02/23/1988 | US4726689 Linear gas bearing with integral vacuum seal for use in serial process ion implantation equipment |
| 02/17/1988 | EP0255981A1 Charged particle optical systems having therein means for correcting aberrations |
| 02/16/1988 | US4725736 Electrostatic electron gun with integrated electron beam deflection and/or stigmating system |
| 02/16/1988 | US4725730 System of automatically measuring sectional shape |
| 02/16/1988 | US4725447 Method of utilizing a plasma column |
| 02/16/1988 | US4725332 Method for monitoring microhole growth during production of microholes having a predetermined diameter |
| 02/16/1988 | US4725265 Syringe |
| 02/16/1988 | US4724796 Vaporization arrangement with a rectangular vaporization crucible and several electron guns |
| 02/11/1988 | WO1988001099A1 Multipurpose gaseous detector device for electron microscopes |
| 02/10/1988 | EP0255542A1 Electron beam memory system with ultra-compact, high current density electron gun |
| 02/09/1988 | US4724328 Lithographic apparatus for the production of microstructures |
| 02/09/1988 | US4724325 Adhesion cooling for an ion implantation system |
| 02/09/1988 | US4724324 Method and apparatus for ion beam centroid location |
| 02/09/1988 | US4724320 Method of observing the arrangement of atoms on a surface and apparatus therefor |
| 02/09/1988 | US4724319 Image focusing method and apparatus for electron microscope |
| 02/09/1988 | US4724300 Temperature control in vacuum |
| 02/09/1988 | US4724296 Plasma generator |
| 02/09/1988 | US4724060 Target with recesses; for semiconductors |
| 02/09/1988 | US4724058 Method and apparatus for arc evaporating large area targets |
| 02/09/1988 | US4723508 Plasma CVD apparatus |
| 02/04/1988 | DE3625700A1 Device for producing and analysing multi-component films |
| 02/03/1988 | EP0255265A2 Plasma etching process and apparatus |
| 02/02/1988 | US4722654 Article transfer system |
| 02/02/1988 | CA1232375A1 Electron cyclotron resonance ion source |
| 02/02/1988 | CA1232228A1 Coating film and method and apparatus for producing the same |
| 01/27/1988 | EP0254625A1 Procedure and device for discharging insulating samples in the course of an ionic analysis |
| 01/27/1988 | EP0254168A2 Sputtering cathode for vaccum coating devices |
| 01/27/1988 | EP0254128A2 Method and arrangement for charge-free examination of a sample |
| 01/27/1988 | EP0254127A2 Charged particles detector |
| 01/26/1988 | US4721909 Apparatus for pulsing electron beams |
| 01/26/1988 | US4721878 Charged particle emission source structure |
| 01/26/1988 | US4721842 Beam position correction device |
| 01/26/1988 | US4721553 Method and apparatus for microwave assisting sputtering |
| 01/20/1988 | EP0253435A1 Process and device for igniting an arc in an environment with reduced pressure |
| 01/20/1988 | EP0253344A2 Sputtering cathode based on the magnetron principle |