| Patents for H01J 37 - Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof (46,866) |
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| 01/20/1988 | EP0253098A1 Measuring arrangement for the evaluation of a sequence of signals generated by corpuscular radiation |
| 01/19/1988 | US4720633 Scanning electron microscope for visualization of wet samples |
| 01/19/1988 | US4720628 Optical process for determining the endpoint of a process via analog multiplication of photocell signals |
| 01/19/1988 | US4719873 Film forming apparatus |
| 01/14/1988 | WO1988000399A1 Fine-positioning piezoelectric device |
| 01/13/1988 | EP0252745A2 Relative displacement control apparatus |
| 01/13/1988 | EP0252548A1 Process for the production of electrically conductive moulded articles by the plasma-activated chemical gas phase precipitation |
| 01/13/1988 | EP0252174A1 Coarse-approach positioning device |
| 01/12/1988 | US4719388 Flat visual display device |
| 01/12/1988 | US4719383 Piezoelectric shear wave resonator and method of making same |
| 01/12/1988 | US4719355 Ion source for an ion implanter |
| 01/12/1988 | US4718976 Etching, vapor deposition |
| 01/07/1988 | EP0251567A1 Dry process apparatus |
| 01/07/1988 | EP0251381A2 Magnetic lens system |
| 01/07/1988 | EP0113746B1 An elektrode system of a retarding-field spectrometer for a voltage measuring electron beam apparatus |
| 01/05/1988 | US4718019 Election beam exposure system and an apparatus for carrying out a pattern unwinder |
| 01/05/1988 | US4717829 Platen and beam setup flag assembly for ion implanter |
| 01/05/1988 | US4717806 Plasma reactor and methods for use |
| 01/05/1988 | US4717644 Improved thruput, reduced proximity effects |
| 01/05/1988 | US4717462 Sputtering apparatus |
| 01/05/1988 | US4717445 Etch bias monitoring technique |
| 12/30/1987 | WO1987007978A1 Process for verifying the energy of an ion beam |
| 12/29/1987 | US4716491 High frequency plasma generation apparatus |
| 12/29/1987 | US4716340 Pre-ionization aided sputter gun |
| 12/29/1987 | US4716338 Electrode structure for a cathode glow discharge system |
| 12/29/1987 | US4716127 Method of implanting spatially controlled P-N junctions by focused ion beams containing at least two species |
| 12/29/1987 | US4715319 Device for coating a substrate by means of plasma-CVD or cathode sputtering |
| 12/23/1987 | EP0250391A2 Arrangement for positioning a structure image of a mask on a substrate |
| 12/23/1987 | EP0249968A2 Electron emitting apparatus |
| 12/22/1987 | US4714833 Arrangement for detecting secondary and/or backscatter electrons in an electron beam apparatus |
| 12/22/1987 | US4714831 For focussing charged particles |
| 12/22/1987 | US4714536 Planar magnetron sputtering device with combined circumferential and radial movement of magnetic fields |
| 12/17/1987 | WO1987007762A1 Photo ion spectrometer |
| 12/17/1987 | WO1987007760A1 Dual plasma microwave apparatus and method for treating a surface |
| 12/17/1987 | WO1987007651A1 Semiconductor manufacturing apparatus |
| 12/16/1987 | EP0249254A1 Semiconductor device for generating an electron current |
| 12/16/1987 | EP0248914A1 Liquid metal ion source |
| 12/15/1987 | US4713687 Scan line type dynamic observation apparatus |
| 12/15/1987 | US4713585 Ion source |
| 12/15/1987 | US4713543 Scanning particle microscope |
| 12/10/1987 | EP0195052A4 A method of stabilising a plasma column produced by a multi-cathode generator. |
| 12/09/1987 | EP0248588A2 Electron beam exposure system |
| 12/09/1987 | EP0248244A1 Magnetron sputtering cathode for vacuum coating apparatuses |
| 12/09/1987 | EP0248233A2 Cathode mounting a high-frequency piezoelectric chip |
| 12/09/1987 | EP0248139A2 Method for the authentification of ancient metallic objects |
| 12/09/1987 | EP0221164A4 Method and apparatus for producing large volume magnetoplasmas. |
| 12/08/1987 | US4712042 Variable frequency RFQ linear accelerator |
| 12/08/1987 | US4712013 Method of forming a fine pattern with a charged particle beam |
| 12/08/1987 | US4711767 Minimizing arc discharge |
| 12/08/1987 | CA1230079A1 Cathodic sputtering apparatus |
| 12/03/1987 | WO1987007429A1 Apparatus and method for the chemical analysis of solids by spectroscopy of x photoelectrons |
| 12/03/1987 | DE3618283A1 Device for processing workpieces with an electron beam |
| 12/02/1987 | EP0247651A1 Electron-beam probe system utilizing test device having interdigitated conductive pattern and associated method of using the test device |
| 12/02/1987 | EP0247397A2 Apparatus for the surface treatment of work pieces |
| 12/02/1987 | EP0247316A2 Spherical retarding grid analyzer |
| 12/01/1987 | US4710640 Electron beam lithography |
| 12/01/1987 | US4710639 Ion beam lithography system |
| 12/01/1987 | US4710633 Specimen moving device for electron microscope |
| 12/01/1987 | US4710632 Ion microbeam apparatus |
| 12/01/1987 | US4710625 Charged particle energy analyzer based upon isentropic containment |
| 12/01/1987 | US4710283 For sputtering, deposition of thin films |
| 12/01/1987 | US4709656 Layer forming apparatus |
| 11/25/1987 | EP0246841A2 Electron spectrometer |
| 11/25/1987 | EP0246765A2 Apparatus and method for manufacturing planarized aluminium films |
| 11/25/1987 | EP0246453A2 Novel multiple-processing and contamination-free plasma etching system |
| 11/19/1987 | WO1987007076A1 Dose measurement and uniformity monitoring system for ion implantation |
| 11/19/1987 | EP0245907A2 Electron beam pattern generator control |
| 11/17/1987 | US4707637 Plasma-anode electron gun |
| 11/17/1987 | CA1229430A1 Electron emission system |
| 11/17/1987 | CA1229429A1 Positioning system |
| 11/11/1987 | EP0244816A2 Mask pattern defect detection apparatus |
| 11/11/1987 | EP0106869B1 Low temperature stage for microanalysis |
| 11/11/1987 | CN86107820A Cathode/ground shield arrangement in target for sputter coating apparatus |
| 11/10/1987 | US4706019 Electron beam test probe system for analyzing integrated circuits |
| 11/10/1987 | US4705956 Electron image projector |
| 11/10/1987 | US4705954 Method and apparatus for automatically positioning a particle beam |
| 11/10/1987 | US4705950 Specimen-exchanging apparatus |
| 11/10/1987 | US4705949 Method and apparatus relating to specimen cells for scanning electron microscopes |
| 11/05/1987 | WO1987006407A3 Liquid metal ion source and alloy |
| 11/05/1987 | WO1987006390A3 Liquid metal ion source and alloy for ion emission of multiple ionic species |
| 11/04/1987 | EP0244289A2 Electron beam device for projecting an image of an object onto a sample |
| 11/04/1987 | EP0243556A1 Cathode/ground shield arrangement in a target for a sputter coating apparatus |
| 11/03/1987 | US4704532 Methods and structures to produce electrostatic quadrupole fields using closed boundaries |
| 11/03/1987 | US4704526 Apparatus of regulating shape of focused ion beams |
| 11/03/1987 | US4704301 Method of making low resistance contacts |
| 11/03/1987 | CA1228915A1 Method for microphotometering microscope specimens, and apparatus for carrying out the method |
| 10/28/1987 | EP0243060A2 A charged particle energy analyser |
| 10/28/1987 | EP0243059A2 A charged particle analyser |
| 10/28/1987 | EP0242993A1 Apparatus and method for collecting charged particles |
| 10/28/1987 | EP0242826A2 Cathode for magnetron sputtering |
| 10/28/1987 | EP0242602A2 Electrostatic and magnetic lens for corpuscular beam apparatus |
| 10/27/1987 | US4703256 Measuring the energy density of an electron beam |
| 10/27/1987 | US4703234 Charged-particle accelerator |
| 10/27/1987 | US4703222 Hall accelerator with preionization discharge |
| 10/27/1987 | US4703183 Ion implantation chamber purification method and apparatus |
| 10/27/1987 | US4703181 Anti-drift device for side entry electron microscope specimen holders |
| 10/27/1987 | US4703180 Microwave discharge type ion source for ion injection devices |
| 10/22/1987 | WO1987006407A2 Liquid metal ion source and alloy |
| 10/22/1987 | WO1987006391A1 Ion beam scanning method and apparatus |
| 10/22/1987 | WO1987006390A2 Liquid metal ion source and alloy for ion emission of multiple ionic species |