| Patents for H01J 37 - Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof (46,866) |
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| 06/22/1988 | EP0155283B1 Focused ion beam column |
| 06/21/1988 | US4752686 Method and apparatus for emphasizing a specimen surface region scanned by a scanning microscope primary beam |
| 06/21/1988 | US4752685 Electronic spectrometer for identifying element conditions of a sample surface by utilizing an energy spectrum of charged particles |
| 06/21/1988 | US4752426 Low temperature plasma microwave activation then graft polymerization |
| 06/21/1988 | CA1238415A1 Microwave ion source |
| 06/16/1988 | WO1988004470A1 Process and device for generating material structures of atomic dimensions |
| 06/15/1988 | EP0271341A2 Method and apparatus for ion etching |
| 06/15/1988 | EP0270667A1 Dual plasma microwave apparatus and method for treating a surface. |
| 06/15/1988 | EP0270589A1 Apparatus and method for the chemical analysis of solids by spectroscopy of x photoelectrons |
| 06/15/1988 | CN87106755A Sphared current loop, multiple field apparatus and process for plasma processing |
| 06/14/1988 | US4751393 Dose measurement and uniformity monitoring system for ion implantation |
| 06/14/1988 | US4751384 Electron beam metrology system |
| 06/14/1988 | CA1238121A1 Charged-particle-beam lithography |
| 06/07/1988 | US4749911 Ion plasma electron gun with dose rate control via amplitude modulation of the plasma discharge |
| 06/07/1988 | US4749910 Electron beam-excited ion beam source |
| 06/07/1988 | US4749868 Method of processing a sample containing water under scanning electron microscope and apparatus thereof |
| 06/07/1988 | US4749589 Method of surface treatment |
| 06/07/1988 | US4749270 Micromanipulator for inverted-design microscope |
| 06/07/1988 | US4748935 Vapor source for vacuum coating installation |
| 06/02/1988 | WO1988004104A1 Apparatus for observation using charged particle beams and method of surface observation using charged particle beams |
| 06/02/1988 | WO1988004103A1 Method and apparatus for ion beam centroid location |
| 06/01/1988 | EP0269613A2 Device for ion beam projection lithography |
| 06/01/1988 | EP0269181A2 Variable shaped spot electron beam pattern generator |
| 06/01/1988 | CN87103626A Electron spectrometer |
| 05/31/1988 | US4748407 Method and apparatus for measuring time dependent signals with a particle probe |
| 05/31/1988 | US4748325 Method and device to discharge samples of insulating material during ion analysis |
| 05/31/1988 | US4748324 Electrostatic opposing field spectrometer for electron beam test methods |
| 05/31/1988 | US4747927 Two plates oriented adjacent at one joint; back surface for support |
| 05/31/1988 | US4747926 Film-forming on planar substrate, such as silicon wafer |
| 05/31/1988 | US4747922 Confined ion beam sputtering device and method |
| 05/25/1988 | CN87107779A Microware enhanced cvd method and apparatus |
| 05/24/1988 | US4746587 Electron emissive mask for an electron beam image projector, its manufacture, and the manufacture of a solid state device using such a mask |
| 05/24/1988 | US4746571 Spheres, particles, calibration |
| 05/24/1988 | US4746417 Circular target plate of material to be sputtered |
| 05/19/1988 | WO1988003742A1 Dynamic electron emitter |
| 05/18/1988 | EP0267820A1 Electronic optical device using variable illumination and aperture limitation, and its use in an electron beam lithographic system |
| 05/18/1988 | EP0267555A2 Spectrometer objective for a corpuscular beam measuring apparatus and method for examining samples. |
| 05/18/1988 | EP0267513A2 Microwave enhanced CVD method and apparatus |
| 05/18/1988 | EP0267481A2 Ion source for an apparatus for processing solid-state samples by means of ion beams |
| 05/17/1988 | US4745362 Method and apparatus for detecting and imaging a voltage signal of at least one specific frequency at a measuring location |
| 05/17/1988 | US4745360 Electron-beam probe system utilizing test device having interdigitated conductive pattern and associated method of using the test device |
| 05/17/1988 | US4745338 For refining raw material |
| 05/17/1988 | US4745337 Method and device for exciting a plasma using microwaves at the electronic cyclotronic resonance |
| 05/17/1988 | US4745297 Specimen holder for holding specimen stubs to be coated in an ion-beam sputter coating unit |
| 05/17/1988 | US4745287 Ion implantation with variable implant angle |
| 05/17/1988 | US4745281 Ion beam fast parallel scanning having dipole magnetic lens with nonuniform field |
| 05/17/1988 | US4745270 Photoelectric microscope using position sensitive device |
| 05/17/1988 | US4745000 Method of fabricating electrostatic drums using microwave energy |
| 05/17/1988 | US4744880 Anode for magnetic sputtering of gradient films |
| 05/11/1988 | EP0266604A2 Anode plate for a parallel-plate reactive ion etching reactor |
| 05/10/1988 | US4743806 Process and arrangement to irradiate solid state materials with ions |
| 05/10/1988 | US4743767 Systems and methods for ion implantation |
| 05/10/1988 | US4743766 Method of drawing a desired pattern on a target through exposure thereof with an electron beam |
| 05/10/1988 | US4743757 Secondary electron emission control in electron microscopes |
| 05/10/1988 | EP0216919A4 Method and target for sputter depositing thin films. |
| 05/10/1988 | CA1236595A1 Apparatus and method for displaying hole-electron pair distributions induced by electron bombardment |
| 05/10/1988 | CA1236592A1 Field-emission scanning auger electron microscope |
| 05/04/1988 | EP0266288A2 Vacuum processing method and apparatus |
| 05/04/1988 | EP0265873A2 Holder for plastic leaded chip carrier |
| 05/04/1988 | CN85104863B Analysing method and device for element state |
| 05/03/1988 | US4742234 Charged-particle-beam lithography |
| 05/03/1988 | US4742216 Photographic apparatus for transmission electron microscopes |
| 05/03/1988 | US4741800 Microwaves, light |
| 05/03/1988 | US4741620 Irradiative probe system |
| 05/03/1988 | CA1236223A1 Focused ion beam processing |
| 04/28/1988 | DE3735162A1 Vapour deposition apparatus |
| 04/28/1988 | DE3636524A1 Apparatus for applying coatings in a vacuum by magnetron atomisation |
| 04/27/1988 | EP0265105A1 A method of etching a substrate |
| 04/27/1988 | EP0264913A2 Plasma processing apparatus |
| 04/27/1988 | EP0264709A2 Hollow-anode ion-electron source |
| 04/26/1988 | US4740705 Axially compact field emission cathode assembly |
| 04/26/1988 | US4740704 Omega-type electron energy filter |
| 04/26/1988 | US4740698 Hybrid charged particle apparatus |
| 04/26/1988 | US4740697 Secondary ion mass spectrometer |
| 04/26/1988 | US4740694 Method and apparatus for analyzing positron extinction and electron microscope having said apparatus |
| 04/26/1988 | US4740693 Electron beam pattern line width measurement system |
| 04/26/1988 | US4740383 Coating with color-changing substance |
| 04/26/1988 | US4740268 Magnetically enhanced plasma system |
| 04/21/1988 | WO1988002926A1 Mass separator for ionized cluster beam |
| 04/21/1988 | WO1988002920A1 Method and apparatus for constant angle of incidence scanning in ion beam systems |
| 04/21/1988 | WO1988002791A1 Thin film formation apparatus |
| 04/20/1988 | EP0263942A1 Spectrometer-detector arrangement for quantitative potential measurements |
| 04/20/1988 | EP0263876A1 Ion beam scanning method and apparatus |
| 04/20/1988 | EP0263849A1 Liquid metal ion source and alloy. |
| 04/20/1988 | EP0263839A1 Specimen chamber for scanning electron beam instruments |
| 04/20/1988 | EP0263815A1 Semiconductor dopant vaporizer |
| 04/19/1988 | US4739463 High voltage source providing continuously regulated output voltage, preferably for supplying low-power ion and electron beam machining and evaporating apparatuses |
| 04/19/1988 | US4739399 TV system for transmission electron microscopes |
| 04/19/1988 | US4739214 Dynamic electron emitter |
| 04/19/1988 | US4739169 Ion source |
| 04/19/1988 | US4738761 Shared current loop, multiple field apparatus and process for plasma processing |
| 04/14/1988 | DE3633386A1 Method and device for treating substrates in a vacuum |
| 04/13/1988 | EP0263517A2 Lithography apparatus |
| 04/13/1988 | EP0263487A2 Optical axis adjusting apparatus for electron microscope |
| 04/13/1988 | CN86106604A Electronic microscope capable of extending kinds and range of samples examined and observing negative electrons |
| 04/12/1988 | US4737688 Wide area source of multiply ionized atomic or molecular species |
| 04/12/1988 | US4737646 Method of using an electron beam |
| 04/12/1988 | US4737644 Conductive coated semiconductor electrostatic deflection plates |
| 04/12/1988 | US4737640 Electron microscope |
| 04/12/1988 | US4737637 Mass separator for ionized cluster beam |