| Patents for H01J 37 - Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof (46,866) |
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| 02/07/1989 | US4803369 Purification device for charged particle beam diaphragm |
| 02/07/1989 | US4803358 For scanning the surface of a specimen |
| 02/07/1989 | US4803357 Method and arrangement for detecting secondary particles triggered on a specimen by a primary particle beam |
| 02/07/1989 | US4803356 Method and apparatus for measuring degree of vacuum in an electron microscope |
| 02/07/1989 | US4803355 Mass spectrometer |
| 02/07/1989 | US4803333 Viewing optics for external-mount electron beam welders |
| 02/07/1989 | US4802968 RF plasma processing apparatus |
| 02/01/1989 | EP0301604A2 Apparatus for coating a substrate by plasma-chemical vapour deposition or cathodic sputtering, and process using the apparatus |
| 02/01/1989 | EP0301505A2 Sample tilting device in electron microscope |
| 02/01/1989 | EP0301296A1 Plasma coating vessel with a shortened cycling time and facilitated cleaning |
| 02/01/1989 | EP0301256A2 Equipment for modulating the intensity of a corpuscular ray |
| 01/31/1989 | US4801994 Semiconductor electron-current generating device having improved cathode efficiency |
| 01/31/1989 | US4801879 Electron beam testing of integrated circuits |
| 01/31/1989 | US4801849 Ion source operating by surface ionization in particular for providing an ion probe |
| 01/31/1989 | US4801847 Charged particle accelerator using quadrupole electrodes |
| 01/31/1989 | US4801839 Mounting of a cold cathode directly to a vacuum chamber wall |
| 01/31/1989 | US4801801 Transmission-type electron microscope |
| 01/25/1989 | EP0300995A2 Rod shaped magnetron or sputter cathode arrangement, sputtering process, device for implementing the process and tube shaped target |
| 01/25/1989 | EP0300993A1 Heavy duty bearing |
| 01/25/1989 | EP0300566A1 Liquid metal ions source with a vacuum arc |
| 01/25/1989 | EP0300447A2 Method and apparatus for treating material by using plasma |
| 01/24/1989 | US4799451 Chemical vapor processing apparatus |
| 01/24/1989 | US4799392 Method for determining silicon (mass 28) beam purity prior to implantation of gallium arsenide |
| 01/17/1989 | US4798989 Scanning tunneling microscope installed in electron microscope |
| 01/17/1989 | US4798959 Super submicron electron beam writer |
| 01/17/1989 | US4798957 Electron beam apparatus comprising an anode which is included in the cathode/Wehnelt unit |
| 01/17/1989 | US4798953 Electronic beam device for projecting an image of an object on a sample |
| 01/17/1989 | US4798739 Plasma-assisted method for thin film fabrication |
| 01/17/1989 | US4798663 Magnetron |
| 01/12/1989 | WO1988009562A3 Enhanced-wetting, boron-based liquid-metal ion source and method |
| 01/11/1989 | EP0298817A1 Process and device for the production of electrons using a field coupling and the photoelectric effect |
| 01/11/1989 | EP0298608A2 Mass spectrometry system and method employing measurement/survey scan strategy |
| 01/11/1989 | EP0298577A2 Charged particle source of large current with high energy |
| 01/11/1989 | EP0298420A2 Apparatus for plasma treatment |
| 01/11/1989 | EP0298275A2 Pattern splicing system and method for scanning of electron beam system |
| 01/11/1989 | CN1030327A Improved ion source |
| 01/11/1989 | CN1030192A Method and system for vapor extraction from gases |
| 01/10/1989 | US4797261 Shield |
| 01/10/1989 | US4797053 Manipulator for vacuum applications |
| 01/10/1989 | CA1248493A1 Method and apparatus for evaporation arc stabilization including initial target cleaning |
| 01/04/1989 | EP0297779A2 Magnetron sputtering targets |
| 01/04/1989 | EP0297521A1 High temperature heating sputtering process |
| 01/04/1989 | EP0297502A2 Method of and apparatus for sputtering |
| 01/04/1989 | EP0297247A1 Electron beam writing method and system using large range deflection in combination with a continuously moving table |
| 01/04/1989 | EP0297235A1 Apparatus for coating |
| 01/03/1989 | US4795942 Hollow cathode discharge device with front shield |
| 01/03/1989 | US4795880 Low pressure chemical vapor deposition furnace plasma clean apparatus |
| 01/03/1989 | US4795879 Coating a surface in a gas)free environment |
| 01/03/1989 | US4795529 Plasma treating method and apparatus therefor |
| 01/03/1989 | US4795260 Apparatus for locating and testing areas of interest on a workpiece |
| 01/03/1989 | CA1248210A1 Upstream cathode assembly |
| 01/03/1989 | CA1248047A1 Method of making amorphous semiconductor alloys and devices using microwave energy |
| 12/29/1988 | WO1988010506A1 Microwave plasma generator |
| 12/29/1988 | WO1988010498A1 On-line dose distribution monitor |
| 12/28/1988 | EP0296871A2 Tunnelling scanning microscope |
| 12/28/1988 | EP0296720A2 Plasma extraction reactor and its use for vapor extraction from gases |
| 12/28/1988 | EP0296419A2 Xenon enhanced plasma etch |
| 12/28/1988 | EP0296385A2 Beam emitting system for particle beam apparatus |
| 12/28/1988 | EP0296262A1 Method for investigating surfaces at nanometer and picosecond resolution and laser-sampled scanning tunneling microscope for performing said method |
| 12/28/1988 | EP0296192A1 X-Y-$g(U)-Z POSITIONING STAGE |
| 12/28/1988 | CA1247757A Method and apparatus for producing large volume magnetoplasmas |
| 12/27/1988 | US4794646 Charged beam pattern defect inspection apparatus |
| 12/27/1988 | US4794305 Substrate support structure for ion implantation device |
| 12/27/1988 | US4794298 Ion source |
| 12/27/1988 | US4794259 Charged particle collection |
| 12/22/1988 | DE3734620C1 Electrostatic quadrupole lens system for focusing particle beams in a vacuum tube |
| 12/21/1988 | EP0295752A1 Apparatus suitable for plasma surface treating and process for preparing membrane layers |
| 12/21/1988 | EP0295743A1 Ion source with four electrodes |
| 12/21/1988 | EP0295649A2 Magnetron sputter apparatus and method for forming films by using the same apparatus |
| 12/21/1988 | EP0295616A2 Differentially pumped seal apparatus |
| 12/20/1988 | US4792732 Radio frequency plasma generator |
| 12/20/1988 | US4792730 Circuit for interrupting arc discharge in a gas-discharge vessel |
| 12/20/1988 | US4792688 For use in a particle beam lithography system |
| 12/20/1988 | US4792687 Freeman ion source |
| 12/20/1988 | US4792378 Pressure balancing plate with holes gives uniform layers; semiconductors |
| 12/20/1988 | CA1247043A1 Controlled vacuum arc material deposition, method and apparatus |
| 12/15/1988 | WO1988009830A1 Process for etching with gaseous plasma |
| 12/15/1988 | DE3718177A1 Equipment for electron-beam focusing, in particular in electron-beam welding |
| 12/14/1988 | EP0295065A2 Semiconductor integrated circuit device, method of making same or cutting method for same, and cutting system using energy beam for same |
| 12/14/1988 | EP0294873A1 Test apparatus for performing a realization process of semiconductor structures |
| 12/14/1988 | EP0294572A1 Method and apparatus for coating a substrate |
| 12/13/1988 | US4791301 Device for the input of a nominal value for the impact point of an electron beam on a medium |
| 12/13/1988 | US4791295 Method and apparatus for automatically correcting astigmatism of scanning electron microscope or the like |
| 12/13/1988 | US4791294 Electron beam scanning method and scanning electron microscope |
| 12/13/1988 | US4791288 Scanning photon microscope for simulataneously displaying both the ampitude and phase distributions of ac photovoltage or photocurrents |
| 12/13/1988 | US4791273 Vaporizer system for ion source |
| 12/13/1988 | CA1246492A1 Magnetron sputtering cathode assembly and magnet assembly therefor |
| 12/08/1988 | DE3817604A1 Ion beam generator for semiconductor processing |
| 12/07/1988 | EP0294363A2 Method and device for positioning and aligning the image pattern of a mask on a substrate |
| 12/07/1988 | EP0293924A2 Direct imaging monochromatic electron microscope |
| 12/07/1988 | EP0293607A1 Device for sputtering thin layers on a substrate |
| 12/06/1988 | US4789945 Method and apparatus for charged particle beam exposure |
| 12/06/1988 | US4789809 High frequency discharge apparatus with impedance matching |
| 12/06/1988 | US4789787 Wien filter design |
| 12/06/1988 | US4789786 Providing a mask substrate and selectively forming a metal layer to lower work function |
| 12/06/1988 | US4789781 Scanning electron microscope |
| 12/06/1988 | US4789780 Apparatus for energy-selective visualization |
| 12/01/1988 | WO1988009564A1 Secondary electron detector for use in a gaseous atmosphere |
| 12/01/1988 | WO1988009563A1 Ion implantation apparatus |
| 12/01/1988 | WO1988009562A2 Enhanced-wetting, boron-based liquid-metal ion source and method |