| Patents for H01J 37 - Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof (46,866) |
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| 06/06/1989 | US4837435 Tunneling scanning microscope having light source |
| 06/06/1989 | US4837434 Mass spectrometry system and method employing measurement/survey scan strategy |
| 06/06/1989 | US4837185 Pulsed dual radio frequency CVD process |
| 06/06/1989 | US4836902 Plasma gases; by-product ultraviolet radiation absorption baffles |
| 05/31/1989 | EP0318289A2 Apparatus and method for detecting tunnel current and electro-chemical reaction |
| 05/31/1989 | EP0317952A2 Device having superlattice structure, and method of and apparatus for manufacturing the same |
| 05/31/1989 | EP0317620A1 Enhanced-wetting, boron-based liquid-metal ion source and method |
| 05/30/1989 | US4835789 Electron-beam heated evaporation source |
| 05/30/1989 | US4835438 Source of spin polarized electrons using an emissive micropoint cathode |
| 05/30/1989 | US4835399 Charged particle beam apparatus |
| 05/30/1989 | US4835392 Ion-projection apparatus |
| 05/30/1989 | US4835385 Method of measuring sectional shape and a system therefor |
| 05/30/1989 | US4834860 Magnetron sputtering targets |
| 05/30/1989 | US4834855 Method for sputter depositing thin films |
| 05/24/1989 | EP0317060A2 Electron-emission filament cutoff for GC/MS systems |
| 05/24/1989 | EP0316523A2 Control for sputtering according to the magnetron principle |
| 05/23/1989 | US4833362 Encapsulated high brightness electron beam source and system |
| 05/23/1989 | US4833331 Method of holding an electrically insulating sample |
| 05/23/1989 | US4833330 Anticontaminator for transmission electron microscopes |
| 05/23/1989 | US4833323 Determining the composition of a solid body |
| 05/23/1989 | US4832981 Vapor deposition, cleaning |
| 05/23/1989 | US4832781 Methods and apparatus for thermal transfer with a semiconductor wafer in vacuum |
| 05/23/1989 | US4831963 Plasma processing apparatus |
| 05/23/1989 | CA1254670A1 Method and apparatus for identifying points on a specimen having a defined time-dependent signal |
| 05/18/1989 | WO1989004586A2 Method and apparatus for generating particle beams |
| 05/18/1989 | WO1989004546A1 Magnetron ion source without filament and process for using same |
| 05/18/1989 | WO1989004493A1 Process and arrangement for measuring the variation of a signal at a measuring point of a probe |
| 05/18/1989 | WO1989004382A1 Process and device for producing thin layers of a material which melts or sublimes at high temperatures on a substrate |
| 05/18/1989 | WO1989004217A1 Electron cyclotron resonance plasma source |
| 05/17/1989 | EP0315986A1 Filamentless magnetron ion source and its utilization process |
| 05/16/1989 | US4831397 Photographic apparatus for transmission electron microscopes |
| 05/16/1989 | US4831328 Measurement processing arrangement |
| 05/16/1989 | US4831308 Ion beam gun wherein the needle emitter is surrounded by a tubular nozzle so as to produce an increased ion beam |
| 05/16/1989 | US4831271 Ion beam dosimetry |
| 05/16/1989 | US4831270 Ion implantation apparatus |
| 05/16/1989 | US4831267 Detector for charged particles |
| 05/16/1989 | US4831266 Detector objective for particle beam apparatus |
| 05/16/1989 | US4831255 Variable-attenuation parallel detector |
| 05/16/1989 | CA1254307A1 Electron beam apparatus comprising a semiconductor electron emitter |
| 05/11/1989 | DE3737142A1 Erzeugung von (duennen) schichten aus hochschmelzender bzw. sublimierender materie (leitender, halbleitender und nichtleitender) und gemischen davon mit pseudofunkenelektronenstrahlen Production of (thin) layer of high-melting or sublimating matter (key, semi-conductive and non-conductive) and mixtures thereof pseudo radio with electron beams |
| 05/11/1989 | DE3736340A1 Method for stroboscopically imaging a periodic process in a scanning microscope |
| 05/10/1989 | EP0314947A1 Circuit allowing the magnification independant image shifting |
| 05/10/1989 | EP0314918A1 Control circuit for electron beam generator |
| 05/10/1989 | EP0314763A1 Secondary electron detector for use in a gaseous atmosphere. |
| 05/09/1989 | US4829550 Controlling charged particle beams |
| 05/09/1989 | US4829444 Charged particle beam lithography system |
| 05/09/1989 | US4829243 Electron beam testing of electronic components |
| 05/09/1989 | US4829240 Secondary electron measuring circuit |
| 05/09/1989 | US4829215 Discharge reaction apparatus utilizing dynamic magnetic field |
| 05/09/1989 | US4829189 Apparatus for low-temperature plasma treatment of sheet material |
| 05/09/1989 | US4829178 Apparatus for surface analysis |
| 05/09/1989 | US4829177 Point projection photoelectron microscope with hollow needle |
| 05/05/1989 | WO1989004052A1 Exposing substrates to ion beams |
| 05/03/1989 | EP0314520A2 An apparatus for automatically controlling the magnification factor for a scanning electron microscope |
| 05/03/1989 | EP0314216A1 Charged-particle beam apparatus |
| 05/03/1989 | EP0313750A1 Magnetron sputter etching/deposition system |
| 05/02/1989 | US4827184 Electron beam device and a focusing lens therefor |
| 05/02/1989 | US4827137 Soft vacuum electron beam patterning apparatus and process |
| 05/02/1989 | US4827127 Apparatus using charged particle beam |
| 05/02/1989 | US4826585 Plasma processing apparatus |
| 05/02/1989 | US4826584 Magnetron sputtering cathode |
| 05/02/1989 | US4825806 Film forming apparatus |
| 05/02/1989 | CA1253636A1 Spectrometer lens for particle beam metrology |
| 04/26/1989 | EP0313154A1 Method and apparatus for cleaning elongate metal substrates, substrates cleaned according to this method and polymeric objects reinforced with such substrates |
| 04/26/1989 | EP0312653A1 Electron image projector |
| 04/25/1989 | US4825087 System and methods for wafer charge reduction for ion implantation |
| 04/25/1989 | US4825082 Electron emitting apparatus |
| 04/25/1989 | US4825080 Electrical particle gun |
| 04/25/1989 | US4825033 Variable shaped spot electron beam pattern generator |
| 04/25/1989 | US4824544 Large area cathode lift-off sputter deposition device |
| 04/25/1989 | US4824540 Method and apparatus for magnetron sputtering |
| 04/25/1989 | US4824309 Vacuum processing unit and apparatus |
| 04/25/1989 | CA1253196A1 Vacuum system for a charged particle beam recording system |
| 04/20/1989 | WO1989003587A1 Method and apparatus for thin film formation by plasma cvd |
| 04/20/1989 | WO1989003584A1 Multi-electrode vacuum processing chamber |
| 04/20/1989 | DE3822099A1 Effecting accurate micro-manipulating |
| 04/19/1989 | EP0312447A1 Process and element for the production, using plasma, of thin films for electronic and/or optoelectronic applications |
| 04/19/1989 | EP0312225A2 Particle accelerator |
| 04/19/1989 | EP0312083A2 Pattern measurement method |
| 04/19/1989 | EP0312082A2 Image forming method using secondary electrons from object |
| 04/19/1989 | EP0312066A2 A guard ring for a differentially pumped seal apparatus |
| 04/19/1989 | EP0311976A1 Process and device for the ionic irradiation of great surfaces |
| 04/19/1989 | EP0311975A1 Reflection device for low energy ions |
| 04/19/1989 | EP0311697A2 Magnetically enhanced sputter source |
| 04/19/1989 | EP0311696A1 Method and apparatus for processing with plasma |
| 04/18/1989 | US4823358 High capacity electron beam cold hearth furnace |
| 04/18/1989 | US4823013 Charged particles exposure apparatus having an optically deformable beam bounding diaphragm |
| 04/18/1989 | US4823011 Ion-projection lithographic apparatus with means for aligning the mask image with the substrate |
| 04/18/1989 | US4823006 Integrated electron optical/differential pumping/imaging signal detection system for an environmental scanning electron microscope |
| 04/18/1989 | US4823005 Electron beam apparatus |
| 04/18/1989 | US4823004 Method of interacting carriers |
| 04/18/1989 | US4823003 Charged particle optical systems having therein means for correcting aberrations |
| 04/18/1989 | CA1252918A1 Scanning tunneling microscope |
| 04/13/1989 | DE3733037A1 Method for improving the signal-to-noise ratio in scanning electron microscopes |
| 04/12/1989 | EP0310888A2 Method for the introduction of ions into the ion trap of an ion cyclotron resonance spectrometer and ion cyclotron resonance spectrometer used in this method |
| 04/12/1989 | EP0310816A1 Automatic frequency following in a corpuscular beam-measuring method using a modulated primary beam |
| 04/11/1989 | US4821196 High resolution automatic focus correction electronic subsystem for E-beam lithography |
| 04/11/1989 | US4820977 Method and apparatus for identifying points on a specimen having a defined time-dependent signal |
| 04/11/1989 | US4820928 Lithography apparatus |
| 04/11/1989 | US4820927 Electron beam source employing a photo-emitter cathode |