| Patents for H01J 37 - Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof (46,866) |
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| 04/11/1989 | US4820921 Method of beam centering |
| 04/11/1989 | US4820898 Ion beam apparatus for finishing patterns |
| 04/11/1989 | US4820397 Quick change sputter target assembly |
| 04/11/1989 | US4820371 Apertured ring for exhausting plasma reactor gases |
| 04/11/1989 | US4820370 Particle shielded R. F. connector for a plasma enhanced chemical vapor processor boat |
| 04/11/1989 | CA1252581A1 Electron beam-excited ion beam source |
| 04/06/1989 | DE3731715A1 Method and arrangement for detecting the secondary particles released on a sample by a corpuscular beam |
| 04/05/1989 | EP0310590A2 Ion treatment of the inner surfaces of objects connected as cathodes |
| 04/05/1989 | EP0309767A1 Beam generating system for electron beam measuring instruments |
| 04/05/1989 | EP0309648A1 Apparatus for coating or etching by means of a plasma |
| 04/04/1989 | US4818885 Electron beam writing method and system using large range deflection in combination with a continuously moving table |
| 04/04/1989 | US4818874 Scanning electron microscope |
| 04/04/1989 | US4818873 Apparatus for automatically controlling the magnification factor of a scanning electron microscope |
| 04/04/1989 | US4818872 Integrated charge neutralization and imaging system |
| 04/04/1989 | US4818869 Method of isolating a single mass or narrow range of masses and/or enhancing the sensitivity of an ion trap mass spectrometer |
| 04/04/1989 | US4818838 Apparatus for preselecting and maintaining a fixed gap between a workpiece and a vacuum seal apparatus in particle beam lithography systems |
| 04/04/1989 | US4818837 Multiple arc plasma device with continuous gas jet |
| 04/04/1989 | US4818359 Low contamination RF sputter deposition apparatus |
| 04/04/1989 | US4818358 Magnetron cathode sputter coating apparatus |
| 04/04/1989 | US4817556 Apparatus for retaining wafers |
| 04/04/1989 | US4817449 Device for moving samples in a controlled atmosphere enclosure |
| 03/29/1989 | EP0309236A2 Microprobe, preparation thereof and electronic device by use of said microprobe |
| 03/29/1989 | EP0308953A1 Charged particle detector |
| 03/29/1989 | EP0308680A1 Cathode sputtering apparatus |
| 03/29/1989 | EP0308678A1 Process and device for measuring the phase of signals at a test point by means of an unmodulated particle beam |
| 03/29/1989 | EP0308677A1 Process and device for measuring the phase of signals at a test point by means of a modulated particle beam |
| 03/29/1989 | EP0308560A1 Charged-particle gun for the pulsed emission of particles having a fixed energy |
| 03/29/1989 | EP0308427A1 Photo ion spectrometer |
| 03/29/1989 | EP0163745B1 Quadrupole particle accelerator |
| 03/28/1989 | US4817178 Linear cursor representation method |
| 03/28/1989 | US4816693 Apparatus and method for uniform ion dose control |
| 03/28/1989 | US4816692 Pattern splicing system and method for scanning of electron beam system |
| 03/28/1989 | US4816638 Vacuum processing apparatus |
| 03/23/1989 | WO1989002695A1 Multiple electrode plasma reactor power distribution system |
| 03/23/1989 | DE3801205C1 Device for ion etching of substrates with the support of a magnetic field |
| 03/22/1989 | EP0308304A1 Method for analysing a sample by etching with a beam of particles, and apparatus therefor |
| 03/22/1989 | EP0308211A2 Ion beam position sensor |
| 03/22/1989 | EP0308151A2 Microscope viewing arrangements |
| 03/22/1989 | EP0307906A1 Compensating eddy current effects in charged particle beam systems |
| 03/21/1989 | US4814716 Apparatus for producing and accelerating an electron beam |
| 03/21/1989 | US4814682 Drive apparatus for specimen stage of microscope |
| 03/21/1989 | US4814615 Method and apparatus for detecting defect in circuit pattern of a mask for X-ray exposure |
| 03/15/1989 | EP0307029A1 Apparatus for the point-by-point scanning of an object |
| 03/15/1989 | EP0307017A1 Metallic ion implantation device |
| 03/15/1989 | EP0306790A2 Cathodoluminescence detector |
| 03/15/1989 | EP0306491A1 Arc coating of refractory metal compounds. |
| 03/15/1989 | EP0185045B1 Wire-ion-plasma electron gun employing auxiliary grid |
| 03/15/1989 | CN1031749A Heavy-duty sliding surface bearing |
| 03/14/1989 | US4812962 Area feature sorting mechanism for neighborhood-based proximity correction in lithography processing of integrated circuit patterns |
| 03/14/1989 | US4812748 Method and apparatus for operating a scanning microscope |
| 03/14/1989 | US4812712 Plasma processing apparatus |
| 03/14/1989 | US4812663 Calorimetric dose monitor for ion implantation equipment |
| 03/14/1989 | US4812662 Alignment system using an electron beam |
| 03/14/1989 | US4812661 Method and apparatus for hybrid I.C. lithography |
| 03/14/1989 | US4812652 Imaging method and apparatus for electron microscopes |
| 03/14/1989 | US4812651 Spectrometer objective for particle beam measuring instruments |
| 03/14/1989 | US4812416 Monitoring reaction products with mass spectrometry |
| 03/14/1989 | CA1251287A1 Ion beam implanter control system |
| 03/08/1989 | EP0306275A2 Photoelectron image projection apparatus |
| 03/07/1989 | US4810935 Method and apparatus for producing large volume magnetoplasmas |
| 03/07/1989 | US4810886 Electron microscope |
| 03/07/1989 | US4810883 Device for providing an energy filtered charge particle image |
| 03/07/1989 | US4810882 Mass spectrometer for positive and negative ions |
| 03/07/1989 | US4810880 Direct imaging monochromatic electron microscope |
| 03/07/1989 | US4810879 For investigating a selected area of a specimen |
| 03/07/1989 | US4810347 Penning type cathode for sputter coating |
| 03/07/1989 | US4810346 Magnetron type sputtering cathode |
| 03/07/1989 | US4810342 Method for controlling substrate temperature in a high temperature sputtering process |
| 03/07/1989 | US4810335 Method for monitoring etching processes |
| 03/07/1989 | US4810322 Uniformity of etch rate |
| 03/01/1989 | EP0305269A1 Process for the real-tame control of the etching selectivity by analysis of the plasma gases in a reactive ion etching process, and reactor for carrying it out |
| 03/01/1989 | EP0304895A2 Sputtering chamber structure for high-frequency bias sputtering process |
| 02/28/1989 | US4808829 Mark position detection system for use in charged particle beam apparatus |
| 02/28/1989 | US4808821 Spectrometer objective for electron beam mensuration techniques |
| 02/28/1989 | US4808820 Electron-emission filament cutoff for gas chromatography + mass spectrometry systems |
| 02/28/1989 | US4808373 Gold with aluminum and copper; corrosion resistance, jewelry |
| 02/28/1989 | US4808258 High frequency voltage, semiconductor manufacture |
| 02/23/1989 | WO1989001699A1 Steered arc coating with thick targets |
| 02/23/1989 | WO1989001698A1 Electrode for use in a scanning electron microscope |
| 02/23/1989 | WO1989001530A1 Metallurgical controlling method |
| 02/22/1989 | EP0304114A1 Charged particle apparatus comprising a beam discriminator |
| 02/22/1989 | EP0179840B1 Arrangement to irradiate solid state materials with ions |
| 02/21/1989 | US4807159 Apparatus and method for controlling irradiation of an electron beam at a fixed position in an electron beam tester system |
| 02/21/1989 | US4806829 Apparatus utilizing charged particles |
| 02/21/1989 | US4806769 Disk exchangeable target mechanism with effective cooling means, for ion implantation system |
| 02/21/1989 | US4806767 Electron lens assembly |
| 02/21/1989 | US4806766 Magnetic lens system |
| 02/21/1989 | US4806755 Micromechanical atomic force sensor head |
| 02/15/1989 | EP0303486A2 Method of ion implantation |
| 02/15/1989 | CN1031154A Secondary electron detectory for use in gaseous atmosphere |
| 02/14/1989 | US4804879 Deflecting electromagnet apparatus with moveable pole piece |
| 02/14/1989 | US4804852 Treating work pieces with electro-magnetically scanned ion beams |
| 02/14/1989 | US4804851 Charged particle sources |
| 02/14/1989 | US4804840 Apparatus for detecting focused condition of charged particle beam |
| 02/14/1989 | US4804837 Ion implantation surface charge control method and apparatus |
| 02/14/1989 | US4804431 Microwave plasma etching machine and method of etching |
| 02/09/1989 | WO1989001094A1 Sliding bearing with high load capacity |
| 02/07/1989 | US4803644 Alignment mark detector for electron beam lithography |
| 02/07/1989 | US4803430 Magnetic/electric field measuring device by means of an electron beam |
| 02/07/1989 | US4803398 Electron gun with one directly heatable and one indirectly heatable cathode |