| Patents for H01J 37 - Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof (46,866) |
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| 08/02/1989 | EP0326191A2 Apparatus and method for plasma treatment of resin material |
| 08/02/1989 | CN1034452A Scanning electron microscope for visualization of wet samples |
| 08/01/1989 | US4853870 Electron beam exposure system |
| 08/01/1989 | US4853622 Method and apparatus for detecting and imaging a voltage signal of at least one specific frequency at a measuring location |
| 08/01/1989 | US4853549 Electron beam drawing method |
| 08/01/1989 | US4853545 Particle beam apparatus for low-error imaging of line-shaped subjects |
| 08/01/1989 | US4853102 Sputtering process and an apparatus for carrying out the same |
| 07/27/1989 | WO1989006857A1 Method and apparatus for the treatment of surfaces of machine components |
| 07/27/1989 | WO1989006708A1 Procedure and apparatus for the coating of materials by means of a pulsating plasma beam |
| 07/27/1989 | DE3801309A1 Device for regulating the target DC voltage and the bias DC voltage of sputtering installations |
| 07/27/1989 | DE3801058A1 Beam generator for electron beam measuring devices |
| 07/26/1989 | EP0325243A2 Etching apparatus |
| 07/26/1989 | EP0325178A2 Apparatus for heating a sample within a vacuum chamber |
| 07/25/1989 | US4851768 Characteristic test apparatus for electronic device and method for using the same |
| 07/25/1989 | US4851693 Compensated scan wave form generator for ion implantation equipment |
| 07/25/1989 | US4851677 Apparatus for recording and reproducing image produced by an electron microscope including an optical filter and a deflecting element |
| 07/25/1989 | US4851676 Electron beam image recording using stimulable phosphor sheets of reduced thickness and/or with no protective layer |
| 07/25/1989 | US4851674 Electron beam control apparatus for use in transmission electron microscope |
| 07/25/1989 | US4851673 Secondary ion mass spectrometer |
| 07/25/1989 | US4851672 Specimen mount for secondary ion mass spectrometry and other sensitive particle beam analysis methods and method for the operation thereof |
| 07/25/1989 | US4851671 Oscillating quartz atomic force microscope |
| 07/25/1989 | US4851670 Energy-selected electron imaging filter |
| 07/25/1989 | US4851668 Ion source application device |
| 07/25/1989 | US4851097 Apparatus for repairing a pattern film |
| 07/25/1989 | EP0287630A4 Method and apparatus for constant angle of incidence scanning in ion beam systems. |
| 07/20/1989 | DE3817897A1 Die erzeugung und handhabung von ladungsgebilden hoher ladungsdichte The generation and handling of cargo structures of high charge density |
| 07/19/1989 | EP0324667A1 Electron collector for an electron tube |
| 07/19/1989 | EP0324436A2 Apparatus for preselecting and maintaining a fixed gap between a workpiece and a vacuum seal apparatus in particle beam lithography systems |
| 07/19/1989 | EP0324247A2 Ion implantation surface charge control method and apparatus |
| 07/19/1989 | EP0324213A1 Scanning electron microscope for visualization of wet samples |
| 07/19/1989 | EP0324123A2 Method and apparatus for manufacturing of a magneto-optic recording and/or erasable information carrier |
| 07/19/1989 | CN1034092A Production and manipulation of high charge density |
| 07/18/1989 | US4849641 Real time non-destructive dose monitor |
| 07/18/1989 | US4849068 Diffusion of gases to boundary of wafer face |
| 07/13/1989 | WO1989006434A1 Production and manipulation of high charge density |
| 07/13/1989 | DE3844242A1 Elektromagnetischer stigmator Electromagnetic stigmator |
| 07/13/1989 | DE3830478A1 Cathodic sputtering device |
| 07/12/1989 | EP0323902A2 Apparatus for thermal transfer with a semiconductor wafer in vacuum |
| 07/12/1989 | EP0323898A2 Cathod assembly for mounting in an electron gun |
| 07/12/1989 | EP0323620A2 Etching method and etching apparatus |
| 07/12/1989 | EP0156913B1 Ion microbeam implanting apparatus |
| 07/12/1989 | CN1033906A Octupole electromagnetic stigmator |
| 07/11/1989 | US4847792 Process and apparatus for detecting aberrations in production process operations |
| 07/11/1989 | US4847504 Apparatus and methods for ion implantation |
| 07/11/1989 | US4847502 Dual cathode system for electron beam instruments |
| 07/11/1989 | US4847497 Apparatus for recording images produced by an electron microscope |
| 07/11/1989 | US4846953 Metal ion source |
| 07/11/1989 | US4846928 Process and apparatus for detecting aberrations in production process operations |
| 07/11/1989 | US4846920 Plasma amplified photoelectron process endpoint detection apparatus |
| 07/05/1989 | EP0322419A1 Point projection photoelectron microscope with hollow needle. |
| 07/04/1989 | US4845370 Magnetic field former for charged particle beams |
| 07/04/1989 | US4845366 Semiconductor dopant vaporizer |
| 07/04/1989 | US4845365 Process and apparatus for producing electrons using a field coupling and the photoelectric effect |
| 07/04/1989 | US4845362 In situ differential imaging and method utilizing a scanning electron microscope |
| 07/04/1989 | US4845361 Process for electron beam guiding with energy selection and electron spectrometer |
| 07/04/1989 | US4844775 Ion etching and chemical vapour deposition |
| 07/04/1989 | US4844767 Controlling alternating current bias in microwave plasma etching |
| 07/04/1989 | CA1256997A1 Method and apparatus for producing neutral atomic and molecular beams |
| 06/29/1989 | DE3842757A1 Tragbares raster-elektronenmikroskop Portable raster electron microscope |
| 06/28/1989 | EP0321925A2 Apparatus for analysis employing electron |
| 06/28/1989 | CN1004664B Equipment for generating multiple metals and gas particle beams |
| 06/27/1989 | US4843246 Apparatus for detecting the position of incidence of a beam of charge carriers on a target |
| 06/27/1989 | US4843238 Method for identifying a blistered film in layered films |
| 06/27/1989 | US4842707 Dry process apparatus |
| 06/27/1989 | US4842703 Magnetron cathode and method for sputter coating |
| 06/27/1989 | US4842683 Magnetic field-enhanced plasma etch reactor |
| 06/27/1989 | US4842679 Method for the production of semiconductor devices |
| 06/27/1989 | CA1256597A1 Apparatus for pulsing electron beams |
| 06/27/1989 | CA1256587A1 Electron beam test probe system for analyzing integrated circuits |
| 06/26/1989 | EP0290575A4 Method and apparatus for ion beam centroid location. |
| 06/21/1989 | EP0321147A2 Photoelectron mask and photo cathode image projection method using the same |
| 06/21/1989 | EP0320947A2 Halogen monitoring apparatus |
| 06/20/1989 | US4841197 Double-chamber ion source |
| 06/20/1989 | US4841148 Variable temperature scanning tunneling microscope |
| 06/20/1989 | US4841146 Self-cleaning scorotron with focused ion beam |
| 06/20/1989 | US4841143 Charged particle beam apparatus |
| 06/20/1989 | US4840702 Apparatus and method for plasma treating of circuit boards |
| 06/20/1989 | US4840487 Measuring apparatus for etching pits |
| 06/15/1989 | WO1989005206A1 Installation for electron-beam welding of workpieces |
| 06/15/1989 | WO1989004586A3 Method and apparatus for generating particle beams |
| 06/15/1989 | DE3741124A1 Electron beam nanolithographic system having a multiple-beam electron source capable of multiplex control and made from MIM (metal-insulator-metal) thin-film cathodes |
| 06/14/1989 | EP0320425A2 Plasma amplified photoelectron process endpoint detection apparatus |
| 06/14/1989 | EP0320354A1 Process for analysing the time of flight using continuous scanning, and analytical device for carrying out this process |
| 06/14/1989 | EP0320292A2 A process for forming a pattern |
| 06/14/1989 | EP0320016A1 Sputtering device |
| 06/14/1989 | EP0319912A2 Method and apparatus for investigating materials with X-rays |
| 06/13/1989 | US4839523 Ion implantation apparatus for semiconductor manufacture |
| 06/13/1989 | US4839520 Production of pulsed electron beams |
| 06/13/1989 | US4839011 Arc coating of refractory metal compounds |
| 06/13/1989 | US4838990 Using gas mixture of fluorine source, fluorosilane, bromine source, weak oxygen source |
| 06/13/1989 | US4838978 Dry etching apparatus |
| 06/13/1989 | CA1255815A1 Semiconductor etching apparatus with magnetic array and vertical shield |
| 06/07/1989 | EP0319107A2 Current control circuit |
| 06/07/1989 | EP0319095A1 Inspection apparatus incorporating digital electron detection |
| 06/07/1989 | EP0318539A1 Microwave plasma generator |
| 06/07/1989 | CN1033297A Apparatus for coating material |
| 06/06/1989 | US4837447 Rasterization system for converting polygonal pattern data into a bit-map |
| 06/06/1989 | US4837445 Coarse adjusting device of scanning tunneling microscope |
| 06/06/1989 | US4837444 Electron microscope |
| 06/06/1989 | US4837443 Guard ring for a differentially pumped seal apparatus |