Patents
Sitemap › H01 - Basic electric elements › H01J - Electric discharge tubes or discharge lamps › H01J 37 - Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
Patents for H01J 37 - Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof (46,866)
12/1989
12/06/1989EP0344513A2 Process for the manufacture of a steering plate for a lithography apparatus
12/06/1989EP0344236A1 Electron cyclotron resonance plasma source
12/06/1989EP0167561B1 Method and apparatus for surface diagnostics
12/05/1989US4885472 Silicon grid as a reference and calibration standard in a particle beam lithography system
12/05/1989US4885465 Spectrum display device for x-ray microanalyzer or the like
12/05/1989US4885075 Cooling device for a sputter target and source
12/05/1989US4885074 Plasma reactor having segmented electrodes
12/05/1989US4885070 Method and apparatus for the application of materials
12/05/1989US4885068 Deforming an arc plasma stream by magnetic field, forming a coating layer on a substrate
12/05/1989CA1263766A1 Electron spectrometer
11/1989
11/30/1989WO1989011729A1 Magnetically enhanced rie process and apparatus
11/30/1989WO1989011553A1 Selective area nucleation and growth method for metal chemical vapor deposition using focused ion beams
11/29/1989EP0343602A2 Microwave plasma treating apparatus
11/29/1989EP0343500A1 Plasma etching apparatus
11/29/1989CN1037615A Electron gun assembly, especially for electron microscope
11/29/1989CN1037614A Coating method for making emission filament used for ionization in mass spectrum field
11/28/1989US4883969 Method of ionizing gas within cathode-containing chamber
11/28/1989US4883968 Electron cyclotron resonance ion source
11/28/1989US4883959 Scanning surface microscope using a micro-balance device for holding a probe-tip
11/28/1989US4883560 Plasma treating apparatus for gas temperature measuring method
11/23/1989EP0343017A2 Reactive ion etching apparatus
11/23/1989EP0342933A2 Disk scanning apparatus for batch ion implanters
11/23/1989EP0342316A2 Method of electron beam lithography alignment
11/23/1989EP0342279A1 Plasma apparatus
11/21/1989US4882487 Direct imaging monochromatic electron microscope
11/21/1989US4882486 Electron detection with energy discrimination
11/21/1989US4882028 R-F electrodes for removably providing electrical energy to an apparatus during R-F energy reactive treatment processes
11/21/1989US4882022 Process and apparatus for sputter coating a gold alloy onto a substrate
11/21/1989US4881717 Vacuum chamber
11/16/1989WO1989011206A1 Plasma reactor
11/15/1989EP0342113A1 Thin film formation apparatus
11/15/1989EP0341781A1 Charged particle beam apparatus
11/14/1989US4881010 Ion implantation method and apparatus
11/14/1989US4880977 Analytical electron microscope
11/14/1989US4880976 Secondary electron detector for use in a gaseous atmosphere
11/14/1989US4880975 Fine adjustment mechanism for a scanning tunneling microscope
11/14/1989US4880496 Microsurgery, genetic engineering
11/14/1989US4880294 Continuously variable microdiaphragm
11/14/1989EP0280714A4 Beam position correction device.
11/09/1989DE3814616A1 Mikromanipulator zur bewegung von objekten Micromanipulator for moving objects
11/08/1989EP0340861A1 Auger spectrometry
11/07/1989US4879518 Linear particle accelerator with seal structure between electrodes and insulators
11/07/1989US4879473 Electron-beam exposure apparatus
11/07/1989US4879467 Apparatus for the translatory manipulation of an element such as an axle
11/07/1989US4879017 Uniformity
11/02/1989WO1989010628A1 Encapsulated high brightness electron beam source and system therefor
11/02/1989WO1989010428A1 Method and apparatus for magnetron sputtering
11/02/1989WO1989010241A1 Micromanipulator for moving objects
11/02/1989EP0340126A1 Parallax-free gas-filled X-ray detector
11/02/1989EP0339951A2 Wand optics column and associated array wand and charged particle source
11/02/1989EP0339655A2 Transmission electron microscope
11/02/1989EP0339580A2 A vacuum processing reactor
11/02/1989EP0339554A2 High-frequency ion beam source
11/01/1989CN1036855A Method and apparatus for forming coherent clusters
10/1989
10/31/1989US4878177 Method for drawing a desired circuit pattern using charged particle beam
10/31/1989US4877957 Scanning type tunnel microscope
10/31/1989US4877642 Microwave cavity resonator as reaction space
10/31/1989US4877509 Semiconductor wafer treating apparatus utilizing a plasma
10/31/1989US4877479 Maskless deposition; existing topography to desired topography, using algorithim comprising image restoration
10/31/1989US4876983 Plasma operation apparatus
10/31/1989CA1262578A1 Semiconductor device for generating an electron beam
10/19/1989WO1989010004A1 Plasma x-ray tube, in particular for x-ray preionizing gas lasers, process for producing x-ray radiation with said x-ray tube and use of said x-ray tube
10/19/1989WO1989010003A1 Plasma x-ray tube, in particular for x-ray preionizing of gas lasers, and use as electron gun
10/19/1989WO1989009673A1 Viewing optics for external-mount electron beam welders
10/19/1989DE3911446A1 Elektronenkanone fuer elektronenmikroskope Electron gun for electron microscopes
10/19/1989DE3811673A1 Scanning electron microscope method for measuring the profiling, in particular the roughness, of surfaces, and device for carrying out the method
10/18/1989EP0337530A2 Improved electronic feeder for an ion pump
10/18/1989EP0337012A2 Sputtering cathode following the magnetron principle
10/18/1989EP0336979A1 Apparatus for thin film formation by plasma cvd
10/17/1989US4874979 Electromechanical translation apparatus
10/17/1989US4874947 Focused ion beam imaging and process control
10/17/1989US4874946 Method and apparatus for analyzing the internal chemistry and compositional variations of materials and devices
10/17/1989US4874945 Electron microscope equipped with scanning tunneling microscope
10/17/1989US4874944 Mass spectrometer
10/17/1989US4874497 Thin film forming apparatus
10/17/1989US4874494 Bias sputtering thin film
10/17/1989US4874460 Using ion beam
10/17/1989US4874459 In evacuated housing with temperature controlled tiltable support
10/17/1989US4874453 Apparatus and method for plasma treatment of resin material
10/11/1989EP0336618A2 Quick change sputter target assembly
10/11/1989EP0336282A1 Plasma X-ray tube, especially for X-ray-preionization of gas lasers, method for generating X-rays with such an X-ray tube and usage of the latter
10/11/1989CN1036233A Microwave plasma chemical vapour deposition apparatus
10/10/1989US4873445 Source of ions of the triode type with a single high frequency exitation ionization chamber and magnetic confinement of the multipole type
10/10/1989US4873440 Electron microscope image output method and apparatus
10/10/1989US4872964 Planar magnetron sputtering apparatus and its magnetic source
10/10/1989US4872944 Process for the control in real time of the selectivity of the etching by analysis of the plasma gases in a process of reactive ionic etching and a reactor therefore
10/05/1989WO1989009483A1 A variable temperature scanning tunneling microscope
10/04/1989EP0335711A2 Charged particle beam exposure system
10/04/1989EP0335675A2 Large area microwave plasma apparatus
10/04/1989EP0335526A2 Magnetron with flux switching cathode and method of operation
10/04/1989EP0335398A1 Scanning electron microscope for observing and measuring minute pattern of samples
10/04/1989EP0335122A2 Device and procedure for controlling and monitoring electron beam for processing metals
10/04/1989EP0191439B1 Linearly structured multiple aperture and beam blanking electrodes for the production of a multiplicity of individually blankable corpuscular beam probes in a lithography apparatus
10/03/1989US4871919 Electron beam lithography alignment using electric field changes to achieve registration
10/03/1989US4871918 Hollow-anode ion-electron source
10/03/1989US4871912 Control system using external computer for electron microscope
10/03/1989US4871911 Electron beam apparatus comprising a semiconductor electron emitter
10/03/1989US4871434 Process for equipment to coat tools for machining and forming techniques with mechanically resistant layers
10/03/1989US4871433 Method and apparatus for improving the uniformity ion bombardment in a magnetron sputtering system
10/03/1989US4871421 Split-phase driver for plasma etch system
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