| Patents for H01J 37 - Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof (46,866) |
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| 04/17/1990 | US4917786 Method and apparatus for evaporating material in vacuum |
| 04/17/1990 | US4917136 Process gas supply piping system |
| 04/17/1990 | US4917044 Electrical contact apparatus for use with plasma or glow discharge reaction chamber |
| 04/12/1990 | DE3834154A1 Electron beam evaporator |
| 04/11/1990 | EP0363055A2 Electron gun and process of producing same |
| 04/11/1990 | EP0362947A1 Sealed neutron tube equipped with a multicellular ion source with magnetic confinement |
| 04/11/1990 | EP0362613A2 Electromechanical translation apparatus |
| 04/11/1990 | EP0362498A1 Inspection system utilizing retarding field back scattered electron collection |
| 04/11/1990 | EP0248914B1 Liquid metal ion source |
| 04/10/1990 | US4916315 Scanning electron microscope for observing and measuring minute pattern of sample |
| 04/10/1990 | US4915979 Electron cyclotron resonance |
| 04/10/1990 | US4915917 For rendering surfaces hydrophilic |
| 04/10/1990 | US4915807 Method and apparatus for processing a semiconductor wafer |
| 04/10/1990 | US4915805 Use of permanent magnets with same north and south pole orientation |
| 04/10/1990 | US4915777 Method for etching tungsten |
| 04/04/1990 | EP0361932A2 Scanning tunnel-current-detecting device and method |
| 04/03/1990 | USRE33193 Ion beam processing apparatus and method of correcting mask defects |
| 04/03/1990 | US4914305 Uniform cross section ion beam system |
| 04/03/1990 | US4914304 Charged-beam exposure system |
| 04/03/1990 | US4914292 Ion implanting apparatus |
| 04/03/1990 | US4913929 In situ growth and deposition of layers on wafer |
| 04/03/1990 | US4913790 Temperature control in metal deposition |
| 04/03/1990 | US4912822 Method of making an integrated scanning tunneling microscope |
| 03/28/1990 | EP0360655A1 Apparatus for irradiating a product at both sides |
| 03/28/1990 | EP0360534A2 Microwave plasma treatment apparatus |
| 03/28/1990 | EP0360035A2 Electron beam source |
| 03/28/1990 | EP0359966A2 Device for reactive ion etching |
| 03/28/1990 | EP0359777A1 Process for etching with gaseous plasma. |
| 03/27/1990 | US4912405 Magnetic lens and electron beam deflection system |
| 03/27/1990 | US4912328 Apparatus for improving the signal-to-noise ratio of image signals in a scan-type imaging system |
| 03/27/1990 | US4912326 Direct imaging type SIMS instrument |
| 03/27/1990 | US4912325 Method for sample analysis by sputtering with a particle beam, and device to implement said method |
| 03/27/1990 | US4912313 Method of measuring surface topography by using scanning electron microscope, and apparatus therefor |
| 03/27/1990 | US4911814 Plasma generating chamber; microwaves; applying voltage and magnetic field |
| 03/27/1990 | US4911810 Modular sputtering apparatus |
| 03/27/1990 | US4911784 Decoupling magnetic field from substrate; applying etching potential |
| 03/22/1990 | WO1990002955A1 Process and device for measuring states and variations over time |
| 03/21/1990 | EP0359153A2 Split-phase driver for plasma etch system |
| 03/21/1990 | EP0359018A2 Lithography apparatus for structuring an object |
| 03/20/1990 | US4910463 Halogen monitoring apparatus |
| 03/20/1990 | US4910442 Field emission type electron gun |
| 03/20/1990 | US4910436 Wide area VUV lamp with grids and purging jets |
| 03/20/1990 | US4910435 Remote ion source plasma electron gun |
| 03/20/1990 | US4910399 Electron microscope having X-ray detector |
| 03/20/1990 | US4910398 Pattern Measurement method |
| 03/20/1990 | US4910041 Generated arced plasma; applying a magnetic field |
| 03/20/1990 | US4909184 Apparatus for the formation of a functional deposited film using microwave plasma chemical vapor deposition process |
| 03/20/1990 | CA1266923A1 Ion beam implantation display method and apparatus |
| 03/14/1990 | EP0358567A2 Method of exposing patterns of semiconductor devices and stencil mask for carrying out same |
| 03/14/1990 | EP0357824A1 A sheet plasma sputtering method and an apparatus for carrying out the method |
| 03/13/1990 | US4908519 Loading mechanism and support structure having improved vibration damping useful in scanning tunneling microscopy |
| 03/13/1990 | US4908492 Microwave plasma production apparatus |
| 03/13/1990 | US4908226 Selective area nucleation and growth method for metal chemical vapor deposition using focused ion beams |
| 03/13/1990 | US4907422 In an ice making system |
| 03/08/1990 | WO1990002414A1 Device for glow potential processing, in particular ionic carburation |
| 03/08/1990 | WO1990002213A1 Device for plasma processing with an anode |
| 03/07/1990 | EP0357133A1 Protection device for neutron tubes |
| 03/07/1990 | EP0208851B1 Fabricating a semiconductor device by means of molecular beam epitaxy |
| 03/06/1990 | US4907287 Image correction system for scanning electron microscope |
| 03/06/1990 | US4906900 Coaxial cavity type, radiofrequency wave, plasma generating apparatus |
| 03/06/1990 | US4906840 Integrated scanning tunneling microscope |
| 03/06/1990 | US4906811 Process and device for igniting an arc with a conducting plasma channel |
| 03/06/1990 | US4906347 Dry-etching apparatus |
| 03/01/1990 | DE3829260A1 Plasma-coating chamber with removable guard screen |
| 02/28/1990 | EP0355766A2 Vacuum deposition apparatus and process for preparing magnetic recording medium |
| 02/28/1990 | EP0355241A1 Spin-polarized scanning tunneling microscope |
| 02/28/1990 | CN1040122A Large area microwave plasma apparatus |
| 02/27/1990 | US4904902 Ion implanting system |
| 02/27/1990 | US4904873 Method of producing and guiding intensive, large-area ion, electron and x-ray beams |
| 02/27/1990 | US4904866 Wide area soft vacuum abnormal glow electron beam discharge hardening process |
| 02/27/1990 | US4904362 Bar-shaped magnetron or sputter cathode arrangement |
| 02/22/1990 | DE3900768C1 Plasma etching device and method for operating it |
| 02/20/1990 | US4902966 Method and apparatus for operating a scanning microscope |
| 02/20/1990 | US4902940 Current control circuit |
| 02/20/1990 | US4902934 Plasma apparatus |
| 02/20/1990 | US4902930 Electron image projector |
| 02/20/1990 | US4902898 Wand optics column and associated array wand and charged particle source |
| 02/20/1990 | US4902897 Ion beam gun and ion beam exposure device |
| 02/20/1990 | US4902892 Method of measurement by scanning tunneling microscope |
| 02/20/1990 | US4902631 Monitoring the fabrication of semiconductor devices by photon induced electron emission |
| 02/20/1990 | US4902531 Vacuum processing method and apparatus |
| 02/20/1990 | US4902099 Trace element spectrometry with plasma source |
| 02/20/1990 | US4901667 Surface treatment apparatus |
| 02/14/1990 | EP0354669A2 Dry etching apparatus with anhydrous hydrogen fluoride gas generator |
| 02/13/1990 | US4900982 Cathode assembly |
| 02/13/1990 | US4900974 Ion source |
| 02/13/1990 | US4900932 Cathodoluminescence detector utilizing a hollow tube for directing light radiation from the sample to the detector |
| 02/13/1990 | US4900930 Alpha-ray image detecting apparatus |
| 02/08/1990 | WO1990001250A1 Remote ion source plasma electron gun |
| 02/08/1990 | WO1990001213A1 High capacity electron beam cold hearth furnace |
| 02/07/1990 | EP0354055A2 Disposable spray aperture |
| 02/07/1990 | EP0354020A2 Electronic probe |
| 02/07/1990 | EP0353245A1 Method and apparatus for ion etching and deposition |
| 02/07/1990 | EP0240526B1 Method and device for chemical treatment, particularly thermochemical treatment and chemical deposition in a large volume homogeneous plasma |
| 02/06/1990 | US4899078 For use in electron microscopes |
| 02/06/1990 | US4899060 Diaphragm system for generating a plurality of particle probes haivng variable cross section |
| 02/06/1990 | US4899059 Disk scanning apparatus for batch ion implanters |
| 02/06/1990 | US4898557 Process for preparing extraction grids |
| 02/06/1990 | US4898253 Electronic balance for dosing |
| 02/06/1990 | US4898118 Apparatus for forming functional deposited film by microwave plasma CVD process |