| Patents for H01J 37 - Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof (46,866) |
|---|
| 06/26/1990 | US4937206 Method and apparatus for preventing cross contamination of species during the processing of semiconductor wafers |
| 06/26/1990 | US4936968 Ion-beam machining method and apparatus |
| 06/26/1990 | US4936967 Method of detecting an end point of plasma treatment |
| 06/26/1990 | US4936960 Method and apparatus for recovery from low impedance condition during cathodic arc processes |
| 06/26/1990 | CA1270895A1 Conductive coated semiconductor electrostatic deflection plates |
| 06/20/1990 | EP0374060A1 Device in a vacuum of big volume and procedure for its fabrication |
| 06/20/1990 | EP0373742A2 Tunnel unit and scanning head for scanning tunneling microscope |
| 06/20/1990 | EP0373656A2 Detection system for cathodoluminescence analysis |
| 06/20/1990 | EP0373599A2 Method of determining the position of electron beam irradiation and device used in such method |
| 06/20/1990 | EP0373399A2 Imaging corrector of the Wien type for electron microscopes |
| 06/20/1990 | EP0267820B1 Electronic optical device using variable illumination and aperture limitation, and its use in an electron beam lithographic system |
| 06/19/1990 | US4935661 Pulsed plasma apparatus and process |
| 06/19/1990 | US4935634 Atomic force microscope with optional replaceable fluid cell |
| 06/19/1990 | US4935625 Electron holography apparatus |
| 06/19/1990 | US4935115 Method and apparatus for cold sputter cleaning an elongated metal substrate |
| 06/13/1990 | EP0372179A1 Method of procuring high-frequency energy, and its use |
| 06/13/1990 | DE3940215A1 Kathoden- und heizungsbaugruppe fuer elektronenstrahlanalagen Cathode and heater assembly for elektronenstrahlanalagen |
| 06/12/1990 | US4933594 Electron collector for electron tubes |
| 06/12/1990 | US4933553 Focusing apparatus of electron microscope |
| 06/12/1990 | US4933552 For analyzing a sample |
| 06/12/1990 | US4933064 Sputtering cathode based on the magnetron principle |
| 06/12/1990 | US4933063 Sputtering device |
| 06/12/1990 | CA1270133A1 Coarse approach positioning device |
| 06/06/1990 | EP0371894A1 Vapour and ion source |
| 06/06/1990 | EP0371252A1 Process and apparatus for etching substrates with a low-pressure discharge assisted by a magnetic field |
| 06/05/1990 | US4931698 Ion source |
| 06/05/1990 | US4931169 Apparatus for coating a substrate with dielectrics |
| 06/05/1990 | US4931158 Deposition of films onto large area substrates using modified reactive magnetron sputtering |
| 06/05/1990 | US4931135 Etching method and etching apparatus |
| 06/05/1990 | CA1270071A1 Method of operating a three-dimensional ion trap with enhanced sensitivity |
| 06/05/1990 | CA1269950A1 Glow-discharge decomposition apparatus |
| 05/31/1990 | WO1990005991A1 Vibration cancellation system for scanning electron microscopes |
| 05/31/1990 | WO1990005990A1 Large-area uniform electron source |
| 05/31/1990 | WO1990005793A1 Improved magnetron sputtering cathode |
| 05/30/1990 | EP0370276A1 Device for detecting charged secondary particles |
| 05/30/1990 | EP0370196A2 Process for using an electron beam measuring apparatus |
| 05/29/1990 | US4929840 Wafer rotation control for an ion implanter |
| 05/29/1990 | US4929839 Focused ion beam column |
| 05/29/1990 | US4929838 Magnetic object lens for an electron beam exposure apparatus which processes a wafer carried on a continuously moving stage |
| 05/29/1990 | US4929836 Focusing in instruments, such as SEMs and CRTs |
| 05/29/1990 | US4929831 Electron beam apparatus for testing infrared detectors in a cryogenically shielded environment |
| 05/29/1990 | US4929321 Arc evaporation; visual shield to deflect ions |
| 05/29/1990 | US4929041 Cathodoluminescence system for use in a scanning electron microscope including means for controlling optical fiber aperture |
| 05/29/1990 | CA1269719A1 Microwave apparatus for generating plasma afterglows for stripping semiconductor |
| 05/23/1990 | EP0369913A1 Device for the transfer and atmospherically controlled reactions in situ of samples to be examined in transmission electron microscopy |
| 05/23/1990 | EP0368945A1 Viewing optics for external-mount electron beam welders. |
| 05/23/1990 | DE3839153A1 Method of detoxifying process exhaust gases in plasma etching |
| 05/22/1990 | US4928018 Thermo-enhanced electron image projector |
| 05/22/1990 | US4928016 Magazine for accommodating recording medium for electron microscope |
| 05/22/1990 | US4928010 Observing a surface using a charged particle beam |
| 05/22/1990 | US4927785 Controlling reactive ion etching by measurement of reflection of laser beam |
| 05/22/1990 | US4927515 For uniform and radial sputtering |
| 05/22/1990 | US4927513 Sputtering |
| 05/22/1990 | US4927485 Laser interferometer system for monitoring and controlling IC processing |
| 05/22/1990 | US4926791 Microwave plasma apparatus employing helmholtz coils and ioffe bars |
| 05/16/1990 | EP0368579A2 Probe unit, driving method thereof, and scanning device for detecting tunnel current having said probe unit |
| 05/16/1990 | EP0368037A1 Process for controlling the distribution of the evaporation rate of an electron beam |
| 05/15/1990 | US4926439 Process for preventing contamination of high temperature melts |
| 05/15/1990 | US4926055 Field emission electron gun |
| 05/15/1990 | US4926054 Objective lens for focusing charged particles in an electron microscope |
| 05/15/1990 | US4925542 Plasma plating apparatus and method |
| 05/15/1990 | CA1269181A1 Mass spectrometer for positive and negative ions |
| 05/14/1990 | CA2002898A1 Magnetron sputtering cathode |
| 05/14/1990 | CA2002735A1 Vibration cancellation system for scanning electron microscopes |
| 05/10/1990 | DE3929735A1 Finely controlling point of scanning tunnelling microscope - exerting electrostatic forces on metallised oxide diaphragm deflected vertically by tensions in two directions |
| 05/09/1990 | EP0367568A1 Use of plasma in ashing processes |
| 05/09/1990 | EP0367496A2 Charged particle beam lithography system and a method thereof |
| 05/09/1990 | EP0367289A2 Plasma chemical vapor deposition apparatus |
| 05/09/1990 | EP0366851A1 Low-voltage source for narrow electron/ion beams |
| 05/09/1990 | EP0366746A1 A variable temperature scanning tunneling microscope |
| 05/09/1990 | CN1042029A Improved electron detector for use in gaseous environment |
| 05/08/1990 | US4924138 Device comprising a vacuum ion arc source |
| 05/08/1990 | US4924136 Holders located immediately under emitting tip |
| 05/08/1990 | US4924135 Electrode for vapor deposition and vapor-deposition method using same |
| 05/08/1990 | US4924104 Ion beam apparatus and method of modifying substrate |
| 05/08/1990 | US4924101 Charged particle source |
| 05/08/1990 | US4924089 Method and apparatus for the accumulation of ions in a trap of an ion cyclotron resonance spectrometer, by transferring the kinetic energy of the motion parallel to the magnetic field into directions perpendicular to the magnetic field |
| 05/08/1990 | CA1268864A1 End-hall ion source |
| 05/04/1990 | CA2002322A1 Method and apparatus for etching substrates with a magnetic-field supported low-pressure discharge |
| 05/02/1990 | EP0366367A2 Charged particle beam exposure method |
| 05/01/1990 | US4922106 Ion beam scanning method and apparatus |
| 05/01/1990 | US4922098 Electron microscope |
| 05/01/1990 | US4922097 Potential measurement device |
| 05/01/1990 | US4921724 Process for coating a substrate with an organic coating having gradated hardness |
| 05/01/1990 | US4920917 Reactor for depositing a layer on a moving substrate |
| 04/26/1990 | DE3835153A1 Apparatus for etching substrates by a glow discharge |
| 04/25/1990 | EP0365249A2 Method and apparatus for sputtering |
| 04/25/1990 | EP0364929A2 Fabrication method of semiconductor devices and transparent mask for charged particle beam |
| 04/25/1990 | EP0262219B1 Liquid metal ion source and alloy for ion emission of multiple ionic species |
| 04/24/1990 | US4919783 Intereaction of a magnetic field, an electron magnetic wave; a predetermined gas |
| 04/24/1990 | US4919780 Bombarding foils with ions at a narrowly confined area; sputtering |
| 04/24/1990 | US4919745 Apparatus and method for plasma treatment of resin material |
| 04/24/1990 | CA1268214A1 Method and apparatus for analyzing errors in integrated circuits |
| 04/19/1990 | WO1990004261A1 Improved electron detector for use in a gaseous environment |
| 04/18/1990 | EP0364215A2 Plasma etching apparatus |
| 04/17/1990 | US4918358 Apparatus using charged-particle beam |
| 04/17/1990 | US4918318 Electronic optics device with variable illumination and aperture limitation, and application thereof to an electron beam lithographic system |
| 04/17/1990 | US4918316 Method of and apparatus for irradiating large surfaces with ions |
| 04/17/1990 | US4918309 Method for investigating surfaces at nanometer and picosecond resolution and laser-sampled scanning tunneling microscope for performing said method |
| 04/17/1990 | US4918031 Anisotropic plasma etching; low gas pressure |