| Patents for H01J 37 - Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof (46,866) |
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| 08/22/1990 | EP0382803A1 Process and device for supplying processing gas to a reactor located in a zone subjected to intense electric and/or electromagnetic fields. |
| 08/21/1990 | US4950956 Plasma processing apparatus |
| 08/21/1990 | US4950910 For depicting a pattern on a sample |
| 08/21/1990 | US4950909 Sample tilting device in electron microscope |
| 08/21/1990 | US4950901 Specimen cooling holder for side entry transmission electron microscopes |
| 08/21/1990 | US4950498 Process for repairing pattern film |
| 08/21/1990 | US4950377 High ion density, narrow spectrum of energies |
| 08/21/1990 | US4950376 Method of gas reaction process control |
| 08/21/1990 | US4949671 Processing apparatus and method |
| 08/21/1990 | US4949670 Method and apparatus for low pressure plasma |
| 08/21/1990 | CA1272910A1 Arc coating of refractory metal compounds |
| 08/16/1990 | EP0382249A2 Electron beam exposure data processing method, electron beam exposure method and apparatus |
| 08/16/1990 | EP0382065A2 Apparatus for plasma processing |
| 08/16/1990 | EP0381912A1 Method to centre an electron beam |
| 08/16/1990 | DE3904280A1 Sub-picosecond electron-beam blanking system |
| 08/14/1990 | US4948979 Vacuum device for handling workpieces |
| 08/14/1990 | US4948971 Vibration cancellation system for scanning electron microscopes |
| 08/14/1990 | US4948962 Plasma ion source mass spectrometer |
| 08/14/1990 | US4948750 Method and apparatus for producing semiconductor layers composed of amorphous silicon-germanium alloys through glow discharge technique, particularly for solar cells |
| 08/14/1990 | US4948458 Radiofrequency resonant current induced in a planar coil; uniform flux; semiconductor wafer processing |
| 08/14/1990 | US4948259 Method and apparatus for monitoring layer erosion in a dry-etching process |
| 08/09/1990 | WO1990009030A1 A method of producing high-energy electtron curtains with high performance |
| 08/08/1990 | EP0381437A2 Magnetron sputtering apparatus |
| 08/08/1990 | EP0381337A2 Apparatus and method for simultaneously effecting electro-chemical measurement and measurement of tunnelling current and tunnel probe therefor |
| 08/08/1990 | CN1009145B Field-emission scanning auger electron microscope |
| 08/07/1990 | US4947404 Magnet structure for electron-beam heated evaporation source |
| 08/07/1990 | US4947085 Plasma processor |
| 08/07/1990 | US4947042 Tunnel unit and scanning head for scanning tunneling microscope |
| 08/07/1990 | US4947041 Analyzer tube for mass spectrometry |
| 08/07/1990 | US4946706 Method of ion implantation |
| 08/07/1990 | US4946576 Apparatus for the application of thin layers to a substrate |
| 08/07/1990 | US4946537 Plasma reactor |
| 08/02/1990 | DE4000941A1 Magnetron vaporising system - includes magnetic circuit in plasma-producing vaporiser giving more even target consumption in plasma-coating system |
| 08/02/1990 | DE3902348A1 Plate-shaped specimen slide (microscope slide) for microscopy |
| 08/01/1990 | EP0380119A2 Microwave plasma processing apparatus |
| 08/01/1990 | EP0379865A2 Specimen examination method for a corpuscular-beam apparatus |
| 08/01/1990 | EP0379828A2 Radio frequency induction/multipole plasma processing tool |
| 08/01/1990 | EP0379739A2 Device for determining the point of impact on a target of a charged-particles beam |
| 08/01/1990 | EP0379690A1 Multi-pole element |
| 07/31/1990 | US4945247 Field emission electron gun system |
| 07/31/1990 | US4945246 Tri-deflection electron beam system |
| 07/31/1990 | US4945237 Transmission electron microscope |
| 07/31/1990 | US4945235 Fine adjustment mechanism for a scanning tunneling microscope |
| 07/31/1990 | US4944645 Method and apparatus for loading objects into evacuated treating chamber |
| 07/30/1990 | CA2202801A1 Magnetron sputtering apparatus |
| 07/26/1990 | WO1990008397A1 Microminiature cantilever stylus |
| 07/26/1990 | WO1990008312A1 Holding method for specimen of electric insulation |
| 07/25/1990 | EP0379442A2 Deflection compensating device for converging lens |
| 07/25/1990 | EP0379403A1 Electron gun comprising a device producing a magnetic field in the proximity of the cathode |
| 07/25/1990 | EP0378970A2 Cold-cathode, ion-generating and ion-accelerating universal device |
| 07/25/1990 | EP0378793A2 Electron emission cathode, its manufacturing process, electron beam supply with such a cathode and vacuum-processing apparatus |
| 07/25/1990 | EP0378782A2 Ion implantation apparatus for uniformly injecting an ion beam into a substrate |
| 07/24/1990 | USRE33275 Electron Spectrometer |
| 07/24/1990 | US4943730 Charged particle beam lithography method |
| 07/24/1990 | US4943729 Electron beam lithography system |
| 07/24/1990 | US4943728 Beam pattern control system for an ion implanter |
| 07/24/1990 | US4943722 To display two views of a surface for stereoscopic viewing |
| 07/24/1990 | US4943720 Electronic probe |
| 07/24/1990 | US4943719 Microminiature cantilever stylus |
| 07/24/1990 | US4943361 Cyclotronic motion of electrons, semiconductor wafers |
| 07/24/1990 | US4943345 Plasma reactor apparatus and method for treating a substrate |
| 07/24/1990 | CA1271997A1 Electron beam test probe for integrated circuit testing |
| 07/18/1990 | EP0378237A2 Reflection electron holography apparatus |
| 07/18/1990 | EP0378077A2 Ion mass-spectroscopic analysis method and apparatus |
| 07/17/1990 | US4942342 Parallel sweeping system for electrostatic sweeping ion implanter |
| 07/17/1990 | US4942339 Intense steady state electron beam generator |
| 07/17/1990 | US4942304 Ion implantation |
| 07/17/1990 | US4942300 Electron beam image recording using stimulable phosphor sheet of reduced thickness and/or with no protective layer |
| 07/17/1990 | US4942299 Method and apparatus for differential spectroscopic atomic-imaging using scanning tunneling microscopy |
| 07/17/1990 | US4941980 System for measuring a topographical feature on a specimen |
| 07/17/1990 | US4941915 Thin film forming apparatus and ion source utilizing plasma sputtering |
| 07/17/1990 | US4941753 Absorption microscopy and/or spectroscopy with scanning tunneling microscopy control |
| 07/17/1990 | CA1271849A1 Electron beam testing of semiconductor wafers |
| 07/12/1990 | DE3941915A1 Suppressor for electronic equipment electromagnetic interference - uses magnetic material ring located or connecting cable to unit |
| 07/11/1990 | EP0377298A2 Uniform cross section ion beam system |
| 07/11/1990 | EP0377224A2 Method and vacuum chamber for ion implantation |
| 07/11/1990 | CN1043826A Vacuum chamber for ionic implantation |
| 07/10/1990 | US4941068 Portable ion generator |
| 07/10/1990 | US4940893 Method and apparatus for forming coherent clusters |
| 07/10/1990 | US4940015 Microwave decomposition of methane and hydrogen reaction gas |
| 07/04/1990 | EP0376546A2 Processes depending on plasma generation |
| 07/04/1990 | EP0376392A1 Electron beam apparatus with dynamic focussing |
| 07/04/1990 | EP0376286A2 Method and apparatus for fine movement of specimen stage of electron microscope |
| 07/04/1990 | EP0376045A2 Method and apparatus for processing a fine pattern |
| 07/04/1990 | EP0376017A2 Magnetron-cathodic sputtering device with a hollow cathode and a cylindrical target |
| 07/04/1990 | EP0375716A1 Electrode for use in a scanning electron microscope |
| 07/03/1990 | US4939493 Magnetic field generator |
| 07/03/1990 | US4939425 Four-electrode ion source |
| 07/03/1990 | US4939424 Apparatus for producing a plasma and for the treatment of substrates |
| 07/03/1990 | US4939373 Electron image projector |
| 07/03/1990 | US4939371 Charged particle beam device |
| 07/03/1990 | US4939365 Automatic preliminary irradiation apparatus in transmission electron microscope |
| 07/03/1990 | US4939364 Specimen or substrate cutting method using focused charged particle beam and secondary ion spectroscopic analysis method utilizing the cutting method |
| 07/03/1990 | US4939363 Scanning tunneling microscope |
| 07/03/1990 | US4939360 Particle beam irradiating apparatus having charge suppressing device which applies a bias voltage between a change suppressing particle beam source and the specimen |
| 07/03/1990 | US4938859 Ion bombardment device with high frequency |
| 06/28/1990 | EP0322419A4 Point projection photoelectron microscope with hollow needle. |
| 06/27/1990 | EP0375169A1 External resonance circuit type radio frequency quadrupole acceleration |
| 06/26/1990 | US4937531 External ion injection apparatus for a cyclotron |
| 06/26/1990 | US4937458 Electron beam lithography apparatus including a beam blanking device utilizing a reference comparator |