| Patents for H01J 37 - Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof (46,866) |
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| 12/22/1990 | CA2019211A1 Method for the preliminary treatment of transparent plastic substrates intended to be coated in vacuum |
| 12/19/1990 | EP0403418A2 High density plasma deposition and etching apparatus |
| 12/19/1990 | EP0403005A2 Method for producing of oxide materials containing alkaline earth metals and coils produced therewith |
| 12/19/1990 | EP0402867A2 Apparatus for microwave processing in a magnetic field |
| 12/18/1990 | US4978908 Scanning electron microscope based parametric testing method and apparatus |
| 12/18/1990 | US4978856 Automatic focusing apparatus |
| 12/18/1990 | US4978855 Electron microscope for investigation of surfaces of solid bodies |
| 12/18/1990 | US4978556 Electrode for vapor deposition and vapor-deposition method using same |
| 12/13/1990 | DE4011515C1 Coating substrate with metal (alloy) - by magnetic sputtering, with substrate mounted on surface held at negative voltage |
| 12/12/1990 | EP0402282A2 Microwave energy coupling and distribution device in an exciter for plasma production |
| 12/12/1990 | EP0402125A2 Electron beam exposure apparatus |
| 12/12/1990 | EP0401852A2 Surface microscope |
| 12/12/1990 | EP0401658A1 Scanning tunneling microscope with arrangements for detecting electrons coming from the sample |
| 12/12/1990 | EP0401622A1 Target cooling procedure and device for cooling targets |
| 12/12/1990 | CN1047757A Electric discharge element |
| 12/11/1990 | US4977328 Method of detecting a marker provided on a specimen |
| 12/11/1990 | US4977324 Charged particle beam apparatus |
| 12/11/1990 | US4977321 Electron microscope which prevents undesired X-ray exposure |
| 12/11/1990 | US4977307 Apparatus for heating sample within vacuum chamber |
| 12/11/1990 | US4976843 Particle beam shielding |
| 12/06/1990 | DE4020810A1 Scanning electron beam unit - uses P-N cold cathode to generate short duration pulses |
| 12/05/1990 | EP0400926A1 SEM with magnification compensation apparatus |
| 12/05/1990 | EP0400751A1 Electric discharge element |
| 12/05/1990 | EP0400541A1 Atomic probe type microscope apparatus |
| 12/04/1990 | US4975586 Ion implanter end station |
| 12/04/1990 | US4975168 Method of forming transparent conductive film and apparatus for forming the same |
| 12/04/1990 | US4975141 Laser ablation for plasma etching endpoint detection |
| 12/04/1990 | US4974736 Multi-electron-beam pattern drawing apparatus |
| 12/04/1990 | US4974543 Apparatus for amorphous silicon film |
| 11/29/1990 | WO1990014685A1 Fabrication of electronic devices |
| 11/29/1990 | WO1990014683A1 Electron beam machining of materials |
| 11/29/1990 | WO1990014682A1 Magnetic structure for electron-beam heated evaporation source |
| 11/29/1990 | WO1990014228A1 Improved dielectric surface for electrostatic charge target |
| 11/29/1990 | WO1990014202A1 Process for molding target electrode used in the application of electrostatic charge to a fibrous structure |
| 11/29/1990 | DE3917149A1 Charged particles detector coping with high potential - has collector forming electrode of capacitor embedded in central conductor of waveguide |
| 11/29/1990 | DE3844659A1 Micromanipulator |
| 11/28/1990 | EP0399710A1 Sputtering apparatus with a rotating magnet array having a geometry for specified target erosion profile |
| 11/28/1990 | EP0399390A2 Device and process for controlling the focusing of a monopolar charged particle beam |
| 11/28/1990 | EP0399374A1 Ion source method and apparatus |
| 11/28/1990 | EP0398995A1 Plasma x-ray tube, in particular for x-ray preionizing of gas lasers, and use as electron gun. |
| 11/28/1990 | CN1010629B Flat electron control device utilizing uniform space-charge cloud of free electrons as virtual cathode |
| 11/27/1990 | US4973883 Plasma processing apparatus with a lisitano coil |
| 11/27/1990 | US4973849 Electron beam lithography apparatus having external magnetic field correcting device |
| 11/27/1990 | US4973842 Lens system for a photo ion spectrometer |
| 11/27/1990 | US4973818 Device and method for the control and monitoring of an electron beam for metal working |
| 11/27/1990 | US4972799 Microwave plasma chemical vapor deposition apparatus for mass-producing functional deposited films |
| 11/22/1990 | EP0398832A1 Plasma reactor with electromagnetic wave-coupling means |
| 11/22/1990 | EP0398335A2 Converged ion beam apparatus |
| 11/22/1990 | EP0398334A1 Position detecting apparatus |
| 11/22/1990 | EP0398270A2 Ion implantation apparatus |
| 11/22/1990 | EP0398269A2 Ion implantation apparatus |
| 11/22/1990 | EP0398190A2 Ion implantation apparatus and method of controlling the same |
| 11/22/1990 | EP0397799A1 A piezoelectric motion transducer and an integrated scanning tunneling microscope using the same. |
| 11/22/1990 | EP0397660A1 Installation for electron-beam welding of workpieces. |
| 11/21/1990 | CN1010530B Coating method for making emission filament used for ionization in mass spectrum field |
| 11/20/1990 | US4972142 Automatic frequency follow-up in particle beam metrology upon employment of a modulated primary beam |
| 11/20/1990 | US4972083 Post-acceleration detector for mass spectrometer |
| 11/20/1990 | US4971674 Targets, currents, magnets, solenoid coils |
| 11/20/1990 | US4971667 Plasma processing method and apparatus |
| 11/20/1990 | US4971651 Electromagnetic waves, plasma gases |
| 11/15/1990 | WO1990013909A1 Reactive ion etching apparatus |
| 11/15/1990 | WO1990013907A1 Scanning tunnel microscope |
| 11/14/1990 | EP0397416A1 Imaging apparatus and method |
| 11/14/1990 | EP0397315A2 Method and apparatus for heating and cooling semiconductor wafers in semiconductor wafer processing equipment |
| 11/14/1990 | EP0397161A2 Methods for device transplantation |
| 11/14/1990 | EP0397120A2 Ion implantation apparatus capable of avoiding electrification of a substrate |
| 11/14/1990 | EP0397073A2 Circuit pattern forming apparatus using mu-STM |
| 11/14/1990 | EP0397032A2 Method for manufacturing metal cylinder members of electron tubes and method for manufacturing magnetron anodes |
| 11/14/1990 | EP0396919A2 Plasma Reactor and method for semiconductor processing |
| 11/14/1990 | EP0396603A1 Procedure and apparatus for the coating of materials by means of a pulsating plasma beam. |
| 11/14/1990 | EP0396539A1 Method and apparatus for the treatment of surfaces of machine components |
| 11/13/1990 | US4970435 Plasma processing apparatus |
| 11/13/1990 | US4970392 Stably emitting demountable photoelectron generator |
| 11/13/1990 | US4969978 Electrolytic cells |
| 11/13/1990 | CA1276319C Vaporizer system for ion source |
| 11/08/1990 | CA2016002A1 Imaging apparatus and method |
| 11/07/1990 | EP0396398A1 Plasma etching apparatus with surface magnetic fields |
| 11/07/1990 | EP0396099A1 Arrangement for removal of material from a target |
| 11/07/1990 | EP0223823B1 Apparatus for scanning a high current ion beam with a constant angle of incidence |
| 11/06/1990 | US4968918 Apparatus for plasma treatment |
| 11/06/1990 | US4968894 Electrical field enhanced electron image projector |
| 11/06/1990 | US4968893 Scanning electron beam exposure system |
| 11/06/1990 | US4968888 Pulsed field sample neutralization |
| 11/06/1990 | US4968585 Microfabricated cantilever stylus with integrated conical tip |
| 11/06/1990 | US4968374 Plasma etching apparatus with dielectrically isolated electrodes |
| 11/06/1990 | US4968206 Shuttle system for rapidly manipulating a workpiece into and out of an atmospherically controlled chamber for doing work thereon in the chamber |
| 11/05/1990 | CA2015976A1 Plasma etching apparatus with surface magnetic fields |
| 11/01/1990 | WO1990013137A1 Sputtering apparatus |
| 10/31/1990 | EP0395415A2 Apparatus for and method of processing a semiconductor device using microwave-generated plasma |
| 10/31/1990 | EP0394698A2 Electron beam lithography machine and image display apparatus |
| 10/31/1990 | EP0394692A2 Process and apparatus for coating a substrate in a plasma |
| 10/31/1990 | EP0394286A1 Steered arc coating with thick targets |
| 10/31/1990 | EP0211057B1 Sputtering installation for reactive coating of a substrate with hard materials |
| 10/30/1990 | US4967150 Method and apparatus for phase measurement of signals at a measuring point by an unmodulated particle beam |
| 10/30/1990 | US4967088 Method and apparatus for image alignment in ion lithography |
| 10/30/1990 | US4967078 Rutherford backscattering surface analyzer with 180-degree deflecting and focusing permanent magnet |
| 10/30/1990 | US4966787 Method of creating isolated plates on the inside surface of a metallized substrate |
| 10/30/1990 | US4966677 Cathode sputtering apparatus on the magnetron principle with a hollow cathode and a cylindrical target |
| 10/30/1990 | US4966095 Apparatus for forming a thin film |
| 10/30/1990 | CA1275742C Ion beam implanter scan control system |