| Patents for H01J 37 - Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof (46,866) |
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| 04/02/1991 | US5004925 Method and apparatus for detecting alignment mark of semiconductor device |
| 04/02/1991 | US5004919 Transmission electron microscope |
| 04/02/1991 | US5004918 Differential phase contrast scanning transmission electron microscope |
| 04/02/1991 | US5003815 Spectroscopic apparatus |
| 03/27/1991 | EP0419369A1 Optical near-field method for microlithography and microlithography devices using this method |
| 03/27/1991 | EP0419287A2 Method of correcting astigmatism of variable shaped beam |
| 03/27/1991 | EP0418894A2 A scanning electron microscope and a method of displaying cross sectional profiles using the same |
| 03/27/1991 | EP0418438A1 Method and apparatus for the plasma etching, substrate cleaning or deposition of materials by D.C. glow discharge |
| 03/27/1991 | CN1050267A Double tongue scanning tunnel microscope regulating device |
| 03/27/1991 | CA2026175A1 Microwave plasma generating apparatus and process for the preparation of diamond thin film utilizing same |
| 03/26/1991 | US5003183 Ion implantation apparatus and method of controlling the same |
| 03/26/1991 | US5003178 Large-area uniform electron source |
| 03/26/1991 | US5003173 Electron beam apparatus with dynamic focussing |
| 03/26/1991 | US5003172 Examining object |
| 03/26/1991 | US5003152 Microwave transforming method and plasma processing |
| 03/26/1991 | US5003151 Method and control arrangement for the evaporation rate of an electron beam |
| 03/26/1991 | US5002632 Reaction of a metastable with etchant gas in activation zone |
| 03/26/1991 | US5002631 Plasma etching apparatus and method |
| 03/26/1991 | CA1282191C Apparatus for automatically controlling the magnification factor of a scanning electron microscope |
| 03/23/1991 | WO1991004513A1 Method of optical near field microlithography and microlithography devices implementing same |
| 03/23/1991 | CA2066586A1 Method of optical near field microlithography and microlithography devices implementing same |
| 03/21/1991 | WO1991003832A1 Electron microscope with an asymmetrical immersion lens |
| 03/21/1991 | WO1991003733A1 Method and apparatus for imaging dislocations in materials using a scanning electron microscope |
| 03/21/1991 | DE3930400A1 Observing work position of electron beam gun - using mirror inside vacuum which deflects reflected light perpendicular towards microscope |
| 03/20/1991 | EP0417780A2 Method and device for evaporating an arc discharge cathode with cathode spots with reduced macroparticle emission |
| 03/20/1991 | EP0417643A2 Electron beam producing device, particularly for an electron gun |
| 03/20/1991 | EP0417642A2 Device for producing electron beams, particularly for an electron gun |
| 03/20/1991 | EP0417641A2 Device for producing electron beams, particularly for an electron gun |
| 03/20/1991 | EP0417640A2 Cathode support for election beam producing device |
| 03/20/1991 | EP0417639A1 Electron bream producing device for electron gun |
| 03/20/1991 | EP0417638A2 Electron beam producing device, particularly for an electron gun |
| 03/20/1991 | EP0417354A1 Electron beam apparatus with charge-up compensation |
| 03/20/1991 | EP0417340A1 Electron source |
| 03/20/1991 | EP0417221A1 Process for detecting the attainment of a predetermined depth in target body erosion and target body therefor |
| 03/19/1991 | US5001403 Method and apparatus for centering an electron beam |
| 03/19/1991 | US5001385 Electron beam apparatus with adjusting mechanism for a thermally emitting cathod tip |
| 03/19/1991 | US5001350 Electron microscope |
| 03/19/1991 | US5001349 Charged-particle beam apparatus |
| 03/19/1991 | US5001345 Transmission electron microscope |
| 03/19/1991 | US5001344 Scanning electron microscope and method of processing the same |
| 03/19/1991 | US5000834 Facing targets sputtering device |
| 03/14/1991 | DE3930201A1 Current transfer contact for electron gun - has separate relatively movable connecting and contact element components |
| 03/13/1991 | EP0416787A1 Plasma processing of III-V semiconductors, controlled by photoluminescence spectroscopy |
| 03/13/1991 | EP0416549A2 Ion implantation equipment |
| 03/13/1991 | EP0416414A2 Procedure and device for deviating a beam |
| 03/13/1991 | EP0416241A2 Apparatus for coating a substrate |
| 03/13/1991 | CN1049870A Process for continuously forming large area functional deposited film by microwave pcvd method and apparatus suitable for practicing same |
| 03/12/1991 | US4999496 Magnification compensation apparatus |
| 03/12/1991 | US4999494 System for scanning large sample areas with a scanning probe microscope |
| 03/12/1991 | US4999320 Method for suppressing ionization avalanches in a helium wafer cooling assembly |
| 03/12/1991 | US4999096 Method of and apparatus for sputtering |
| 03/12/1991 | US4998968 Plasma CVD apparatus |
| 03/12/1991 | US4998788 Reflection electron holography apparatus |
| 03/12/1991 | US4998503 Apparatus for forming functional deposited film by microwave plasma CVD process |
| 03/12/1991 | CA1281439C Plasma reactor and method for removing photoresist |
| 03/08/1991 | CA2021112A1 Process for preventing contamination for high temperatures melts |
| 03/07/1991 | WO1991003143A1 Special ion emitter tip materials and coatings |
| 03/07/1991 | DE3929774A1 Corpuscular beam optical device - compensates for illumination and imaging errors in irradiation of flat sample slide |
| 03/06/1991 | EP0415764A2 Scanning tunneling microscope memory utilizing optical fluorescence of substrate for reading |
| 03/06/1991 | EP0415227A2 Apparatus and method for inhibiting the generation of excessive radiation |
| 03/06/1991 | EP0415122A2 Method and apparatus for film formation by high pressure microwave plasma chemical vapour deposition |
| 03/06/1991 | EP0414859A1 Improved etch chamber with gas dispersing membrane. |
| 03/06/1991 | EP0216919B1 Method and target for sputter depositing thin films |
| 03/06/1991 | CN1011933B Device and method for treatment of magnetic controlled tube gas discharging |
| 03/05/1991 | US4998020 Electron beam exposure evaluation method |
| 03/05/1991 | US4998016 Probe unit, driving method thereof, and scanning device for detecting tunnel current having said probe unit |
| 03/05/1991 | US4998004 Electron beam gun |
| 03/05/1991 | CA1281082C Apparatus for producing a plasma and for the treatment of substrates therein |
| 03/01/1991 | CA2022407A1 Scanning tunneling microscope memory utilizing optical fluorescence of substrate for reading |
| 02/27/1991 | EP0140979B1 Alloy containing liquid metal ion species |
| 02/27/1991 | CN1049530A Method and apparatus for continuously forming functional deposited films with large area by microwave plasma cvd method |
| 02/27/1991 | CN1011767B Plasma generating device with adjustable cathode |
| 02/26/1991 | US4996441 Lithographic apparatus for structuring a subject |
| 02/26/1991 | US4996434 Electron-beam lithographic apparatus |
| 02/26/1991 | US4996433 Specimen heating holder for electron microscopes |
| 02/26/1991 | US4996077 Electron cyclotron resonance apparatus; multiple energy/ excitation source; intergrated circuits |
| 02/26/1991 | US4995958 Sputtering apparatus with a rotating magnet array having a geometry for specified target erosion profile |
| 02/26/1991 | CA1280630C Stereoscopic optical viewing system |
| 02/21/1991 | WO1991002374A1 Charged particle ray apparatus and method of observing samples |
| 02/20/1991 | EP0413397A1 Electro-mechanical transducer and positioning device comprising such an electro-mechanical transducer |
| 02/20/1991 | EP0413366A2 Ion implantation apparatus |
| 02/20/1991 | EP0413291A2 Method and device for sputtering of films |
| 02/20/1991 | EP0413282A2 Method and apparatus for producing magnetically-coupled planar plasma |
| 02/20/1991 | EP0413239A2 Gas distribution system and method of using said system |
| 02/20/1991 | EP0413042A1 Method of producing micromechanical sensors for the AFM/STM profilometry and micromechanical AFM/STM sensor head |
| 02/20/1991 | EP0413041A1 Method of producing micromechanical sensors for the AFM/STM profilometry and micromechanical AFM/STM sensor head |
| 02/20/1991 | EP0413040A1 Method of producing ultrafine silicon tips for the AFM/STM profilometry |
| 02/19/1991 | US4994674 Ion implantation apparatus capable of avoiding electrification of a substrate |
| 02/19/1991 | US4994336 Method for manufacturing a control plate for a lithographic device |
| 02/19/1991 | US4994164 Metal ion implantation apparatus |
| 02/15/1991 | CA2023092A1 Method and device for sputtering of films |
| 02/13/1991 | EP0412690A2 Device manufacture involving lithographic processing |
| 02/13/1991 | EP0412393A2 Electron-detector diode biassing scheme for improved writing by an electron beam lithography machine |
| 02/12/1991 | US4992744 Radio frequency linear accelerator control system |
| 02/12/1991 | US4992728 Electrical probe incorporating scanning proximity microscope |
| 02/12/1991 | US4992668 Electron beam pattern generator control |
| 02/12/1991 | US4992665 Filamentless magnetron-ion source and a process using it |
| 02/12/1991 | US4992662 Scanning |
| 02/12/1991 | US4992661 Method and apparatus for neutralizing an accumulated charge on a specimen by means of a conductive lattice deposited on the specimen |
| 02/12/1991 | US4992660 Scanning tunneling microscope |