| Patents for H01J 37 - Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof (46,866) |
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| 05/21/1991 | US5016564 Plasma apparatus |
| 05/21/1991 | CA1284375C Electronic mosaic imaging process |
| 05/16/1991 | WO1991006972A1 Method and apparatus relating to ion implantation |
| 05/16/1991 | WO1991006969A1 Metal-ion source and process for the generation of metal ions |
| 05/16/1991 | WO1991006393A1 Device for protection against deposition on cathode of electron beam welding gun and on walls of vacuum chamber |
| 05/15/1991 | EP0427443A2 Process and structure wherein atoms are repositioned on a surface using a scanning tunnelling microscope |
| 05/15/1991 | EP0427326A1 Object holder for supporting an object in a charged particle beam system |
| 05/15/1991 | EP0426861A1 Method of cooling charged particle beam |
| 05/14/1991 | US5015920 Superconducting device for injection of electrons into electron tubes |
| 05/14/1991 | US5015862 Laser modulation of LMI sources |
| 05/14/1991 | US5015330 Film forming method and film forming device |
| 05/14/1991 | US5015323 Multi-tipped field-emission tool for nanostructure fabrication |
| 05/14/1991 | CA1284237C Electron-beam exposure apparatus |
| 05/09/1991 | WO1991007519A1 Method for coating substrates with silicon based compounds |
| 05/08/1991 | EP0426493A2 Dry etching apparatus |
| 05/08/1991 | EP0425528A1 A real-time signal processing circuit |
| 05/08/1991 | EP0425489A1 Method and apparatus for forming coherent clusters |
| 05/07/1991 | US5013969 Protective device for neutron tubes |
| 05/07/1991 | US5013915 Transmission type electron microscope |
| 05/07/1991 | US5013914 Method and apparatus for generating electron channeling patterns |
| 05/07/1991 | US5013913 Method of illuminating an object in a transmission electron microscope |
| 05/07/1991 | US5013673 Implantation method for uniform trench sidewall doping by scanning velocity correction |
| 05/07/1991 | US5013579 Microwave enhanced CVD method for coating mechanical parts for improved wear resistance |
| 05/07/1991 | US5013419 Flat cathode with fins, sputtering |
| 05/07/1991 | US5013401 Microwave plasma etching method and apparatus |
| 05/07/1991 | US5013385 Quad processor |
| 05/07/1991 | US5013384 Vacuum system |
| 05/07/1991 | US5013274 Process for restoring locally damaged parts, particularly anticathodes |
| 05/02/1991 | WO1991006199A1 Improved resonant radio frequency wave coupler apparatus using higher modes |
| 05/02/1991 | EP0425419A2 Methods and apparatus for contamination control in plasma processing |
| 05/02/1991 | EP0425204A2 Secondary ion mass analyzing apparatus |
| 05/02/1991 | EP0424925A2 Method of removing electric charge accumulated on a semiconductor substrate in ion implantation |
| 04/30/1991 | US5012158 Plasma CVD apparatus |
| 04/30/1991 | US5012109 Charged particle beam apparatus |
| 04/30/1991 | US5012105 Multiple-imaging charged particle-beam exposure system |
| 04/30/1991 | US5012104 For a beam column of a lithography machine |
| 04/30/1991 | US5012092 Method and apparatus for fine movement of specimen stage of electron microscope |
| 04/30/1991 | US5012064 Electron beam evaporation source |
| 04/30/1991 | US5011705 Plasma processing method |
| 04/25/1991 | DE3935408A1 Metallionenquelle Metal ion source |
| 04/24/1991 | EP0424256A1 Device for chemical treatment assisted by a diffusion plasma |
| 04/24/1991 | EP0423877A1 Vacuum system comprising an evacuatable housing, an object holder and an object carrier which is detachably coupled thereto |
| 04/24/1991 | CA2024637A1 Methods and apparatus for contamination control in plasma processing |
| 04/23/1991 | US5010276 Microwave plasma CVD apparatus with plasma generating chamber constituting a cylindrical cavity resonator |
| 04/23/1991 | US5010253 Detection system for cathodoluminescence analysis |
| 04/23/1991 | US5010250 System for surface temperature measurement with picosecond time resolution |
| 04/23/1991 | US5010229 Apparatus for electron beam welding of workpieces |
| 04/23/1991 | US5009765 Welding to backing |
| 04/23/1991 | US5009764 Apparatus for removal of electrical shorts in a sputtering system |
| 04/23/1991 | US5009743 Chemically-assisted ion beam milling system for the preparation of transmission electron microscope specimens |
| 04/23/1991 | US5009738 Apparatus for plasma etching |
| 04/23/1991 | CA1283381C Hollow cathode enhanced plasma for high rate reactive ion etching and deposition |
| 04/23/1991 | CA1283369C Vacuum treating method and apparatus |
| 04/20/1991 | CA2027883A1 Diffusion-plasma-assisted chemical treatment apparatus |
| 04/18/1991 | WO1991005450A1 Device for electrically exciting a gas with microwaves |
| 04/18/1991 | WO1991005367A1 Improved endpoint detection system and method for plasma etching |
| 04/18/1991 | WO1991005073A1 Thin film fabrication method and device |
| 04/18/1991 | WO1991004827A1 A magnetic plasma producing device with adjustable resonance plane |
| 04/18/1991 | DE3933619A1 Vorrichtung zur elektrischen anregung eines gases mit mikrowellen Device for electrical excitation of gases with microwave |
| 04/17/1991 | EP0422655A2 Charged-particle beam apparatus |
| 04/17/1991 | EP0422430A2 Coupling structure between microwaves and plasma |
| 04/17/1991 | EP0422414A1 Utilization of a deflection system located in the intermediate focusing region of two lenses |
| 04/17/1991 | EP0422395A2 Apparatus for and method of characterizing photolithography systems |
| 04/17/1991 | EP0422099A1 Modular sputtering apparatus |
| 04/17/1991 | CN1012403B Description ion beam implanter scan control system |
| 04/17/1991 | CN1012402B Secondary electron detector for use in gaseous atmosphere |
| 04/16/1991 | US5008897 Water cooled crucible |
| 04/16/1991 | US5008830 Method of preparing drawing data for charged beam exposure system |
| 04/16/1991 | US5008585 Vacuum arc sources of ions |
| 04/16/1991 | US5008553 Electron beam lithography method and apparatus |
| 04/16/1991 | US5008549 High performance, vacuum compatible electromagnetic lens coil |
| 04/16/1991 | US5008537 Composite apparatus with secondary ion mass spectrometry instrument and scanning electron microscope |
| 04/16/1991 | US5008536 Electron microscope having electrical and mechanical position controls for specimen and positioning method |
| 04/16/1991 | US5007981 Method of removing residual corrosive compounds by plasma etching followed by washing |
| 04/11/1991 | DE3932344A1 On=line evaluation of cathode erosion in electron beam welding - comprising circuit and computing to monitor cathode heater voltage accelerator voltage and beam current for timely cathode change |
| 04/10/1991 | EP0421728A2 Apparatus and method relating to ion implantation and heat transfer |
| 04/10/1991 | EP0421695A2 Electron beam exposuring device and exposuring method using the same |
| 04/10/1991 | EP0421686A2 Electrode plate for plasma etching |
| 04/10/1991 | EP0421430A2 A plasma process, method and apparatus |
| 04/10/1991 | EP0421355A2 Scanning tunneling microscope |
| 04/10/1991 | EP0421354A2 Scanning tunneling microscope |
| 04/10/1991 | EP0421348A1 Film forming apparatus |
| 04/10/1991 | EP0366746A4 A variable temperature scanning tunneling microscope |
| 04/10/1991 | EP0228394B1 An apparatus for coating substrates by plasma discharge |
| 04/09/1991 | US5006795 Charged beam radiation apparatus |
| 04/09/1991 | US5006760 Capacitive feed for plasma reactor |
| 04/09/1991 | US5006707 Electron microscope image recording and read-out method |
| 04/09/1991 | US5006220 Electrode for use in the treatment of an object in a plasma |
| 04/09/1991 | US5006219 Microwave cathode sputtering arrangement |
| 04/09/1991 | US5006218 Sputtering apparatus |
| 04/09/1991 | US5006192 Apparatus for producing semiconductor devices |
| 04/09/1991 | CA1282840C Shared current loop, multiple field apparatus and process for plasma processing |
| 04/04/1991 | WO1991004569A1 Disk scanning apparatus for batch ion implanters |
| 04/04/1991 | DE3931970A1 Sector field deflection system for LV electron microscope - has several magnet sectors with uniformly excited outer pole shoe, enclosing several, identical excited inner pole shoes |
| 04/03/1991 | EP0420117A2 Microwave plasma generating apparatus and process for the preparation of diamond thin film utilizing same |
| 04/03/1991 | EP0419930A2 Particulate contamination prevention scheme |
| 04/03/1991 | EP0419461A1 Wafer handling system with bernoulli pick-up |
| 04/02/1991 | US5005138 Electron beam direct printing apparatus |
| 04/02/1991 | US5004927 Process for forming a fine pattern having a high aspect ratio |
| 04/02/1991 | US5004926 Device for the irradiation of a product on both faces |