Patents
Sitemap › H01 - Basic electric elements › H01J - Electric discharge tubes or discharge lamps › H01J 37 - Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
Patents for H01J 37 - Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof (46,866)
12/2013
12/18/2013CN103456589A Diaphragm for adjusting particle beam with multipole lenses and device including same
12/18/2013CN103456588A Improved ion beam processing and imaging using a plasma ion source
12/18/2013CN102315085B Uniform ring inclination warning device for reaction cavity of plasma body etching machine
12/17/2013US8610096 Charged particle beam writing apparatus and method
12/17/2013US8610093 Direct write lithography system
12/17/2013US8610090 Ion beam sample preparation thermal management apparatus and methods
12/17/2013US8610083 Systems and methods providing electron beam writing to a medium
12/17/2013US8610061 Scanning electron microscope
12/17/2013US8610060 Charged particle beam device
12/17/2013US8610059 Method and system for non-destructive distribution profiling of an element in a film
12/17/2013US8608918 Magnet structure and cathode electrode unit for magnetron sputtering, and magnetron sputtering system
12/17/2013US8608901 Process chamber cleaning method in substrate processing apparatus, substrate processing apparatus, and substrate processing method
12/12/2013WO2013184458A1 Fluid capture of nanoparticles
12/12/2013WO2013184000A1 Plasma jet etching device and method for removing an encapsulation portion of a sample via plasma jet etching
12/12/2013WO2013183573A1 Charged-particle radiation device
12/12/2013WO2013183543A1 Sample holder and method for fixing observation sample
12/12/2013WO2013182372A1 Plasma-assisted chemical gas separation method having increased plasma density and device for implementing the method
12/12/2013WO2013181879A1 Magnetron sputtering system
12/12/2013WO2013155004A3 Advanced debris mitigation of euv light source
12/12/2013WO2013115660A3 Textile product for attenuation of electromagnetic field and the devices for manufacturing the textile product attenuating electromagnetic field
12/12/2013US20130332116 Electron Microscope and Method of Operating the Same
12/12/2013US20130328246 Lamella creation method and device using fixed-angle beam and rotating sample stage
12/12/2013US20130327962 Electron Beam Lithography System and Method For Improving Throughput
12/12/2013US20130327938 Electron Microscope and Method of Adjusting the Same
12/12/2013US20130327937 Method for measuring light intensity distribution
12/12/2013DE112011105007T5 Probenhalter für ein Elektronenmikroskop und Probenuntersuchungsverfahren Sample holder for an electron microscope and sample analysis procedures
12/12/2013DE102012011277A1 Verfahren zur Ausbildung geschlossener flächiger Schichten aus sp2 - hybridisierten Kohlenstoffatomen oder Graphen auf der Oberfläche eines Substrats und mit dem Verfahren beschichtetes Substrat A method of forming closed-area layers of sp2 - hybridized carbon atoms or graphs on the surface of a substrate and the coated substrate process
12/12/2013DE102009015737B4 Magnetron-Beschichtungsmodul sowie Magnetron-Beschichtungsverfahren Magnetron coating module and magnetron coating process
12/12/2013DE102008035163B4 Elektronenmikroskop Electron microscope
12/11/2013EP2672504A2 Combined directional electron detector
12/11/2013EP2672503A2 Method of axial alignment of charged particle beam and charged particle beam system
12/11/2013EP2672502A1 High brightness electron gun with moving condenser lens
12/11/2013EP2672501A1 Focused charged particle column for operation at different beam energies at a target
12/11/2013CN203339107U Arc discharge-plasma combined device used for preparing nanometer silicon powder
12/11/2013CN203339106U A bottom-mounted optical fiber coupling transmission electron microscope digital imaging device
12/11/2013CN102394210B Device and method used for preparing transparent conducting film of thin film solar cell
12/11/2013CN102315058B Transmission electron microscope microgrid and preparation method thereof
12/11/2013CN102124538B System and method of controlling broad beam uniformity
12/10/2013US8604445 Method of evacuating sample holder, pumping system, and electron microscope
12/10/2013US8604432 Defect inspection apparatus and defect inspection method
12/10/2013US8604431 Pattern-height measuring apparatus and pattern-height measuring method
12/10/2013US8604430 Method and an apparatus of an inspection system using an electron beam
12/10/2013US8604429 Electron beam device and sample holding device for electron beam device
12/10/2013US8604428 Method of controlling particle absorption on a wafer sample being inspected by a charged particle beam imaging system
12/10/2013US8604427 Three-dimensional mapping using scanning electron microscope images
12/10/2013US8604411 Charged particle beam modulator
12/10/2013US8603931 Method of preparing catalyst for fuel cell
12/05/2013WO2013181093A1 Inert atmospheric pressure pre-chill and post-heat
12/05/2013WO2013180393A1 Scanning electron microscope
12/05/2013WO2013179825A1 Pattern evaluation device and pattern evaluation method
12/05/2013WO2013179808A1 Charged particle device
12/05/2013WO2013178288A1 Method for sputtering for processes with a pre-stabilized plasma
12/05/2013WO2013178252A1 Method for coating a substrate and coater
12/05/2013US20130320854 Inductively coupled plasma flood gun using an immersed low inductance rf coil and multicusp magnetic arrangement
12/05/2013US20130320853 Passive power distribution for multiple electrode inductive plasma source
12/05/2013US20130320230 Multi charged particle beam writing method and multi charged particle beam writing apparatus
12/05/2013US20130320229 Imaging and processing for plasma ion source
12/05/2013US20130320228 Contamination reduction electrode for particle detector
12/05/2013US20130320227 Multipole and charged particle radiation apparatus using the same
12/05/2013US20130320211 Inspection system using scanning electron microscope
12/05/2013US20130320210 Charged Particle Beam System and Method of Axial Alignment of Charged Particle Beam
12/05/2013US20130320209 Ion beam processing apparatus
12/05/2013US20130319849 Preparation of lamellae for tem viewing
12/05/2013US20130319328 Apparatus for preparing, in particular coating, samples
12/05/2013US20130319090 Testing of surface crystalline content in bulk amorphous alloy
12/05/2013DE102013210045A1 Multigeladener Teilchenstrahl-Schreibverfahren und multigeladener Teilchenstrahl-Schreibvorrichtung Multi-Charged particle beam writing method and multi-charged particle beam writing device
12/05/2013DE102012209196A1 Electron beam melting method for vacuum coating system, involves producing beam, concentrating secondary electrons close to vaporization point, and enriching electrons with energy to form plasma extracted by evaporating evaporation material
12/05/2013DE102012010707A1 Verfahren und vorrichtung zum abrastern einer oberfläche einesobjekts mit einem teilchenstrahl Method and apparatus for scanning a surface of an object using a particle beam
12/04/2013EP2669928A1 Method and apparatus for scanning a surface of an object using a particle beam
12/04/2013EP2669927A2 Inspection system for use with scanning electron microscope
12/04/2013EP2669926A2 Method of axial alignment of charged particle beam and charged particle beam system
12/04/2013EP2669925A2 Improved ion beam processing and imaging using a plasma ion source
12/04/2013EP2668488A1 Tem sample preparation
12/04/2013EP2668309A1 Sliding element, in particular piston ring, having a coating and process for producing a sliding element
12/04/2013CN203325834U Support pin and plasma etching apparatus
12/04/2013CN203325833U Ion implanter with dual ion sources
12/04/2013CN103430327A Systems and methods for charging solar cell layers
12/04/2013CN103430275A Enclosure and method for handling electron gun or ion gun
12/04/2013CN103426746A Substrate processing apparatus and substrate processing method
12/04/2013CN103426711A Plasma reactor with tiltable overhead rf inductive source
12/04/2013CN103426710A Plasma etching device with even gas supply function and gas supply device thereof
12/04/2013CN103426709A Angle scanning light emission electron micro-imaging system and method
12/04/2013CN103426708A Electrode of electrostatic lens and method of manufacturing the same
12/04/2013CN103426707A Charged-particle beam lens
12/04/2013CN103426706A Microwave ion source
12/04/2013CN103426705A Filament exchange jig and filament exchange structure
12/04/2013CN103422065A Magnetron sputtering device and magnetron control method
12/03/2013US8598545 Multiple beam charged particle optical system
12/03/2013US8598544 Method of generating a two-level pattern for lithographic processing and pattern generator using the same
12/03/2013US8598527 Scanning transmission electron microscopy
12/03/2013US8598526 Transmission electron microscope
12/03/2013US8598525 Particle beam system
12/03/2013US8598523 Electron beam layer manufacturing using scanning electron monitored closed loop control
12/03/2013US8598485 Stage for working, focused beam working apparatus and focused beam working method
11/2013
11/28/2013WO2013177209A1 Preparation of lamellae for tem viewing
11/28/2013WO2013176867A1 Gallium ion source and materials therefore
11/28/2013WO2013175972A1 Electron microscope and electron detector
11/28/2013WO2013175897A1 Substrate processing apparatus and substrate processing method
11/28/2013WO2012143091A8 Method for supplying sequential power impulses
11/28/2013WO2012139707A8 Carbon spark evaporation
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