| Patents for H01J 37 - Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof (46,866) |
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| 09/10/1991 | US5047394 High Temperature Superconductor Target |
| 09/10/1991 | US5047131 Method for coating substrates with silicon based compounds |
| 09/10/1991 | US5047130 Method and apparatus for magnetron discharge type sputtering |
| 09/10/1991 | US5047115 Inorganic fluorine, oxidizing, and inert gas mixture |
| 09/05/1991 | WO1991013458A1 Charge neutralization apparatus for ion implantation system |
| 09/05/1991 | WO1991013457A1 Apparatus for ion implantation |
| 09/05/1991 | DE4006411A1 Chamber for vacuum deposition - has one-piece profiles with channels for heating medium and process gas |
| 09/04/1991 | EP0444935A2 Ion beam control system |
| 09/04/1991 | EP0444697A2 Atomic probe microscope and cantilever unit for use in the microscope |
| 09/04/1991 | EP0444658A2 Magnetron sputtering apparatus and thin film depositing method |
| 09/04/1991 | EP0444253A2 Apparatus for the deposition of thin layers on a substrate |
| 09/04/1991 | EP0444085A1 Improved electron detector for use in a gaseous environment |
| 09/04/1991 | CN2084232U Large capacity cylindric plate type dry corrosion machine |
| 09/03/1991 | US5046148 Ion implantation apparatus |
| 09/03/1991 | US5046078 Apparatus and method for inhibiting the generation of excessive radiation |
| 09/03/1991 | US5045705 Charged particle beam apparatus with charge-up compensation |
| 09/03/1991 | US5045696 Photoelectron microscope |
| 09/03/1991 | US5045405 Metal layer with fine insoluble inclusion; wear resistance |
| 09/03/1991 | US5045166 Magnetron method and apparatus for producing high density ionic gas discharge |
| 09/03/1991 | US5045149 Method and apparatus for end point detection |
| 09/03/1991 | US5044311 Plasma chemical vapor deposition apparatus |
| 08/29/1991 | CA2037260A1 Magnetron sputtering apparatus and thin film depositing method |
| 08/28/1991 | EP0443565A2 Electron beam exposure apparatus |
| 08/28/1991 | EP0443410A2 Multiple detector system for specimen inspection using high energy backscatter electrons |
| 08/28/1991 | EP0443249A2 Manufacturing adjustment during article fabrication |
| 08/28/1991 | EP0443154A2 Apparatus for and method of surface treatment for microelectronic devices |
| 08/28/1991 | EP0442966A1 Vibration cancellation system for scanning electron microscopes |
| 08/28/1991 | EP0442939A1 Improved magnetron sputtering cathode. |
| 08/27/1991 | US5044006 Microwave frequency modulation of x-ray beam for radio therapy treatment system |
| 08/27/1991 | US5044001 Method and apparatus for investigating materials with X-rays |
| 08/27/1991 | US5043586 Planarized, reusable calibration grids |
| 08/27/1991 | US5043583 Backscattered |
| 08/27/1991 | US5043144 Self-centering vise for holding a sample in a laboratory instrument chamber |
| 08/22/1991 | WO1991012353A1 Device for treating substrates in a gas-based plasma produced by microwaves |
| 08/21/1991 | EP0442630A2 Combined scanning electron and scanning tunnelling microscope apparatus and method |
| 08/21/1991 | EP0442123A1 Method for preparing electronic and electro-optical components and circuits based on conducting polymers |
| 08/21/1991 | EP0368945A4 Viewing optics for external-mount electron beam welders |
| 08/20/1991 | US5041783 Probe unit for an atomic probe microscope |
| 08/20/1991 | US5041732 Charged particle beam generating apparatus |
| 08/20/1991 | US5041731 Deflection compensating device for converging lens |
| 08/20/1991 | US5041725 Secondary ion mass spectrometry apparatus |
| 08/20/1991 | US5041724 Method of operating an electron beam measuring device |
| 08/20/1991 | US5041712 Method for the control of an evaporation process |
| 08/14/1991 | EP0441311A2 Surface microscope apparatus |
| 08/14/1991 | EP0440901A2 Ion beam apparatus as well as a process to perform potential measurements by means of an ion beam |
| 08/14/1991 | DE4003904A1 Vorrichtung zum behandeln von substraten in einem durch mikrowellen erzeugten, gasgestuetzten plasma Device for treatment of substrates in a microwave-generated, plasma gasgestuetzten |
| 08/14/1991 | DE4003670A1 Tomographic measuring device - measures three=dimensional micro-magnetic or microelectronic fields with rotating device |
| 08/13/1991 | US5039913 Method for the cooling of targets as well as cooling device for targets |
| 08/13/1991 | US5039864 Device for replacing electron microscope specimens |
| 08/13/1991 | US5039862 Switched electron beam source employing a common photo-emitter cathode and method of operation |
| 08/13/1991 | US5039548 Plasma chemical vapor reaction method employing cyclotron resonance |
| 08/13/1991 | US5039388 Plasma forming electrode and method of using the same |
| 08/13/1991 | US5039376 Method and apparatus for the plasma etching, substrate cleaning, or deposition of materials by D.C. glow discharge |
| 08/13/1991 | US5038713 Microwave plasma treating apparatus |
| 08/13/1991 | US5038712 Apparatus with layered microwave window used in microwave plasma chemical vapor deposition process |
| 08/08/1991 | WO1991012628A1 Process for controlling an installation for plasma treatment of worpieces |
| 08/08/1991 | WO1991011096A1 Process and device for electron beam treatment of particulates |
| 08/08/1991 | DE4003623A1 Verfahren zur steuerung einer anlage zur plasmabehandlung von werkstuecken A method for controlling a system for the plasma treatment of workpieces |
| 08/08/1991 | DE4003356A1 Three=dimensional micro-magnetic field detection system - has output of scanning electron microscope received by diode array |
| 08/08/1991 | DE4003308A1 Unit for detecting micromagnetic or microelectric fields of object - uses electron microscope in vacuum chamber of which electron beam is led through magnetic field of object being measured |
| 08/08/1991 | DE4003307A1 Detection and measurement system for micro-magnetic fields - has output from scanning electron microscope directed onto photodiode with electrode matrix |
| 08/08/1991 | CA2075299A1 Process for controlling an installation for plasma treatment of workpieces |
| 08/07/1991 | EP0440377A2 Collimated deposition apparatus and method |
| 08/07/1991 | EP0439561A1 Process and device for coating substrates. |
| 08/07/1991 | EP0305411B1 Molecular beam etching system and method |
| 08/07/1991 | EP0292519B1 Process and device for generating material structures of atomic dimensions |
| 08/06/1991 | US5038045 Composite electromagnetic lens with variable focal distance |
| 08/06/1991 | US5038044 Method and device for the deflection of a beam |
| 08/06/1991 | US5038034 Scanning tunneling microscope |
| 08/06/1991 | US5038013 Plasma processing apparatus including an electromagnet with a bird cage core |
| 08/06/1991 | US5037666 High-speed film forming method by microwave plasma chemical vapor deposition (CVD) under high pressure |
| 07/31/1991 | EP0439361A2 Sputtering apparatus with a rotating magnet array having a geometry for specified target erosion profile |
| 07/31/1991 | EP0439360A2 Rotating sputtering apparatus for selected erosion |
| 07/31/1991 | EP0439220A2 Device for the ionization of metals having a high melting point, which may be used on ion implanters of the type using ion sources of Freeman or similar type |
| 07/31/1991 | EP0438627A1 Arc-evaporator with several evaporation crucibles |
| 07/31/1991 | CN1053411A High-efficiency new-type ozone-generating device and manufacturing process thereof |
| 07/30/1991 | US5036252 Radio frequency ion beam source |
| 07/30/1991 | US5036209 Fabrication method for semiconductor devices and transparent mask for charged particle beam |
| 07/30/1991 | US5036205 Apparatus for the transfer and in-situ reactions under a controlled atmosphere, of specimens for transmissive electron microscopy |
| 07/30/1991 | US5036196 Surface microscope |
| 07/30/1991 | CA2035106A1 Collimated deposition apparatus and method |
| 07/25/1991 | WO1991011018A1 Method and device for treating a substrate with a plasma |
| 07/25/1991 | WO1991010534A1 Method of making electrode |
| 07/25/1991 | DE4002049A1 Multifilament electron gun with regulator emitters pattern - giving uniform current density through plane of film stretched across exit window in pref. rectangular frame |
| 07/24/1991 | EP0437628A1 Method and device for reducing the emittance of the electron beam in an electron microscope |
| 07/24/1991 | EP0437443A1 Device for glow potential processing, in particular ionic carburation |
| 07/24/1991 | CN1013294B Heavy-duty sliding surface bearing |
| 07/23/1991 | US5034903 Apparatus and method for measuring the time evolution of carriers propogating within submicron and micron electronic devices |
| 07/23/1991 | US5034612 Ion source method and apparatus |
| 07/23/1991 | US5034590 Electron gun arrangement for use in the electron beam evaporation process |
| 07/23/1991 | US5034086 Vacuum, microwave, magnetic field |
| 07/23/1991 | US5033834 Microscope specimen mount converter |
| 07/23/1991 | CA1286769C Electron gun design |
| 07/17/1991 | EP0436982A2 Scanning tip for a scanning tunnelling apparatus |
| 07/17/1991 | EP0436981A1 Valve device for a particle beam apparatus |
| 07/17/1991 | EP0285630B1 Mass separator for ionized cluster beam |
| 07/16/1991 | US5032725 Focussing an electron beam |
| 07/16/1991 | US5032724 Multichannel charged-particle analyzer |
| 07/16/1991 | US5032246 Sputtering target wrench and sputtering target design |
| 07/16/1991 | US5032205 Plasma etching apparatus with surface magnetic fields |