| Patents for H01J 37 - Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof (46,866) |
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| 11/12/1991 | US5065118 Electronically tuned VHF/UHF matching network |
| 11/12/1991 | US5065034 Charged particle beam apparatus |
| 11/12/1991 | US5065029 Cooled CCD camera for an electron microscope |
| 11/12/1991 | US5065027 Electromagnetic lens |
| 11/12/1991 | US5065020 Energy dispersive X-ray spectrometer |
| 11/12/1991 | US5064522 Feed through for application of hf energy |
| 11/12/1991 | CA1292068C Particle accelerator |
| 11/06/1991 | CN1055998A Method and apparatus for background correction in analysis of specimen surface |
| 11/06/1991 | CN1014590B Controlling form of electron-beam unit |
| 11/05/1991 | US5063330 Plasma reactor |
| 11/05/1991 | US5063296 Electron-optical system for making a pseudoparallel micro electron-beam |
| 11/05/1991 | US5063294 Converged ion beam apparatus |
| 11/05/1991 | US5063293 Positron microscopy |
| 11/05/1991 | US5062758 Shuttle system for rapidly manipulating a workpiece into and out of an atmospherically controlled chamber for doing work thereon in the chamber |
| 10/31/1991 | WO1991017549A1 X-ray imaging system |
| 10/31/1991 | WO1991016723A1 Gaseous radical producing apparatus |
| 10/31/1991 | CA2049946A1 X-ray imaging system |
| 10/30/1991 | EP0454604A2 Laser ablation for plasma etching endpoint detection |
| 10/30/1991 | EP0453780A2 Apparatus for contamination control in processing apparatus containing voltage driven electrode |
| 10/30/1991 | CN1014568B Integrated electronic optical/differential pumping/imaging signal detection system for environmental scanning electron |
| 10/29/1991 | US5061856 Corpuscular beam device |
| 10/29/1991 | US5061851 Inspection method and device for an aperture in a focused ion beam generating apparatus |
| 10/29/1991 | US5061850 High-repetition rate position sensitive atom probe |
| 10/29/1991 | US5061838 Toroidal electron cyclotron resonance reactor |
| 10/29/1991 | US5061360 Apparatus for depositing a thin film of a sputtered material on a member |
| 10/23/1991 | EP0452969A2 Charged particle beam apparatus |
| 10/23/1991 | EP0452930A2 Apparatus for sample ionization and mass spectrometry |
| 10/23/1991 | EP0452851A1 Information recording/reproducing apparatus |
| 10/23/1991 | EP0452825A2 Method and apparatus for background correction in analysis of a specimen surface |
| 10/23/1991 | EP0452745A1 Process for reactive surface treatment |
| 10/22/1991 | US5059859 Charged particle beam generating apparatus of multi-stage acceleration type |
| 10/22/1991 | US5059804 Delta-phi microlens for low-energy particle beams |
| 10/22/1991 | US5059792 Thermal field emission electron gun |
| 10/22/1991 | US5059785 Backscattering spectrometry device for identifying unknown elements present in a workpiece |
| 10/22/1991 | US5059784 Optical mask filter capable of reducing the semiperiodic component of temporal variation in endpoint detection |
| 10/17/1991 | WO1991015871A1 Field emission electron gun and method having complementary passive and active vacuum pumping |
| 10/17/1991 | WO1991015870A1 High performance, vacuum compatible electromagnetic lens coil |
| 10/17/1991 | WO1991015752A1 Scanning tunneling microscope |
| 10/17/1991 | DE4111742A1 Mass-spectrometer measuring ions and neutral particles - uses retractable probe and HF-plasma for neutrals |
| 10/16/1991 | EP0451943A2 Plasma processing method and apparatus |
| 10/16/1991 | EP0451907A1 Method of irradiating an object by means of a charged particle beam, and device for performing the method |
| 10/16/1991 | EP0451642A2 Sputtering system |
| 10/16/1991 | EP0451370A1 Correction system for a charged-particle beam apparatus |
| 10/16/1991 | EP0451247A1 Method and apparatus relating to ion implantation. |
| 10/15/1991 | US5057689 Scanning electron microscope and a method of displaying cross sectional profiles using the same |
| 10/15/1991 | US5057185 Triode plasma reactor with phase modulated plasma control |
| 10/10/1991 | DE4108404A1 Ion beam machining control for lenses - using simulated machining strategy for computer control of aperture system |
| 10/10/1991 | DE4010672A1 Reactive ion etching process - useful for rapid anisotropic etching of masked semiconductor substrates |
| 10/09/1991 | EP0450163A1 Apparatus for coating a substrate with materials, for example with metals |
| 10/09/1991 | EP0450061A1 Improved resonant radio frequency wave coupler apparatus using higher modes. |
| 10/09/1991 | EP0263876A4 Ion beam scanning method and apparatus |
| 10/08/1991 | US5055696 Multilayered device micro etching method and system |
| 10/08/1991 | US5055680 Scanning tunneling microscope |
| 10/03/1991 | WO1991014797A1 Magnetron sputter ion plating |
| 10/02/1991 | EP0449740A1 Charged particle beam focussing device |
| 10/02/1991 | EP0449081A2 Microwave plasma CVD apparatus |
| 10/01/1991 | US5054047 Circuits responsive to and controlling charged particles |
| 10/01/1991 | US5053627 Apparatus for ion implantation |
| 10/01/1991 | US5053244 Reacting a silicon containing gas with oxygen or oxygen containing gas using microwaves to provide a magnetic field |
| 10/01/1991 | US5052339 Radio frequency plasma enhanced chemical vapor deposition process and reactor |
| 10/01/1991 | CA1290080C Method and apparatus for plasma source ion implantation |
| 09/26/1991 | DE4008195A1 Microwave gas exciter for gas discharge path - uses microwave resonator including discharge path and connected to microwave supply line |
| 09/25/1991 | EP0448474A1 Device for homogenizing the ion implantation on the surface of plane substrates |
| 09/25/1991 | EP0448077A2 Microwave plasmatron |
| 09/25/1991 | EP0447764A2 Cathodic sputtering substrate coating device |
| 09/25/1991 | EP0428682A4 Magnetic structure for electron-beam heated evaporation source |
| 09/25/1991 | CN1014082B Glow discharge decomposing device |
| 09/24/1991 | WO1991015027A1 Arc diverter |
| 09/24/1991 | US5051977 Scanning tunneling microscope memory utilizing optical fluorescence of substrate for reading |
| 09/24/1991 | US5051600 Particle beam generator |
| 09/24/1991 | US5051599 Device for recognizing the impact site of a charge carrier beam on a target |
| 09/24/1991 | US5051598 Method for correcting proximity effects in electron beam lithography |
| 09/24/1991 | US5051594 Fine positioning device, as for the stage of a scanning tunneling microscope |
| 09/24/1991 | US5051589 Forming radiation images from x-rays signals |
| 09/24/1991 | US5051585 Apparatus and method of pattern detection based on a scanning transmission electron microscope |
| 09/24/1991 | US5051556 Charged particle beam lithography system and a method thereof |
| 09/24/1991 | US5051379 Coating an inorganic material on a wafer, masking for a beam pattern photoresists |
| 09/18/1991 | EP0447241A2 Electron beam exposure system having an improved data transfer efficiency |
| 09/18/1991 | EP0446742A2 Method and apparatus for manufacturing welded electrically-conductive microstructures on probe heads and use thereof |
| 09/17/1991 | US5049843 Strip-line for propagating microwave energy |
| 09/17/1991 | US5049784 Electron generating apparatus |
| 09/17/1991 | US5049755 Method and apparatus for the treatment of surfaces of machine components |
| 09/17/1991 | US5049753 Optically powered charged particle accelerator |
| 09/17/1991 | US5049745 Phase-compensating vibration cancellation system for scanning electron microscopes |
| 09/17/1991 | US5049523 Method of forming semiconducting materials and barriers |
| 09/17/1991 | US5049461 Scanning tunneling microscope |
| 09/17/1991 | US5049460 Semiconductor membrane containing recesses |
| 09/17/1991 | CA1289270C Plasma amplified photoelectron process endpoint detection apparatus |
| 09/12/1991 | DE4042337C1 Controlling degree of ionisation of vapour for surface coating - by preventing straight line current flow between hot anode target surface and cold cathode by using movable wall between them |
| 09/12/1991 | DE4007123A1 Plasma treatment appts. - has working vessel with vacuum sealed vessel with evacuation of the intermediate zone |
| 09/11/1991 | EP0445981A2 Plasma etching apparatus and method |
| 09/11/1991 | EP0445964A2 Apparatus and methods relating to scanning ion beams |
| 09/11/1991 | EP0445903A2 Holographic low energy electron diffraction |
| 09/11/1991 | EP0445711A2 Process for the manufacture of straw tube drift chambers |
| 09/10/1991 | US5047649 Method and apparatus for writing or etching narrow linewidth patterns on insulating materials |
| 09/10/1991 | US5047648 Method and apparatus for detecting particles in ion implantation machines |
| 09/10/1991 | US5047647 Electron beam lithography apparatus |
| 09/10/1991 | US5047646 Method of correcting astigmatism of variable shaped beam |
| 09/10/1991 | US5047637 Atomic probe type microscope apparatus |
| 09/10/1991 | US5047633 Imaging apparatus and method |