| Patents for H01J 37 - Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof (46,866) |
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| 04/28/1992 | CA1299773C Plasma processing method and apparatus |
| 04/27/1992 | CA2054238A1 Large surface cathode arrangement of uniform consumption |
| 04/23/1992 | DE4032918A1 Verfahren und vorrichtung zur abschirmung eines elektronenstrahles Method and device for shielding an electron beam |
| 04/22/1992 | EP0481416A1 Cathodic sputtering coating machine |
| 04/22/1992 | EP0481198A2 Scanned electron cyclotron resonance plasma source |
| 04/21/1992 | US5107170 Ion source having auxillary ion chamber |
| 04/21/1992 | US5107124 Apparatus for modulating a particle beam intensity |
| 04/21/1992 | US5107114 Fine scanning mechanism for atomic force microscope |
| 04/21/1992 | US5107113 Method and apparatus for correcting distortions in scanning tunneling microscope images |
| 04/21/1992 | US5107112 Scanning tunnel-current-detecting device and method for detecting tunnel current and scanning tunnelling microscope and recording/reproducing device using thereof |
| 04/21/1992 | US5107111 Spherical electrode type charged particle analyzer |
| 04/21/1992 | US5106821 Process for forming thin oxide film |
| 04/21/1992 | US5106474 Anode structures for magnetron sputtering apparatus |
| 04/21/1992 | US5106470 Alternating direction of electric current in outer peripheral coil moves magnetic field and widens target area sputtered |
| 04/21/1992 | US5105761 Diffusion plasma-assisted chemical treatment apparatus |
| 04/16/1992 | WO1992006486A1 Apparatus for and method of producing ion beams |
| 04/16/1992 | WO1992005891A1 Surface structure of a roller and process and device for producing it |
| 04/16/1992 | WO1992005890A1 Surface structure of a roller and process and device for producing it |
| 04/16/1992 | WO1992003841A3 Device for evaporating material by means of a vacuum arc discharge and process |
| 04/16/1992 | DE4130895A1 Electron beam lithographic system - performs correction process to eliminate proximity effect distortion |
| 04/16/1992 | DE4127260C1 Magnetron sputter source |
| 04/15/1992 | EP0480732A2 Electron beam permeable window |
| 04/15/1992 | EP0480689A2 Ion implantation and surface processing method and apparatus |
| 04/15/1992 | EP0480688A2 Plasma source arrangement for ion implantation |
| 04/15/1992 | EP0480645A1 Cantilever type probe, scanning tunnel microscope and information processing apparatus using the same |
| 04/15/1992 | EP0480518A1 Electron source providing a particle retention device |
| 04/15/1992 | EP0480424A2 Scanning electron microscope and method for production of semiconductor device by using the same |
| 04/15/1992 | EP0480273A1 Microwave Radiator |
| 04/15/1992 | EP0480183A2 Method and apparatus for writing or etching narrow linewidth patterns on insulating materials |
| 04/15/1992 | EP0479968A1 X-ray imaging system. |
| 04/14/1992 | US5105089 Electron beam exposure system |
| 04/14/1992 | US5103766 Vacuum arc vapor deposition device having electrode switching means |
| 04/09/1992 | DE4133030A1 Microwave plasma treatment appts. for semiconductor - useful for thin film and etching in electronics, comprises chamber partition of microwave transparent material |
| 04/09/1992 | DE4132730A1 Producing microstructure in material - by placing material on magnetically held holder opposite an electrode in vacuum, admitting reactive gas and exposing material to plasma |
| 04/09/1992 | DE4109213C1 Arc-source for vacuum coating system - comprises cathode housing with double walled shell, and thin base, target, cooling water supply, drain, etc. |
| 04/09/1992 | DE4031770A1 Dust prevention appts. for CVD chamber - has process gas feed and suction openings near plasma forming electrode |
| 04/08/1992 | EP0479189A1 Magnetron plasma processing apparatus |
| 04/08/1992 | EP0478984A1 Plasma enhanced chemical vapor processing system using hollow cathode effect |
| 04/08/1992 | EP0478909A1 Process and apparatus for obtaining a diamondlayer |
| 04/07/1992 | US5103161 Stripline fast faraday cup for measuring GHz structure of ion beams |
| 04/07/1992 | US5103102 Localized vacuum apparatus and method |
| 04/07/1992 | US5103101 Multiphase printing for E-beam lithography |
| 04/07/1992 | US5102523 Arrangement for the production of a plasma |
| 04/07/1992 | US5102496 Exciting plasma with electrical power to generate an electric field in a plasma sheath just above the wafer to repel charged particles away from wafers |
| 04/07/1992 | US5102495 Method providing multiple-processing of substrates |
| 04/02/1992 | WO1992005867A1 Device for generating microwave plasma and method of making diamond film utilizing said device |
| 04/02/1992 | WO1992005574A1 Transmission electron microscope |
| 04/02/1992 | DE4107605C1 Sensor for atomic force raster microscope - has opto-electronic distance measurer for ascertaining movement of probe tip at distal end of extendable arm |
| 04/02/1992 | DE4102984A1 Oberflaechenstruktur einer walze sowie verfahren und vorrichtung zur erzeugung der oberflaechenstruktur Superficies of a roller and method and apparatus for the production of superficies |
| 04/02/1992 | DE4102983A1 Oberflaechenstruktur einer walze sowie verfahren und vorrichtung zur erzeugung der oberflaechenstruktur Superficies of a roller and method and apparatus for the production of superficies |
| 04/02/1992 | DE4031048A1 Position correction system for electron beam lithography device - using deflection signals corrected for system transmission function |
| 04/02/1992 | DE4030242A1 Vacuum electron microscope or ion beam probe - has particle beam section and external section formed integrally to provide large vacuum space |
| 04/02/1992 | CA2069942A1 Microwave plasma generating apparatus and process for preparing diamond layer by utilizing same |
| 04/01/1992 | EP0478283A2 Microwave plasma processing method and apparatus |
| 04/01/1992 | EP0478215A2 Reflection mask and electrically charged beam exposing apparatus using the reflection mask |
| 04/01/1992 | EP0477992A2 Focused ion beam etching apparatus |
| 04/01/1992 | EP0477906A2 Plasma processing apparatus using plasma produced by microwaves |
| 04/01/1992 | EP0477524A2 Method of image restoration |
| 03/31/1992 | US5101301 High-accuracy traveling table apparatus |
| 03/31/1992 | US5101110 Ion generator |
| 03/31/1992 | US5100527 Rotating magnetron incorporating a removable cathode |
| 03/31/1992 | US5100495 Dry etching apparatus with diluted anhydrous hydrogen fluoride gas generator |
| 03/31/1992 | US5099790 Microwave plasma chemical vapor deposition apparatus |
| 03/25/1992 | EP0476900A1 Microwave-powered plasma-generating apparatus and method |
| 03/25/1992 | EP0476652A2 Method for depositing thin film on substrate by sputtering process |
| 03/25/1992 | EP0476572A2 Tantalum carbide composite materials |
| 03/25/1992 | EP0476479A2 Method of producing microscopic structure |
| 03/24/1992 | US5099133 Charged particle beam exposure method and apparatus |
| 03/24/1992 | US5099130 Apparatus and methods relating to scanning ion beams |
| 03/24/1992 | US5099117 Scanning tunnel microscope capable of detecting electrons emanating from a specimen |
| 03/24/1992 | US5099100 Plasma etching device and process |
| 03/19/1992 | WO1992004291A1 Method of endpoint detection and structure therefor |
| 03/18/1992 | EP0475564A1 Fine scanning mechanism for atomic force microscope |
| 03/18/1992 | EP0475559A2 Cantilever for use in atomic force microscope and manufacture method therefor |
| 03/18/1992 | EP0475199A2 A fast atom beam source |
| 03/18/1992 | EP0475033A2 Method for correcting proximity effects in electron beam lithography |
| 03/17/1992 | US5097430 Method and apparatus for displaying process end point signal based on emission concentration within a processing chamber |
| 03/17/1992 | US5097178 RF electron gun with cathode activating device |
| 03/17/1992 | US5097138 Electron beam lithography system and method |
| 03/17/1992 | US5097134 Observing moist specimens |
| 03/17/1992 | US5097127 Multiple detector system for specimen inspection using high energy backscatter electrons |
| 03/17/1992 | US5097126 High resolution electron energy loss spectrometer |
| 03/17/1992 | US5096562 Rotating cylindrical magnetron structure for large area coating |
| 03/17/1992 | US5096558 Method and apparatus for evaporating material in vacuum |
| 03/17/1992 | US5096536 Cooling substrates, substrate-supporting electrode, seals, hea t transfer gas, partial vacuum |
| 03/17/1992 | US5096449 Method for manufacturing metal cylinder members of electron tubes and method for manufacturing magnetron anodes |
| 03/11/1992 | EP0474604A2 Apparatus for thermal plasma processing of workpiece surfaces |
| 03/11/1992 | EP0474584A2 Capacitively coupled radiofrequency plasma source |
| 03/11/1992 | EP0474348A2 Sputtering apparatus and method for producing thin films of material |
| 03/11/1992 | EP0474244A2 Plasma processing method |
| 03/11/1992 | EP0474223A2 Scanning electron microscope |
| 03/11/1992 | EP0474108A1 Ion implantation apparatus and method of cleaning the same |
| 03/11/1992 | EP0473574A1 Process for molding target electrode used in the application of electrostatic charge to a fibrous structure. |
| 03/11/1992 | EP0397660B1 Installation for electron-beam welding of workpieces |
| 03/10/1992 | US5095241 Cooling structure for cathode in electron beam generator |
| 03/10/1992 | US5095208 Charged particle generating device and focusing lens therefor |
| 03/10/1992 | US5095207 Method of three-dimensional atomic imaging |
| 03/10/1992 | US5094879 Oxidation |
| 03/05/1992 | WO1992003841A2 Device for evaporating material by means of a vacuum arc discharge and process |
| 03/05/1992 | WO1992003840A1 Phase-compensating vibration cancellation system for scanning electron microscopes |