| Patents for H01J 37 - Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof (46,866) |
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| 09/22/1992 | US5149975 Pattern fabrication method using a charged particle beam and apparatus for realizing same |
| 09/22/1992 | US5149974 Gas delivery for ion beam deposition and etching |
| 09/22/1992 | US5149973 Apparatus for wiring semiconductor device using energy beam and wiring method by using the same |
| 09/22/1992 | US5149968 Scanning electron microscope |
| 09/22/1992 | US5149967 Specimen stage mounted inside an objective lens |
| 09/22/1992 | US5149934 High voltage electron beam gun |
| 09/22/1992 | US5149932 Arc/gas electrode |
| 09/22/1992 | US5149415 Film forming apparatus |
| 09/17/1992 | WO1992015952A1 Automatic impedance matching apparatus and method |
| 09/17/1992 | WO1992015722A1 Interfacial plasma bars for photovoltaic deposition apparatus |
| 09/16/1992 | EP0503787A1 Ion beam implantation method and apparatus for particulate control |
| 09/16/1992 | EP0503138A1 Device for actuating a magnet arrangement of a planar magnetron for a sputtering facility |
| 09/16/1992 | EP0503082A1 Device for generating microwave plasma and method of making diamond film utilizing said device |
| 09/16/1992 | CN1018308B Improved electron detector for use in gaseous environment |
| 09/15/1992 | US5148036 Multi-axis wafer position detecting system using a mark having optical power |
| 09/15/1992 | US5148034 Ion implantation method |
| 09/15/1992 | US5148033 Electron beam exposure device and exposure method using the same |
| 09/15/1992 | US5148027 Method of microarea analysis with a focused cesium ion beam |
| 09/15/1992 | US5148026 Scanning probe microscopy |
| 09/15/1992 | US5148025 In situ composition analysis during growth vapor deposition |
| 09/15/1992 | US5148024 Ion beam processing apparatus and gas gun therefor |
| 09/15/1992 | US5147521 Quick change sputter target assembly |
| 09/15/1992 | US5147520 For uniform rate plasma processing of semiconductor substrates |
| 09/15/1992 | US5147497 Vacuum chamer having a supporting table which generates plasma, a temperature detecting means, a metal container in a direct current floating state, filter for removing high frequency component of signal and a temperature measuring mean |
| 09/15/1992 | US5147493 Plasma generating apparatus |
| 09/15/1992 | US5147465 Method of cleaning a surface |
| 09/10/1992 | DE4107711A1 Material doping by magnetron sputtering - using separate plasmas for different target portions |
| 09/10/1992 | DE4106771A1 Flat glass coating - has gap between target and cathode in vapour deposition appts. to prevent pimple formation on the deposited layer |
| 09/09/1992 | EP0502429A2 Fast atom beam source |
| 09/09/1992 | EP0502412A1 Processing system |
| 09/09/1992 | EP0502401A2 Low aberration field emission electron gun |
| 09/09/1992 | EP0502269A1 Method of and system for microwave plasma treatments |
| 09/09/1992 | EP0502242A2 Process and apparatus for reactive coating of a substrate |
| 09/08/1992 | US5146138 Plasma processor |
| 09/08/1992 | US5146137 Device for the generation of a plasma |
| 09/08/1992 | US5146098 Ion beam contamination sensor |
| 09/08/1992 | US5146090 Particle beam apparatus having an immersion lens arranged in an intermediate image of the beam |
| 09/08/1992 | US5146089 Ion beam device and method for carrying out potential measurements by means of an ion beam |
| 09/08/1992 | US5145551 High accuracy, high flexibility energy beam machining system |
| 09/03/1992 | WO1992014861A1 Microwave plasma cvd device, and method for synthesizing diamond by device thereof |
| 09/02/1992 | EP0501638A1 Reduced path ion beam implanter |
| 09/02/1992 | EP0501584A1 Cathode ray tube comprising an electron gun having a plane-parallel optical system |
| 09/02/1992 | EP0501466A1 Low pressure plasma generator |
| 09/02/1992 | EP0501257A2 Ion scattering spectrometer |
| 09/02/1992 | EP0500980A1 Cantilevered microtip |
| 09/02/1992 | CN1018110B Scanning electron microscope for visualization of wet samples |
| 09/01/1992 | US5144196 Particle source, especially for reactive ionic etching and plasma-supported CVD processes |
| 09/01/1992 | US5144148 Process for repositioning atoms on a surface using a scanning tunneling microscope |
| 09/01/1992 | US5144147 Ion implantation apparatus and method of cleaning the same |
| 09/01/1992 | US5144143 Device for the ionization of metals having a high melting point, which may be used on ion implanters of the type using ion sources of freeman or similar type |
| 09/01/1992 | US5144142 Blanking aperture array, method for producing blanking aperture array, charged particle beam exposure apparatus and charged particle beam exposure method |
| 09/01/1992 | US5144129 Method of focusing adjustment |
| 09/01/1992 | US5144128 Surface microscope and surface microscopy |
| 09/01/1992 | US5143590 A backing, positioning and machining the interior walls |
| 09/01/1992 | CA1307057C Electron beam testing of electronic components |
| 09/01/1992 | CA1306972C Electric arc vapor deposition method and apparatus |
| 08/26/1992 | EP0500179A1 Charged particle beam device |
| 08/26/1992 | EP0500031A1 Method of manufacturing a sputtering target |
| 08/25/1992 | US5142198 Microwave reactive gas discharge device |
| 08/25/1992 | US5142154 Charged-particle beam lithography and cassette for material patterned by charged-particle beam lithographic apparatus |
| 08/25/1992 | US5142149 Electron microscope |
| 08/25/1992 | US5142148 Field emission scanning electron microscope and method of controlling beam aperture angle |
| 08/25/1992 | US5142147 Image processing device for an electron microscope |
| 08/25/1992 | US5142145 Composite scanning tunneling microscope |
| 08/25/1992 | US5141830 Writing patterns |
| 08/25/1992 | US5141319 Displacement detection device with adjacent semiconductor diode lasers |
| 08/20/1992 | WO1992014258A1 High density plasma deposition and etching apparatus |
| 08/20/1992 | WO1992014162A1 Method and device for contactless measurement of the voltage in an object with an insulating surface |
| 08/20/1992 | DE4105121A1 Electro microlithographic system for depicting linear object - allows variation of scale of miniaturised image and rotation with respect to axis |
| 08/20/1992 | DE4105014A1 Vapour deposition - has closed tunnels of magnetic field lines over molten material in crucible with electron beam guns for ionisation |
| 08/20/1992 | DE4104845A1 Electron beam generator esp. for electron gun - with beam shaping providing good focussing at high beam power |
| 08/19/1992 | EP0499490A2 Scanning reflection electron diffraction microscope |
| 08/19/1992 | EP0499357A2 Ion beam potential detection probe |
| 08/19/1992 | EP0487656A4 Charge neutralization apparatus for ion implantation system |
| 08/19/1992 | CN1017949B Ion implantation surface charge control method and apparatus |
| 08/18/1992 | US5140164 Ic modification with focused ion beam system |
| 08/18/1992 | US5139633 Film-forming on substrate by sputtering |
| 08/18/1992 | US5139383 Device for positioning objects within a sealed chamber |
| 08/18/1992 | CA1306514C Process and device for igniting an arc with a conducting plasma channel |
| 08/13/1992 | DE4203410A1 Lithography device for wafer structuring - has wafer support table, SXM base with reference structure, and jibs, each with STM sensor |
| 08/13/1992 | DE4104061A1 Circuit arrangement for heating and feeding cathode - feeds high AC or DC as supply voltage and AC as heating voltage to cathode in vacuum vessel, with two heating vessels incorporated with HV cables |
| 08/11/1992 | US5138271 Method for cooling a charged particle beam |
| 08/11/1992 | US5138232 Power supply device for thermionic emitting cathode |
| 08/11/1992 | US5138173 Charge detector for semiconductor substrates |
| 08/11/1992 | US5138169 Method and apparatus for irradiating low-energy electrons |
| 08/11/1992 | US5138159 Scanning tunneling microscope |
| 08/11/1992 | US5137701 Apparatus and method for eliminating unwanted materials from a gas flow line |
| 08/11/1992 | US5137610 Rotatably mounted cathode nested in Teflon spacers; quartz plate covering prevents sputtering of spacers |
| 08/11/1992 | US5136977 Apparatus for depositing dielectric films |
| 08/06/1992 | WO1992013115A1 Target for cathode sputtering |
| 08/06/1992 | DE4109972C1 Electron beam lithography appts. - includes personal computer to prepare data prepresenting desired pattern, digital signal processor and CPU |
| 08/06/1992 | DE4102102A1 Magnet arrangement with variable magnetic field - useful for magnetron sputtering unit |
| 08/06/1992 | CA2098725A1 Target for cathode sputtering |
| 08/05/1992 | EP0497563A2 Surface processing method using charged or not charged particles and apparatus for carrying out the same |
| 08/05/1992 | EP0497066A1 A sputtering apparatus |
| 08/05/1992 | EP0450061A4 Improved resonant radio frequency wave coupler apparatus using higher modes |
| 08/05/1992 | CN2112201U Electro-mirror filament emission automatic controller |
| 08/05/1992 | CN1017726B Microwave plasma cvd method enhanced magnetic field |
| 08/04/1992 | US5136171 Charge neutralization apparatus for ion implantation system |
| 08/04/1992 | US5136169 Energy beam locating |