| Patents for H01J 37 - Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof (46,866) |
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| 08/04/1992 | US5136167 Electron beam lens and deflection system for plural-level telecentric deflection |
| 08/04/1992 | US5136166 Temperature stable magnetic deflection assembly |
| 08/04/1992 | US5136162 Measuring device in a scanning probe microscope |
| 08/04/1992 | US5135634 Apparatus for depositing a thin layer of sputtered atoms on a member |
| 08/04/1992 | US5135629 Containing electrolytic copper foil having fine grains of copper and/or copper oxide on projections of matte surface to prevent contamination and particle formation |
| 08/04/1992 | US5135609 Precise patterning of thin films; identifying, removing microscopically sized tiles; chromium masks for integrated circuits |
| 08/04/1992 | US5134965 Processing apparatus and method for plasma processing |
| 08/04/1992 | CA1306074C Ion source |
| 08/04/1992 | CA1305872C Micromechanical atomic force sensor head |
| 07/29/1992 | EP0496681A1 Device for the distribution of microwave energy for excitation of a plasma |
| 07/29/1992 | EP0496564A1 Method and apparatus for etching diamond with plasma |
| 07/29/1992 | EP0496159A2 Partitioning method for E-beam lithography |
| 07/29/1992 | EP0496158A2 Proximity correction method for E-beam lithography |
| 07/29/1992 | EP0496036A1 A sputtering apparatus |
| 07/29/1992 | EP0462209A4 Electron cyclotron resonance plasma source and method of operation |
| 07/29/1992 | EP0359777B1 Process for etching with gaseous plasma |
| 07/28/1992 | US5134641 Plasma x-ray tube, in particular for x-ray preionizing of gas lasers, and an electron gun using the plasma x-ray tube |
| 07/28/1992 | US5134339 High-voltage lead-through for particle-beam apparatus |
| 07/28/1992 | US5134301 Ion implanting apparatus, having ion contacting surfaces made of high purity silicon, for fabricating semiconductor integrated circuit devices |
| 07/28/1992 | US5134300 Method and apparatus for controlling charged particle beams in charged particle beam exposure system |
| 07/28/1992 | US5134299 Ion beam implantation method and apparatus for particulate control |
| 07/28/1992 | US5134298 Beam control method and apparatus |
| 07/28/1992 | US5134289 Field emission electron device which produces a constant beam current |
| 07/28/1992 | US5134288 Method of directly deriving amplitude and phase information of an object from images produced by a high-resolution electron microscope |
| 07/28/1992 | US5134287 Double-focussing mass spectrometer |
| 07/28/1992 | US5133986 Plasma enhanced chemical vapor processing system using hollow cathode effect |
| 07/28/1992 | US5133850 Sputtering cathode for coating substrates in cathode sputtering apparatus |
| 07/28/1992 | US5133849 Thin film forming apparatus |
| 07/28/1992 | US5133826 Electron cyclotron resonance plasma source |
| 07/28/1992 | US5133825 Plasma generating apparatus |
| 07/23/1992 | WO1992012528A1 Surface atom machining method and apparatus |
| 07/23/1992 | WO1992012527A1 Method of three-dimensional atomic imaging |
| 07/23/1992 | WO1992012398A1 Piezoresistive cantilever for atomic force microscopy |
| 07/23/1992 | WO1992012275A1 Device and process for the vaporisation of material |
| 07/22/1992 | EP0495542A1 Method for autotuning of an electron microscope, and an electron microscope suitable for carrying out such a method |
| 07/22/1992 | EP0495524A1 System for processing a workpiece in a plasma and a process for generating such plasma |
| 07/22/1992 | EP0495447A1 Method of controlling an arc spot in vacuum arc vapor deposition and an evaporation source |
| 07/22/1992 | EP0495262A2 Integrated circuits modification with focused ion beam system |
| 07/21/1992 | US5132545 Ion implantation apparatus |
| 07/21/1992 | US5132544 System for irradiating a surface with atomic and molecular ions using two dimensional magnetic scanning |
| 07/21/1992 | US5131992 Microwave induced plasma process for producing tungsten carbide |
| 07/15/1992 | EP0494737A2 Charged particle beam exposure device for improving the heating state of block mask |
| 07/15/1992 | EP0494415A2 Method for chemical marking of solid state surfaces at atomic level and use of such a method to store information units in an atomic range |
| 07/15/1992 | EP0494342A1 Sputtering cathode |
| 07/14/1992 | US5130607 Cold-cathode, ion-generating and ion-accelerating universal device |
| 07/14/1992 | US5130554 Two-dimensional scanning device for detecting position between two relatively movable objects |
| 07/14/1992 | US5130552 Improved ion implantation using a variable mass resolving system |
| 07/14/1992 | US5130550 Electron beam lithography apparatus having device for correcting beam shape |
| 07/14/1992 | US5130547 Charged-particle beam exposure method and apparatus |
| 07/14/1992 | US5130540 Method and apparatus for automatic focusing of scanning electron microscope |
| 07/14/1992 | US5130539 Imaging beta tracer microscope |
| 07/14/1992 | US5130213 Device manufacture involving lithographic processing |
| 07/14/1992 | US5130170 Chemical vapor deposition of films |
| 07/14/1992 | US5130005 Magnetron sputter coating method and apparatus with rotating magnet cathode |
| 07/14/1992 | US5129359 Microwave plasma CVD apparatus for the formation of functional deposited film with discharge space provided with gas feed device capable of applying bias voltage between the gas feed device and substrate |
| 07/14/1992 | US5129132 Method of making an integrated scanning tunneling microscope |
| 07/08/1992 | EP0493647A1 Sputtering cathode for substrate deposition in a cathode sputtering apparatus |
| 07/08/1992 | EP0479968A4 X-ray imaging system |
| 07/08/1992 | CN1017377B Double tongue scanning tunnel microscope regulating device |
| 07/07/1992 | US5128545 Method and apparatus for background correction in analysis of a specimen surface |
| 07/07/1992 | US5128544 Scanning probe microscope |
| 07/07/1992 | US5128543 Particle analyzer apparatus and method |
| 07/01/1992 | EP0492992A2 Magnetron sputtering equipment |
| 07/01/1992 | EP0492915A1 Cantilever probe and apparatus using the same |
| 07/01/1992 | EP0492592A1 Vacuum arc deposition device |
| 07/01/1992 | EP0492511A2 Plasma chamber reactor |
| 07/01/1992 | EP0492295A2 Electron energy filter, preferably from alpha or omega type |
| 07/01/1992 | EP0492218A1 Cooling arrangement for electronic devices within a vacuum chamber |
| 07/01/1992 | EP0491973A1 Integrated pneumatically and electrostatically controlled scanning tunneling microscope and method of making the same |
| 06/30/1992 | US5126633 Method of and apparatus for generating uniform elongated electron beam with the aid of multiple filaments |
| 06/30/1992 | US5126576 Method and apparatus for controlling the rate of emission of electrons used for charge neutralization in ion implantation |
| 06/30/1992 | US5126575 Method and apparatus for broad beam ion implantation |
| 06/30/1992 | US5126574 Microtip-controlled nanostructure fabrication and multi-tipped field-emission tool for parallel-process nanostructure fabrication |
| 06/30/1992 | US5126571 Semiconductor manufacturing apparatus |
| 06/30/1992 | US5126566 Dimension measurement system utilizing scanning electron beam |
| 06/30/1992 | US5126565 Energy filter for charged particle beam apparatus |
| 06/30/1992 | US5126164 Plasma polymerization of monomer gas in helium |
| 06/30/1992 | US5126163 Method for metal ion implantation using multiple pulsed arcs |
| 06/30/1992 | US5126033 Process and apparatus for reactively coating a substrate |
| 06/30/1992 | US5126032 Process and apparatus for reactively coating a substrate |
| 06/30/1992 | US5126030 Magnet coil between evaporation source and substrate; vapor deposition of hard, smooth films |
| 06/30/1992 | US5126029 Apparatus and method for achieving via step coverage symmetry |
| 06/30/1992 | US5126028 Computerized control of thickness and deposition rate |
| 06/30/1992 | US5125963 Metallurgical controlling method |
| 06/30/1992 | US5125360 Vacuum processing apparatus |
| 06/30/1992 | US5125358 Microwave plasma film deposition system |
| 06/25/1992 | WO1992010308A1 Minimization of particle generation in cvd reactors and methods |
| 06/24/1992 | EP0491313A2 Ion implantation method and apparatus |
| 06/24/1992 | EP0491311A2 Ion implanting apparatus and method |
| 06/24/1992 | EP0490958A1 Method and apparatus for imaging dislocations in materials using a scanning electron microscope. |
| 06/23/1992 | US5124645 Transmission electron microscope (TEM) power probe for in-situ viewing of electromigration and operation of an integrated circuit or microprocessor |
| 06/23/1992 | US5124560 Electron beam exposure system having an improved data transfer efficiency |
| 06/23/1992 | US5124557 Apparatus and methods relating to ion implantation and heat transfer |
| 06/23/1992 | US5124556 Charged particle beam apparatus |
| 06/23/1992 | US5124526 Ion source |
| 06/23/1992 | US5124522 High accuracy, high flexibility energy beam machining system |
| 06/23/1992 | CA1303861C Metallurgical controlling method |
| 06/17/1992 | EP0490659A2 An ion source for a mass spectrometer |
| 06/17/1992 | EP0490170A2 Spin detector |
| 06/17/1992 | EP0490068A1 Method for centering an electron beam |