H01J 37 - Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof

Patents for H01J 37 - Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof (46,866)
11/1992
11/19/1992	EP0514255A1 Electron cyclotron resonance ion source
11/19/1992	EP0514046A1 System for controlling and executing the etching of a wafer
11/19/1992	EP0513776A2 Instrument and method for 3-dimensional atomic arrangement observation
11/19/1992	EP0513634A2 High-speed film-forming processes by plasma CVD and Radical CVD under high pressure
11/19/1992	EP0513080A1 Process and device for electron beam treatment of particulates.
11/19/1992	DE4216330A1 Ion plasma processing of products - using plasma stream in vacuum chamber with arc discharges and with an electric field directed inwards from the edge of the plasma reservoir
11/18/1992	CN2122437U Strong flow ion implantation machine with multiple ionic sources
11/17/1992	US5165106 Contour collimator
11/17/1992	US5164666 Method and apparatus for analyzing errors in integrated circuits
11/17/1992	US5164599 Ion beam neutralization means generating diffuse secondary emission electron shower
11/17/1992	US5164596 Focused ion beam irradiating apparatus
11/17/1992	US5164594 Charged particle extraction arrangement
11/17/1992	US5164063 Sputtering cathode arrangement according to the magnetron principle for coating a flat annular surface
11/12/1992	WO1992020089A2 Forming charges in a fluid and generation of a charged beam
11/12/1992	WO1992019789A1 Electric arc evaporator of metals
11/12/1992	WO1992019788A1 Device for electric arc evaporation of metals
11/12/1992	WO1992019785A1 Method and device for treatment of articles in gas-discharge plasma
11/11/1992	EP0512677A2 Plasma treatment method and apparatus
11/11/1992	EP0512456A1 Process for fitting and removal of a target plate in a vacuum processing chamber, fitting therefor, target plate and vacuum chamber
11/11/1992	EP0512296A1 Method of depositing conductors in high aspect ratio apertures under high temperature conditions
11/11/1992	EP0512082A1 Power-supply circuit for pulse-operated vacuum-arc devices
11/10/1992	US5162699 Ion source
11/10/1992	US5162653 Scanning tunneling microscope and surface topographic observation method
11/10/1992	US5162633 Microwave-excited plasma processing apparatus
11/10/1992	CA1310141C Integrated electronic optical/differential pumping/imaging signal detection system for an environmental scanning electron microscope
11/05/1992	DE4114427A1 Specimen transfer mechanism for placing specimens in vacuum chambers - has transport plug, specimen container and support in container joined via bayonet connectors
11/04/1992	EP0511733A1 Removable shutter apparatus for a semiconductor process chamber
11/04/1992	EP0511704A1 Translation device
11/04/1992	EP0511492A1 Method and apparatus for treatment or coating of substrates
11/04/1992	EP0511448A1 Method and apparatus for in-situ and on-line monitoring of a trench formation process
11/04/1992	EP0217951B1 Manufacture of liquid metal ion source
11/03/1992	US5161149 Electron density storage device and method using STM
11/03/1992	US5160884 Charged particle beam device
11/03/1992	US5160846 Method and apparatus for reducing tilt angle variations in an ion implanter
11/03/1992	US5160845 Alignment technique for masked ion beam lithography
11/03/1992	US5160841 Ion source for a mass spectrometer
11/03/1992	US5160825 Process and device for supplying processing gas to a reactor located in a zone subjected to intense electric and/or electromagnetic fields
11/03/1992	US5160595 Arc-magnetron and the method of coating
11/03/1992	US5160592 Continuous movement through zones of treatment; textiles
11/03/1992	US5160402 Multi-channel plasma discharge endpoint detection method
11/03/1992	US5160398 High speed reactive ion etching
11/03/1992	US5160397 Plasma process apparatus and plasma processing method
10/1992
10/29/1992	WO1992019007A1 Signal leadthrough into vacuum
10/29/1992	WO1992019006A1 Ion beam blanking apparatus and method
10/29/1992	WO1992018853A1 Imaging beta tracer microscope
10/29/1992	DE4113704A1 Suppression circuit for arc discharge effects in reactive high rate DC atomisation - with high frequency inductance between current supply and plasmatron
10/29/1992	DE4113111A1 Vakuum-signaldurchfuehrung Vacuum signaldurchfuehrung
10/28/1992	EP0511153A1 Plasma enhancement apparatus and method for physical vapor deposition
10/28/1992	EP0510618A1 Electron microscope
10/28/1992	EP0510581A2 Ion neutralizer
10/28/1992	EP0510401A1 Processing apparatus using plasma
10/28/1992	EP0510334A2 Apparatus and method for locating target area for electron microanalysis
10/27/1992	US5159264 For measuring plasma energy flux impinging upon a specimen
10/27/1992	US5159234 Electron beam generator and emission cathode
10/27/1992	US5159201 Shape decompositon system and method
10/27/1992	US5159196 Apparatus and method for discharging a specimen disposed in an evacuated chamber
10/27/1992	US5159195 For producing magnified images of a specimen target
10/27/1992	US5159170 Grid structure for reducing current density in focussed ion beam
10/27/1992	US5158660 Rotary sputtering cathode
10/21/1992	EP0509771A1 High voltage insulation device
10/20/1992	WO1992018663A1 Method and apparatus for linear magnetron sputtering
10/20/1992	US5157256 System for exchanging samples and electrode tip units in a surface probe microscope
10/20/1992	US5157251 Scanning force microscope having aligning and adjusting means
10/20/1992	US5156727 Film thickness uniformity control apparatus for in-line sputtering systems
10/20/1992	US5156703 Removal and structuring of solids; surface doping
10/20/1992	CA2108673A1 Method and apparatus for linear magnetron sputtering
10/20/1992	CA1309192C Foot and ankle positioning device
10/15/1992	WO1992017899A1 Energy beam locating
10/15/1992	WO1992017898A1 Device for generating short particle-beam pulses
10/14/1992	EP0508833A1 Surface treating method and apparatus
10/14/1992	EP0508429A1 Vacuum arc vapor deposition device
10/14/1992	EP0508359A1 Process and apparatus for coating at least one object
10/14/1992	EP0508151A1 Charged particle beam exposure system and charged particle beam exposure method
10/14/1992	EP0507885A1 A low frequency inductive rf plasma reactor
10/14/1992	EP0278969B1 Ion beam fast parallel scanning having dipole magnetic lens with nonuniform field
10/13/1992	US5155369 Multiple angle implants for shallow implant
10/13/1992	US5155368 Ion beam blanking apparatus and method
10/13/1992	US5155361 Potentiostatic preparation of molecular adsorbates for scanning probe microscopy
10/13/1992	US5155359 For imaging a surface
10/13/1992	US5155331 Method for cooling a plasma electrode system for an etching apparatus
10/06/1992	US5153441 Electron-beam exposure apparatus
10/06/1992	US5153440 Method of stabilizing operation for a liquid metal ion source
10/06/1992	US5153434 Electron microscope and method for observing microscopic image
10/01/1992	WO1992016959A1 Arc source macroparticle filter
10/01/1992	WO1992016671A1 Method and device for forming film by sputtering process
10/01/1992	CA2106598A1 Arc source macroparticle filter
09/1992
09/30/1992	EP0506484A1 Ion beam generating apparatus, filmforming apparatus, and method for formation of film
09/29/1992	US5151605 Method of irradiating an object by means of a charged particle beam, and device for performing the method
09/29/1992	US5151594 Subpicosecond atomic and molecular motion detection and signal transmission by field emission
09/29/1992	US5150882 Treatment system having gate device for decompression chamber
09/29/1992	CA1308203C Magnification compensation apparatus
09/29/1992	CA1308060C Cathode and target design for a sputter coating apparatus
09/23/1992	EP0504972A1 Specimen holder for use in a charged particle beam device
09/23/1992	EP0504477A1 Substrate coating device
09/23/1992	EP0504353A1 Apparatus for and method of producing ion beams
09/23/1992	CN1064765A Cathode ray tube comprising electron gun having plane-parallel optical system
09/22/1992	US5150392 For providing precise alignment
09/22/1992	US5150010 Discharge-in-magnetic-field type ion generating apparatus
09/22/1992	US5150001 Field emission electron gun and method having complementary passive and active vacuum pumping
09/22/1992	US5149976 Charged particle beam pattern generation apparatus and method

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