| Patents for H01J 37 - Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof (46,866) |
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| 01/13/1993 | EP0522962A1 Ion implanter with surface potential measuring system |
| 01/13/1993 | EP0522821A1 Method of manufacturing sputtering target assembly |
| 01/13/1993 | EP0522300A2 Arrangement for coupling microwave energy |
| 01/13/1993 | EP0522296A2 Plasma processing system and method |
| 01/13/1993 | EP0522281A1 CVD plasma igniting procedure and device |
| 01/13/1993 | EP0522168A1 Surface atom machining method and apparatus |
| 01/13/1993 | EP0407460A4 An integrated mass storage device |
| 01/13/1993 | EP0290575B1 Method and apparatus for ion beam centroid location |
| 01/13/1993 | CN1067930A Process and apparatus for plasma cvd coating or handle substrates |
| 01/13/1993 | CA2073645A1 Apparatus and process for dcpv diamond deposit assisted by microwave plasma |
| 01/12/1993 | US5179280 Computer control of the electron microscope sample stage |
| 01/12/1993 | US5178743 Cylindrical magnetron sputtering system |
| 01/12/1993 | US5178742 Method of and apparatus for forming a micromelt structure on an electrically-conductive probe tip |
| 01/12/1993 | US5178739 Sputtering; magnetic confinement of plasma electrons; radio frequency power to sustain plasma; semiconductors |
| 01/12/1993 | US5178683 Microwave plasma cvd apparatus |
| 01/12/1993 | CA1312681C Variable temperature scanning tunneling microscope |
| 01/11/1993 | CA2073391A1 Arrangement for coupling in of microwave energy |
| 01/07/1993 | EP0521045A1 Magnetron sputter ion plating |
| 01/07/1993 | EP0521017A1 Arc diverter. |
| 01/07/1993 | EP0465597A4 Raster scan control system for a charged-particle beam |
| 01/07/1993 | EP0328613B1 Metallurgical controlling method |
| 01/05/1993 | US5177692 Method and apparatus for processing errors occurring upon division of pattern to be transferred |
| 01/05/1993 | US5177402 Arc suppressor for electron gun |
| 01/05/1993 | US5177398 Grid assembly for ion beam sources and method therefor |
| 01/05/1993 | US5177367 Method of exposure using an electron beam to provide uniform dosage and apparatus therefor |
| 01/05/1993 | US5177366 Ion beam implanter for providing cross plane focusing |
| 01/05/1993 | US5177365 Charged particle beam exposure device for improving the heating state of block mask |
| 01/05/1993 | US5177361 Electron energy filter |
| 12/30/1992 | EP0520519A1 Plasma processing reactor and process for plasma etching |
| 12/30/1992 | EP0470209B1 Metal-ion source and process for the generation of metal ions |
| 12/29/1992 | US5175608 Method of and apparatus for sputtering, and integrated circuit device |
| 12/29/1992 | US5175468 Device for generating an on-off modulation electron beam |
| 12/29/1992 | US5175436 Method of producing high-energy electron curtains with high performance |
| 12/29/1992 | US5175435 For writing a pattern on an object |
| 12/29/1992 | US5175019 Distorting generated plasma ball of reactants with dielectric plate suspended above and parallel to substrate |
| 12/29/1992 | US5174880 Magnetron sputter gun target assembly with distributed magnetic field |
| 12/29/1992 | US5174875 Method of enhancing the performance of a magnetron sputtering target |
| 12/29/1992 | CA1312108C Electromechanical translation apparatus |
| 12/24/1992 | DE4120690A1 Ferromagnetic target for magnetron electrode - has first part between north and south poles of permanent magnet and second part opposite poles |
| 12/23/1992 | WO1992022920A1 Device for processing substrates within a plasma |
| 12/23/1992 | EP0519693A1 Reference grid for use in charged particle beam spectroscopes |
| 12/23/1992 | EP0519269A1 Method for targeted modification of isolated nanometer structures of a solid state body surface |
| 12/23/1992 | EP0519167A2 Micromanipulator |
| 12/23/1992 | CN2125877U Saddle field ion gun |
| 12/22/1992 | US5173641 Plasma generating apparatus |
| 12/22/1992 | US5173640 Apparatus for the production of a regular microwave field |
| 12/22/1992 | US5173582 For drawing a pattern on an object |
| 12/22/1992 | CA1311863C Low-voltage source for narrow electron/ion beams |
| 12/21/1992 | CA2070210A1 Selective modification of individual nanometer and subnanometer structures in the surface of a solid |
| 12/16/1992 | EP0518783A1 Mask and charged particle beam exposure method using the mask |
| 12/16/1992 | EP0518633A1 Pattern inspection apparatus and electron beam apparatus |
| 12/16/1992 | EP0518618A2 Scanning tunneling microscope with cantilever type displacement element |
| 12/16/1992 | EP0518372A1 Rolling element cage constraint |
| 12/16/1992 | EP0517999A1 Apparatus for reactive ion beam etching and plasma-assisted CVD processing |
| 12/15/1992 | US5172331 Apparatus and method for effecting exposure of sample to charged particle beam |
| 12/15/1992 | US5172083 Microwave plasma processing apparatus |
| 12/15/1992 | US5171993 Method of correcting error arising in current-imaging tunneling spectroscopy |
| 12/15/1992 | US5171964 High accuracy, high flexibility, energy beam machining system |
| 12/15/1992 | US5171415 Cooling method and apparatus for magnetron sputtering |
| 12/15/1992 | US5171369 Device for glow potential processing, in particular ionic carburation |
| 12/10/1992 | WO1992022085A1 Window for microwave plasma processing device |
| 12/10/1992 | WO1992021788A1 Device for electric arc application of coatings on articles under vacuum |
| 12/10/1992 | WO1992021787A1 Method and device for thermochemical treatment of articles |
| 12/10/1992 | DE4118973A1 Vorrichtung zur plasmaunterstuetzten bearbeitung von substraten A plasma assisted processing of substrates |
| 12/09/1992 | EP0517074A2 Information recording/reproduction apparatus and method for recording and/or reproducing information onto and/or from recording medium using probe electrodes |
| 12/09/1992 | EP0517042A1 Plasma-chemical vapor-phase epitaxy system |
| 12/09/1992 | CN1066923A Freezing and dissolving corrosion sample making method for electronic microscope observation of liquid state sample |
| 12/08/1992 | US5170098 Plasma processing method and apparatus for use in carrying out the same |
| 12/08/1992 | US5170052 Apparatus for sample ionization and mass spectrometry |
| 12/08/1992 | US5170028 Process and apparatus, for electron beam welding of a member partially enclosed in vacuum chamber, and the member formed thereby |
| 12/08/1992 | US5169509 Pair of magnetron cathodes and evacuable chamber connected to ungrounded A.C. power supply; discharge voltage measured; gas flow controlled; for depositing dielectrics |
| 12/08/1992 | US5169488 Method of forming planarized, reusable calibration grids |
| 12/08/1992 | CA1311214C Dual plasma microwave apparatus and method for treating a surface |
| 12/03/1992 | DE4117368A1 Sputtering device with rotating magnetron cathode target - concentrates cooling medium pref. water onto target surface heated by plasma |
| 12/03/1992 | DE4117367A1 Modifying magnetic field in sputter equipment with rotating target - results in a box-shaped profile of material removal on the target surface which improves the efficiency and reduced penetration danger |
| 12/02/1992 | EP0516436A2 Sputtering device |
| 12/02/1992 | EP0516425A1 Cathodic arc deposition system and a method of controlling same |
| 12/02/1992 | EP0516418A1 Probe-driving mechanism, production thereof, and apparatus and piezoelectric actuator employing the same |
| 12/02/1992 | EP0516098A1 High accuracy beam blanker |
| 12/01/1992 | US5168197 Ion beam generating apparatus, film-forming apparatus, and method for formation of film |
| 12/01/1992 | US5168166 Charged particle beam projection aligner having position detector using light beam |
| 12/01/1992 | US5168159 Barrier height measuring apparatus including a conductive cantilever functioning as a tunnelling probe |
| 12/01/1992 | US5167789 Apparatus for coating a substrate |
| 12/01/1992 | US5167748 Plasma etching method and apparatus |
| 11/26/1992 | WO1992021135A1 Universal, microfabricated probe for scanning probe microscopes |
| 11/26/1992 | WO1992020842A1 Methods of fabricating integrated, aligned tunneling tip pairs |
| 11/26/1992 | WO1992020831A1 Improved quick change sputter target assembly |
| 11/25/1992 | EP0515352A1 Ion source |
| 11/25/1992 | EP0514391A1 Process for controlling an installation for plasma treatment of worpieces |
| 11/25/1992 | EP0514384A1 Device for treating substrates in a gas-based plasma produced by microwaves. |
| 11/25/1992 | EP0263849B1 Liquid metal ion source and alloy |
| 11/25/1992 | EP0261198B1 Plasma-anode electron gun |
| 11/24/1992 | US5166529 Electron beam lithography system |
| 11/24/1992 | US5166522 Spin detector |
| 11/24/1992 | US5166521 Ion-scattering spectrometer |
| 11/24/1992 | US5166520 Universal, microfabricated probe for scanning probe microscopes |
| 11/24/1992 | US5166519 Electron imaging band pass analyser for a photoelectron spectromicroscope |
| 11/24/1992 | US5166516 Scanning probe microscope with slant detection and compensation |
| 11/22/1992 | WO1992021136A1 Cluster tool soft etch module and ecr plasma generator therefor |
| 11/22/1992 | CA2102201A1 Cluster tool soft etch module and ecr plasma generator therefor |