| Patents for H01J 37 - Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof (46,866) |
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| 03/17/1993 | EP0280714B1 Beam position correction device |
| 03/16/1993 | US5195045 Automatic impedance matching apparatus and method |
| 03/16/1993 | US5194748 Method and apparatus relating to ion implantation |
| 03/16/1993 | US5194742 Method of and apparatus for shielding electron and other particle beam accelerators |
| 03/16/1993 | US5194741 Method for writing a pattern on an object by a focused electron beam with an improved efficiency |
| 03/16/1993 | US5194131 Apparatus and method for multiple ring sputtering from a single target |
| 03/16/1993 | US5193385 Cantilever for use in atomic force microscope and manufacturing method therefor |
| 03/11/1993 | DE4229275A1 Sample position control in focussed ion beam system e.g. for faulty bit analysis of semiconductor memory - allows automatic movement of sample w.r.t. reference point calculated by detection of secondary electrons released by irradiation by ion beam |
| 03/11/1993 | DE4214401C1 Plasma-aided CVD of coating inside hollow body - by introducing atmos. contg. cpd. vapour into cavity at below atmos. pressure and passing microwaves into cavity |
| 03/10/1993 | EP0530640A1 Imaging system with mirror corrector for charged particle radiation |
| 03/10/1993 | EP0530236A1 Process and device for monitoring and controlling etching operations. |
| 03/09/1993 | US5192894 Device for the suppression of arcs |
| 03/09/1993 | US5192867 Electron optical measurement apparatus |
| 03/09/1993 | US5192866 Sample-moving automatic analyzing apparatus |
| 03/09/1993 | US5192849 Multipurpose low-thermal-mass chuck for semiconductor processing equipment |
| 03/04/1993 | WO1993004211A1 Apparatus and method for multiple ring sputtering from a single target |
| 03/03/1993 | EP0530004A1 Electron beam gun |
| 03/03/1993 | EP0529846A1 Scanning probe microscope |
| 03/03/1993 | EP0529519A1 Transmission electron microscope |
| 03/03/1993 | EP0529259A1 Apparatus for processing substrates |
| 03/03/1993 | EP0314763B1 Secondary electron detector for use in a gaseous atmosphere |
| 03/02/1993 | US5191213 Integrated circuit structure analysis |
| 03/02/1993 | US5190703 Plasma reactor chamber |
| 03/02/1993 | US5190614 Electromagnetic radiation to measure processing, detection windows |
| 02/24/1993 | EP0528785A1 Ion optical imaging system |
| 02/24/1993 | EP0528163A1 Device for suppressing arcing |
| 02/24/1993 | EP0527859A1 Apparatus for-plasma treatment of continuous material. |
| 02/23/1993 | US5189446 Plasma wafer processing tool having closed electron cyclotron resonance |
| 02/23/1993 | US5189341 Electron emitting element |
| 02/23/1993 | US5189306 Grey-splice algorithm for electron beam lithography post-processor |
| 02/23/1993 | US5189303 Ion source having a mass separation device |
| 02/23/1993 | US5188862 Microwave plasma generating apparatus and process for the preparation of diamond thin film utilizing same |
| 02/23/1993 | US5188717 Uniformity |
| 02/18/1993 | WO1993003590A1 Plasma processing apparatus |
| 02/18/1993 | WO1993003491A1 Color synthesizing scanning electron microscope |
| 02/17/1993 | EP0527607A1 Electron beam exposure process for writing a pattern on an object by an electron beam with a compensation of the proximity effect |
| 02/17/1993 | EP0527601A1 Composite scanning tunnelling microscope and optical microscope |
| 02/17/1993 | EP0527448A2 Scanning tunnelling/atomic force microscope combined with optical microscope |
| 02/17/1993 | EP0527379A1 Method for targeted modification of surfaces of solid state body in the nanometer range through local laminar separation as well as use of the method for storing information units |
| 02/17/1993 | EP0527370A1 Procedure for implementing localised catalytic reactions with or on solid state surfaces on a nanometric or subnanometric scale |
| 02/17/1993 | EP0527290A1 Device for implementing a thin film process for the treatment of large area substrates |
| 02/17/1993 | EP0527133A1 Plasma reaction chamber having conductive diamond-coated surfaces. |
| 02/16/1993 | US5187457 Harmonic and subharmonic filter |
| 02/16/1993 | US5187371 Charged particle beam apparatus |
| 02/16/1993 | US5187347 For conducting a voltage to generate a plasma discharge |
| 02/16/1993 | US5187115 Method of forming semiconducting materials and barriers using a dual enclosure apparatus |
| 02/16/1993 | US5186789 Method of making a cantilever stylus for use in an atomic force microscope |
| 02/16/1993 | US5186786 Method for determining the complete elimination of a thin layer on a non planar substrate |
| 02/11/1993 | CA2074438A1 Specific modification of the surfaces of solids in the nanometer range by local delamination, and the storage of information units |
| 02/10/1993 | EP0526657A1 Microwave plasma cvd device, and method for synthesizing diamond by device thereof |
| 02/10/1993 | EP0526491A1 Gaseous radical producing apparatus |
| 02/10/1993 | CA2074437A1 Performance of location-selective catalytic reactions with or on the surfaces of solids in the namometer or subnanometer range |
| 02/09/1993 | US5185757 Modularized replaceable vaporizer and extractor apparatus |
| 02/09/1993 | US5185571 Process and system for the asynchronous measurement of signal courses |
| 02/09/1993 | US5185530 Electron beam instrument |
| 02/09/1993 | US5185524 Charged particle energy analyzers |
| 02/09/1993 | US5185523 Mass spectrometer for analyzing ultra trace element using plasma ion source |
| 02/09/1993 | US5185132 Introducing mixture of rare gas and reactive gas into vessel having dielectric coated electrodes, exciting with plasma, treating substrate surface |
| 02/04/1993 | WO1992020089A3 Forming charges in a fluid and generation of a charged beam |
| 02/03/1993 | EP0526420A1 Method for the production of extraction grids for ion generation and grids produced according to said method |
| 02/03/1993 | EP0526376A1 Shape decomposition system and method |
| 02/03/1993 | EP0526237A1 Information processing apparatus, and electrode substrate and information recording medium used in the apparatus |
| 02/03/1993 | EP0526039A1 Method for exposing a pattern plate having an alignment pattern |
| 02/03/1993 | EP0525927A1 Ion source having a mass separation device |
| 02/03/1993 | EP0525633A1 Plasma processing apparatus |
| 02/03/1993 | EP0525295A1 Cathode for magnetron sputtering for vacuum deposition apparatus |
| 02/02/1993 | US5184046 Circular waveguide plasma microwave sterilizer apparatus |
| 02/02/1993 | US5183511 Photo CVD apparatus with a glow discharge system |
| 02/02/1993 | CA1313318C Microscope viewing arrangement |
| 01/30/1993 | CA2064265A1 Method of and apparatus for generating uniform elongated electron beam with the aid of multiple filaments |
| 01/27/1993 | EP0418250B1 Micromanipulator for moving objects |
| 01/26/1993 | US5182718 Method and apparatus for writing a pattern on a semiconductor sample based on a resist pattern corrected for proximity effects resulting from direct exposure of the sample by a charged-particle beam or light |
| 01/26/1993 | US5182495 Plasma processing method and apparatus using electron cyclotron resonance |
| 01/26/1993 | US5182488 Electron beam gun for use in an electron beam evaporation source |
| 01/26/1993 | US5182454 Scanning electron microscope |
| 01/26/1993 | US5182453 Ion scattering spectrometer |
| 01/26/1993 | US5182452 Method for determining the presence of thin insulating films |
| 01/26/1993 | US5182001 Configuration of magnetic flux lines |
| 01/26/1993 | US5181986 Plasma generator, microwaves, resonance |
| 01/21/1993 | WO1993001698A1 Method of producing flat ecr layer in microwave plasma device and apparatus therefor |
| 01/21/1993 | WO1993001327A1 Continuous vacuum arc broad beam ion source |
| 01/20/1993 | EP0523983A1 An Ion Beam Neutralizer and an Ion Implantation System using the same. |
| 01/20/1993 | EP0523699A1 Charged particle beam apparatus |
| 01/20/1993 | EP0523695A1 A sputtering apparatus and an ion source |
| 01/20/1993 | CA2072848A1 Diffuse secondary emission electron shower |
| 01/19/1993 | US5180948 Plasma generator with secondary radiator |
| 01/19/1993 | US5180920 Method and apparatus for making charged particle beam exposure |
| 01/19/1993 | US5180919 Electron beam exposure system having the capability of checking the pattern of an electron mask used for shaping an electron beam |
| 01/19/1993 | US5180918 Method and apparatus for measuring ion beam collimation, shaping the ion beam and controlling scanning thereof |
| 01/19/1993 | US5180478 Sputter coating source |
| 01/19/1993 | US5180467 Etching system having simplified diffuser element removal |
| 01/19/1993 | US5180436 Microwave plasma film deposition system |
| 01/19/1993 | US5180434 Interfacial plasma bars for photovoltaic deposition apparatus |
| 01/19/1993 | US5180230 Rolling element cage constraint |
| 01/19/1993 | CA1312952C Microprobe, preparation thereof and electronic device by use of said microprobe |
| 01/19/1993 | CA1312908C Plasma x-ray tube, for the x-ray pre-ionisation of gas lasers |
| 01/19/1993 | CA1312907C Plasma x-ray tube, in particular for x-ray preionization of gas lasers and method for producing x-radiation with such an x-ray tube |
| 01/14/1993 | DE4210185A1 Vorrichtung zur erzeugung kurzer teilchenstrahlpulse Apparatus for generation short teilchenstrahlpulse |
| 01/13/1993 | EP0523033A1 Ion optical imaging system |
| 01/13/1993 | EP0522986A1 Apparatus and process for diamond deposition by micro wave assisted CVD |