| Patents for H01J 37 - Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof (46,866) |
|---|
| 07/08/1993 | WO1993013541A1 Mass spectroscope |
| 07/08/1993 | WO1993013240A1 System for depositing superconducting films |
| 07/08/1993 | WO1993013238A1 Vacuum surface treatment apparatus and method |
| 07/08/1993 | CA2125180A1 Extended lifetime collimator |
| 07/07/1993 | EP0550173A1 Integrated circuits |
| 07/07/1993 | EP0550134A1 Filament clip support |
| 07/07/1993 | EP0550054A1 Arc suppressor for electron gun |
| 07/07/1993 | EP0549854A1 Cathode for coating a substrate |
| 07/06/1993 | US5225740 Method and apparatus for producing high density plasma using whistler mode excitation |
| 07/06/1993 | US5225684 Charged particle beam exposure apparatus control system and a method of operation for providing a drawing start signal |
| 07/06/1993 | US5225683 Detachable specimen holder for transmission electron microscope |
| 07/06/1993 | US5225676 Electrooptical viewing apparatus capable of switching depth of focus |
| 07/06/1993 | US5225659 Method and apparatus for surface treating an axially symmetric substrate at atmosphere pressure |
| 07/06/1993 | US5225393 Yttrium oxide, barium oxide, copper oxide |
| 07/06/1993 | US5225375 Plasma enhanced chemical vapor processing of semiconductor substrates |
| 07/06/1993 | US5225024 Magnetically enhanced plasma reactor system for semiconductor processing |
| 07/06/1993 | US5224441 Apparatus for rapid plasma treatments and method |
| 07/01/1993 | DE4236273A1 Lens for focussing electrons for specimen inspection - has field generated by coils and cone-shaped electrode set into entry section |
| 07/01/1993 | DE4223091C1 Water cooled holder for inserted exchangeable target - comprises housing, cooling plate and axially freely movable metal bellows, vacuum arc discharge vapour deposition appts. |
| 07/01/1993 | DE4221361C1 Plasma-supported deposition of thin insulating layers on substrates - buy vaporising insulating material and ionising in plasma of low energetic arc discharge |
| 07/01/1993 | CA2083911A1 Filament clip support |
| 06/30/1993 | EP0549545A2 Electric arc evaporator |
| 06/30/1993 | EP0549113A1 Parallel filament electron gun |
| 06/30/1993 | EP0548899A1 Ion beam analyzing method |
| 06/30/1993 | EP0548573A2 Electron beam apparatus |
| 06/29/1993 | US5223719 Mask for use in a charged particle beam apparatus including beam passing sections |
| 06/29/1993 | US5223713 Scanner for scanning tunneling microscope |
| 06/29/1993 | US5223457 High-frequency semiconductor wafer processing method using a negative self-bias |
| 06/29/1993 | US5223112 Removable shutter apparatus for a semiconductor process chamber |
| 06/29/1993 | US5223111 Device for applying thin layers onto a substrate |
| 06/29/1993 | US5223109 Ion beam processing method and apparatus |
| 06/29/1993 | US5223108 Multipassages tapering longitudinally; cathode sputtering |
| 06/29/1993 | US5222396 Tunnelling acoustic microscope |
| 06/24/1993 | WO1993012546A1 Semiconductor device and microwave process for its manufacture |
| 06/24/1993 | WO1993012534A1 Energy analyser |
| 06/24/1993 | DE4142145A1 Sensor arrangement for electron beam machines - includes coaxial partial current sensor preceding total current sensor |
| 06/24/1993 | DE4142144A1 Determining the operating states of electron beam machines - by applying check voltages and comparing the response with given function values |
| 06/24/1993 | DE4142143A1 Determining the parameters of electron beam machine - by means of partial current sensor and pre-calibrated beam deflection |
| 06/23/1993 | EP0548032A2 Electric arc evaporator |
| 06/23/1993 | EP0547868A1 Apparatus and method for controlling plasma size and position in plasma-activated chemical vapor deposition processes |
| 06/23/1993 | EP0547303A1 Suspension system for isolating vibrations |
| 06/23/1993 | EP0463167A4 Method of making electrode |
| 06/23/1993 | EP0398995B1 Plasma x-ray tube, in particular for x-ray preionizing of gas lasers, and use as electron gun |
| 06/23/1993 | CN1021390C Glow-discharge tube for analysis |
| 06/22/1993 | US5221845 Frictionless linear actuator |
| 06/22/1993 | US5221844 Charged particle beam device |
| 06/22/1993 | US5221841 Fast atom beam source |
| 06/22/1993 | US5221427 Plasma generating device and method of plasma processing |
| 06/22/1993 | US5221425 Method for reducing foreign matter on a wafer etched in a reactive ion etching process |
| 06/22/1993 | US5221416 Plasma surface treating method |
| 06/22/1993 | US5221403 Support table for plate-like body and processing apparatus using the table |
| 06/22/1993 | US5221349 Vaccum arc vapor deposition device |
| 06/16/1993 | EP0546852A1 Methods and apparatus for generating a plasma for "downstream" rapid shaping of surfaces of substrates and films |
| 06/16/1993 | EP0546842A1 Methods and apparatus for confinement of a plasma etch region for precision shaping of surfaces of substances |
| 06/16/1993 | EP0546305A1 Corpuscular optical analysing and/or processing of material specimen |
| 06/16/1993 | EP0546293A1 Apparatus for coating a substrate, in particular for electrical insulating layers |
| 06/16/1993 | EP0546251A2 Cathodic sputtering apparatus |
| 06/16/1993 | EP0546052A1 Method of enhancing the performance of a magnetron sputtering target |
| 06/16/1993 | EP0349555B1 High-frequency ion source |
| 06/10/1993 | WO1993011554A1 Corona discharge ionisation source |
| 06/10/1993 | WO1993011276A1 Deposition apparatus and methods |
| 06/10/1993 | WO1993011275A1 Process and device for coating substrate bodies with hard substances |
| 06/10/1993 | CA2124215A1 Deposition apparatus and methods |
| 06/09/1993 | EP0545748A1 Device for supplying a voltage to a substrate holder |
| 06/09/1993 | DE4140158A1 Verfahren und vorrichtung zur hartstoffbeschichtung von substratkoerpern Method and device for hard material coating of substratkoerpern |
| 06/08/1993 | US5218433 Real time scanning device signal processing circuit including color signal and blanking signal generating circuits |
| 06/08/1993 | US5218262 Apparatus for retaining an electrode by a magnetically shielded magnet |
| 06/08/1993 | US5218210 Broad beam flux density control |
| 06/08/1993 | US5218209 Ion implanter |
| 06/08/1993 | US5218179 Plasma source arrangement for ion implantation |
| 06/08/1993 | US5217761 Sheet plasma CVD apparatus |
| 06/08/1993 | US5217560 A reaction tube is to house semiconductor wafers with high frequency plasma generating electrode unit located outside; purity, uniformity; film forming, etching |
| 06/08/1993 | CA1318980C Scanning tunnel-current-detecting device and method for detecting tunnel current and scanning tunnelling microscope and recording/reproducing device using thereof |
| 06/02/1993 | EP0544107A1 Method and apparatus for coating a substrate, in particular for electrical insulating layers |
| 06/02/1993 | EP0543935A1 Particle beam generator |
| 06/02/1993 | EP0543931A1 Shielding for arc suppression in rotating magnetron sputtering systems |
| 06/02/1993 | EP0543844A1 Cantilever mount for rotating cylindrical magnetrons |
| 06/02/1993 | EP0372061B1 Selective area nucleation and growth method for metal chemical vapor deposition using focused ion beams |
| 06/02/1993 | CN1072734A Apparatus for rapid plasma treatments and method |
| 06/01/1993 | US5216690 Electron beam gun with grounded shield to prevent arc down |
| 06/01/1993 | US5216330 Ion beam gun |
| 06/01/1993 | US5216329 Device for distributing a microwave energy for exciting a plasma |
| 06/01/1993 | US5216254 Circuit pattern forming apparatus using mu-stm |
| 06/01/1993 | US5216253 Ion implantation apparatus with variable width slits providing an ion beam of high purity |
| 06/01/1993 | US5216241 Reaction gas; platinum filament; ionization of halogen or halide; emitting holes in plate-shaped cathode |
| 06/01/1993 | US5216235 Opto-mechanical automatic focusing system and method |
| 06/01/1993 | US5215640 Method and arrangement for stabilizing an arc between an anode and a cathode particularly for vacuum coating devices |
| 06/01/1993 | US5215638 Rotating magnetron cathode and method for the use thereof |
| 06/01/1993 | US5215623 Blanking aperture array and method of producing same |
| 06/01/1993 | US5215619 Magnetic field-enhanced plasma etch reactor |
| 06/01/1993 | US5215420 Substrate handling and processing system |
| 05/27/1993 | WO1993010276A1 Method and apparatus for sputter coating employing machine readable indicia carried by target assembly |
| 05/27/1993 | DE4221930A1 Vacuum deposition chamber - has anode directly near cathode to coat PMMA substrate disc with aluminium@ |
| 05/27/1993 | DE4138794A1 Process and appts. for coating substrate - uses current source connected to cathodes in evacuated coating chamber |
| 05/27/1993 | DE4138793A1 Process and appts. for coating substrate - uses current source connected to cathodes in evacuated coating chamber |
| 05/27/1993 | DE4138691A1 Monitoring quality of plasma in plasma reactor or gas discharge laser - using test phase superimposed over excitation voltage to change frequency which is then used to determine electron density and temp. in plasma |
| 05/27/1993 | DE4138029A1 Cooling of target material in sputtering process - mounting target on plate with formed channel through which cooling fluid is circulated |
| 05/27/1993 | CA2122720A1 Method and apparatus for sputter coating employing machine readable indicia carried by target assembly |
| 05/26/1993 | EP0543502A1 Subpicosecond atomic motion detection and signal transmission |
| 05/25/1993 | US5214291 Pattern forming method |