| Patents for H01J 37 - Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof (46,866) |
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| 01/22/2014 | EP2686877A2 Method and apparatus for plasma dicing a semi-conductor wafer |
| 01/22/2014 | EP2686865A1 Phase contrast unit |
| 01/22/2014 | EP2686864A1 Electron beam apparatus |
| 01/22/2014 | CN103531429A Plasma etching device and etching method thereof |
| 01/22/2014 | CN103531428A Etch tool process indicator method and apparatus |
| 01/22/2014 | CN103531427A A method of preparing and imaging a lamella in a particle-optical apparatus |
| 01/22/2014 | CN103531426A On-axis detector for charged particle beam system |
| 01/22/2014 | CN103531425A Fixing device for transmission electron microscope samples |
| 01/22/2014 | CN103531424A Transmission electron microscope sample table of in-situ measurement nanometer device |
| 01/22/2014 | CN103531423A Needle-shaped charged particle beam emitter and manufacturing method thereof |
| 01/22/2014 | CN103527783A Sealing device for plasma tube device cover body in ASP cavity |
| 01/21/2014 | US8633454 Sterilising apparatus |
| 01/21/2014 | US8633451 Ion sources, systems and methods |
| 01/21/2014 | US8633438 Ultrafast electron diffraction device |
| 01/21/2014 | US8632637 Method and apparatus for plasma processing |
| 01/16/2014 | WO2014010751A1 Etching apparatus and etching method technical field |
| 01/16/2014 | WO2014010443A1 Mass spectrometer and mass image analyzing system |
| 01/16/2014 | WO2014010430A1 Electron microscope and image-formation method using electron microscope |
| 01/16/2014 | WO2014009883A2 Device and process for preventing substrate damages in a dbd plasma installation |
| 01/16/2014 | WO2014009816A1 Assembly for use in a vacuum treatment process |
| 01/16/2014 | WO2014009028A1 Device for producing an electron beam |
| 01/16/2014 | WO2014008989A1 High-power pulse coating method |
| 01/16/2014 | WO2014008984A1 High-power pulse coating method |
| 01/16/2014 | US20140017613 Holding apparatus, processing apparatus, lithography apparatus, and method for manufacturing article |
| 01/16/2014 | US20140014854 Dual sided workpiece handling |
| 01/16/2014 | US20140014852 Projection lens arrangement |
| 01/16/2014 | US20140014850 Charged particle multi-beamlet lithography system with modulation device |
| 01/16/2014 | US20140014835 Electron microscope sample holder and sample observation method |
| 01/16/2014 | DE112012000586T5 Mehrpol und Ladungsteilchen-Strahlvorrichtung mit demselben Multipole and charged particle beam apparatus having the same |
| 01/16/2014 | DE112011104595T5 Vorrichtung mit einem geladenen Teilchenstrahl A charged particle beam device with |
| 01/16/2014 | DE102013213307A1 Ladungsträgerteilchenstrahl-Schreibvorrichtung und Bestrahlungszeit-Einteilungsverfahren von Ladungsträgerteilchenstrahlen zum mehrfachen Schreiben Charged particle-writer and irradiation time-division method of Ladungsträgerteilchenstrahlen for multiple writing |
| 01/15/2014 | CN203398085U 电浆激发装置 Plasma excitation device |
| 01/15/2014 | CN103518002A Tubular target having protective device |
| 01/15/2014 | CN103517536A Plasma processing apparatus, plasma producing apparatus and plasma producing method, antenna structure |
| 01/15/2014 | CN103515181A Methods and apparatus for controlling plasma in a plasma processing system |
| 01/15/2014 | CN103515180A In-situ plasma glow processing method for improving field emission characteristics of tungsten oxide nanometer material thin film |
| 01/15/2014 | CN103515179A Plasma reaction chamber and plasma device with same |
| 01/15/2014 | CN103515178A 等离子体刻蚀装置 Plasma etching apparatus |
| 01/15/2014 | CN103515177A Reaction chamber, substrate processing equipment and its temperature control method |
| 01/15/2014 | CN103515176A Seasoning method and etching method |
| 01/15/2014 | CN103515175A Two-dimensional guard structure and radiation detector with the same |
| 01/15/2014 | CN103515174A Drawing apparatus, data processing method, and method of manufacturing article |
| 01/15/2014 | CN103515173A Compositions for extending ion source life and improving ion source performance during carbon implantation |
| 01/15/2014 | CN103515172A Ion beam irradiation apparatus and operation method thereof |
| 01/15/2014 | CN103510060A Magnetron electrode device and plasma processing system comprising magnetron electrode device |
| 01/14/2014 | US8629410 Charged particle radiation device |
| 01/14/2014 | US8629395 Charged particle beam apparatus |
| 01/14/2014 | US8628640 Plasma processing unit and high-frequency electric power supplying unit |
| 01/09/2014 | WO2014007624A1 Integrated light optical and charged particle beam inspection apparatus |
| 01/09/2014 | WO2014007121A1 Hexaboride metal cold field emitter, method of manufacturing same, and electron gun |
| 01/09/2014 | WO2014006443A2 Samples holders – grids – supports for the samples characterization or processing with electron, ion, molecular, atomic, photon or other beams |
| 01/09/2014 | WO2014005617A1 Apparatus for coating a layer of sputtered material on a substrate and deposition system |
| 01/09/2014 | US20140008534 Measuring/inspecting apparatus and measuring/inspecting method |
| 01/09/2014 | US20140008325 Method of etching |
| 01/09/2014 | US20140008021 Substrate treatment apparatus |
| 01/09/2014 | US20140008020 Plasma processing apparatus and temperature control method |
| 01/09/2014 | US20140007812 Plasma generating apparatus and substrate processing apparatus |
| 01/09/2014 | DE102013210277A1 Verfahren zum Bearbeiten eines Schneidengrats und Instrument mit bearbeitetem Schneidengrat Method for processing a Schneidengrats and instrument worked Schneidengrat |
| 01/09/2014 | DE102012013593A1 Device for producing electron beam, has deflection unit whose deflection electrodes reflects electron beam passed through opening of anode electrode while deflection surface is inclined towards propagation direction of electron beam |
| 01/09/2014 | DE102012013420A1 Method for performing dose control for electron beam exposure systems, involves creating set of patterns for elementary figures in electron beam exposure system, and determining dose levels based on created patterns |
| 01/08/2014 | EP2682979A1 A method of etching |
| 01/08/2014 | EP2682978A1 Contamination reduction electrode for particle detector |
| 01/08/2014 | EP2681758A1 Device for producing nanoparticles at high efficiency, use of said device and method of depositing nanoparticles |
| 01/08/2014 | EP2681757A2 E-petri dishes, devices, and systems |
| 01/08/2014 | EP2681756A1 Microtome utilizing a movable knife in a retardation field scanning electron microscope and a retardation field scanning electron microscope including the same |
| 01/08/2014 | EP2681624A1 Lithography system and method of processing substrates in such a lithography system |
| 01/08/2014 | CN103500704A Ion implantation method for back face of wafer |
| 01/08/2014 | CN103500695A Dry etching lower electrode and dry etching device |
| 01/08/2014 | CN102237245B Ion implantation device and adjustment method of beam current density distribution |
| 01/07/2014 | US8624478 High voltage shielding arrangement of a charged particle lithography system |
| 01/07/2014 | US8624205 Charged particle beam writing apparatus and device production method |
| 01/07/2014 | US8624199 Sample block holder |
| 01/07/2014 | US8624186 Movable detector for charged particle beam inspection or review |
| 01/07/2014 | US8624185 Sample preparation |
| 01/07/2014 | US8624184 Methods for spatially resolved alignment of independent spectroscopic data from scanning transmission electron microscopes |
| 01/07/2014 | US8624182 Electro-optical inspection apparatus and method with dust or particle collection function |
| 01/07/2014 | US8623471 Plasma treatment system |
| 01/03/2014 | WO2014003937A1 Multi Species Ion Source |
| 01/03/2014 | WO2014003146A1 Polarization control device, near-field light source, and parallel electron beam device |
| 01/03/2014 | WO2014002734A1 Charged particle beam device |
| 01/03/2014 | WO2014002700A1 Cryogenic specimen holder and cooling source container |
| 01/03/2014 | WO2014002579A1 Stage device, and specimen observation device |
| 01/03/2014 | WO2014001709A1 Device for surface treatment with plasma generated ex situ, and related method |
| 01/03/2014 | WO2014001525A1 Method of coating by pulsed bipolar sputtering |
| 01/03/2014 | WO2014001157A1 Efficient scanning for em based target localization |
| 01/03/2014 | WO2013167391A3 Method and apparatus for generating electron beams |
| 01/03/2014 | WO2013162419A3 Plasma generator (variants) |
| 01/03/2014 | WO2013151421A3 Integrated optical and charged particle inspection apparatus |
| 01/02/2014 | US20140001380 Mask drawing method, mask drawing apparatus |
| 01/02/2014 | US20140001361 Micro-gripper |
| 01/02/2014 | US20140001360 Charged Particle Ray Apparatus and Pattern Measurement Method |
| 01/02/2014 | US20140001359 Method for inspecting and measuring sample and scanning electron microscope |
| 01/02/2014 | US20140001357 On-Axis Detector for Charged Particle Beam System |
| 01/02/2014 | US20140001356 Cluster analysis of unknowns in sem-eds dataset |
| 01/02/2014 | US20140001355 Charged particle beam device and image display method |
| 01/02/2014 | DE112012001306T5 Probenhaltevorrichtung für Elektronenmikroskop und Elektronenmikroskopvorrichtung Sample holding means for the electron microscope and electron microscope device |
| 01/02/2014 | DE102012013418A1 Generating device i.e. plasma-jet source, for generating scalable linear plasma in e.g. vacuum atmospheric pressures, has plasma reactor comprising contour with side surfaces, and slot antennas arranged along longitudinal axis of reactor |
| 01/01/2014 | EP2680296A2 Three dimensional fiducial |
| 01/01/2014 | EP2680295A2 On-axis detector for charged particle beam system |
| 01/01/2014 | EP2680294A1 Electron gun and electron beam device |