| Patents for H01J 37 - Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof (46,866) |
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| 10/26/1994 | EP0620870A1 Process for surface treatment with ions |
| 10/26/1994 | EP0620868A1 Process for ionising thermally generated material vapours and device for implementing it. |
| 10/26/1994 | EP0620867A1 Procedure and apparatus for improving a plasma accelerator plating apparatus used for diamond plating. |
| 10/26/1994 | EP0600070A4 Improved planar magnetron sputtering magnet assembly. |
| 10/25/1994 | US5359202 Electron beam exposure apparatus employing blanking aperture array |
| 10/25/1994 | US5359199 Specific modification of the surfaces of solids in the nanometer range by local delamination, and the storage of information units |
| 10/25/1994 | US5359197 Apparatus and method of aligning electron beam of scanning electron microscope |
| 10/25/1994 | US5359177 Microwave plasma apparatus for generating a uniform plasma |
| 10/20/1994 | DE4312014A1 Device for coating and/or etching substrates in a vacuum chamber |
| 10/19/1994 | EP0620583A1 Sputtering apparatus having a rotating magnet array and fixed electromagnets |
| 10/19/1994 | EP0619916A1 Extended lifetime collimator. |
| 10/19/1994 | EP0619872A1 Piezoresistive cantilever for atomic force microscopy. |
| 10/19/1994 | EP0586579A4 Window for microwave plasma processing device. |
| 10/18/1994 | US5357115 Processing method for wafers |
| 10/18/1994 | US5357110 Visual color mapping X-ray analysis apparatus |
| 10/18/1994 | US5357109 Probe for scanning tunneling microscope and manufacturing method thereof |
| 10/18/1994 | US5357108 Cantilever type displacement element, and scanning tunneling microscope or information processing apparatus using same |
| 10/18/1994 | US5356522 Sputtering metals onto moving substrate, alloying |
| 10/18/1994 | US5355832 Forming polymeric material from vaporizable monomers on surface of substrate at low pressure |
| 10/18/1994 | US5355683 Cryogenic temperature control and tension/compression attachment stage for an electron microscope |
| 10/13/1994 | WO1994023440A1 Reactive dc sputtering system |
| 10/13/1994 | WO1994023439A1 Intraoperative electron beam therapy system and facility |
| 10/13/1994 | WO1994023088A1 Device for producing a plasma polymer protection layer on workpieces, in particular headlamp reflectors |
| 10/13/1994 | DE4412415A1 Method for reducing the electric charge on an insulating film during analysis in an electron-beam test device |
| 10/13/1994 | DE4311360A1 Arrangement for the reactive deposition of materials as a thin film by means of medium-frequency cathode sputtering |
| 10/13/1994 | CA2120975A1 Scanning near-field optic/atomic-force microscope, probe for use in same, and method of fabricating said probe |
| 10/12/1994 | EP0619495A1 Process for manufacturing tunnel sensors |
| 10/12/1994 | EP0290620B1 Apparatus for observation using charged particle beams and method of surface observation using charged particle beams |
| 10/11/1994 | US5354986 Ion implantation apparatus |
| 10/11/1994 | US5354963 Process and a device for continuous surface treatment of rod-shaped, longitudinally extended materials with metal surfaces using a magnetically displaced plasma arc |
| 10/11/1994 | US5354698 Hydrogen reduction method for removing contaminants in a semiconductor ion implantation process |
| 10/11/1994 | US5354446 For forming transparent noncrystalline durable oxide film |
| 10/11/1994 | US5354445 Thin film-forming apparatus |
| 10/11/1994 | US5354443 Method and apparatus for physical-vapor deposition of material layers |
| 10/11/1994 | US5354418 Method for dry etching |
| 10/11/1994 | US5354413 Electrode position controller for a semiconductor etching device |
| 10/11/1994 | US5354381 Cold cathode discharging; very short high voltage ionization pulses; synchronously produced electron flow to neutralize positively charged wafer surfaces |
| 10/05/1994 | EP0618606A1 Apparatus for DC reactive plasma vapor deposition of an electrically insulating material using a shielded secondary anode |
| 10/05/1994 | EP0618425A1 Sensor head and method for its manufacture |
| 10/05/1994 | CN1026068C Modulation of X-ray beam for selective absorption of radiant energy in pathological material |
| 10/04/1994 | US5352954 Plasma generator and associated ionization method |
| 10/04/1994 | US5352902 Method for controlling plasma surface-treatments with a plurality of photodetectors and optical filters |
| 10/04/1994 | US5352899 Method and apparatus for fabricating a device/circuit pattern by a converging atomic beam |
| 10/04/1994 | US5352898 Method and apparatus for preparing slurry specimens for cryo-scanning electron microscopy |
| 10/04/1994 | US5352894 Electron spectroscopy analyzer and a method of correcting a shift of spectral line in electron spectroscopy |
| 10/04/1994 | CA2031733C Method for forming probe and apparatus therefor |
| 09/29/1994 | WO1994021839A1 Apparatus and system for arc ion plating |
| 09/29/1994 | DE4408523A1 Device with a charged beam |
| 09/28/1994 | EP0617454A1 Method and structure for electronically measuring beam parameters |
| 09/28/1994 | EP0617453A1 Charged particle analyser |
| 09/28/1994 | EP0617452A1 Charged particle analyser |
| 09/28/1994 | EP0617451A1 Imaging electron energy filter |
| 09/28/1994 | EP0616729A1 Semiconductor device and microwave process for its manufacture. |
| 09/27/1994 | US5350974 Coaxial electromagnetic wave injection and electron cyclotron resonance ion source |
| 09/27/1994 | US5350926 Compact high current broad beam ion implanter |
| 09/27/1994 | US5350924 Ion-optical imaging system |
| 09/27/1994 | US5350921 Analytical electron microscope and a method of operating such an electron microscope |
| 09/27/1994 | US5350920 Ion beam analyzing apparatus |
| 09/27/1994 | US5350918 Transmission electron microscope |
| 09/27/1994 | US5350499 Method of producing microscopic structure |
| 09/27/1994 | US5350454 Plasma processing apparatus for controlling plasma constituents using neutral and plasma sound waves |
| 09/22/1994 | DE4409374A1 Electron-beam lithography device with an electron-optics correction system |
| 09/22/1994 | DE4335400C1 Device for treating substrates between magnetron cathodes arranged mirror-symmetrically |
| 09/21/1994 | EP0616192A1 Scanning probe microscope and method for measuring surfaces by using this microscope |
| 09/21/1994 | EP0615655A1 Corona discharge ionisation source. |
| 09/21/1994 | EP0615552A1 Process and device for coating substrate bodies with hard substances. |
| 09/21/1994 | EP0432189B1 Process and device for measuring states and variations over time of a signal |
| 09/20/1994 | US5349197 Method for exposing a pattern on an object by a charged particle beam |
| 09/20/1994 | US5349196 Ion implanting apparatus |
| 09/20/1994 | US5348638 Chemical adsorption |
| 09/20/1994 | US5348614 Process for dynamic control of the concentration of one or more reactants in a plasma-enhanced process for formation of integrated circuit structures |
| 09/20/1994 | US5348497 High voltage vaccum feed-through electrical connector |
| 09/15/1994 | WO1994020977A1 Method of triggering gas discharges |
| 09/15/1994 | WO1994020972A1 Inductive coil for inductively coupled plasma production apparatus |
| 09/14/1994 | EP0615273A1 Method and apparatus for detection of sputtering target erosion |
| 09/14/1994 | EP0615272A1 Guiding structure for electrically charged particles |
| 09/14/1994 | EP0615123A1 Method and apparatus for surface analysis |
| 09/14/1994 | EP0614997A1 High-power target and process for production of such a target |
| 09/14/1994 | EP0573421B1 Installation for the study or transformation of sample surfaces in a vacuum or controlled atmosphere |
| 09/14/1994 | EP0570389B1 Method and device for contactless measurement of the voltage in an object with an insulating surface |
| 09/13/1994 | US5347592 Pattern judging method and mask producing method using the pattern judging method |
| 09/13/1994 | US5347460 Method and system employing optical emission spectroscopy for monitoring and controlling semiconductor fabrication |
| 09/13/1994 | US5347132 Position sensitive detector providing position information with enhanced reliability and performance |
| 09/13/1994 | US5346600 Carbides, nitrides |
| 09/13/1994 | US5346582 Dry etching apparatus |
| 09/13/1994 | US5346579 Magnetic field enhanced plasma processing chamber |
| 09/13/1994 | US5346578 Integrated circuit fabrication |
| 09/13/1994 | US5346554 Apparatus for forming a thin film |
| 09/13/1994 | US5345815 Atomic force microscope having cantilever with piezoresistive deflection sensor |
| 09/08/1994 | DE4407044A1 Maske und Verfahren zu deren Herstellung Mask and method for their preparation |
| 09/08/1994 | DE4306611A1 Device for the surface treatment of substrates by means of plasma influence |
| 09/08/1994 | DE4306603A1 Acoustic microscope |
| 09/07/1994 | EP0614177A2 Information recording and reproducing apparatus using probe |
| 09/07/1994 | EP0404799B1 Integrated scanning tunneling microscope |
| 09/06/1994 | US5345207 Magnet configuration with permanent magnets |
| 09/06/1994 | US5345145 Method and apparatus for generating highly dense uniform plasma in a high frequency electric field |
| 09/06/1994 | US5345085 Method and structure for electronically measuring beam parameters |
| 09/06/1994 | US5345080 Method of observing electron microscopic images and an apparatus for carrying out of the same |
| 09/06/1994 | US5344542 Multiple-processing and contamination-free plasma etching system |
| 09/06/1994 | US5344536 Method of and apparatus for processing a workpiece in plasma |