| Patents for H01J 37 - Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof (46,866) |
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| 02/27/2014 | US20140054458 Scanning Transmission Electron Microscopy for Imaging Extended Areas |
| 02/27/2014 | US20140054165 Carbon spark evaporation |
| 02/27/2014 | US20140053778 Ion implantation apparatus |
| 02/27/2014 | DE112012002533T5 Tischbaugruppe und Steuerungsverfahren für eine Tischbaugruppe Table assembly and control method for an assembly table |
| 02/27/2014 | DE102013108850A1 Ionenquellenvorrichtungen und -verfahren Ion source apparatus and methods |
| 02/26/2014 | EP2701178A2 Electron beam exposure system |
| 02/26/2014 | EP2701006A2 Method for preparing a pattern to be printed on a plate or mask by electron beam lithography, corresponding printed circuit design system and computer program |
| 02/26/2014 | EP2700163A1 Method for impedance matching and high frequency power supply |
| 02/26/2014 | EP2700083A1 Method for supplying sequential power impulses |
| 02/26/2014 | EP2700082A1 High-power sputtering source |
| 02/26/2014 | EP2700081A2 Network architecture for lithography machine cluster |
| 02/26/2014 | EP2699966A2 Network architecture and protocol for cluster of lithography machines |
| 02/26/2014 | EP2699886A2 Automated sample preparation |
| 02/26/2014 | EP2699709A1 High power impulse magnetron sputtering method providing enhanced ionization of the sputtered particles and apparatus for its implementation |
| 02/26/2014 | EP2699708A2 Lithium sputter targets |
| 02/26/2014 | CN103608893A Method for supplying sequential power impulses |
| 02/26/2014 | CN103608892A Facility for microwave treatment of a load |
| 02/26/2014 | CN103608891A Charged particle beam device and sample production method |
| 02/26/2014 | CN103608890A Stage device and control method for stage device |
| 02/26/2014 | CN103608483A High power impulse magnetron sputtering method providing enhanced ionization of the sputtered particles and apparatus for its implementation |
| 02/26/2014 | CN103608482A Sliding element, in particular piston ring, having a coating and process for producing a sliding element |
| 02/26/2014 | CN103606530A Method for fault detection in plasma etching process of fusion function data description |
| 02/26/2014 | CN103606508A Processing device for granular material surface plasma |
| 02/26/2014 | CN103606507A Plasma processing device for sheet material |
| 02/26/2014 | CN102148125B Plasma processing apparatus |
| 02/26/2014 | CN102067270B Low-inertia multi-axis multi-directional mechanically scanned ion implantation system |
| 02/26/2014 | CN101855534B Method and apparatus of automatic scanning probe imaging |
| 02/25/2014 | US8658985 Drawing apparatus and method of manufacturing article |
| 02/25/2014 | US8658973 Auger elemental identification algorithm |
| 02/25/2014 | US8658010 Filtered cathodic arc deposition method and apparatus |
| 02/25/2014 | CA2791249C Method and system for ion beam delayering of a sample and control thereof |
| 02/25/2014 | CA2601722C Hard material layer |
| 02/22/2014 | CA2823169A1 Housing for holding a flat screen |
| 02/20/2014 | WO2014028488A1 Method of performing edx in a charged–particle microscope |
| 02/20/2014 | WO2014028290A1 Inductively coupled plasma ion source with multiple antennas for wide ion beam |
| 02/20/2014 | WO2013171216A9 Charged particle multi-beamlet lithography system and cooling arrangement manufacturing method |
| 02/20/2014 | WO2013132081A4 Lithography system and method for processing a target, such as a wafer |
| 02/20/2014 | US20140051254 Movable chamber liner plasma confinement screen combination for plasma processing apparatuses |
| 02/20/2014 | US20140048720 Sample holder of electron beam exposure apparatus and electron beam exposure method using the same |
| 02/20/2014 | US20140048707 Optical Characterization Systems Employing Compact Synchrotron Radiation Sources |
| 02/20/2014 | US20140048211 Plasma processing apparatus |
| 02/20/2014 | US20140048210 Substrate processing apparatus |
| 02/20/2014 | US20140048209 Ignition apparatus for arc sources |
| 02/20/2014 | DE112010000717B4 Plasmaverarbeitungsvorrichtung Plasma processing apparatus |
| 02/20/2014 | DE102013108586A1 Probenhalter eines Elektronenstrahlbestrahlungsgeräts und diesen verwendendes Elektronenstrahlbestrahlungsverfahren Sample holder of an electron beam irradiation apparatus and these-use electron beam irradiation method |
| 02/19/2014 | EP2698815A2 Method and apparatus for plasma dicing a semi-conductor wafer |
| 02/19/2014 | EP2698814A2 Method and apparatus for plasma dicing a semi-conductor wafer |
| 02/19/2014 | EP2698813A2 Method and apparatus for plasma dicing a semi-conductor wafer |
| 02/19/2014 | EP2698805A1 Method of performing EDX in a charged-particle microscope |
| 02/19/2014 | EP2697817A1 Carbon spark evaporation |
| 02/19/2014 | EP2697816A1 Process for plasma treatment employing ceramic-filled polymer composite parts |
| 02/19/2014 | EP2697815A1 Combine apparatus of scanning electron microscope and energy dispersive x-ray spectroscopy |
| 02/19/2014 | CN103597572A Charged particle system for processing a target surface |
| 02/19/2014 | CN103597571A 带电粒子装置 Charged particle device |
| 02/19/2014 | CN103597570A Spin rotation device |
| 02/19/2014 | CN103594553A Array type silicon wafer loading target disk |
| 02/19/2014 | CN103594352A Substrate processing method |
| 02/19/2014 | CN103594320A Surface plasma treatment device applied to normal pressure ecomaterial |
| 02/19/2014 | CN103594319A Powder material surface plasma processing device |
| 02/19/2014 | CN103594318A Plasma circular processing device |
| 02/19/2014 | CN103594317A Improved type powder material surface plasma processing device |
| 02/19/2014 | CN103594316A Plasma baffle ring for a plasma processing apparatus and method of use |
| 02/19/2014 | CN103594315A Plasma processing equipment |
| 02/19/2014 | CN103594314A Gas phase etching equipment with multiple cavities |
| 02/19/2014 | CN103594313A A gas distribution apparatus and a plasma processing apparatus containing the same |
| 02/19/2014 | CN103594312A Dotted high current ion implanter |
| 02/19/2014 | CN103594311A Method for introducing punctiform ion beam injecting machine into mass production |
| 02/19/2014 | CN103594310A High-temperature secondary electronic detector collection assembly and high-temperature scanning electron microscope |
| 02/19/2014 | CN103594309A An oxide etching method and apparatus |
| 02/19/2014 | CN102677008B Online preparation device of coating of electric conduction electrode of solar battery |
| 02/19/2014 | CN101986777B Copper discoloration prevention following bevel etch process |
| 02/19/2014 | CN101755322B 等离子体反应器 Plasma reactor |
| 02/18/2014 | US8653807 Apparatus and method for measuring ion beam current |
| 02/18/2014 | US8653488 Electron beam apparatus |
| 02/18/2014 | US8653486 Method and apparatus for improved uniformity control with dynamic beam shaping |
| 02/18/2014 | US8653485 Projection lens arrangement |
| 02/18/2014 | US8653474 Charged particle extraction device and method of design there for |
| 02/18/2014 | US8653459 Scanning electron microscope |
| 02/13/2014 | WO2014025611A1 Techniques for improving the performance and extending the lifetime of an ion source |
| 02/13/2014 | WO2013190349A4 Rf feed line |
| 02/13/2014 | US20140042338 Stage apparatus and charged particle beam apparatus |
| 02/13/2014 | US20140042334 Method of and system for exposing a target |
| 02/13/2014 | US20140042318 Sample holding apparatus for electron microscope, and electron microscope apparatus |
| 02/13/2014 | US20140042317 Parallel radial mirror analyser for scanning microscopes |
| 02/13/2014 | US20140042123 Plasma processing apparatus and plasma processing method |
| 02/13/2014 | US20140041805 Substrate processing apparatus and gas supply apparatus |
| 02/13/2014 | US20140041684 Techniques For Improving The Performance And Extending The Lifetime Of An Ion Source |
| 02/13/2014 | DE19842477B9 Verfahren zum Bestrahlen von strangförmigem Bestrahlgut sowie Bestrahlungsvorrichtung zur Durchführung des Verfahrens A method of irradiating strand-Bestrahlgut and irradiation apparatus for carrying out the method |
| 02/13/2014 | DE112012002145T5 Ladungsteilchenstrahlvorrichtung und Probenherstellungsverfahren A charged particle beam and sample preparation procedure |
| 02/13/2014 | DE102012015482A1 Elektrodenanordnung für ein behindertes Plasma Electrode assembly for a disabled plasma |
| 02/13/2014 | DE102009014067B4 Plasmabearbeitungsvorrichtung The plasma processing apparatus |
| 02/12/2014 | EP2696364A1 Ion beam device and machining method |
| 02/12/2014 | EP2696363A1 Electron microscope |
| 02/12/2014 | EP2695969A1 Thin film deposition apparatus and method of depositing thin film using the same |
| 02/12/2014 | EP2695179A1 Apparatus for treating two opposed surfaces by ion bombardment |
| 02/12/2014 | EP2694954A1 Methods, apparatuses and computer programs for crystallography |
| 02/12/2014 | EP2694941A2 Method for extracting frozen specimens and manufacture of specimen assemblies |
| 02/12/2014 | EP2694700A1 Atomic layer deposition with plasma source |
| 02/12/2014 | EP2694697A1 Tubular target having a protective device |
| 02/12/2014 | EP2694695A1 Improved method of controlling lithium uniformity |