Patents
Sitemap › H01 - Basic electric elements › H01J - Electric discharge tubes or discharge lamps › H01J 37 - Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
Patents for H01J 37 - Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof (46,866)
03/2014
03/12/2014CN103632998A Plasma processing device
03/12/2014CN103632993A A real time monitoring apparatus and a method
03/12/2014CN103632954A Plasma-enhanced etching in an augmented plasma processing system
03/12/2014CN103632927A Impedance matching method of plasma etching system
03/12/2014CN103632917A Normal pressure plasma processing device for continuous material surface
03/12/2014CN103632916A Symmetric return liner for modulating azimuthal non-uniformity in a plasma processing system
03/12/2014CN103632915A Electronic knob for tuning radial etch non-uniformity at VHF frequencies
03/12/2014CN103632914A Plasma processing apparatus and plasma processing method
03/12/2014CN103632913A Plasma processing device
03/12/2014CN103632912A Electron microscopy imaging system and method
03/12/2014CN103632911A Ion source devices and methods
03/12/2014CN102509689B Objective anastigmator of electronic microscope
03/12/2014CN102394211B Control equipment of tungsten growth and method thereof
03/12/2014CN102315150B Movable ground ring for plasma processing chamber
03/12/2014CN102142351B In-chamber member and substrate mounting table in plasma processing apparatus
03/12/2014CN101678497B Gas distributor comprising plurality of diffusion-welded panes and method for production of such gas distributor
03/11/2014US8669540 System and method for gas leak control in a substrate holder
03/11/2014US8669539 Implant method and implanter by using a variable aperture
03/11/2014US8669538 Method of improving ion beam quality in an implant system
03/11/2014US8669534 Electrostatic lens for charged particle radiation
03/11/2014US8669525 Sample inspection methods, systems and components
03/11/2014US8669524 Scanning incremental focus microscopy
03/11/2014US8669523 Contour-based defect detection using an inspection apparatus
03/11/2014US8669522 Mask inspection apparatus and mask inspection method
03/11/2014US8669517 Mass analysis variable exit aperture
03/11/2014US8668816 Self-ionized and inductively-coupled plasma for sputtering and resputtering
03/10/2014DE202014100594U1 Endblock-Anordnung End block assembly
03/06/2014WO2014036130A2 Method and apparatus for a porous electrospray emitter
03/06/2014WO2014036064A1 Silicon-containing dopant compositions, systems and methods of use thereof for improving ion beam current and performance during silicon ion implantation
03/06/2014WO2014035688A1 Method and apparatus for a large area inductive plasma source
03/06/2014WO2014035344A1 Apparatus and method of producing diamond
03/06/2014WO2014035238A1 Microscopic imaging apparatus and method to detect a microscopic image
03/06/2014WO2014034277A1 Electron microscope and electron microscope image acquisition method
03/06/2014WO2014034276A1 Sample transport apparatus
03/06/2014WO2014034252A1 Defect observation system and defect observation method
03/06/2014WO2014009883A3 Device and process for preventing substrate damages in a dbd plasma installation
03/06/2014WO2013190358A3 Plasma processing system with movable plasma chamber housing parts
03/06/2014US20140065549 Drawing apparatus and method of manufacturing article
03/06/2014US20140065547 Charged particle beam apparatus, drawing apparatus, and method of manufacturing article
03/06/2014US20140062495 Systems and methods for monitoring faults, anomalies, and other characteristics of a switched mode ion energy distribution system
03/06/2014US20140062305 Secondary Plasma Detection Systems and Methods
03/06/2014US20140062300 Plasma microwave resonant cavity
03/06/2014US20140061502 Specimen holder for holding a semiconductor device during a sample preparation procedure carried out using first and second sample preparation apparatuses
03/06/2014US20140061501 Silicon-containing dopant compositions, systems and methods of use thereof for improving ion beam current and performance during silicon ion implantation
03/06/2014US20140061499 Charged particle beam pattern writing method and charged particle beam writing apparatus
03/06/2014US20140061497 Charged particle lithography system with intermediate chamber
03/06/2014US20140061465 Electron beam detector, electron beam processing apparatus, and method of manufacturing electron beam detector
03/06/2014US20140061464 Method of Investigating and Correcting Aberrations in a Charged-Particle Lens System
03/06/2014US20140061463 Imaging a sample in a tem equipped with a phase plate
03/06/2014US20140061461 Defect inspection apparatus, defect inspection method and non-transitory computer readable recording medium
03/06/2014US20140061456 Coordinate correcting method, defect image acquiring method and electron microscope
03/06/2014US20140061455 Image quality adjusting method, non-transitory computer-readable recording medium, and electron microscope
03/06/2014US20140061159 Composite charged particle beam apparatus and thin sample processing method
03/06/2014US20140061157 Plasma source with integral blade and method for removing materials from substrates
03/06/2014US20140061156 Wide dynamic range ion energy bias control; fast ion energy switching; ion energy control and a pulsed bias supply; and a virtual front panel
03/06/2014US20140060739 Rf ground return in plasma processing systems and methods therefor
03/06/2014US20140060738 Apparatus for treating substrate
03/06/2014US20140060736 Templates including self-assembled block copolymer films
03/06/2014DE112012002175T5 Fertigstellungsvorrichtung und Verfahren, die/das einen Elektronenstrahl und einen lonenstrahl verwendet Finishing apparatus and methods / uses an electron beam and an ion beam
03/06/2014DE102013217140A1 Ladungsträgerteilchenstrahl-Musterschreibverfahren und Ladungsträgerteilchenstrahl-Schreibvorrichtung Charged particle pattern writing method and charged particle-writer
03/06/2014DE102013216475A1 Anorganischer festkörper-werkstoff und schneidenwerkzeug Inorganic solids-material and cutting tool
03/06/2014DE102013108587A1 Elektronenstrahldetektor, Elektronenstrahlarbeitsgerät und Verfahren zur Herstellung eines Elektronenstrahldetektors Electron beam detector, electron work device and method for producing an electron beam detector
03/06/2014DE102012017453A1 Plasmabehandlungseinrichtung und Verfahren zur Behandlung zumindest eines Substrats Plasma treatment device and method for treating at least one substrate
03/05/2014EP2704179A2 Dose-based end-pointing for low-kv FIB milling in TEM sample preparation
03/05/2014EP2704178A1 Imaging a sample in a TEM equipped with a phase plate
03/05/2014EP2704177A1 Method of investigating and correcting aberrations in a charged-particle lens system
03/05/2014EP2703521A1 Forming method and apparatus for amorphous carbon films
03/05/2014EP2702604A1 Facility for microwave treatment of a load
03/05/2014EP2702603A2 Method and apparatus for processing a substrate with a fo-cussed particle beam
03/05/2014EP2702595A1 Charged particle system comprising a manipulator device for manipulation of one or more charged particle beams
03/05/2014CN203466163U Reaction cavity and dry-etching equipment
03/05/2014CN203466162U Convertible gas cluster and atom ion gun
03/05/2014CN103620731A High-power sputtering source
03/05/2014CN103620730A Method and system for controlling critical dimension and roughness in resist features
03/05/2014CN103620729A E-beam enhanced decoupled source for semiconductor processing
03/05/2014CN103620728A Phase plate, and electron microscope
03/05/2014CN103620693A Charged particle system comprising a manipulator device for manipulation of one or more charged particle beams
03/05/2014CN102347197B Method for dynamically detecting etched end point
03/05/2014CN102270557B Ion implantation apparatus
03/04/2014US8666165 Scanning electron microscope
03/04/2014US8664619 Hybrid electrostatic lens for improved beam transmission
03/04/2014US8664598 Electron microscope and specimen analyzing method
03/04/2014US8664596 Method for characterizing identified defects during charged particle beam inspection and application thereof
03/04/2014US8662010 Plasma processing apparatus, plasma processing method, plasma film deposition apparatus, and plasma film deposition method
02/2014
02/27/2014WO2014031208A2 Shock-resistant image intensifier
02/27/2014WO2014031156A1 Apparatus for cylindrical magnetron sputtering
02/27/2014WO2014030725A1 Plasma processing apparatus
02/27/2014WO2014030435A1 Observation device and light axis adjustment method
02/27/2014WO2014030433A1 Composite charged particle beam device
02/27/2014WO2014030430A1 Charged particle beam device and sample observation method
02/27/2014WO2014030429A1 Charged particle beam device and objective lens
02/27/2014WO2014030425A1 Electron microscope and sample movement device
02/27/2014WO2014029963A1 Method of treating a porous substrate and manufacture of a membrane
02/27/2014WO2013186697A3 Device for generating plasma and directing an electron beam towards a target
02/27/2014WO2013104583A3 Apparatus and method for surface processing of a substrate
02/27/2014US20140057212 Transmission apparatus, drawing apparatus, and method of manufacturing article
02/27/2014US20140057206 Drawing apparatus and method of manufacturing article
02/27/2014US20140054809 Method and apparatus for a porous electrospray emitter
02/27/2014US20140054469 Method for acquiring settling time
02/27/2014US20140054468 Chromatic Aberration Corrector and Method of Controlling Same
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