| Patents for H01J 37 - Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof (46,866) |
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| 10/30/1997 | WO1997040515A1 Generation of electrical discharges with transient voltage pulses |
| 10/30/1997 | WO1997040493A1 Thin-film magnetic recording heads and systems and methods for manufacturing the same |
| 10/30/1997 | DE19711501A1 Electron beam generator for electron microscope |
| 10/30/1997 | DE19654000C1 Apparatus for cathode sputtering |
| 10/30/1997 | DE19643098C1 Apparatus for cathode sputtering |
| 10/30/1997 | DE19605136A1 Plasma processing apparatus for high or ultra-high vacuum operation |
| 10/30/1997 | CA2252979A1 Thin-film magnetic recording heads and systems and methods for manufacturing the same |
| 10/29/1997 | EP0803897A2 Electrode for plasma etching |
| 10/29/1997 | EP0803896A2 Plasma processing system and protective member used for the same |
| 10/29/1997 | EP0803895A2 Electrode for plasma etching |
| 10/29/1997 | EP0803894A1 Combined ion beam and microwave irradiation means and method |
| 10/29/1997 | EP0803893A2 Vacuum evaporator |
| 10/29/1997 | EP0803587A1 Method and apparatus for sputter coating |
| 10/29/1997 | CN1163585A Electromechanical positioning unit |
| 10/28/1997 | US5682104 Electron beam tester and testing method using the same |
| 10/28/1997 | US5682067 Circuit for reversing polarity on electrodes |
| 10/28/1997 | US5681424 Plasma processing method |
| 10/28/1997 | US5681418 Plasma processing with inductive coupling |
| 10/28/1997 | US5681393 Plasma processing apparatus |
| 10/23/1997 | WO1997039607A1 Plasma treatment device |
| 10/23/1997 | WO1997039472A1 Use of a cleaning process, a cleaning process, a connecting process and work piece pair |
| 10/23/1997 | WO1997039161A1 Cathodic sputtering device |
| 10/23/1997 | CA2251602A1 Cathodic sputtering device |
| 10/22/1997 | EP0802560A1 Process and electromagnetically coupled plasma apparatus for etching oxides |
| 10/22/1997 | EP0801811A1 Electron beam lithography machine |
| 10/22/1997 | EP0801810A2 Specimen holder for an electron microscope and device and method for mounting a specimen in an electron microscope |
| 10/22/1997 | EP0801809A2 Discharge methods and electrodes for generating plasmas at one atmosphere of pressure, and materials treated therewith |
| 10/22/1997 | EP0728224A4 Apparatus for a thin film manufacturing |
| 10/21/1997 | US5680013 Ceramic protection for heated metal surfaces of plasma processing chamber exposed to chemically aggressive gaseous environment therein and method of protecting such heated metal surfaces |
| 10/21/1997 | US5679952 Scanning probe microscope |
| 10/21/1997 | US5679214 Removing polymer form inside surface of window by injecting oxygen |
| 10/21/1997 | US5679204 Chemical reactor and gas supply pipes having aluminum alloy with magnesium, free of surface coatings; corrosion resistance, chemical resistance |
| 10/16/1997 | WO1997038149A1 Cathodic arc cathode |
| 10/16/1997 | DE19614599A1 Apparatus for cathode sputtering in substrate coating installations |
| 10/16/1997 | DE19614598A1 Vorrichtung zur Kathodenzerstäubung Apparatus for sputtering |
| 10/16/1997 | DE19614595A1 Apparatus for cathode sputtering in substrate coating |
| 10/16/1997 | DE19614487A1 Sputtering cathode used in substrate coating |
| 10/15/1997 | EP0801416A1 Plasma processing chamber with epicyclic magnet source assembly |
| 10/15/1997 | EP0801415A2 A magnetron for low pressure, full face erosion |
| 10/15/1997 | EP0801414A2 Gas-controlled arc vapor deposition apparatus and process |
| 10/15/1997 | EP0801413A1 Inductively coupled plasma reactor with faraday-sputter shield |
| 10/15/1997 | EP0801143A1 Apparatus for masking or covering of substrates |
| 10/14/1997 | US5677597 Electron flow accelerating method and apparatus which can generate a high-power beam |
| 10/14/1997 | US5677542 A stimulable phosphor sheet can emit light when scanning with rays |
| 10/14/1997 | US5677531 Scanning electron microscope |
| 10/14/1997 | US5677530 Scanning electron microscope |
| 10/14/1997 | US5677109 Method for E-beam writing |
| 10/14/1997 | US5677012 Plasma processing method and plasma processing apparatus |
| 10/14/1997 | US5677010 Method for producing a polymer coating inside hollow plastic articles |
| 10/14/1997 | US5676810 Target mounting-demounting arrangement |
| 10/14/1997 | US5676803 Vacuum chamber comprising a magnetron and a insulating barrier positioning between magnetron and backing of target |
| 10/14/1997 | US5676758 CVD apparatus |
| 10/14/1997 | CA2069708C Probe-driving mechanism, production thereof, and apparatus and piezoelectric actuator employing the same |
| 10/12/1997 | CA2201810A1 Gas-controlled arc apparatus and process |
| 10/09/1997 | WO1997037518A1 Methods and apparatuses for controlling phase difference in plasma processing systems |
| 10/09/1997 | WO1997037371A1 Magnet array for magnetrons |
| 10/09/1997 | WO1997037059A1 Showerhead for uniform distribution of process gas |
| 10/09/1997 | WO1997037055A1 Plasma device and method utilizing azimuthally and axially uniform electric field |
| 10/09/1997 | DE19610253A1 Sputtering apparatus for coating glass, packaging material, tools etc. |
| 10/08/1997 | EP0800200A2 Plasma applicators |
| 10/08/1997 | EP0800199A2 Electrode for supporting a sample in a scanning electron microscope |
| 10/08/1997 | EP0799557A1 High frequency induction plasma method and apparatus |
| 10/08/1997 | CN1161563A Method and apparatus for ion beam transport |
| 10/08/1997 | CN1036079C Apparatus for rapid plasma treatments |
| 10/07/1997 | US5675154 Scanning probe microscope |
| 10/07/1997 | US5675148 Scanning reflection electron diffraction microscope |
| 10/07/1997 | US5674573 Irradiation of hydrocarbon gas plasma generated in first vacuum vessel onto substrate within second vessel at lower pressure due to gas flow resistance between vessels |
| 10/07/1997 | US5674367 Sputtering target having a shrink fit mounting ring |
| 10/07/1997 | US5674321 Method and apparatus for producing plasma uniformity in a magnetic field-enhanced plasma reactor |
| 10/02/1997 | WO1997036462A1 Device and method for plasma treatment |
| 10/02/1997 | WO1997036461A1 Device and method for plasma treatment |
| 10/02/1997 | WO1997036022A1 Plasma producing method and apparatus including an inductively-coupled plasma source |
| 10/02/1997 | DE19709761A1 Electron beam exposure apparatus for semiconductor circuit manufacture |
| 10/02/1997 | DE19700856A1 Ion source for ion beam system, e.g. for doping semiconductors |
| 10/02/1997 | DE19610492A1 Elektronenstrahlanlage Electron-beam system |
| 10/01/1997 | EP0797838A1 Method and apparatus for plasma processing |
| 10/01/1997 | EP0797688A1 Method for deposition of diamondlike carbon films |
| 09/30/1997 | US5672882 Ion implantation device with a closed-loop process chamber pressure control system |
| 09/30/1997 | US5672879 System and method for producing superimposed static and time-varying magnetic fields |
| 09/30/1997 | US5672255 Sputtering device |
| 09/30/1997 | CA2107795C Processes for electron lithography |
| 09/25/1997 | WO1997035325A1 Electron bombardment installation |
| 09/25/1997 | WO1997035235A1 Improved photomask |
| 09/25/1997 | WO1997035044A1 Method and apparatus for rf diode sputtering |
| 09/25/1997 | WO1997035043A1 Target, magnetron source with said target, and process for producing said target |
| 09/24/1997 | EP0797236A2 A charged particle beam exposure method and an apparatus therefor |
| 09/24/1997 | EP0797233A2 Thin-film electron emitter device and application equipment using the same |
| 09/24/1997 | EP0796505A1 Plasma reactor and method of operating the same |
| 09/24/1997 | EP0796355A1 Apparatus for generating plasma by plasma-guided microwave power |
| 09/24/1997 | CN1160333A Ion-implanter having variable ion angle control |
| 09/24/1997 | CN1160287A Method and apparatus for ion beam formation in ion implanter |
| 09/23/1997 | US5670785 Charge converter provided in an ion implantation apparatus |
| 09/23/1997 | US5670782 Scanning electron microscope and speciman observation method thereby |
| 09/23/1997 | US5670415 Method and apparatus for vacuum deposition of highly ionized media in an electromagnetic controlled environment |
| 09/23/1997 | US5670224 Modified silicon oxide barrier coatings produced by microwave CVD deposition on polymeric substrates |
| 09/23/1997 | US5670217 Method for capturing and removing contaminant particles from an interior region of an ion implanter |
| 09/23/1997 | US5669975 Plasma producing method and apparatus including an inductively-coupled plasma source |
| 09/23/1997 | US5669583 Method and apparatus for covering bodies with a uniform glow discharge plasma and applications thereof |
| 09/18/1997 | WO1997034450A1 Particulate contamination removal from wafers using plasmas and mechanical agitation |
| 09/18/1997 | WO1997034319A1 Manufacture of semiconductor device |