| Patents for H01J 37 - Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof (46,866) |
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| 04/15/2014 | US8698079 Method for scanning electron microscope observation of sample floating on liquid surface |
| 04/15/2014 | US8698078 Charged-particle microscopy with occlusion detection |
| 04/15/2014 | US8696878 Wafer processing deposition shielding components |
| 04/15/2014 | US8696875 Self-ionized and inductively-coupled plasma for sputtering and resputtering |
| 04/15/2014 | CA2492174C Vacuum sputtering cathode |
| 04/15/2014 | CA2492172C Cathode for vacuum sputtering treatment machine |
| 04/10/2014 | WO2014055484A1 System and method for compressed data transmission in a maskless lithography system |
| 04/10/2014 | WO2014055417A1 Reducing glitching in an ion implanter |
| 04/10/2014 | WO2014055182A1 Implant-induced damage control in ion implantation |
| 04/10/2014 | WO2014054852A1 Holder device for electron microscope |
| 04/10/2014 | WO2014054477A1 Charged particle beam device, position adjusting method for diaphragm, and diaphragm position adjusting jig |
| 04/10/2014 | WO2014053209A1 Process for producing a metallic borocarbide layer on a substrate |
| 04/10/2014 | WO2013171216A4 Charged particle multi-beamlet lithography system and cooling arrangement manufacturing method |
| 04/10/2014 | US20140098380 Method for Preparing Specimens for Microscopy |
| 04/10/2014 | US20140098211 System, method and computed readable medium for evaluating a parameter of a feature having nano-metric dimensions |
| 04/10/2014 | US20140097362 System and Method for Compressed Data Transmission in a Maskless Lithography System |
| 04/10/2014 | US20140097342 Electron microscope and image capturing method using electron beam |
| 04/10/2014 | US20140097341 In-column detector for particle-optical column |
| 04/10/2014 | US20140096908 Distributed multi-zone plasma source systems, methods and apparatus |
| 04/10/2014 | DE112012003028T5 Elektronenmikroskop Electron microscope |
| 04/10/2014 | DE10340147B4 Trockenätzverfahren und Trockenätzvorrichtung Dry etching and dry etching |
| 04/10/2014 | DE102013211807A1 Glühkathode mit langer Lebensdauer und grosser Helligkeit und Verfahren zu ihrer Herstellung Thermionic cathode with long life and high brightness and processes for their preparation |
| 04/10/2014 | DE102012109424A1 Sputtermagnetron und Verfahren zur dynamischen Magnetfeldbeeinflussung Sputtering magnetron and method for the dynamic magnetic field influencing |
| 04/09/2014 | EP2716792A1 Process for the manufacture of local nanostructures of high purity material |
| 04/09/2014 | EP2715768A2 Charged particle multi-beamlet apparatus |
| 04/09/2014 | EP2715767A1 Apparatus and method for investigating an object |
| 04/09/2014 | EP2715766A2 Methods and systems for material characterization |
| 04/09/2014 | CN103718269A Sputter-etch tool and liners |
| 04/09/2014 | CN103718268A Charged particle beam apparatus |
| 04/09/2014 | CN103718267A Charged particle beam device |
| 04/09/2014 | CN103715113A Method and device for etching rate uniformity monitoring |
| 04/09/2014 | CN103715052A Hybrid impedance matching for inductively coupled plasma system |
| 04/09/2014 | CN103715051A Apparatus and method for treating plasma |
| 04/09/2014 | CN103715050A Substrate supporting assembly and substrate treating apparatus |
| 04/09/2014 | CN103715049A Plasma processing apparatus and method for adjusting process rate of marginal area of substrate |
| 04/09/2014 | CN103715048A Ion implantation machine vertical direction ion beam angle measurement and control system and measurement method |
| 04/09/2014 | CN103710673A Sputtering magnetron and method for dynamically influencing the magnetic field |
| 04/08/2014 | US8692217 Multi-source plasma focused ion beam system |
| 04/08/2014 | US8692216 Ion implantation apparatus and control method thereof |
| 04/08/2014 | US8692215 Heated rotary seal and bearing for chilled ion implantation system |
| 04/08/2014 | US8692197 Scanning electron microscope optical condition setting method and scanning electron microscope |
| 04/08/2014 | US8692195 Charged particle radiation device |
| 04/08/2014 | US8692194 Electron microscope device |
| 04/08/2014 | US8692193 Method for inspecting EUV reticle and apparatus thereof |
| 04/08/2014 | US8691048 Plasma stabilization method and plasma apparatus |
| 04/08/2014 | US8689733 Plasma processor |
| 04/03/2014 | WO2014051431A1 Multi-axis differential interferometer |
| 04/03/2014 | WO2014050326A1 Electron microscope and electron beam detector |
| 04/03/2014 | WO2014050242A1 Charged particle radiation device |
| 04/03/2014 | WO2014049696A1 Semiconductor device manufacturing method and semiconductor manufacturing apparatus |
| 04/03/2014 | US20140092231 Charged particle microscope device and image capturing method |
| 04/03/2014 | US20140091237 Ion Beam Sample Preparation Apparatus and Methods |
| 04/03/2014 | US20140091232 Charged particle beam apparatus and electrostatic chuck apparatus |
| 04/03/2014 | US20140091229 Electrode for a charged particle beam lens |
| 04/03/2014 | US20140091215 Electro-optical inspection apparatus and method with dust or particle collection function |
| 04/03/2014 | US20140090783 Apparatus for treating substrate |
| 04/03/2014 | US20140090598 Isotopically-enriched boron-containing compounds, and methods of making and using same |
| 04/03/2014 | DE112012002805T5 Ladungsteilchenstrahlvorrichtung Charged particle |
| 04/03/2014 | DE102012109296A1 Method for operating particle beam apparatus and for analyzing object in e.g. electron beam apparatus, involves generating calculated three-dimensional representation of object, and analyzing three-dimensional representation of object |
| 04/02/2014 | CN103703537A Scanning electron microscope and scanning tunneling electron microscope |
| 04/02/2014 | CN103703536A Multiple-column electron beam apparatus and methods |
| 04/02/2014 | CN103700564A Preparation device for molded interconnection device |
| 04/02/2014 | CN103700563A Method, device and system for synchronizing scanning signals for scanning electron microscope with power frequency |
| 04/02/2014 | CN103700562A Height adjustment type scanning electron microscope sampler holder |
| 04/02/2014 | CN102144275B Low pressure high frequency pulsed plasma reactor for producing nanoparticles |
| 04/02/2014 | CN102017053B Projection lens arrangement |
| 04/01/2014 | US8686379 Method and apparatus for preparing serial planar cross sections |
| 04/01/2014 | US8686378 Charged particle beam drawing apparatus, and method of manufacturing article |
| 04/01/2014 | US8686360 Micro-sample processing method, observation method and apparatus |
| 04/01/2014 | US8686351 Systems and methods for transfer of ions for analysis |
| 04/01/2014 | US8685215 Mechanism for continuously varying radial position of a magnetron |
| 04/01/2014 | US8685213 Method and apparatus for plasma generation |
| 03/27/2014 | WO2014045746A1 Charged particle microscope system and measurement method using same |
| 03/27/2014 | WO2014043865A1 Apparatus for adjusting divergence angle of divergent beam |
| 03/27/2014 | WO2014022844A3 In-vacuum high speed pre-chill and post-heat stations |
| 03/27/2014 | US20140085024 Racetrack-shaped magnetic-field-generating apparatus for magnetron sputtering |
| 03/27/2014 | US20140084160 Photon induced near field electron microscope and biological imaging system |
| 03/27/2014 | US20140084159 Scanning electron microscope and method for preparing specimen |
| 03/27/2014 | US20140084158 Scanning Electron Microscope |
| 03/27/2014 | US20140084157 System and Method for Ex Situ Analysis of a Substrate |
| 03/27/2014 | US20140083978 Temperature controlled plasma processing chamber component with zone dependent thermal efficiences |
| 03/27/2014 | US20140083977 Plasma processing apparatus and plasma processing method |
| 03/27/2014 | US20140083976 Cluster beam generating apparatus, substrate processing apparatus, cluster beam generating method, and substrate processing method |
| 03/27/2014 | US20140083975 Plasma processing method |
| 03/27/2014 | US20140083615 Antenna assembly and a plasma processing chamber having the same |
| 03/27/2014 | DE112012002450T5 Probenvorbereitungsvorrichtung, Probenvorbereitungsverfahren und Ladungsteilchenstrahlvorrichtung damit Sample preparation apparatus, sample preparation method and charged particle beam so |
| 03/27/2014 | DE112008000115B4 Messverfahren und Messeinrichtung für eine Plasmaversorgungseinrichtung Measurement methods and apparatus for a plasma power supply |
| 03/26/2014 | EP2711967A1 Scanning electron microscope |
| 03/26/2014 | EP2711684A2 Substrate, method for its creation, and system and method for ex situ TEM, STEM, or SEM analysis of said substrate |
| 03/26/2014 | EP2711443A1 Gas injector and injector pipe thereof |
| 03/26/2014 | EP2710620A1 Method for splitting a pattern for use in a multi-beamlet lithography apparatus |
| 03/26/2014 | CN203503602U Etching structure |
| 03/26/2014 | CN203503601U ICP (inductively coupled plasma) etching device for wafers |
| 03/26/2014 | CN203503600U Scanning electron microscope multipurpose sample bench |
| 03/26/2014 | CN103688335A Electron microscope |
| 03/26/2014 | CN103688334A Method and apparatus for controlling an electrostatic lens about a central ray trajectory of an ion beam |
| 03/26/2014 | CN103688333A Focusing a charged particle imaging system |
| 03/26/2014 | CN103681300A Plasma treatment device |
| 03/26/2014 | CN103681265A Ion implantation method and ion implantation apparatus |
| 03/26/2014 | CN103681201A Sputtering ring and production method thereof |