| Patents for H01J 37 - Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof (46,866) |
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| 04/28/1999 | CN1215094A Non-balance plane magnetic controlled sputtering cathode and film plating device thereof |
| 04/27/1999 | US5898752 X-ray analysis apparatus provided with a double collimator mask |
| 04/27/1999 | US5898269 Electron sources having shielded cathodes |
| 04/27/1999 | US5898179 Method and apparatus for controlling a workpiece in a vacuum chamber |
| 04/27/1999 | US5898177 Electron microscope |
| 04/27/1999 | US5897978 Mask data generating method and mask for an electron beam exposure system |
| 04/27/1999 | US5897923 Plasma treatment device |
| 04/27/1999 | US5897753 Continuous deposition of insulating material using multiple anodes alternated between positive and negative voltages |
| 04/27/1999 | US5897752 Vacuum chamber containing a ring surrounding the wafer substrate clamped to pedestal so that the ring rises up toward target and its electrical bias controls plasma potential |
| 04/27/1999 | US5897713 Plasma generating apparatus |
| 04/27/1999 | US5897712 Plasma uniformity control for an inductive plasma source |
| 04/22/1999 | WO1999020087A2 System for plasma ignition by fast voltage rise |
| 04/22/1999 | WO1999019898A2 Method and apparatus to produce large inductive plasma for plasma processing |
| 04/22/1999 | WO1999019537A1 Dual frequency excitation of plasma for film deposition |
| 04/22/1999 | WO1999019526A2 Apparatus and method for adjusting density distribution of a plasma |
| 04/22/1999 | WO1999004606A3 Compact microwave downstream plasma system |
| 04/22/1999 | DE19837516A1 Thin film is formed by a combined sputter and vapor deposition process |
| 04/22/1999 | DE19813199A1 Plasma generator with microwave waveguide |
| 04/22/1999 | DE19744060A1 Method for surface treating of substrates |
| 04/22/1999 | CA2376059A1 Method and apparatus to produce large inductive plasma for plasma processing |
| 04/21/1999 | EP0910110A2 Method for operating a high power electron beam |
| 04/21/1999 | EP0910109A1 Objective lens |
| 04/21/1999 | EP0910108A1 Electron beam lens |
| 04/21/1999 | EP0909445A1 Recording media having protective overcoats of highly tetrahedral amorphous carbon and methods for their production |
| 04/21/1999 | EP0784861B1 Apparatus and method for magnetron in-situ cleaning of plasma reaction chamber |
| 04/21/1999 | EP0753081B1 An electron jet vapor deposition system |
| 04/20/1999 | US5896012 Metal ion plasma generator having magnetic field forming device located such that a triggering is between the magnetic field forming device and an anode |
| 04/20/1999 | US5895925 Mask used in charged particle beam projecting apparatus and method for dividing pattern |
| 04/20/1999 | US5895924 Charged particle beam exposure method and apparatus |
| 04/20/1999 | US5895923 Ion beam shield for implantation systems |
| 04/20/1999 | US5895919 Gun lens for generating a particle beam |
| 04/20/1999 | US5895917 Detector objective lens |
| 04/20/1999 | US5895916 Method and apparatus for adjusting electron beam apparatus |
| 04/20/1999 | US5895736 Radiating beam uniform in current density through aperture plate to electron resist layer |
| 04/20/1999 | US5895586 Plasma processing apparatus and plasma processing method in which a part of the processing chamber is formed using a pre-fluorinated material of aluminum |
| 04/20/1999 | US5895559 To prevent arc jumping and cathode damage |
| 04/20/1999 | US5895558 Surface treating polymer by applying asymmetrical voltage pulse to affect wettability |
| 04/20/1999 | US5895551 Plasma etching apparatus |
| 04/20/1999 | US5895548 High power microwave plasma applicator |
| 04/20/1999 | US5895531 Apparatus and polymerization gun for coating objects by vacuum deposit |
| 04/15/1999 | WO1999018594A1 Apparatus for process monitoring of a semiconductor wafer and a method of fabricating same |
| 04/15/1999 | WO1999018593A1 Method and device for surface-treating substrates |
| 04/15/1999 | WO1999000689A3 Test slide for microscopes and method for the production of such a slide |
| 04/15/1999 | DE19752202C1 Micromechanical device production involving ion deposition on substrate region |
| 04/14/1999 | EP0908924A1 Device for the condensation deposition of a film on a substrate |
| 04/14/1999 | EP0908923A2 Method and apparatus to produce large inductive plasma for plasma processing |
| 04/14/1999 | EP0908922A1 Process chamber for plasma processing and apparatus employing said process chamber |
| 04/14/1999 | EP0908921A1 Process chamber for plasma enhanced chemical vapour deposition and apparatus employing said process chamber |
| 04/14/1999 | EP0908719A1 Stage unit used for sample positioning and scanning probe microscope with such a stage unit |
| 04/14/1999 | EP0908535A1 Process for cleaning a substrate and apparatus for carrying out the process |
| 04/14/1999 | EP0908531A2 Apparatus and method for forming a thin film of a compound |
| 04/14/1999 | CN1213848A Spatially uniform gas supply and pump configuration for large wafer diameters |
| 04/13/1999 | US5894132 Charged-particle-beam projection-exposure apparatus with focus and tilt adjustments |
| 04/13/1999 | US5894131 Implanting at least one of arsenic, boron, phosphorous into a substrate |
| 04/13/1999 | US5894124 Scanning electron microscope and its analogous device |
| 04/13/1999 | US5894057 Defining the positin of stripe field and sub-field, with respect to mask or wafer surface, developing drawing pattern definition data overlapping the stripe field defined |
| 04/13/1999 | US5893962 Electrode unit for in-situ cleaning in thermal CVD apparatus |
| 04/08/1999 | WO1999017336A1 Insulating ceramic coated metallic part in a plasma sputter reactor |
| 04/08/1999 | WO1999017335A1 Dual face shower head electrode for a magnetron plasma generating apparatus |
| 04/08/1999 | WO1999017334A1 Method and apparatus for treating the inside surface of plastic bottles in a plasma enhanced process |
| 04/08/1999 | WO1999017333A1 Device and method for treating the inside surface of a plastic container with a narrow opening in a plasma enhanced process |
| 04/08/1999 | WO1999017332A1 Electron beam microscope using electron beam patterns |
| 04/08/1999 | WO1999017125A1 Method and apparatus for probing an integrated circuit through the back side of an integrated circuit die |
| 04/08/1999 | WO1999016928A1 Large area microwave plasma apparatus with adaptable applicator |
| 04/08/1999 | WO1999016925A1 Improved methods and apparatus for physical vapor deposition |
| 04/08/1999 | WO1999004412A3 Target cathode assembly |
| 04/08/1999 | CA2304613A1 Method and apparatus for treating the inside surface of plastic bottles in a plasma enhanced process |
| 04/08/1999 | CA2304224A1 Large area microwave plasma apparatus with adaptable applicator |
| 04/07/1999 | EP0907076A2 Methods of fabricating integrated, aligned tunneling tip pairs |
| 04/07/1999 | EP0906716A1 Circuit for reversing polarity on electrodes |
| 04/07/1999 | EP0906637A1 Gas delivery systems for particle beam processing |
| 04/07/1999 | EP0906636A1 Highly tetrahedral amorphous carbon films and methods for their production |
| 04/07/1999 | EP0906589A1 Apertured nonplanar electrodes and forming methods |
| 04/07/1999 | CN2313295Y Assembling device for filament assemble of electron microscope |
| 04/07/1999 | CN1213317A Method and apparatus for inactivating contaminants in biological fluid |
| 04/07/1999 | CN1213157A Methods for performing planarization and recess etches and apparatus therefor |
| 04/06/1999 | US5892328 High-power, plasma-based, reactive species generator |
| 04/06/1999 | US5892237 Charged particle beam exposure method and apparatus |
| 04/06/1999 | US5892236 Part for ion implantation device |
| 04/06/1999 | US5892235 Apparatus and method for doping |
| 04/06/1999 | US5892231 Virtual mask digital electron beam lithography |
| 04/06/1999 | US5892230 Scintillating fiducial patterns |
| 04/06/1999 | US5892224 Apparatus and methods for inspecting wafers and masks using multiple charged-particle beams |
| 04/06/1999 | US5892223 Multilayer microtip probe and method |
| 04/06/1999 | US5892198 Method of and apparatus for electronically controlling r.f. energy supplied to a vacuum plasma processor and memory for same |
| 04/06/1999 | US5891350 Adjusting DC bias voltage in plasma chambers |
| 04/06/1999 | US5891349 Plasma enhanced CVD apparatus and process, and dry etching apparatus and process |
| 04/06/1999 | US5891348 Process gas focusing apparatus and method |
| 04/06/1999 | US5891312 Forming a thin metal coating on a substrate |
| 04/06/1999 | US5891311 Sputter coating system and method using substrate electrode |
| 04/06/1999 | US5891253 Corrosion resistant apparatus |
| 04/06/1999 | US5891252 Plasma processing apparatus |
| 04/01/1999 | WO1999016117A1 Method and apparatus for plasma processing, and method for manufacturing semiconductor substrate |
| 04/01/1999 | WO1999016108A2 Method and apparatus for fault detection and control |
| 04/01/1999 | WO1999016101A2 Charged particle beam emitting assembly |
| 04/01/1999 | WO1999015884A1 Monolayer analysis using dynamic secondary ion mass spectrometry |
| 04/01/1999 | WO1999015711A1 Laminate comprising a barrier layer of silicon oxide |
| 04/01/1999 | DE19741708A1 Apparatus for coating a substrate with thin layers |
| 04/01/1999 | DE19740792A1 Verfahren zur Erzeugung eines Plasmas durch Einstrahlung von Mikrowellen A method of generating a plasma by microwave irradiation |
| 03/31/1999 | EP0905758A2 Methods for performing planarization and recess etches and apparatus therefor |