Patents
Sitemap › H01 - Basic electric elements › H01J - Electric discharge tubes or discharge lamps › H01J 37 - Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
Patents for H01J 37 - Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof (46,866)
05/2014
05/21/2014CN103811257A 离子注入装置及离子注入方法 Means of ion implantation and ion implantation method
05/21/2014CN103811256A 离子注入装置、射束平行化装置及离子注入方法 An ion implantation apparatus, the beam collimating means and the ion implantation method
05/21/2014CN103811255A 离子注入装置及离子注入方法 Means of ion implantation and ion implantation method
05/21/2014CN103811254A 宽束离子源增加反射极的装置 Broad beam ion source increases repeller device
05/21/2014CN103811253A 一种引出限流的装置 An apparatus for limiting lead
05/21/2014CN103811252A 一种用于离子引出的引出抑制电极 A method for inhibiting ion extraction electrode lead-out
05/21/2014CN103811251A 一种离子注入系统中束流均匀性调节装置 An ion implantation system, the beam uniformity of the adjusting means
05/21/2014CN103811250A 一种闭环控制淋浴枪的方法 A closed-loop control method shower gun
05/21/2014CN103811249A 等离子体处理装置以及等离子体处理方法 The plasma processing apparatus and plasma processing method
05/21/2014CN103811248A 利用离子束以及可变孔隙在衬底上进行离子注入的方法 Pores with an ion beam on the substrate, and a variable ion implantation method
05/21/2014CN103811247A 用于等离子体刻蚀的聚焦环及具有其的等离子体刻蚀装置 Focus ring for plasma etching and plasma etching apparatus has its
05/21/2014CN103811246A 加热装置及等离子体加工设备 The heating means and the plasma processing equipment
05/21/2014CN103807471A 一种真空隔离安全阀装置 A vacuum isolation valve device
05/21/2014CN103807454A 阀板连接组件、门阀装置及等离子体加工设备 Valve plate connector assembly, the gate valve apparatus and plasma processing equipment
05/21/2014CN103807154A 一种离子注入机冷泵的控制方法 An ion implantation method for controlling the pump Cold
05/21/2014CN102067271B 子束阻断器装置 Beamlet blanker means
05/20/2014US8729510 Ion beam sample preparation apparatus and methods
05/20/2014US8729509 Drawing apparatus and method of manufacturing article
05/20/2014US8729507 Multi charged particle beam writing method and multi charged particle beam writing apparatus
05/20/2014US8729498 High throughput UV curing systems and methods of curing a plurality of articles
05/20/2014US8729497 Sample device for charged particle beam
05/20/2014US8729492 Methods, devices, and systems for manipulating charged particle streams
05/20/2014US8729491 Charged particle beam apparatus
05/20/2014US8729471 Electron detector including an intimately-coupled scintillator-photomultiplier combination, and electron microscope and X-ray detector employing same
05/20/2014US8729470 Electron microscope with an emitter operating in medium vacuum
05/20/2014US8729469 Multiple sample attachment to nano manipulator for high throughput sample preparation
05/20/2014US8729468 Microelectronic substrate inspection equipment using helium ion microscopy
05/20/2014US8729466 Aberration-corrected and energy-filtered low energy electron microscope with monochromatic dual beam illumination
05/20/2014US8728779 Processing biomass
05/20/2014US8728588 Method of treating a surface of at least one part by means of individual sources of an electron cyclotron resonance plasma
05/20/2014US8728287 Oxynitride sputtering target
05/20/2014US8726838 Combinatorial plasma enhanced deposition and etch techniques
05/15/2014WO2014074649A1 Methods for directed irradiation synthesis with ion and thermal beams
05/15/2014WO2014074414A1 Reducing glitching in an ion implanter
05/15/2014WO2014022872A3 Apparatus and method for the plasma coating of a substrate, in particular a press platen
05/15/2014US20140137059 Method and apparatus for plasma processing
05/15/2014US20140131590 Charged particle beam apparatus
05/15/2014US20140131589 Electron beam exposure apparatus and method
05/15/2014US20140131575 Cross-section processing and observation method and cross-section processing and observation apparatus
05/15/2014US20140131574 Control imaging methods in advanced ultrafast electron microscopy
05/15/2014US20140131572 Automated Sample Oreintation
05/15/2014US20140131563 Method for detecting electron beam of scanning electron microscope and for detecting fine patterns
05/15/2014US20140131315 Method of processing a material-specimen
05/15/2014US20140131311 Thin film forming apparatus and thin film forming method using the same
05/15/2014US20140131195 Dual Laser Beam System Used With an Electron Microscope and FIB
05/15/2014US20140130980 Plasma generation apparatus and plasma generation method
05/15/2014DE102013112492A1 Querschnittbearbeitungs- und -beobachtungsverfahren und Querschnitbearbeitungs- und -beobachtungsvorrichtung Querschnittbearbeitungs- and -beobachtungsverfahren and Querschnitbearbeitungs- and -beobachtungsvorrichtung
05/14/2014EP2729955A1 Apparatus and method for the pretreatment and/or for the coating of an article in a vacuum chamber with a hipims power source
05/14/2014CN1979119B 透射型电子显微镜用的试样制作方法、观察方法以及结构 The method of making a sample with a transmission electron microscope, the observation method and the structure
05/14/2014CN103797351A 掠射角铣削 Glancing angle milling
05/14/2014CN103797156A 用于线性沉积腔室中的气体分布与等离子体应用的方法与设备 Linear deposition method for the gas distribution chamber and the plasma application of the device
05/14/2014CN103794538A 静电卡盘以及等离子体加工设备 An electrostatic chuck and a plasma processing equipment
05/14/2014CN103794527A 静电卡盘加热方法及系统 Electrostatic chuck heating method and system
05/14/2014CN103794462A 一种超声波雾化等离子体处理装置 An ultrasonic atomizing plasma processing apparatus
05/14/2014CN103794461A 一种等离子体处理装置 A plasma processing apparatus
05/14/2014CN103794460A 用于半导体装置性能改善的涂层 Used for a semiconductor device improved coating properties
05/14/2014CN103794459A 用于等离子处理腔室的气体喷淋头及其涂层形成方法 And coating the gas shower head for plasma processing method for forming a chamber
05/14/2014CN103794458A 用于等离子体处理腔室内部的部件及制造方法 Inside the plasma processing chamber components, and a method for producing
05/14/2014CN103794457A 一种等离子体处理设备及其中的温度隔离装置 A plasma processing apparatus and the temperature of the isolator device
05/14/2014CN103794456A 刻蚀机台的结构及刻蚀方法 Structure and etching method of etching machine
05/14/2014CN103794455A 一种减速电极驱动装置 An electrode driving means deceleration
05/14/2014CN103794454A 一种束流均匀性调节装置 One kind of beam uniformity adjustment device
05/14/2014CN103794453A 一种双灯丝等离子淋浴装置 A dual filament plasma shower unit
05/14/2014CN103794452A 一种控制离子注入均匀分布的方法 A control method for a uniform distribution of the ion implantation
05/14/2014CN103794451A 监测扫描电子显微镜的电子束状态的方法和装置 Methods and apparatus for monitoring the electron beam scanning electron microscope a state
05/14/2014CN103794450A 具有杂散电子抑制功能的电子注轴向速度测量腔体 With a stray electronic suppression of electron beam axial velocity measuring chamber
05/14/2014CN103794449A 电子注轴向速度测量系统 Electron beam axial velocity measurement system
05/14/2014CN103794448A 一种垂直方向角度测量的装置 The vertical direction of the angle measurement device
05/14/2014CN103794447A 一种离子束采集系统与离子束采集方法 An ion-beam acquisition system and an ion beam acquisition method
05/14/2014CN103794446A 一种垂直方向角度测量的系统 The vertical direction angle measurement system
05/14/2014CN103794445A 用于等离子体处理腔室的静电夹盘组件及制造方法 The plasma processing chamber assembly, and the electrostatic chuck manufacturing method for
05/13/2014US8723144 Apparatus for sample formation and microanalysis in a vacuum chamber
05/13/2014US8723138 Electron beam source and method of manufacturing the same
05/13/2014US8723134 Electrostatic corrector
05/13/2014US8723117 Switchable multi perspective detector, optics therefor and method of operating thereof
05/13/2014US8723116 Method of determining an applicable threshold for determining the critical dimension of at least one category of patterns imaged by atomic force scanning electron microscopy
05/13/2014US8723114 Sequential radial mirror analyser
05/13/2014US8721846 Method of forming film, film forming apparatus and storage medium
05/13/2014US8721791 Showerhead support structure for improved gas flow
05/08/2014WO2014071091A1 Method and system for improving critical dimension uniformity using shaped beam lithography
05/08/2014WO2014070656A1 Fourier ptychographic imaging systems, devices, and methods
05/08/2014WO2014069470A1 Sample storage container, charged particle beam apparatus, and image acquiring method
05/08/2014WO2014069364A1 Charged particle beam apparatus and observation method using same
05/08/2014WO2014069325A1 Electron beam microscope apparatus
05/08/2014WO2014069271A1 Charged particle beam apparatus
05/08/2014WO2014068689A1 Spectroscopic element and charged particle beam device using same
05/08/2014WO2014067650A1 Power distributor for defined sequential power distribution
05/08/2014WO2014042531A3 Double tilt holder and multicontact device
05/08/2014WO2014036130A3 Method and apparatus for a porous electrospray emitter
05/08/2014US20140127914 Charged particle beam writing apparatus and charged particle beam writing method
05/08/2014US20140126801 Microscopy Visualization
05/08/2014US20140124684 Multi charged particle beam writing method and multi charged particle beam writing apparatus
05/08/2014US20140124667 System And Method For Electromagnetic Interference Shielding For Critical Dimension-Scanning Electron Microscope
05/08/2014US20140124666 Charged Particle Beam Device
05/08/2014US20140124665 Radiation detector, radiation detection apparatus, and x-ray analyzer
05/08/2014US20140124664 Device for correcting diffraction aberration of electron beam
05/08/2014US20140124367 Sample preparation apparatus, sample preparation method, and charged particle beam apparatus using the same
05/08/2014US20140124364 Plasma generation source including belt-type magnet and thin film deposition system using this
05/08/2014US20140124139 Plasma processing apparatus and method
05/08/2014US20140123898 Charged particle beam device
1 ... 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 ... 469