| Patents for H01J 37 - Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof (46,866) |
|---|
| 06/18/2014 | CN203659813U 一种干刻设备的电极和干刻设备 One kind of dry etching and dry etching apparatus of an electrode device |
| 06/18/2014 | CN203659796U 一种超声波雾化等离子体处理装置 An ultrasonic atomizing plasma processing apparatus |
| 06/18/2014 | CN203659795U 一种镀膜设备 One kind of coating equipment |
| 06/18/2014 | CN103875057A Mass spectrometer |
| 06/18/2014 | CN103875056A Method and apparatus for protecting passive components connected to a radio-frequency generator |
| 06/18/2014 | CN103874780A Drill having a coating |
| 06/18/2014 | CN103874316A Laboratory inductive-plasma treatment device |
| 06/18/2014 | CN103874315A Plasma generating device with moving carousel and method of use |
| 06/18/2014 | CN103871947A Clamping device and plasma processing device |
| 06/18/2014 | CN103871936A Device for separating top electrode and cooling disk |
| 06/18/2014 | CN103871819A Large-size chamber for forming HJT of high uniformity |
| 06/18/2014 | CN103871818A Upper electrode of dry etching chamber and method for manufacturing same |
| 06/18/2014 | CN103871817A Signal filtering mechanism for sensing coupling plasma etching machine |
| 06/18/2014 | CN103871816A Sensor used for matcher, matcher with sensor and plasma equipment with matcher |
| 06/18/2014 | CN103871815A Semiconductor processing device and method for processing semiconductor wafer |
| 06/18/2014 | CN103871814A Semiconductor ultra shallow junction preparation method |
| 06/18/2014 | CN103871813A Method for improving uniformity of semiconductor ion implantation |
| 06/18/2014 | CN103871812A Ion injection device |
| 06/18/2014 | CN103871811A Charged particle radiation device and detector |
| 06/18/2014 | CN103871810A Method and system for determining value of variable on radio frequency (RF) transmission model |
| 06/18/2014 | CN103871809A Wide-beam ion source device used for ion implanter |
| 06/18/2014 | CN102446683B Bottom-mounted lens coupled transmission electron microscope digital imaging device |
| 06/17/2014 | US8754372 Structure and method for determining a defect in integrated circuit manufacturing process |
| 06/17/2014 | US8753474 Method and apparatus for high efficiency gas dissociation in inductive couple plasma reactor |
| 06/12/2014 | WO2014086237A1 Plasma device and reaction chamber thereof |
| 06/12/2014 | WO2014018694A3 Ion beam sample preparation apparatus and methods |
| 06/12/2014 | US20140162463 Plasma etching method and plasma etching apparatus |
| 06/12/2014 | US20140159572 Method for processing a gas and a device for performing the method |
| 06/12/2014 | US20140158951 Zn-Si-O-BASED OXIDE SINTERED BODY, METHOD FOR PRODUCING THE SAME, AND TRANSPARENT CONDUCTIVE FILM |
| 06/12/2014 | US20140158907 Specimen Positioning Device, Charged Particle Beam System, and Specimen Holder |
| 06/12/2014 | US20140158903 Drawing apparatus and method of manufacturing article |
| 06/12/2014 | US20140158902 Particle-Optical Systems and Arrangements and Particle-Optical Components for such Systems and Arrangements |
| 06/12/2014 | US20140158901 Chromatic aberration corrector and electron microscope |
| 06/12/2014 | US20140158886 Electron beam apparatus |
| 06/12/2014 | US20140158885 Testing apparatus using charged particles and device manufacturing method using the testing apparatus |
| 06/12/2014 | US20140158884 Method for operating a particle beam device and/or for analyzing an object in a particle beam device |
| 06/12/2014 | US20140158883 Characterization of nanoscale structures using an ultrafast electron microscope |
| 06/12/2014 | US20140158302 Microwave radiation antenna, microwave plasma source and plasma processing apparatus |
| 06/12/2014 | US20140158154 Method of modifying electrostatic chuck and plasma processing apparatus |
| 06/12/2014 | US20140158048 Method and apparatus for cleaning a cvd chamber |
| 06/12/2014 | US20140158047 Plasma generation apparatus, deposition apparatus, and deposition method |
| 06/12/2014 | US20140157914 Apparatus for Preparing Specimens for Microscopy |
| 06/12/2014 | DE102013020399A1 Vorrichtung zur Korrektur chromatischer Aberration und Elektronenmikroskop Apparatus for correcting chromatic aberration and electron |
| 06/11/2014 | EP2741311A2 Specimen positioning device, charged particle beam system, and specimen holder |
| 06/11/2014 | EP2741310A1 System for detecting cathodoluminescence optimising the collection of the signal, the spectral resolution and the preservation of brightness, and microscope implementing such a system |
| 06/11/2014 | EP2740143A2 Method and device for controlling pattern and structure formation by an electric field |
| 06/11/2014 | EP2739764A2 Ion source |
| 06/11/2014 | EP2739719A2 System and method for tissue construction using an electric field applicator |
| 06/11/2014 | CN203644727U 一种离子注入机外部门状态监控装置 An ion implanter outside the state sector monitoring device |
| 06/11/2014 | CN203644726U 一种原位测量纳米器件的透射电镜样品台 An in-situ measurement of nanoscale devices TEM sample stage |
| 06/11/2014 | CN103858211A Electron beam lithography device and lithographic method |
| 06/11/2014 | CN103858204A Inspection or observation device and specimen inspection or observation method |
| 06/11/2014 | CN103855068A Manufacturing method for surface bumps of electrostatic adsorption plate in dry etching device |
| 06/11/2014 | CN103855065A Workpiece locating system, loading system and plasma processing device |
| 06/11/2014 | CN103854993A Atmosphere plasma chemistry planarization method and device |
| 06/11/2014 | CN103854947A Power switching system for esc with array of thermal control elements |
| 06/11/2014 | CN103854946A Method and apparatus for preventing the occurrence of plasma un-confinement events in plasma processing chamber |
| 06/11/2014 | CN103854945A Plasma equipment and reaction chamber thereof |
| 06/11/2014 | CN103854944A Gas leading-in structure and gas leading-in method of etching equipment cavity |
| 06/11/2014 | CN103854943A Confinement ring and chamber cleaning method applicable to plasma processing chamber |
| 06/11/2014 | CN103854942A Ion implantation apparatus |
| 06/11/2014 | CN103854941A Method of performing tomographic imaging of sample in charged-particle microscope |
| 06/11/2014 | CN102634761B Method for magnetic filtration of strip-sectional vacuum cathodic arc plasma |
| 06/11/2014 | CN102157345B Plasma reactor and etching method using the same |
| 06/10/2014 | US8748845 Ion sources, systems and methods |
| 06/10/2014 | US8748844 Sample analyzing apparatus and sample analyzing method |
| 06/10/2014 | US8748843 Charged particle beam drawing apparatus and charged particle beam drawing method |
| 06/10/2014 | US8748819 Transmission electron microscopy system and method of operating a transmission electron microscopy system |
| 06/10/2014 | US8748818 Incoherent transmission electron microscopy |
| 06/10/2014 | US8748816 Clustering of multi-modal data |
| 06/10/2014 | US8748815 Method and system for detecting or reviewing open contacts on a semiconductor device |
| 06/10/2014 | US8748814 Structure for inspecting defects in word line array fabricated by SADP process and method thereof |
| 06/10/2014 | US8748773 Ion plasma electron emitters for a melting furnace |
| 06/10/2014 | US8747963 Apparatus and method for diamond film growth |
| 06/10/2014 | US8746174 Discharge surface treatment apparatus and discharge surface treatment method |
| 06/10/2014 | DE202008018481U1 Magnetronplasmaanlage Magnetronplasmaanlage |
| 06/05/2014 | WO2014085406A1 Tilt-imaging scanning electron microscope |
| 06/05/2014 | WO2014084172A1 Charged-particle beam device |
| 06/05/2014 | WO2014084095A1 Charged particle beam device and program |
| 06/05/2014 | WO2014083246A1 Ion implanter provided with a plurality of plasma source bodies |
| 06/05/2014 | WO2014083054A1 Device and method for sterilizing containers, comprising an x-ray radiation monitoring system |
| 06/05/2014 | US20140154629 Lithography apparatus and method of manufacturing article |
| 06/05/2014 | US20140152189 Plasma pulse tracking system and method |
| 06/05/2014 | US20140151573 Multi-energy ion implantation |
| 06/05/2014 | US20140151571 Charged particle beam lens and exposure apparatus using the same |
| 06/05/2014 | US20140151570 Charged particle beam lens and exposure apparatus using the same |
| 06/05/2014 | US20140151555 Electron microscope |
| 06/05/2014 | US20140151554 System and Method for Controlling Charge-up in an Electron Beam Apparatus |
| 06/05/2014 | US20140151553 Charged particle beam device, method for adjusting charged particle beam device, and method for inspecting or observing sample |
| 06/05/2014 | US20140151552 Tilt-imaging scanning electron microscope |
| 06/05/2014 | US20140151551 Methods and apparatus for measurement of relative critical dimensions |
| 06/05/2014 | US20140151333 Small Plasma Chamber Systems and Methods |
| 06/05/2014 | US20140151332 Substrate supporting unit and substrate treating apparatus and method |
| 06/05/2014 | US20140151331 Deposition shield for plasma enhanced substrate processing |
| 06/05/2014 | US20140150975 Plasma processing device |
| 06/05/2014 | DE112012003887T5 lonenquelle und lonenstrahlvorrichtung, bei der diese verwendet wird ion source and lonenstrahlvorrichtung in which it is used |
| 06/05/2014 | DE112012003809T5 Untersuchungs- und Betrachtungsvorrichtung und Probenuntersuchungs- und Betrachtungsverfahren Examination and viewing device and Probenuntersuchungs- and observation method |
| 06/05/2014 | DE112012003268T5 Elektronenquelle vom elektrischen Feldentladungstyp Electron source by the electric field discharge type |
| 06/05/2014 | DE102011105713B4 Elektrodenanordnung für eine dielektrisch behinderte Gasentladung Electrode assembly for a dielectric barrier discharge gas |
| 06/04/2014 | EP2738787A1 Method of performing tomographic imaging of a sample in a charged-particle microscope |