| Patents for H01J 37 - Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof (46,866) |
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| 07/08/2003 | US6589611 Forming a material along the sidewalls during the forming of the deposit over the substrate; impacting the material along the sidewalls with the activated species to treat the material and thereby decrease flaking |
| 07/08/2003 | US6589437 Active species control with time-modulated plasma |
| 07/08/2003 | US6589407 Aluminum deposition shield |
| 07/08/2003 | US6589350 Vacuum processing chamber with controlled gas supply valve |
| 07/08/2003 | US6588090 Fabrication method of high precision, thermally stable electromagnetic coil vanes |
| 07/08/2003 | CA2248250C Device for generating powerful microwave plasmas |
| 07/03/2003 | WO2003055287A2 Plasma reactor with overhead rf electrode tuned to the plasma with arcing suppression |
| 07/03/2003 | WO2003055286A1 High-frequency power source and its control method, and plasma processor |
| 07/03/2003 | WO2003054949A1 Substrate processing method and substrate processing apparatus |
| 07/03/2003 | WO2003054947A1 Ring mechanism, and plasma processing device using the ring mechanism |
| 07/03/2003 | WO2003054941A1 Plasma treatment apparatus and control method thereof |
| 07/03/2003 | WO2003054940A1 Plasma treatment apparatus, matching box, impedance matching device, and coupler |
| 07/03/2003 | WO2003054913A2 Gas distribution plate electrode for a plasma reactor |
| 07/03/2003 | WO2003054912A1 Method and apparatus comprising a magnetic filter for plasma processing a workpiece |
| 07/03/2003 | WO2003054911A2 Plasma process apparatus |
| 07/03/2003 | WO2003054910A1 Device for treating objects by plasma deposition |
| 07/03/2003 | WO2003054909A1 Scanning electron microscope assembly and method for using same |
| 07/03/2003 | WO2003054248A1 Plasma chamber insert ring |
| 07/03/2003 | WO2003054245A1 Device for producing pcvd coated glass tubes for the drawing of optical fibers |
| 07/03/2003 | WO2003032434B1 Plasma production device and method and rf driver circuit |
| 07/03/2003 | WO2002103337A3 Electron beam apparatus and method for using said apparatus |
| 07/03/2003 | WO2002091453A9 High pressure wafer-less auto clean for etch applications |
| 07/03/2003 | US20030125874 Method of presuming traffic conditions by using floating car data and system for presuming and presenting traffic conditions by using floating data |
| 07/03/2003 | US20030124876 Apparatus and method for use in manufacturing a semiconductor device |
| 07/03/2003 | US20030124846 Multi-step process for depositing copper seed layer in a via |
| 07/03/2003 | US20030124442 Electron beam exposure method using variable backward scattering coefficient and computer-readable recording medium having thereof |
| 07/03/2003 | US20030124250 Device for producing PCVD coated glass tubes for the drawing of optical fibers |
| 07/03/2003 | US20030123992 Linear inductive plasma pump for process reactors |
| 07/03/2003 | US20030122091 Maskless photon-electron spot-grid array printer |
| 07/03/2003 | US20030122090 Ion beam processing method and apparatus therefor |
| 07/03/2003 | US20030122089 Ion sources for ion implantation apparatus |
| 07/03/2003 | US20030122088 Scan methods and apparatus for ion implantation |
| 07/03/2003 | US20030122087 Exposure apparatus, control method thereof, and device manufacturing method |
| 07/03/2003 | US20030122085 Field ionization ion source |
| 07/03/2003 | US20030122076 Charged-particle beam apparatus equipped with aberration corrector |
| 07/03/2003 | US20030122075 Design for an electron holography microscope |
| 07/03/2003 | US20030122074 Scanning electron microscope |
| 07/03/2003 | US20030121887 Multi-component substances and processes for preparation thereof |
| 07/03/2003 | US20030121886 Method of adjusting the thickness of an electrode in a plasma processing system |
| 07/03/2003 | US20030121609 Plasma etching device |
| 07/03/2003 | US20030121474 Apparatus for fixing an electrode in plasma polymerizing apparatus |
| 07/03/2003 | CA2469863A1 Device for treating objects by plasma deposition |
| 07/02/2003 | EP1324381A1 Workpiece holding mechanism |
| 07/02/2003 | EP1324371A1 Plasma processing apparatus |
| 07/02/2003 | EP1324073A2 Charged particle measuring apparatus |
| 07/02/2003 | EP1323671A1 Process for the fabrication of at least one nanotube between two electrically conductive elements and device for carrying out this process |
| 07/02/2003 | EP1323338A1 Electrode for glow-discharge atmospheric plasma treatment |
| 07/02/2003 | EP1323180A2 System, apparatus, and method for processing wafer using single frequency rf power in plasma processing chamber |
| 07/02/2003 | EP1323179A2 Wafer area pressure control for plasma confinement |
| 07/02/2003 | EP1322796A2 High purity sputter targets with target end-of-life indication and method of manufacture |
| 07/02/2003 | EP1322444A1 Method of manufacturing sputter targets with internal cooling channels |
| 07/02/2003 | EP1198611B1 Device for treating a container with microwave plasma |
| 07/02/2003 | EP1053563B1 Methods for reducing mask erosion during plasma etching |
| 07/02/2003 | EP0972284B1 Electric or electronic component and application as non volatile memory and device with surface acoustic waves |
| 07/02/2003 | EP0822996B1 Sputtering system using cylindrical rotating magnetron electrically powered using alternating current |
| 07/02/2003 | CN1428001A Control system for indirectly heated cathode ion source |
| 07/02/2003 | CN1427446A Ion injection device and method thereof |
| 07/02/2003 | CN1427445A Defect and conductivity processing method for conductive nano-structure |
| 07/02/2003 | CN1113397C Plasma processing method and apparatus |
| 07/01/2003 | US6587581 Visual inspection method and apparatus therefor |
| 07/01/2003 | US6587019 Dual directional harmonics dissipation system |
| 07/01/2003 | US6586887 High-frequency power supply apparatus for plasma generation apparatus |
| 07/01/2003 | US6586886 Gas distribution plate electrode for a plasma reactor |
| 07/01/2003 | US6586753 Electron beam apparatus and electron beam adjusting method |
| 07/01/2003 | US6586746 Multipole electrostatic e-beam deflector |
| 07/01/2003 | US6586737 Transmission electron microscope equipped with energy filter |
| 07/01/2003 | US6586736 Scanning electron beam microscope having an electrode for controlling charge build up during scanning of a sample |
| 07/01/2003 | US6586735 Method for detecting an element in a sample |
| 07/01/2003 | US6586733 Apparatus and methods for secondary electron emission microscope with dual beam |
| 07/01/2003 | US6586262 Etching end-point detecting method |
| 07/01/2003 | US6586055 Method for depositing functionally gradient thin film |
| 07/01/2003 | US6585908 Shallow angle interference process and apparatus for determining real-time etching rate |
| 07/01/2003 | US6585907 Method for manufacturing a shield for an inductively-couple plasma apparatus |
| 07/01/2003 | US6585871 Method of film deposition on substrate surface and substrate produced by the method |
| 07/01/2003 | US6585851 Plasma etching device |
| 06/26/2003 | WO2003052807A1 Plasma processor |
| 06/26/2003 | WO2003052806A1 Plasma treatment apparatus and plasma generation method |
| 06/26/2003 | WO2003052801A2 Wafer pad assembly |
| 06/26/2003 | WO2003052790A2 Lens array with a laterally movable optical axis for corpuscular rays |
| 06/26/2003 | WO2003052161A1 Method for connecting magnetic substance target to backing plate, and magnetic substance target |
| 06/26/2003 | WO2002003402A8 Device for orienting the direction of magnetization of magnetic layers |
| 06/26/2003 | US20030119328 Plasma processing apparatus, and cleaning method therefor |
| 06/26/2003 | US20030119215 Method and system for determining a performance of plasma etch equipment |
| 06/26/2003 | US20030117080 Applied plasma duct system |
| 06/26/2003 | US20030116722 Apparatus wherein ionizing radiation is generated |
| 06/26/2003 | US20030116721 Electron beam drawing apparatus |
| 06/26/2003 | US20030116720 Analyzer/observer |
| 06/26/2003 | US20030116718 System and method for electron beam irradiation |
| 06/26/2003 | US20030116717 Detector arrangement and detection method |
| 06/26/2003 | US20030116710 Method for increasing the measurement information available from a transmission electron microscope and a transmission electron microscopy device |
| 06/26/2003 | US20030116709 Scanning-type instrument utilizing charged-particle beam and method of controlling same |
| 06/26/2003 | US20030116432 Adjustable throw reactor |
| 06/26/2003 | US20030116427 Self-ionized and inductively-coupled plasma for sputtering and resputtering |
| 06/26/2003 | US20030116425 Electric arc spraying; controlling film thickness, surface roughness |
| 06/26/2003 | US20030116281 Atmospheric pressure plasma system |
| 06/26/2003 | US20030116277 Semiconductor etching apparatus and method of etching semiconductor devices using same |
| 06/26/2003 | US20030116090 Apparatus and method for direct current plasma immersion ion implantation |
| 06/26/2003 | US20030116089 Plasma implantation system and method with target movement |
| 06/25/2003 | EP1321963A1 Plasma processing method and plasma processing apparatus |
| 06/25/2003 | EP1321959A1 Ionizing radiation generating device |