| Patents for H01J 37 - Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof (46,866) |
|---|
| 08/07/2014 | US20140217894 Linear plasma source |
| 08/07/2014 | US20140217891 Electrode for plasma processing apparatus, method for manufacturing the same, and plasma processing apparatus |
| 08/07/2014 | US20140217881 Plasma generator, manufacturing method of rotating electrode for plasma generator, method for performing plasma treatment of substrate, and method for forming thin film having mixed structure by using plasma |
| 08/07/2014 | US20140217303 Particle beam system and method for operating the same |
| 08/07/2014 | US20140217283 TEM Sample Preparation |
| 08/07/2014 | US20140217274 Charged particle beam device |
| 08/07/2014 | US20140216928 Thin-film formation sputtering device |
| 08/07/2014 | US20140216924 Method and system for manufacturing a transparent body for use in a touch panel |
| 08/07/2014 | US20140216346 Plasma processing apparatus |
| 08/07/2014 | US20140216345 Plasma processing apparatus |
| 08/07/2014 | US20140216343 Plasma source and methods for depositing thin film coatings using plasma enhanced chemical vapor deposition |
| 08/07/2014 | DE112012004534T5 Ladungsteilchen-Strahlungsvorrichtung Charged particle radiation device |
| 08/07/2014 | DE112012003090T5 Emitter, Gasfeldionenquelle und Ionenstrahlvorrichtung Emitter gas field ion source and ion beam apparatus |
| 08/06/2014 | EP2762609A1 Common deposition platform, processing station and method of operation thereof |
| 08/06/2014 | EP2762608A1 Gas separation by adjustable separation wall |
| 08/06/2014 | EP2762607A1 Deposition source with adjustable electrode |
| 08/06/2014 | EP2761643A1 Method and apparatus for producing a reflection reducing layer on a substrate |
| 08/06/2014 | EP2761642A2 Inorganic materials, methods and apparatus for making same, and uses thereof |
| 08/06/2014 | EP2761357A1 Testing assembly including a multiple degree of freedom stage |
| 08/06/2014 | EP2761049A1 Process of coating a substrate with a thin film of metal or semiconductor compound |
| 08/06/2014 | CN203760420U 一种离子注入装置 An ion implantation apparatus |
| 08/06/2014 | CN103975413A 用于等离子体施加器的气体喷射器设备 Device for the plasma gas injector applicator |
| 08/06/2014 | CN103975234A 借助微探针分析辐照材料的分析装置 With microprobe analysis analyzer irradiated materials |
| 08/06/2014 | CN103975092A 在工件处理期间的电荷中和化的装置及其方法 In the charge neutralization of the workpiece during processing of the apparatus and method |
| 08/06/2014 | CN103972016A 磁控管组件及磁控溅射设备 Magnetron sputtering equipment and components |
| 08/06/2014 | CN103972015A 链式条件下的双频等离子发生器 Dual frequency plasma generator chained conditions |
| 08/06/2014 | CN103972014A 离子体反应腔室电极间隙调整装置及离子体反应腔室 Plasma reaction chamber electrode gap adjusting device and the plasma reaction chamber |
| 08/06/2014 | CN103972013A 一种真空设备 A vacuum device |
| 08/06/2014 | CN103972012A 反应腔室及具有它的等离子体设备 The reaction chamber and the plasma apparatus having its |
| 08/06/2014 | CN103972011A 离子注入设备及离子注入方法 Ion implantation apparatus and an ion implantation method |
| 08/06/2014 | CN103972010A 用于衬底处理腔室的气体供应系统及其方法 The method for a gas supply system and the substrate processing chamber |
| 08/06/2014 | CN101563750B 改善离子束传送的技术 Ion beam technology to improve transmission |
| 08/05/2014 | US8796654 Scan device for microscope measurement instrument |
| 08/05/2014 | US8796650 Charged particle beam drawing method and apparatus |
| 08/05/2014 | US8796649 Ion implanter |
| 08/05/2014 | US8796646 Beam-induced deposition at cryogenic temperatures |
| 08/05/2014 | US8796644 Charged particle beam lithography system and target positioning device |
| 08/05/2014 | US8796154 Method and apparatus for plasma dicing a semi-conductor wafer |
| 08/05/2014 | US8795793 Gas diffusion shower head design for large area plasma enhanced chemical vapor deposition |
| 08/05/2014 | US8795770 Preparation of mist, process and apparatus for forming new materials by mist gas discharge |
| 08/05/2014 | US8795478 Method for manufacturing perpendicular magnetic recording medium |
| 08/05/2014 | US8795467 Plasma processing apparatus and method |
| 08/05/2014 | US8794582 Carbon nanotube film supporting structure and method for using same |
| 07/31/2014 | US20140212913 Embedding resin composition for electron microscope, and method for observing sample on electron microscope using said composition |
| 07/31/2014 | US20140212601 Methods for plasma processing |
| 07/31/2014 | US20140212116 High temperature electrolysis glow discharge device |
| 07/31/2014 | US20140210345 Capacitively coupled remote plasma source |
| 07/31/2014 | US20140210344 Water/wastewater recycle and reuse with plasma, activated carbon and energy system |
| 07/31/2014 | US20140210337 Antenna for plasma processing device, and plasma processing device using the same |
| 07/31/2014 | US20140209453 Method for predicting plasma micro-arcing, and method for controlling plasma process of production equipment using the same |
| 07/31/2014 | US20140209245 Mounting table and plasma processing apparatus |
| 07/31/2014 | US20140209244 Skew elimination and control in a plasma enhanced substrate processing chamber |
| 07/31/2014 | US20140209243 Plasma Equipment and Method of Dry-Cleaning the Same |
| 07/31/2014 | US20140209193 Charged Particle Beam Instrument |
| 07/31/2014 | DE102013100974A1 Sputtermagnetron mit Magnetfeldbeeinflussung Sputtering magnetron with magnetic influence |
| 07/31/2014 | DE102010003056B9 Verfahren zur Erzeugung von Bildern einer Probe A method of generating images of a specimen |
| 07/30/2014 | EP2760042A2 Charged particle beam instrument with a specimen pre-evacuation chamber |
| 07/30/2014 | EP2759619A1 Plant and process for the production of a semiconductor film |
| 07/30/2014 | EP2758981A1 Method and apparatus for predicting a growth rate of deposited contaminants |
| 07/30/2014 | EP2758980A1 Method and alignment of a phase plate in an electron microscope |
| 07/30/2014 | CN1925322B 用于对称和/或同心的射频匹配网络的方法和设备 Methods and apparatus for symmetrical and / or concentric RF matching network |
| 07/30/2014 | CN103959425A 用于在基底上制造减反射层的方法和设备 Method and apparatus for producing on a substrate an antireflective layer |
| 07/30/2014 | CN103958723A 闭环控制 Closed-loop control |
| 07/30/2014 | CN103956315A 一种电极间距可调的离子反应腔室及电极间距调整装置 An electrode spacing adjustable plasma reaction chamber and electrode spacing adjustment device |
| 07/30/2014 | CN103956314A 一种微波驱动无铯负氢离子源 A microwave driving without cesium negative hydrogen ion source |
| 07/30/2014 | CN103954636A 一种原位高分辨观察相变材料电致相变过程的透射电镜薄膜窗口 An in-situ high-resolution observation of phase change material electrically induced phase change process TEM film window |
| 07/30/2014 | CN102610478B 一种带电粒子束测量装置 A charged particle beam measuring device |
| 07/30/2014 | CN102592930B 离子源 Ion source |
| 07/30/2014 | CN102486985B 离子源装置 Ion source means |
| 07/30/2014 | CN102420091B 一种复合式磁控溅射阴极 A composite cathode magnetron sputtering |
| 07/30/2014 | CN102418073B 溅射腔室、预清洗腔室以及等离子体加工设备 Sputtering chamber, pre-wash chamber and a plasma processing equipment |
| 07/30/2014 | CN102315064B 一种磁控管及应用该磁控管的薄膜沉积处理设备 A magnetron, and application of the thin film deposition processing apparatus magnetron |
| 07/30/2014 | CN102243978B 用于多靶溅射系统的电源装置 The power supply device for a multi-target sputtering system |
| 07/29/2014 | USRE45049 Electron beam exposure system |
| 07/29/2014 | US8791438 Ion beam sample preparation apparatus and methods |
| 07/29/2014 | US8791436 Circuit tracing using a focused ion beam |
| 07/29/2014 | US8791432 Charged particle beam writing apparatus and charged particle beam writing method |
| 07/29/2014 | US8791431 Drawing apparatus, and method of manufacturing article |
| 07/29/2014 | US8791426 Electron beam diagnostic system using computed tomography and an annular sensor |
| 07/29/2014 | US8791423 Aberration correction device and charged particle beam device employing same |
| 07/29/2014 | US8791422 Charged particle beam writing apparatus and charged particle beam writing method |
| 07/29/2014 | US8791416 On-chip thin film Zernike phase plate and applications thereof |
| 07/29/2014 | US8790498 Method and device for ion beam processing of surfaces |
| 07/29/2014 | US8790489 Substrate processing apparatus and substrate processing method |
| 07/29/2014 | US8789826 Method for ex-situ lift-out specimen preparation |
| 07/24/2014 | WO2014112877A1 Optical and integrated inspection apparatus and method |
| 07/24/2014 | WO2014072834A3 Encapsulation of inkjet heater chip for ion beam cross-section polishing and method of preparing chip cross-section sample |
| 07/24/2014 | WO2014063970A3 Laminated materials, methods and apparatus for making same, and uses thereof |
| 07/24/2014 | WO2014043061A3 Internal rf antenna with dielectric insulation |
| 07/24/2014 | US20140203702 Plasma processing apparatus |
| 07/24/2014 | US20140203187 Charged Particle Beam Lithography System and Target Positioning Device |
| 07/24/2014 | US20140203185 Charged particle beam writing apparatus, method of adjusting beam incident angle to target object surface, and charged particle beam writing method |
| 07/24/2014 | US20140202995 Plasma heat treatment apparatus |
| 07/24/2014 | US20140202635 Mounting table and plasma processing apparatus |
| 07/24/2014 | US20140202634 Radial transmission line based plasma source |
| 07/24/2014 | US20140202633 Method and system for ion-assisted processing |
| 07/24/2014 | US20140202490 Automated plasma cleaning system |
| 07/24/2014 | DE112012003176T5 Elektronenkanone und Ladungsteilchenstrahlvorrichtung Electron gun and charged particle beam |
| 07/24/2014 | DE102013105617A1 Planarmagnetronanordnung und Verfahren zum Betreiben einer Planarmagnetronanordnung Planarmagnetronanordnung and method for operating a Planarmagnetronanordnung |
| 07/24/2014 | DE102011015263B4 Vorrichtung und Verfahren zum Behandeln von Substraten Apparatus and method for processing substrates |