| Patents for H01J 37 - Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof (46,866) |
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| 09/11/2014 | US20140252228 Device and method for creating gaussian aberration-corrected electron beams |
| 09/11/2014 | US20140252226 Apparatus and method for performing microdiffraction analysis |
| 09/11/2014 | US20140251956 Etching apparatus and etching method |
| 09/11/2014 | US20140251955 Microwave waveguide apparatus, plasma processing apparatus and plasma processing method |
| 09/11/2014 | US20140251954 Pulsed remote plasma method and system |
| 09/11/2014 | US20140251953 Method and systems for in-situ formation of intermediate reactive species |
| 09/11/2014 | US20140251802 Titanium target for sputtering |
| 09/11/2014 | US20140251799 Film Deposition Apparatus with Low Plasma Damage and Low Processing Temperature |
| 09/11/2014 | US20140251791 Cathodic arc deposition stinger |
| 09/11/2014 | US20140251790 Ion beam etching method of magnetic film and ion beam etching apparatus |
| 09/11/2014 | US20140251541 Plasma processing apparatus |
| 09/11/2014 | US20140251540 Substrate supporter and substrate processing apparatus including the same |
| 09/11/2014 | US20140251217 Target for pvd sputtering system |
| 09/11/2014 | DE112013000459T5 Ladungsteilchenvorrichtung und Verdrahtungsverfahren Ladungsteilchenvorrichtung and wiring method |
| 09/11/2014 | DE112013000437T5 Ladungsteilchenstrahl-Mikroskop, Probenhalter für ein Ladungsteilchenstrahl-Mikroskop und Ladungsteilchenstrahl-Mikroskopie A charged particle microscope specimen holder for a charged particle microscope and charged particle microscopy |
| 09/11/2014 | DE112012005455T5 Ladungsteilchen-Strahlungsvorrichtung und arithmetische Vorrichtung Charged particle radiation device and arithmetic means |
| 09/11/2014 | DE112012004204T5 Betrachtungsprüfkörper zur Verwendung in der Elektronenmikroskopie,Elektronenmikroskopie, Elektronenmikroskop und Vorrichtung zur Herstellung eines Betrachtungsprüfkörpers Betrachtungsprüfkörper for use in electron microscopy, electron microscopy, electron microscope and apparatus for producing a Betrachtungsprüfkörpers |
| 09/11/2014 | DE102013204132A1 Vorrichtung zur Anodenhalterung beim Magnetron-Sputtern A device for mounting at the anode magnetron sputtering |
| 09/10/2014 | EP2774000A1 Method for avoiding charge effects for lithography and electron microscopy |
| 09/10/2014 | EP2773791A1 Method and apparatus for deposition using an atmospheric pressure plasma |
| 09/09/2014 | US8829770 Electrode cooling system in a multi-electrode microwave plasma excitation source |
| 09/09/2014 | US8829470 Configurable charged-particle apparatus |
| 09/09/2014 | US8829468 Magnetically enhanced, inductively coupled plasma source for a focused ion beam system |
| 09/09/2014 | US8829466 Particle beam irradiation apparatus and particle beam therapy system |
| 09/09/2014 | US8829465 Charged particle beam lens having a particular support electrically insulating first and second electrodes from each other |
| 09/09/2014 | US8829464 Ion guide array |
| 09/09/2014 | US8829436 Phase plate and method of fabricating same |
| 09/09/2014 | US8829424 Method and apparatus for monitoring electron beam condition of scanning electron microscope |
| 09/09/2014 | US8829387 Plasma processing apparatus having hollow electrode on periphery and plasma control method |
| 09/09/2014 | US8828883 Methods and apparatuses for energetic neutral flux generation for processing a substrate |
| 09/09/2014 | US8828748 Test structures and methods |
| 09/09/2014 | US8828628 Method and system for design of a reticle to be manufactured using variable shaped beam lithography |
| 09/09/2014 | US8828506 Arrangement |
| 09/09/2014 | US8828307 Imprint method, chip production process, and imprint apparatus |
| 09/09/2014 | US8828259 Methods for automatically determining capacitor values and systems thereof |
| 09/09/2014 | US8828257 Plasma processing apparatus and operation method thereof |
| 09/09/2014 | US8828254 Plasma processing method |
| 09/09/2014 | US8828199 Supporting device for a magnetron assembly with a rotatable target |
| 09/09/2014 | US8828184 Plasma processing apparatus and plasma processing method |
| 09/09/2014 | US8828182 Process chamber gas flow improvements |
| 09/09/2014 | US8826857 Plasma processing assemblies including hinge assemblies |
| 09/09/2014 | US8826855 C-shaped confinement ring for a plasma processing chamber |
| 09/04/2014 | WO2014133465A1 A capacitively coupled electrodeless plasma apparatus and a method using capacitively coupled electrodeless plasma for processing a silicon substrate |
| 09/04/2014 | WO2014131458A1 Gapless rotary target and method of manufacturing thereof |
| 09/04/2014 | US20140246605 Defect removal process |
| 09/04/2014 | US20140246586 Solid scintillator and electron beam detector using the same |
| 09/04/2014 | US20140246585 Measuring method, data processing apparatus and electron microscope using same |
| 09/04/2014 | US20140246584 Scanning electron microscope |
| 09/04/2014 | US20140246583 Inspection or observation apparatus and sample inspection or observation method |
| 09/04/2014 | DE112012005295T5 Probenhalter für Elektronenmikroskop Sample holder for electron microscope |
| 09/04/2014 | DE112012005293T5 Ladungsteilchenstrahlvorrichtung und Anzeigeverfahren für eine geneigte Abbildung Charged particle and display method for an inclined image |
| 09/04/2014 | DE102010026169B4 Partikelstrahlsystem A particle beam system |
| 09/03/2014 | EP2772932A1 In-situ sputtering apparatus |
| 09/03/2014 | EP2772931A1 In-situ sputtering appartus |
| 09/03/2014 | EP2772930A2 Focused ion beam low kv enhancement |
| 09/03/2014 | EP2772565A2 Sapphire property modification through ion implantation |
| 09/03/2014 | EP2771901A1 Method for providing sequential power pulses |
| 09/03/2014 | EP2771900A1 Integrated backscattered electron detector with cathodoluminescence collection optics |
| 09/03/2014 | EP2771497A1 Multidirectional racetrack rotary cathode for pvd array applications |
| 09/02/2014 | US8824773 Defect observation method and defect observation device |
| 09/02/2014 | US8823924 Combined measurement of neutron fluence with temperature and/or pressure |
| 09/02/2014 | US8822960 Charged particle beam drawing apparatus and article manufacturing method using same |
| 09/02/2014 | US8822957 Three dimensional fiducial |
| 09/02/2014 | US8822952 Charged particle beam apparatus having noise absorbing arrangements |
| 09/02/2014 | US8822951 Manipulator carrier for electron microscopes |
| 09/02/2014 | US8822949 Apparatus and method for thermal assisted desorption ionization systems |
| 09/02/2014 | US8822920 Charged particle beam apparatus |
| 09/02/2014 | US8822919 Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former |
| 09/02/2014 | US8822345 Apparatus including gas distribution member supplying process gas and radio frequency (RF) power for plasma processing |
| 09/02/2014 | US8821742 Plasma etching method |
| 09/02/2014 | US8821684 Substrate plasma processing apparatus and plasma processing method |
| 09/02/2014 | US8821683 Substrate processing apparatus and method, and program and storage medium |
| 08/28/2014 | WO2014130510A1 Method and system for plasma-assisted ion beam processing |
| 08/28/2014 | WO2014127850A1 Free form fracturing method for electronic or optical lithography |
| 08/28/2014 | WO2013154504A3 Microwave plasma chemical vapour deposition apparatus |
| 08/28/2014 | WO2013122986A8 Carbon dopant gas and co-flow for implant beam and source life performance improvement |
| 08/28/2014 | US20140241611 Pattern inspection method and pattern inspection apparatus |
| 08/28/2014 | US20140239813 Reliable plasma ignition and reignition |
| 08/28/2014 | US20140239812 System and apparatus for arc elimination |
| 08/28/2014 | US20140239200 Cathode operating temperature adjusting method, and writing apparatus |
| 08/28/2014 | US20140239191 Method for Uninterrupted Production of a Polyatomic Boron Molecular Ion Beam with Self-Cleaning |
| 08/28/2014 | US20140239190 Micro-column with double aligner |
| 08/28/2014 | US20140239176 Method of electron beam imaging of a specimen by combining images of an image sequence |
| 08/28/2014 | US20140239175 Focused Ion Beam Low kV Enhancement |
| 08/28/2014 | US20140238852 Cylindrical evaporation source |
| 08/28/2014 | US20140238844 Methods And Apparatus For Generating Strongly-Ionized Plasmas With Ionizational Instabilities |
| 08/28/2014 | US20140238843 Variable radius dual magnetron |
| 08/28/2014 | US20140238608 Ceramic showerhead with embedded rf electrode for capacitively coupled plasma reactor |
| 08/28/2014 | US20140238607 Plasma processing apparatus |
| 08/28/2014 | US20140238604 Life enhancement of ring assembly in semiconductor manufacturing chambers |
| 08/28/2014 | US20140238438 Method and system for cleaning a vacuum chamber |
| 08/28/2014 | US20140238301 Plasma processing apparatus |
| 08/28/2014 | DE102013107982B3 Sputterbeschichtungseinrichtung und Vakuumbeschichtungsanlage Sputterbeschichtungseinrichtung and vacuum coating system |
| 08/27/2014 | EP2770522A1 Method and system for cleaning a vacuum chamber |
| 08/27/2014 | EP2769002A1 Tubular target |
| 08/27/2014 | EP2768999A2 Drill having a coating |
| 08/26/2014 | US8818545 Semiconductor fabrication apparatus and temperature adjustment method |
| 08/26/2014 | US8816712 Inspection device |
| 08/26/2014 | US8816303 Method of processing of an object |
| 08/26/2014 | US8816297 Microfabricated high-bandpass foucault aperture for electron microscopy |