| Patents for H01J 37 - Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof (46,866) |
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| 10/02/2014 | US20140294035 Electron beam melting furnace and method for operating same |
| 10/02/2014 | US20140292195 Plasma wavguide using step part and block part |
| 10/02/2014 | US20140292193 Plasma apparatus and substrate-processing apparatus |
| 10/02/2014 | US20140292189 Focused ion beam apparatus and control method thereof |
| 10/02/2014 | US20140291554 Source Bushing Shielding |
| 10/02/2014 | US20140291553 Charged particle beam writing apparatus and method for acquiring dose modulation coefficient of charged particle beam |
| 10/02/2014 | US20140291543 Insulation structure of high voltage electrodes for ion implantation apparatus |
| 10/02/2014 | US20140291542 Emitter structure, gas ion source and focused ion beam system |
| 10/02/2014 | US20140291519 Automatic filtering of sem images |
| 10/02/2014 | US20140291517 Dynamic Focus Adjustment with Optical Height Detection Apparatus in Electron Beam System |
| 10/02/2014 | US20140291516 Methods and Systems for Measuring a Characteristic of a Substrate or Preparing a Substrate for Analysis |
| 10/02/2014 | US20140291515 Inspection system, inspection image data generation method, inspection display unit, defect determination method, and storage medium on which inspection display program is recorded |
| 10/02/2014 | US20140291514 Inspection system using scanning electron microscope |
| 10/02/2014 | US20140291513 Automatic filtering of sem images |
| 10/02/2014 | US20140291511 Charged particle beam apparatus and sample processing method using charged particle beam apparatus |
| 10/02/2014 | US20140291510 Charged Particle Beam Apparatus |
| 10/02/2014 | US20140291508 Focused ion beam apparatus, method for observing cross-section of sample by using the same, and storage medium |
| 10/02/2014 | US20140291290 Plasma processing apparatus and method thereof |
| 10/02/2014 | US20140291286 Shower head, plasma processing apparatus and plasma processing method |
| 10/02/2014 | US20140291148 Sputtering apparatus |
| 10/02/2014 | US20140291145 Vacuum processing apparatus |
| 10/02/2014 | US20140291144 Plasma deposition on a partially fabricated battery cell through a mesh screen |
| 10/02/2014 | US20140291140 Method and apparatus for plasma generation |
| 10/02/2014 | US20140290860 Plasma process apparatus |
| 10/02/2014 | US20140290576 Method and apparatus for tuning electrode impedance for high frequency radio frequency and terminating low frequency radio frequency to ground |
| 10/02/2014 | US20140290393 Sample Introduction Device and Charged Particle Beam Instrument |
| 10/02/2014 | DE102014205634A1 Ladungsteilchenstrahl-Schreibvorrichtung und Verfahren zum Akquirieren eines Dosismodulationskoeffizienten eines Ladungsteilchenstrahls A charged particle beam writing apparatus and method for acquiring a dose modulation coefficient a charged |
| 10/02/2014 | DE102014103697A1 Ladungspartikelstrahl-einrichtung und verfahren zum erzeugen eines beobachtungsbildes Charged particle beam device and method for generating an observation image |
| 10/02/2014 | DE102014103689A1 Vorrichtung für einen fokussierten ionenstrahl und deren steuerverfahren A control method for a focused ion beam apparatus and its |
| 10/01/2014 | EP2784799A1 Dense, hard coatings on Substrates using HIPIMS |
| 10/01/2014 | EP2784798A1 Determining an electromagnetic response of a sample |
| 10/01/2014 | EP2784797A2 Sample introduction device and charged particle beam instrument |
| 10/01/2014 | EP2784175A1 Device for depositing diamond in vapour phase |
| 09/30/2014 | US8849585 Methods for automatically characterizing a plasma |
| 09/30/2014 | US8848049 Charged particle beam device and method for correcting detected signal thereof |
| 09/30/2014 | US8847561 Apparatus, system, and method for controlling a matching network based on information characterizing a cable |
| 09/30/2014 | US8847496 Inductively coupled plasma flood gun using an immersed low inductance RF coil and multicusp magnetic arrangement |
| 09/30/2014 | US8847180 Charged particle beam apparatus, drawing apparatus, and method of manufacturing article |
| 09/30/2014 | US8847173 Gas field ion source and method for using same, ion beam device, and emitter tip and method for manufacturing same |
| 09/30/2014 | US8847172 Method for axial alignment of charged particle beam and charged particle beam system |
| 09/30/2014 | US8847159 Ion energy analyzer |
| 09/30/2014 | US8847158 Device and method for measuring surface charge distribution |
| 09/30/2014 | US8847148 Method and apparatus for neutral beam processing based on gas cluster ion beam technology |
| 09/30/2014 | US8846539 Apparatus including showerhead electrode and heater for plasma processing |
| 09/30/2014 | US8846525 Hardmask materials |
| 09/30/2014 | US8846451 Methods for depositing metal in high aspect ratio features |
| 09/30/2014 | US8846278 Electron beam lithography system and method for improving throughput |
| 09/30/2014 | US8846163 Method for removing oxides |
| 09/30/2014 | US8845913 Ion radiation damage prediction method, ion radiation damage simulator, ion radiation apparatus and ion radiation method |
| 09/30/2014 | US8845856 Edge ring assembly for plasma etching chambers |
| 09/30/2014 | US8845855 Electrode for plasma processes and method for manufacture and use thereof |
| 09/30/2014 | US8845853 Substrate processing apparatus and substrate processing method |
| 09/30/2014 | US8845810 Substrate damage prevention system and method |
| 09/30/2014 | US8845806 Shower plate having different aperture dimensions and/or distributions |
| 09/25/2014 | WO2014152908A1 Toroidal plasma abatement apparatus and method |
| 09/25/2014 | WO2014152116A1 Topography minimization of neutral layer overcoats in directed self-assembly applications |
| 09/25/2014 | WO2014151264A1 Planar contacts to pseudomorphic electronic and optoelectronic devices |
| 09/25/2014 | WO2014149919A1 Plasma emission monitor and process gas delivery system |
| 09/25/2014 | WO2014149235A1 Plasma tuning rods in microwave resonator plasma sources |
| 09/25/2014 | WO2014147045A1 Method for generating image data relating to an object and particle beam device for carrying out this method |
| 09/25/2014 | WO2014146877A1 Device for protecting an electrode seal in a reactor for the deposition of polycrystalline silicon |
| 09/25/2014 | WO2014146569A1 Broadband ion beam system, and indirectly heated broadband beam ion source used for ion beam system |
| 09/25/2014 | US20140287538 Warp correction device and warp correction method for semiconductor element substrate |
| 09/25/2014 | US20140284500 Settling time acquisition method |
| 09/25/2014 | US20140284495 Array for processing materials |
| 09/25/2014 | US20140284494 Reconfigureable processing enclosures |
| 09/25/2014 | US20140284477 Charged-particle radiation apparatus |
| 09/25/2014 | US20140284476 Energy Filter for Charged Particle Beam Apparatus |
| 09/25/2014 | US20140284475 Incoherent transmission electron microscopy |
| 09/25/2014 | US20140284474 Focused ion beam system |
| 09/25/2014 | US20140284308 Plasma etching method and plasma etching apparatus |
| 09/25/2014 | US20140284307 Focused ion beam system, sample processing method using the same, and sample processing program using focused ion beam |
| 09/25/2014 | US20140284210 Sputtering apparatus, target and shield |
| 09/25/2014 | US20140283995 Gas nozzle, plasma apparatus using the same, and method for manufacturing gas nozzle |
| 09/25/2014 | US20140283872 Plasma cleaning apparatus and method |
| 09/25/2014 | DE19958857B4 Sputterkathode Sputter cathode |
| 09/25/2014 | DE102013102777A1 Verfahren zum Herstellen eines Emitters A method of manufacturing an emitter |
| 09/25/2014 | DE102010053363B4 Verfahren und Steuervorrichtung zur Reinigung einer Plasmabehandlungsvorrichtung und/oder eines in einer Plasmabehandlungsvorrichtung aufgenommenen Substrats A method and control apparatus for cleaning a plasma treatment device and / or received in a plasma treatment device substrate |
| 09/24/2014 | EP2780929A1 Assembly for feeding in hf current for tubular cathodes |
| 09/24/2014 | EP2780698A1 Device for analysing a radiating material using a microprobe |
| 09/23/2014 | US8841636 Modulation device and charged particle multi-beamlet lithography system using the same |
| 09/23/2014 | US8841632 Removable dental appliance sanitizer and storage device |
| 09/23/2014 | US8841631 Apparatus and techniques for controlling ion angular spread |
| 09/23/2014 | US8841630 Corrector for axial aberrations of a particle-optical lens |
| 09/23/2014 | US8841615 Electron microscope |
| 09/23/2014 | US8841614 Sample structure analyzing method, transmission electron microscope, and computer-readable non-transitory recording medium |
| 09/23/2014 | US8841613 Method and system for 4D tomography and ultrafast scanning electron microscopy |
| 09/23/2014 | US8841612 Charged particle beam microscope |
| 09/23/2014 | US8841049 Electron beam data storage system and method for high volume manufacturing |
| 09/23/2014 | US8840844 Plasma generating apparatus |
| 09/23/2014 | US8840763 Methods for stable process in a reactive sputtering process using zinc or doped zinc target |
| 09/23/2014 | US8840753 Plasma etching unit |
| 09/23/2014 | US8840725 Chamber with uniform flow and plasma distribution |
| 09/18/2014 | WO2014142745A1 Permanent magnet based high performance multiaxis immersion electron lens array with low axial leakage field |
| 09/18/2014 | WO2014142737A1 Arrangement and method for high power pulsed magnetron sputtering |
| 09/18/2014 | WO2014142236A1 Environmental scanning electron microscope |
| 09/18/2014 | WO2014141775A1 Charged particle radiation apparatus |
| 09/18/2014 | WO2014141744A1 Charged particle beam device, sample observation method, sample platform, observation system, and light emitting member |
| 09/18/2014 | WO2014140179A1 Method and apparatus for control of a plasma for spectrometry |
| 09/18/2014 | US20140277626 Plasma processing apparatus |