Patents
Sitemap › H01 - Basic electric elements › H01J - Electric discharge tubes or discharge lamps › H01J 37 - Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
Patents for H01J 37 - Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof (46,866)
10/2014
10/16/2014US20140306597 Plasma generating apparatus
10/16/2014US20140306127 Method and system for modifying substrate relief features using ion implantation
10/16/2014US20140306123 Stage apparatus, drawing apparatus, and method of manufacturing article
10/16/2014US20140306121 Ion sources, systems and methods
10/16/2014US20140306119 Beam Monitoring Device, Method, and System
10/16/2014US20140306110 Scanning particle microscope having an energy selective detector system
10/16/2014US20140306109 Method for detecting defect of substrate
10/16/2014US20140306108 Method of collecting and processing electron diffraction data
10/16/2014US20140305905 Plasma processing method and plasma processing apparatus
10/16/2014US20140305802 Self-ionized and inductively-coupled plasma for sputtering and resputtering
10/16/2014US20140305795 Magnetron Plasma Apparatus
10/16/2014US20140305589 Soft pulsing
10/16/2014US20140305467 Cleaning device and cleaning process for a plasma reactor
10/14/2014US8861166 Low voltage modular room ionization system
10/14/2014US8859999 Movement-free bending method for one-dimensional or two-dimensional nanostructure using ion beam
10/14/2014US8859998 TEM sample preparation
10/14/2014US8859997 Charged particle beam writing apparatus and charged particle beam writing method
10/14/2014US8859993 Sample holder of electron beam exposure apparatus and electron beam exposure method using the same
10/14/2014US8859992 Charged particle beam devices
10/14/2014US8859991 Specimen holder used for mounting samples in electron microscopes
10/14/2014US8859985 Radiation detector, radiation detection apparatus, and X-ray analyzer
10/14/2014US8859983 Method of and system for exposing a target
10/14/2014US8859982 Dual-lens-gun electron beam apparatus and methods for high-resolution imaging with both high and low beam currents
10/14/2014US8859966 Simultaneous electron detection
10/14/2014US8859965 Method and system of evaluating distribution of lattice strain on crystal material
10/14/2014US8859964 Electron microscope and method of adjusting the same
10/14/2014US8859963 Methods for preparing thin samples for TEM imaging
10/14/2014US8859962 Charged-particle microscope
10/14/2014US8859929 Method and apparatus for forming a film by deposition from a plasma
10/14/2014US8859432 Bare aluminum baffles for resist stripping chambers
10/14/2014US8859057 Device for applying electromagnetic microwave radiation in a plasma inside a hollow glass substrate tube, and method for manufacturing an optical preform
10/14/2014US8858816 Enhanced etch and deposition profile control using plasma sheath engineering
10/14/2014US8858766 Combinatorial high power coaxial switching matrix
10/14/2014US8858754 Plasma processing apparatus
10/14/2014US8858753 Focus ring heating method, plasma etching apparatus, and plasma etching method
10/14/2014US8858712 Electrode for use in plasma processing apparatus and plasma processing apparatus
10/14/2014US8857465 Method and system for realizing a vacuum in a vacuum chamber
10/14/2014US8857371 Apparatus for generating dielectric barrier discharge gas
10/09/2014WO2014165669A2 Pulsed gas plasma doping method and apparatus
10/09/2014WO2014165615A1 Expanded beam lens assembly
10/09/2014WO2014164791A1 Rotary flex union
10/09/2014WO2014164441A1 Method of improving ion beam quality in an implant system
10/09/2014WO2014162901A1 Electronic microscope and sample observation method
10/09/2014WO2014161759A1 Apparatus for the vacuum treatment of substrates
10/09/2014US20140303037 Patterning method
10/09/2014US20140302666 Pulsed gas plasma doping method and apparatus
10/09/2014US20140302443 Drawing apparatus, and method of manufacturing article
10/09/2014US20140302252 Low Energy Ion Milling or Deposition
10/09/2014US20140299769 Scanning electron microscope
10/09/2014US20140299768 Ion source and ion beam device using same
10/09/2014US20140299767 Charged particle beam device and measuring method using the same
10/09/2014US20140299577 Apparatus and method for surface processing of a substrate
10/09/2014US20140299576 Plasma processing method and plasma processing apparatus
10/09/2014US20140299465 Solid surface smoothing method
10/09/2014US20140299273 Multi-segment electrode assembly and methods therefor
10/09/2014US20140299272 Plasma generation device and plasma processing apparatus
10/09/2014DE112013000704T5 Rasterelektronenmikroskop Scanning electron microscope
10/09/2014DE112013000696T5 Ladungsteilchenstrahlvorrichtung Charged particle
10/09/2014DE102014103896A1 System eines fokussierten lonenstrahls System of a focused ion beam
10/09/2014DE102013103472A1 Vakuumbetriebskomponente und Vakuumprozessanordnung Vacuum operation component and vacuum processing arrangement
10/09/2014DE102013005173A1 Messvorrichtung und Verfahren zur Erfassung einer Impulsverteilung geladener Teilchen Measuring apparatus and method for detecting a pulse distribution of charged particles
10/08/2014EP2787523A1 Low energy ion milling or deposition
10/08/2014EP2787338A1 Method and arrangement for manufacturing a sample for microstructural materials diagnostics and corresponding sample
10/08/2014EP2786396A1 Ion implant apparatus and a method of implanting ions
10/08/2014EP2786395A1 Apparatus for collection of cathodoluminescence signals
10/08/2014EP2786113A1 High throughput tem preparation processes and hardware for backside thinning of cross-sectional view lamella
10/08/2014EP2785892A1 Closed loop control
10/07/2014US8855949 Plasma processing device and method of monitoring discharge state in plasma processing device
10/07/2014US8854781 Power supply device for plasma processing
10/07/2014US8854625 Vacuum apparatus including a particle monitoring unit, particle monitoring method and program, and window member for use in the particle monitoring
10/07/2014US8853655 Gas refraction compensation for laser-sustained plasma bulbs
10/07/2014US8853653 Apparatus and techniques for controlling ion implantation uniformity
10/07/2014US8853648 Sample holder, method for use of the sample holder, and charged particle device
10/07/2014US8853647 Electron microscope
10/07/2014US8853646 Specimen holder used for mounting samples in electron microscopes
10/07/2014US8853630 Scanning electron microscope and a method for imaging a specimen using the same
10/07/2014US8853629 Cross-section processing and observation method and cross-section processing and observation apparatus
10/07/2014US8853628 Defect inspection method, and device thereof
10/07/2014US8853616 Method of adjusting transmission electron microscope
10/07/2014US8852849 Electron beam lithography system and method for improving throughput
10/07/2014US8852520 Plasma reactor for abating hazardous materials and driving method thereof
10/07/2014US8852412 Magnetron source and method of manufacturing
10/07/2014US8852411 Sputtering apparatus
10/07/2014US8852390 Substrate processing apparatus
10/07/2014US8852389 Plasma processing apparatus and plasma processing method
10/07/2014US8852388 Plasma processor
10/07/2014US8852386 Plasma processing apparatus
10/07/2014US8852385 Plasma etching apparatus and method
10/02/2014WO2014160061A2 A device for imaging electron microscope environmental sample supports in a microfluidic or electrochemical chamber with an optical microscope
10/02/2014WO2014159523A1 System and method for plasma control using boundary electrode
10/02/2014WO2014159402A1 Ion source
10/02/2014WO2014159367A1 Rotating vacuum chamber coupling assembly
10/02/2014WO2014158886A1 Method and apparatus for plasma dicing a semi-conductor wafer
10/02/2014WO2014158689A1 Microscale mass spectrometry systems, devices and related methods
10/02/2014WO2014156262A1 Defect inspection method and defect inspection device
10/02/2014WO2014156171A1 Circuit substrate reliably operating when controlling plurality of electron beams
10/02/2014WO2014156170A1 Electron beam irradiation device
10/02/2014WO2014154894A1 Dense, hard coatings on substrates using hipims
10/02/2014US20140295674 Angled gas cluster ion beam
10/02/2014US20140295107 Method of smoothing solid surface with gas cluster ion beam and solid surface smoothing apparatus
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