| Patents for H01J 37 - Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof (46,866) |
|---|
| 02/15/2006 | CN1735956A Tunable gas distribution plate assembly |
| 02/15/2006 | CN1735709A Method and apparatus for layer by layer deposition of thin films |
| 02/15/2006 | CN1735313A Dry etching device and air pore device fixing on the same |
| 02/15/2006 | CN1734712A Plasma processing apparatus and method |
| 02/15/2006 | CN1734710A Semiconductor processing equipment having tiled ceramic liner |
| 02/15/2006 | CN1734706A A process for controlling the proximity effect correction |
| 02/15/2006 | CN1734501A Method and apparatus for removing uneven brightness in an image |
| 02/15/2006 | CN1733965A Magnetron sputtering device, a cylindrical cathode and a method of coating thin multicomponent films on a substrate |
| 02/15/2006 | CN1242656C Device for processing micro wave plasma and control method for processing plasma |
| 02/15/2006 | CN1242456C Semiconductor device manufacturing apparatus employing vacuum system |
| 02/14/2006 | US6998626 Method of producing a dopant gas species |
| 02/14/2006 | US6998625 Ion implanter having two-stage deceleration beamline |
| 02/14/2006 | US6998621 Cooling of a device for influencing an electron beam |
| 02/14/2006 | US6998565 Plasma processing apparatus |
| 02/14/2006 | US6998217 Gray scale lithography; accurate, uniform reticle writing smaller features |
| 02/14/2006 | US6998034 in which time to deposit a film on a substrate can be prolonged or the degree of freedom to form a laminated film can be enhanced |
| 02/14/2006 | US6998033 Providing an annular adapter body; providing an annular electrical-insulator ring; providing a replaceable annular adapter shield attachable to the outside surface of the body; providing a replaceable annular dark-space shield attachable |
| 02/14/2006 | US6998027 Highly efficient compact capacitance coupled plasma reactor/generator and method |
| 02/14/2006 | US6998014 Apparatus and method for plasma assisted deposition |
| 02/14/2006 | US6996896 Electron beam lens for micro-column electron beam apparatus and method of fabricating the same |
| 02/14/2006 | CA2278751C Atmospheric-pressure plasma jet |
| 02/14/2006 | CA2242966C Method and apparatus for inactivating contaminants in biological fluid |
| 02/09/2006 | WO2006014986A2 Device and method for milling of material using ions |
| 02/09/2006 | WO2006014633A2 Electrostatic lens for ion beams |
| 02/09/2006 | WO2006014632A2 Improved magnet for scanning ion beams |
| 02/09/2006 | WO2006014565A1 Device and method for measurement of beam angle and divergence normal to plane of scanned beam or ribbon beam |
| 02/09/2006 | WO2006013974A1 Plasma ion source for metal-carbon binary cluster production apparatus |
| 02/09/2006 | WO2006013199A1 Device for obtaining the image and/or spectra of electron energy loss |
| 02/09/2006 | WO2005119732A3 Non-axisymmetric charged-particle beam system |
| 02/09/2006 | US20060030060 Apparatus and method for testing defects |
| 02/09/2006 | US20060030059 Apparatus and method for testing defects |
| 02/09/2006 | US20060028218 Inspection method and apparatus for circuit pattern |
| 02/09/2006 | US20060027765 Adjusting device of an apparatus for generating a beam of charged particles |
| 02/09/2006 | US20060027763 Workpiece support structure for an ion beam implanter featuring spherical sliding seal vacuum feedthrough |
| 02/09/2006 | US20060027748 Secondary electron detector unit for a scanning electron microscope |
| 02/09/2006 | US20060027539 Non-thermal plasma generator device |
| 02/09/2006 | US20060027328 Hollow anode plasma reactor and method |
| 02/09/2006 | US20060027168 Power supply antenna and power supply method |
| 02/09/2006 | DE10232206B4 Sprühvorrichtung für eine Wafer-Behandlungsvorrichtung mit einer Zwischenraum-Steuervorrichtung Spray device for a wafer processing apparatus having a gap-control device |
| 02/09/2006 | CA2574114A1 Plasma nozzle array for providing uniform scalable microwave plasma generation |
| 02/08/2006 | EP1624480A1 Exposure method, mask, semiconductor device manufacturing method, and semiconductor device |
| 02/08/2006 | EP1624086A1 Device and method for producing gas barrier layers |
| 02/08/2006 | EP1623457A2 Envelope follower end point detection in time division multiplexed processes |
| 02/08/2006 | EP1016134B1 Plasma reactor for passivating a substrate |
| 02/08/2006 | CN1732558A Method and device for plasma-etching organic material film |
| 02/08/2006 | CN1241316C Radio frequency power source for genrating an inducively coupled plasma |
| 02/08/2006 | CN1241240C Device for preventing chip edge from damage in dry-etching period |
| 02/07/2006 | US6995576 Thin film transistor array inspection apparatus |
| 02/07/2006 | US6995545 Control system for a sputtering system |
| 02/07/2006 | US6995381 System and method for multi-wafer scanning in ion implanters |
| 02/07/2006 | US6995380 End effector for supporting a microsample |
| 02/07/2006 | US6995378 Lens array with a laterally movable optical axis for corpuscular rays |
| 02/07/2006 | US6995370 Scanning electron microscope |
| 02/07/2006 | US6995369 Scanning electron beam apparatus and methods of processing data from same |
| 02/07/2006 | US6995079 Ion implantation method and method for manufacturing semiconductor device |
| 02/07/2006 | US6993919 Processing apparatus and processing apparatus maintenance method |
| 02/02/2006 | WO2006011954A2 Diagnostic plasma measurement device having patterned sensors and features |
| 02/02/2006 | WO2006011546A1 Beam fiber and beam transmitting method |
| 02/02/2006 | WO2006010821A1 Calibrating device on a silicon substrate |
| 02/02/2006 | WO2006010509A2 Device and method for plasma coating/sterilization |
| 02/02/2006 | WO2005119363A3 Assembly for supporting a workpiece or specimen in a charged particle beam system |
| 02/02/2006 | US20060022149 Ion implantation apparatus and method for implanting ions by using the same |
| 02/02/2006 | US20060022148 Device and method for milling of material using ions |
| 02/02/2006 | US20060022147 Method and device of monitoring and controlling ion beam energy distribution |
| 02/02/2006 | US20060022143 Emitter for an ion source |
| 02/02/2006 | US20060022138 Electron beam apparatus, and inspection instrument and inspection process thereof |
| 02/02/2006 | US20060022137 Electron microscope |
| 02/02/2006 | US20060022133 Method of photothermographic imaging for transmission electron microscopy |
| 02/02/2006 | US20060021970 Method and apparatus for non-invasive measurement and analysis of semiconductor process parameters |
| 02/02/2006 | US20060021969 Method for controlling the temperature of a gas distribution plate in a process reactor |
| 02/02/2006 | US20060021968 Time continuous ion-ion plasma |
| 02/01/2006 | EP1622187A2 Dual-chamber plasma processing apparatus |
| 02/01/2006 | EP1622186A2 Electron microscope |
| 02/01/2006 | EP1622185A1 Apparatus for evacuating a sample |
| 02/01/2006 | EP1622184A2 Emitter for an ion source and method of producing same |
| 02/01/2006 | EP1622182A1 Emitter for an ion source and method of producing same |
| 02/01/2006 | EP1620915A2 Plasma production device and method and rf driver circuit with adjustable duty cycle |
| 02/01/2006 | EP1620876A2 Rf pulsing of a narrow gap capacitively coupled reactor |
| 02/01/2006 | EP1448769A4 Soft ionization device and applications thereof |
| 02/01/2006 | CN1729549A Vacuum arc source comprising a device for generating a magnetic field |
| 02/01/2006 | CN1729021A Method and apparatus for treating an object with ozone |
| 02/01/2006 | CN1728916A Ultra high speed uniform plasma processing system |
| 02/01/2006 | CN1728338A Ion implantation apparatus and method for implanting ions by using the same |
| 02/01/2006 | CN1240095C Electronic transmitting element, electron source, image display device and manufacture method thereof |
| 02/01/2006 | CN1239737C Magnetron sputtering source |
| 01/31/2006 | US6992442 Restricted getter |
| 01/31/2006 | US6992311 In-situ cleaning of beam defining apertures in an ion implanter |
| 01/31/2006 | US6992310 Scanning systems and methods for providing ions from an ion beam to a workpiece |
| 01/31/2006 | US6992309 Ion beam measurement systems and methods for ion implant dose and uniformity control |
| 01/31/2006 | US6992308 Modulating ion beam current |
| 01/31/2006 | US6992307 Electron beam source and electron beam exposure apparatus employing the electron beam source |
| 01/31/2006 | US6992300 Device and method for the examination of samples in a non-vacuum environment using a scanning electron microscope |
| 01/31/2006 | US6992299 Method and apparatus for aerodynamic ion focusing |
| 01/31/2006 | US6992290 Electron beam inspection system and inspection method and method of manufacturing devices using the system |
| 01/31/2006 | US6992289 Method for performing focusing in a particle-optical device with the aid of astigmatism in the particle beam |
| 01/31/2006 | US6992288 Apparatus and method for directing gas towards a specimen |
| 01/31/2006 | US6992287 Apparatus and method for image optimization of samples in a scanning electron microscope |
| 01/31/2006 | US6992286 Material characterization system |
| 01/31/2006 | US6992261 bonding target backing plate via resistance heating/welding to bond assembly members (mating projections and grooves); fail-safe |
| 01/31/2006 | US6991878 Photomask repair method and apparatus |