| Patents for H01J 37 - Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof (46,866) |
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| 07/04/2006 | US7071478 System and method for passing particles on selected areas on a wafer |
| 07/04/2006 | US7071475 Method and apparatus for specimen fabrication |
| 07/04/2006 | US7071442 Plasma processing apparatus |
| 07/04/2006 | US7071114 efficiency pumping speed of gas flow in vacuum enclosure; etching patterned sidewall; process control; forming semiconductor |
| 06/29/2006 | WO2006068755A1 Electron injection ion implanter magnets |
| 06/29/2006 | WO2006068754A1 Weakening focusing effect of acceleration-decelaration column of ion implanter |
| 06/29/2006 | WO2006067004A2 Dual-mode electron beam column |
| 06/29/2006 | WO2006044722A3 Apparatus and methods for improving the stability of rf power delivery to a plasma load |
| 06/29/2006 | WO2006026765A3 Plasma ashing process for increasing photoresist removal rate and plasma apparatus wuth cooling means |
| 06/29/2006 | WO2006009882B1 Methods and devices for atom probe mass resolution enhancement |
| 06/29/2006 | US20060138357 Method for fabricating a metal-insulator-metal capacitor |
| 06/29/2006 | US20060138356 Method and apparatus for correcting drift during automated FIB processing |
| 06/29/2006 | US20060138355 Method for implanter angle verification and calibration |
| 06/29/2006 | US20060138354 Method for the protection of an optical element, lithographic apparatus, and device manufacturing method |
| 06/29/2006 | US20060138353 Ion-implanting apparatus, ion-implanting method, and device manufactured thereby |
| 06/29/2006 | US20060138343 Sheet beam-type testing apparatus |
| 06/29/2006 | US20060138324 Scanning electron microscope |
| 06/29/2006 | US20060138099 Method of forming a metal oxide film and microwave power source unit for use in the method |
| 06/29/2006 | US20060138082 Method and apparatus for determining consumable lifetime |
| 06/29/2006 | US20060137978 Arc evaporation device |
| 06/29/2006 | DE202006006403U1 Screw connection element for application in coating, wetting, or sputtering installations has top part of dielectric material, e.g. ceramics, and threaded part of metal or dielectric material |
| 06/29/2006 | DE10261035B4 Fotomasken-Reparaturverfahren und Vorrichtung Photomask repair method and apparatus |
| 06/29/2006 | DE102004060377A1 Verfahren und Vorrichtung zum Betrieb einer Plasmaeinrichtung Method and apparatus for operating a plasma device |
| 06/28/2006 | EP1675156A1 Plasma generating electrode and plasma reactor |
| 06/28/2006 | EP1675155A1 Plasma excitation system |
| 06/28/2006 | EP1675154A2 Ion implantation ion source |
| 06/28/2006 | EP1673797A2 Detector system of secondary and backscattered electrons for a scanning electron microscope |
| 06/28/2006 | EP1673488A2 Modular device for surface coating |
| 06/28/2006 | CN1795531A Magnetron sputter cathode |
| 06/28/2006 | CN1795530A Plasma apparatus, gas distribution assembly for a plasma apparatus and processes therewith |
| 06/28/2006 | CN1795529A Charged particle beamlet exposure system |
| 06/28/2006 | CN1795528A Method and system for ion beam containment in an ion beam guide |
| 06/28/2006 | CN1795287A Thin film forming device and thin film forming method |
| 06/28/2006 | CN1794431A Plasma apparatus |
| 06/28/2006 | CN1794411A Ion implanting apparatus and ion implanting method |
| 06/28/2006 | CN1794410A Cathode anode micro cavity electrode plasma device structure using one-dimensional nanometer material |
| 06/28/2006 | CN1261984C Method and apparatus for treating plasma |
| 06/27/2006 | US7067942 Linear motor, moving stage system, exposure apparatus, and device manufacturing method |
| 06/27/2006 | US7067830 Multi-electron beam exposure method and apparatus |
| 06/27/2006 | US7067829 Power sag detection and control in ion implanting system |
| 06/27/2006 | US7067828 Method of and apparatus for measurement and control of a gas cluster ion beam |
| 06/27/2006 | US7067823 Micro-sample pick-up apparatus and micro-sample pick-up method |
| 06/27/2006 | US7067821 Flood gun for charge neutralization |
| 06/27/2006 | US7067820 Particle-optical apparatus with a permanent-magnetic lens and an electrostatic lens |
| 06/27/2006 | US7067809 Method and apparatus for multiple charged particle beams |
| 06/27/2006 | US7067808 Electron beam system and electron beam measuring and observing method |
| 06/27/2006 | US7067807 Charged particle beam column and method of its operation |
| 06/27/2006 | US7067805 Energy spectrum measuring apparatus, electron energy loss spectrometer, electron microscope provided therewith, and electron energy loss spectrum measuring method |
| 06/27/2006 | US7067761 Semiconductor device manufacturing system for etching a semiconductor by plasma discharge |
| 06/27/2006 | US7067432 Methodology for in-situ and real-time chamber condition monitoring and process recovery during plasma processing |
| 06/27/2006 | US7067405 Atmospheric glow discharge with concurrent coating deposition |
| 06/27/2006 | US7067034 Method and apparatus for plasma forming inner magnetic bucket to control a volume of a plasma |
| 06/27/2006 | US7066107 Shielding system for plasma chamber |
| 06/22/2006 | WO2006064548A1 Charged particle beam system and method for making sample by using it |
| 06/22/2006 | WO2006063738A1 Method and device for operating a plasma device |
| 06/22/2006 | WO2006063721A1 Tubular target comprising a connecting layer that is situated between the tubular target and the tubular support |
| 06/22/2006 | WO2006020643A3 Ion beam measurement systems and methods for ion implant dose and uniformity control |
| 06/22/2006 | WO2006009667A3 Highly ionized pvd with moving magnetic field envelope for uniform coverage of structure and wafer |
| 06/22/2006 | US20060131514 Removing byproducts of physical and chemical reactions in an ion implanter |
| 06/22/2006 | US20060131272 Particle-removing apparatus for a semiconductor device manufacturing apparatus and method of removing particles |
| 06/22/2006 | US20060131269 Object-moving method, object-moving apparatus and production process using the method |
| 06/22/2006 | US20060130873 Plasma cleaning of deposition chamber residues using duo-step wafer-less auto clean method |
| 06/21/2006 | EP1672672A2 Charged particle beam apparatus, method of displaying sample image, and method of measuring image shift sensitivity |
| 06/21/2006 | EP1672093A1 Film-forming apparatus and film-forming method |
| 06/21/2006 | EP1671347A1 Method and apparatus for preventing instabilities in radio-frequency plasma processing |
| 06/21/2006 | EP1671346A2 Method, system and device for microscopic examination employing fib-prepared sample grasping element |
| 06/21/2006 | EP1670968A1 Apparatus for low temperature semiconductor fabrication |
| 06/21/2006 | EP1121704B1 Electron beam aperture element with beam shielding |
| 06/21/2006 | EP0839217B1 A plasma enhanced chemical processing reactor and method |
| 06/21/2006 | CN1791972A 等离子体处理装置 Plasma processing apparatus |
| 06/21/2006 | CN1791961A High resolution separation magnet for ribbon beam ion implanters |
| 06/21/2006 | CN1260770C Zirconia toughtened ceramic components and coatings in semiconductor processing equipment and method of manufacturing thereof |
| 06/21/2006 | CN1260621C Method for removing shading defects of light mask and semiconductor device manufacturing method thereof |
| 06/20/2006 | US7065735 Method for making an OPC mask and an OPC mask manufactured using the same |
| 06/20/2006 | US7065034 Optical disc and apparatus for manufacturing a master disc therefor |
| 06/20/2006 | US7064491 Ion implantation system and control method |
| 06/20/2006 | US7064477 Low power schottky emitter |
| 06/20/2006 | US7064340 Method and apparatus for ion beam profiling |
| 06/20/2006 | US7064339 Charged-particle-beam mapping projection-optical systems and methods for adjusting same |
| 06/20/2006 | US7064326 Electron microscope |
| 06/20/2006 | US7064325 Apparatus with permanent magnetic lenses |
| 06/20/2006 | US7064324 Charged particle beam apparatus |
| 06/20/2006 | US7064321 Ion funnel with improved ion screening |
| 06/20/2006 | US7064049 Ion implantation method, SOI wafer manufacturing method and ion implantation system |
| 06/20/2006 | US7063819 Nonthermal plasma processor utilizing additive-gas injection and/or gas extraction |
| 06/20/2006 | US7063773 High purity sputter targets with target end-of-life indication and method of manufacture |
| 06/15/2006 | WO2006063102A2 Method of correction for wafer crystal cut error in semiconductor processing |
| 06/15/2006 | WO2006062132A1 Stereoscopic image reconfiguration device, stereoscopic image reconfiguration method, and stereoscopic image reconfiguration program |
| 06/15/2006 | US20060127600 Film-forming system and film-forming method |
| 06/15/2006 | US20060125495 Charge amount measurement method, shift value measurement method of charged beam, charge amount measuring device and shift value measuring device of charged beam |
| 06/15/2006 | US20060124868 Method for controlling a vaporizer of ion implantation equipment during indium implantation process |
| 06/15/2006 | US20060124867 Method and apparatus for ion beam profiling |
| 06/15/2006 | US20060124866 Electron beam exposure method and system therefor |
| 06/15/2006 | US20060124865 Energetic neutral particle lithographic apparatus and process |
| 06/15/2006 | US20060124858 Imaging device comprising optically coupled fiber optic plate assembly |
| 06/15/2006 | US20060124634 Coil constructions configured for utilization in physical vapor deposition chambers, and methods of forming coil constructions |
| 06/15/2006 | US20060124612 Generation of diffuse non-thermal atmosheric plasmas |
| 06/15/2006 | US20060124455 Thin film forming device and thin film forming method |
| 06/15/2006 | US20060124446 Method for the production of a substrate with a magnetron sputter coating and unit for the same |
| 06/15/2006 | US20060124244 Plasma processor and plasma processing method |