| Patents for H01J 37 - Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof (46,866) |
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| 08/31/2006 | US20060193037 Vacuum chamber with recessed viewing tube and imaging device situated therein |
| 08/31/2006 | US20060192150 Method and apparatus for reducing charge density on a dielectric coated substrate after exposure to a large area electron beam |
| 08/31/2006 | US20060192149 Parameter control in a lithographic apparatus using polarization |
| 08/31/2006 | US20060192148 Electron beam irradiating apparatus and irradiating method |
| 08/31/2006 | US20060192145 Charged particle beam apparatus and method for operating the same |
| 08/31/2006 | US20060192141 Method and devices for producing corpuscular radiation systems |
| 08/31/2006 | US20060192140 Process for electron sterilization of a container |
| 08/31/2006 | US20060192120 Charged-particle-beam mapping projection-optical systems and methods for adjusting same |
| 08/31/2006 | US20060192119 Method of measurement accuracy improvement by control of pattern shrinkage |
| 08/31/2006 | US20060192117 Inspection method and apparatus using an electron beam |
| 08/31/2006 | US20060192116 Charged particle beam device probe operation |
| 08/31/2006 | US20060192114 Processing probe, processing apparatus, and method of manufacturing the processing probe |
| 08/31/2006 | US20060192099 Method and apparatus for specimen fabrication |
| 08/31/2006 | US20060191479 Surface treatment apparatus |
| 08/31/2006 | US20060191478 High density plasma CVD chamber |
| 08/31/2006 | DE19651811B4 Vorrichtung zum Belegen eines Substrats mit dünnen Schichten Device to occupy a substrate with thin layers |
| 08/31/2006 | DE10238347B4 Vorrichtung zum Auffangen von Ionen in einem Massenspektrometer A device for trapping ions in a mass spectrometer |
| 08/30/2006 | EP1696219A1 Repetitive circumferential milling for sample preparation |
| 08/30/2006 | EP1695599A1 Neutral particle beam processing apparatus |
| 08/30/2006 | EP1695370A1 Apparatus and method for plasma processing |
| 08/30/2006 | EP1695369A2 Method and apparatus for extending equipment uptime in ion implantation |
| 08/30/2006 | EP1695038A2 Controlling the flow of vapors sublimated from solids |
| 08/30/2006 | EP1018140A4 Electron sources having shielded cathodes |
| 08/30/2006 | EP0978137A4 Apparatus and method for a modular electron beam system for the treatment of surfaces |
| 08/30/2006 | CN1826685A Method and system for electronic spatial filtering of spectral reflectometer optical signals |
| 08/30/2006 | CN1826679A RF current return path for a large area substrate plasma reactor |
| 08/30/2006 | CN1826523A Method for measuring physical parameters of at least one micrometric or nanometric dimensional phase in a composite system |
| 08/30/2006 | CN1825536A Substrate processing apparatus and substrate processing method |
| 08/29/2006 | US7098614 Electrostatic accelerator and ion implanting apparatus with the same |
| 08/29/2006 | US7098599 Plasma generator |
| 08/29/2006 | US7098468 Raster frame beam system for electron beam lithography |
| 08/29/2006 | US7098464 Electron beam writing equipment and electron beam writing method |
| 08/29/2006 | US7098457 Electron beam apparatus and device manufacturing method using same |
| 08/29/2006 | US7098456 Method and apparatus for accurate e-beam metrology |
| 08/29/2006 | US7098455 Method of inspecting a circuit pattern and inspecting instrument |
| 08/29/2006 | US7098453 Scanning probe microscopy system and method of measurement by the same |
| 08/29/2006 | US7098448 Method and apparatus for measuring beam spot of scanning light |
| 08/29/2006 | US7098055 Apparatus and method for testing defects |
| 08/29/2006 | US7097782 Method of exposing a substrate to a surface microwave plasma, etching method, deposition method, surface microwave plasma generating apparatus, semiconductor substrate etching apparatus, semiconductor substrate deposition apparatus, and microwave plasma generating antenna assembly |
| 08/29/2006 | US7097744 target device with a sputterable target surface, an alignment surface and a target support movable between a first and second target position and a darkspace shield |
| 08/29/2006 | US7097735 Plasma processing device |
| 08/29/2006 | US7096819 Inductive plasma processor having coil with plural windings and method of controlling plasma density |
| 08/24/2006 | WO2006088486A1 Electron beam diagnostic for profiling high power beams |
| 08/24/2006 | WO2006088159A1 Electron microscope and composite irradiation lens |
| 08/24/2006 | WO2006088141A1 Electron beam device |
| 08/24/2006 | WO2006088114A1 Plasma treatment apparatus |
| 08/24/2006 | WO2006087558A2 Apparatus and method for the application of a material layer to display devices |
| 08/24/2006 | WO2006086815A2 Charged-particle exposure apparatus |
| 08/24/2006 | WO2006065476A3 Imaging device comprising optically coupled fiber optic plate assembly |
| 08/24/2006 | WO2006063035A3 Plasma ion implantation system with axial electrostatic confinement |
| 08/24/2006 | WO2006060827A3 Methods and apparatus for downstream dissociation of gases |
| 08/24/2006 | WO2006035403A3 Cleaning device and process for scanning tunneling microscopy (stm) tip |
| 08/24/2006 | WO2005101100A3 Method and apparatus for in-situ film stack processing |
| 08/24/2006 | US20060189006 Method and apparatus for detecting end point |
| 08/24/2006 | US20060188660 Method for depositing multilayer coatings |
| 08/24/2006 | US20060186337 Scanning electron microscope |
| 08/24/2006 | US20060185795 Anodized substrate support |
| 08/24/2006 | US20060185594 Plasma treating apparatus and its electrode structure |
| 08/24/2006 | US20060185424 Integrated measuring instrument |
| 08/23/2006 | EP1693880A2 Diffuser gravity support |
| 08/23/2006 | EP1693879A2 Scanning electron microscope |
| 08/23/2006 | EP1693877A1 High current density ion source |
| 08/23/2006 | EP1693014A1 Apparatus and method for calibration of thermal energy delivery in plasma tissue surface treatment system |
| 08/23/2006 | EP1692715A1 Umbilical cord facilities connection for an ion beam implanter |
| 08/23/2006 | EP1692711A1 Method and apparatus for reactive solid-gas plasma deposition |
| 08/23/2006 | EP1691938A2 Silicon carbide components of semiconductor substrate processing apparatuses treated to remove free-carbon |
| 08/23/2006 | EP0758756B2 Transparent heating plate and transparent heating device |
| 08/23/2006 | CN1823180A Capacitively coupled plasma reactor with uniform radial distribution of plasma |
| 08/23/2006 | CN1822745A Plasma generation apparatus |
| 08/23/2006 | CN1822317A Electrode subassembly |
| 08/23/2006 | CN1822305A 扫描电子显微镜 Scanning electron microscope |
| 08/23/2006 | CN1271688C Plasma etching of silicon carbide |
| 08/23/2006 | CN1271665C Ion source operation method, and ion beam radiation device |
| 08/23/2006 | CN1270871C Reaction bombardment method for improving surface finish degree of diamond |
| 08/22/2006 | US7095699 Detection apparatus, detection method and electron beam irradiation apparatus |
| 08/22/2006 | US7095179 generator comprising enclosures for confining gases, anodes, cathodes and power sources, used for ionization |
| 08/22/2006 | US7095178 Plasma processing apparatus, method for operating the same, designing system of matching circuit, and plasma processing method |
| 08/22/2006 | US7095037 Electron beam lithography system having improved electron gun |
| 08/22/2006 | US7095036 Electron beam lithography apparatus using a patterned emitter and method of fabricating the patterned emitter |
| 08/22/2006 | US7095035 Demagnification measurement method for charged particle beam exposure apparatus, stage phase measurement method for charged particle beam exposure apparatus, control method for charged particle beam exposure apparatus, and charged particle beam exposure apparatus |
| 08/22/2006 | US7095031 Method of automatically correcting aberrations in charged-particle beam and apparatus therefor |
| 08/22/2006 | US7095024 TEM sample equipped with an identifying function, focused ion beam device for processing TEM sample, and transmission electron microscope |
| 08/22/2006 | US7095023 Charged particle beam apparatus, charged particle detection method, and method of manufacturing semiconductor device |
| 08/22/2006 | US7095022 Electron beam apparatus and method of manufacturing semiconductor device using the apparatus |
| 08/22/2006 | US7095021 Method, apparatus and system for specimen fabrication by using an ion beam |
| 08/22/2006 | US7095020 Sensing mode atomic force microscope |
| 08/22/2006 | US7094706 Device and method for etching a substrate by using an inductively coupled plasma |
| 08/22/2006 | US7094685 Integration of titanium and titanium nitride layers |
| 08/22/2006 | US7094670 doping film comprising semiconductors, by placing electrostatic chuck in reactors, charging doping precursors into the reactor and applying radio frequency power to generate gases, and applying voltage to an electrode of the electrostatic chuck |
| 08/22/2006 | US7094316 Externally excited torroidal plasma source |
| 08/22/2006 | US7094315 Chamber configuration for confining a plasma |
| 08/22/2006 | US7094313 Universal mid-frequency matching network |
| 08/22/2006 | US7094312 Focused particle beam systems and methods using a tilt column |
| 08/17/2006 | WO2006086300A2 Control of process gases in specimen surface treatment system using plasma |
| 08/17/2006 | WO2006085994A2 Multi-component substances and apparatus for preparation thereof |
| 08/17/2006 | WO2006085576A1 Plasma source, ion source, and ion generating method |
| 08/17/2006 | WO2006085391A1 Observation technology by coherent wave |
| 08/17/2006 | WO2006084298A1 Charged-particle exposure apparatus with electrostatic zone plate |
| 08/17/2006 | WO2006021961A3 Sample enclosure for inspection and methods of use thereof |
| 08/17/2006 | WO2006014633A3 Electrostatic lens for ion beams |