| Patents for H01J 37 - Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof (46,866) |
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| 10/19/2006 | US20060231753 Computer Program Products for Measuring Critical Dimensions of Fine Patterns Using Scanning Electron Microscope Pictures and Secondary Electron Signal Profiles |
| 10/19/2006 | US20060231526 System and method for determining the state of a film in a plasma reactor using an electrical property |
| 10/19/2006 | US20060231394 Cylindrical AC/DC Magnetron with Compliant Drive System and Improved Electrical and Thermal Isolation |
| 10/19/2006 | US20060231208 Plasma processing apparatus, plasma processing method and wave retardation plate |
| 10/19/2006 | US20060231205 Method and apparatus for cleaning a cvd chamber |
| 10/19/2006 | US20060231031 Method and apparatus for treating a substrate |
| 10/19/2006 | US20060231030 Modulated gap segmented antenna for inductively-coupled plasma processing system |
| 10/19/2006 | US20060231029 Rf current return path for a large area substrate plasma reactor |
| 10/19/2006 | DE102005058207A1 Therapeutische Teilchenstrahl-Vorrichtung Therapeutic particle beam device |
| 10/19/2006 | DE102005017742A1 Method for coating optical substrate e.g. for semiconductor components manufacture, involves generating a plasma for interaction with coating material |
| 10/19/2006 | DE102005017632A1 Method of controlling local etching or deposition in modification of surfaces with pulsed determination of a removal or deposition profile ion streams useful in the high accuracy forming of optical component surfaces involving |
| 10/18/2006 | EP1713119A2 Method for patterning a wafer for the manufacture of an integrated circuit |
| 10/18/2006 | EP1713110A1 Device for coating a substrate and module |
| 10/18/2006 | EP1712527A2 A furnace for carrying out a PCVD process |
| 10/18/2006 | EP1711644A1 Compensation of spacing between magnetron and sputter target |
| 10/18/2006 | EP1711289A1 Method and apparatus for perimeter cleaning in cold hearth refining |
| 10/18/2006 | EP1079868B1 Apparatus for inactivating contaminants in biological fluid |
| 10/18/2006 | CN1849701A Plasma processing device and ashing method |
| 10/18/2006 | CN1849691A Method and apparatus for improved focus ring |
| 10/18/2006 | CN1849690A Electron cyclotron resonance (ECR) plasma source having a linear plasma discharge opening |
| 10/18/2006 | CN1849497A A system and method for determining a cross sectional feature of a structural element using a reference structural element |
| 10/18/2006 | CN1848376A Semiconductor processing system reaction chamber |
| 10/18/2006 | CN1848372A Plasma reaction device |
| 10/18/2006 | CN1848371A Plasma etching apparatus |
| 10/18/2006 | CN1848367A Plasma reaction chamber |
| 10/18/2006 | CN1280873C Plasma treatment device and high-frequency power supply device |
| 10/17/2006 | US7122965 Methods and apparatus for calibration and metrology for an integrated RF generator system |
| 10/17/2006 | US7122809 Charged beam writing method and writing tool |
| 10/17/2006 | US7122806 Laser stimulated atom probe characterization of semiconductor and dielectric structures |
| 10/17/2006 | US7122805 Field emitter beam source and method for controlling a beam current |
| 10/17/2006 | US7122796 Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the same |
| 10/17/2006 | US7122795 Detector optics for charged particle beam inspection system |
| 10/17/2006 | US7122479 Etching processing method |
| 10/17/2006 | US7122125 Controlled polymerization on plasma reactor wall |
| 10/17/2006 | US7122096 Method and apparatus for processing semiconductor |
| 10/12/2006 | WO2006107797A2 Methods and apparatus for glitch recovery in stationary-beam ion implantation process using east ion beam control |
| 10/12/2006 | WO2006107726A1 Method of measuring beam angle |
| 10/12/2006 | WO2006107114A1 Plasma processing apparatus |
| 10/12/2006 | WO2006107113A1 Strain relief cutouts in shower plate made from porous ceramic |
| 10/12/2006 | WO2006106556A1 Method and system for facilitating the determination of the end point in plasma etching processes |
| 10/12/2006 | WO2006106144A1 A method of testing a plasma reactor |
| 10/12/2006 | WO2006105775A2 Method and system for stabilizing an operating point of reactive, plasma-enhanced vacuum coating processes |
| 10/12/2006 | WO2005104178A3 Mass spectrometer |
| 10/12/2006 | US20060228891 Method of exposing a substrate to a surface microwave plasma, etching method, deposition method, surface microwave plasma generating apparatus, semiconductor substrate etching apparatus, semiconductor substrate deposition apparatus, and microwave plasma generating antenna assembly |
| 10/12/2006 | US20060228815 Inductively coupled plasma chamber attachable to a processing chamber for analysis of process gases |
| 10/12/2006 | US20060228634 Beam-induced etching |
| 10/12/2006 | US20060228571 Member of apparatus for plasma treatment, member of treating apparatus, apparatus for plasma treatment, treating apparatus and method of plasma treatment |
| 10/12/2006 | US20060226376 Sample milling/observing apparatus and method of observing sample |
| 10/12/2006 | US20060226359 Method and apparatus for quantitative three-dimensional reconstruction in scanning electron microscopy |
| 10/12/2006 | US20060226352 Ion-implantation machine, control method thereof, and process for manufacturing integrated devices |
| 10/12/2006 | US20060226119 Method for generating plasma method for cleaning and method for treating substrate |
| 10/12/2006 | US20060225998 Direct ion beam deposition method and system |
| 10/12/2006 | US20060225767 Method and apparatus for cleaning a cvd chamber |
| 10/12/2006 | US20060225653 Apparatus and method for generating uniform plasmas |
| 10/12/2006 | DE19829760B4 Koaxialer Mikrowellenapplikator zur Erzeugung eines Plasmas mit automatischer oder manueller Anpassung Coaxial microwave plasma generation with automatic or manual adjustment |
| 10/11/2006 | EP1710829A1 Magnet assembly for a planar magnetron |
| 10/11/2006 | EP1710828A2 Method and apparatus for quantitative three-dimensional reconstruction in scanning electron microscopy |
| 10/11/2006 | EP1710560A1 A method of testing a plasma reactor |
| 10/11/2006 | EP1710327A2 Method of selective etching by using a focused ion beam, an electron beam or a laser beam |
| 10/11/2006 | EP1709679A1 System and method for surface reduction, passivation, corrosion prevention and activation of copper surface |
| 10/11/2006 | EP1709678A1 Stress free etch processing in combination with a dynamic liquid meniscus |
| 10/11/2006 | EP1709663A2 Device for producing excited and/or ionised particles in a plasma and method for producing ionised particles |
| 10/11/2006 | CN1846293A Method for balancing return currents in plasma processing apparatus |
| 10/11/2006 | CN1846292A Unipolar electrostatic quadrupole lens and switching methods for charged beam transport |
| 10/11/2006 | CN1845299A Device for controlling D.C. bias on wafer |
| 10/11/2006 | CN1845292A Magnetic field assistant self glow plasma ion implantation device |
| 10/11/2006 | CN1279573C Target tray oblique scanning moving mechanism in ion implantaton apparatus |
| 10/10/2006 | US7120556 Performance evaluation method for plasma processing apparatus for continuously maintaining a desired performance level |
| 10/10/2006 | US7119489 Rotation-magnetron-in-magnetron (RMIM) electrode, method of manufacturing the RMIM electrode, and sputtering apparatus including the RMIM electrode |
| 10/10/2006 | US7119348 Charged beam writing apparatus and writing method |
| 10/10/2006 | US7119347 Ion implantation apparatus and method |
| 10/10/2006 | US7119346 Lithographic apparatus and device manufacturing method |
| 10/10/2006 | US7119344 Electron beam device having a specimen holder |
| 10/10/2006 | US7119342 Interfaces for a photoionization mass spectrometer |
| 10/10/2006 | US7119333 Ion detector for ion beam applications |
| 10/10/2006 | US7118996 Apparatus and method for doping |
| 10/05/2006 | WO2006104736A1 Termination of secondary frequencies in rf power delivery |
| 10/05/2006 | WO2006104687A1 Load bearing insulator in vacuum etch chamber |
| 10/05/2006 | WO2006104139A1 Multi-column electron beam exposure device |
| 10/05/2006 | WO2006103828A1 Method of manufacturing magnetic recording medium, magnetic recording medium and surface treatment apparatus |
| 10/05/2006 | WO2006103524A1 High brightness solid state ion beam generator, its use, and method for making such a generator |
| 10/05/2006 | WO2006067004A3 Dual-mode electron beam column |
| 10/05/2006 | WO2004013661A3 Methods and apparatus for preparing specimens for microscopy |
| 10/05/2006 | US20060219955 Method of measuring ion beam position |
| 10/05/2006 | US20060219954 Methods and apparatus for glitch recovery in stationary-beam ion implantation process using fast ion beam control |
| 10/05/2006 | US20060219953 Subsurface imaging using an electron beam |
| 10/05/2006 | US20060219952 Plasma ion implantation systems and methods using solid source of dopant material |
| 10/05/2006 | US20060219949 Fib milling of copper over organic dielectrics |
| 10/05/2006 | US20060219946 Electron beam apparatus and method for production of its specimen chamber |
| 10/05/2006 | US20060219919 TEM sample holder and method of forming same |
| 10/05/2006 | US20060219918 Sample electrification measurement method and charged particle beam apparatus |
| 10/05/2006 | US20060219917 Scanning electron microscope with measurement function |
| 10/05/2006 | US20060219910 Monochromator and scanning electron microscope using the same |
| 10/05/2006 | US20060219909 Detecting apparatus and device manufacturing method |
| 10/05/2006 | US20060219906 Technique for CD measurement on the basis of area fraction determination |
| 10/05/2006 | US20060219267 System, method and apparatus for self-cleaning dry etch |
| 10/05/2006 | US20060219170 Pore cathode for the mass production of photovoltaic devices having increased conversion efficiency |
| 10/05/2006 | DE102006012947A1 Elektronenstrahl-Bestrahlungssystem und Elektronenstrahl-Bestrahlungsverfahren Electron beam exposure system and electron beam irradiation method |
| 10/05/2006 | DE10123583B4 Vorrichtung und Verfahren zur Beschichtung und/oder Oberflächenbehandlung von Substraten mittels Niederdruck-Plasma sowie Verwendung der Vorrichtung Apparatus and method for coating and / or surface treatment of substrates using low-pressure plasma, and using the apparatus |
| 10/04/2006 | EP1708242A1 Plasma generating electrode and plasma reactor |