| Patents for H01J 37 - Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof (46,866) |
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| 11/20/2014 | US20140338836 Etching apparatus |
| 11/20/2014 | US20140338601 Deposition apparatus |
| 11/18/2014 | US8890537 Harmonic derived arc detector |
| 11/18/2014 | US8890444 Electron gun used in particle beam device |
| 11/18/2014 | US8890413 Ignition circuit for igniting a plasma fed with alternating power |
| 11/18/2014 | US8890412 Plasma source electrode |
| 11/18/2014 | US8890096 Measuring/inspecting apparatus and measuring/inspecting method enabling blanking control of electron beam |
| 11/18/2014 | US8890095 Reliability in a maskless lithography system |
| 11/18/2014 | US8890094 Projection lens arrangement |
| 11/18/2014 | US8890093 Charged particle beam apparatus and method for forming observation image |
| 11/18/2014 | US8890069 Method for detecting defect of substrate |
| 11/18/2014 | US8890068 Charged particle ray apparatus and pattern measurement method |
| 11/18/2014 | US8890067 Inspection system using scanning electron microscope |
| 11/18/2014 | US8890065 Apparatus and method for performing microdiffraction analysis |
| 11/18/2014 | US8890064 Method for S/TEM sample analysis |
| 11/18/2014 | US8889568 Method and apparatus for producing silicon nitride film |
| 11/18/2014 | US8889435 Plasma density control |
| 11/18/2014 | US8889169 Drug delivery system and method of manufacturing thereof |
| 11/18/2014 | US8889023 Plasma processing apparatus and plasma processing method |
| 11/18/2014 | US8889021 Process condition sensing device and method for plasma chamber |
| 11/18/2014 | US8888982 Reduction of copper or trace metal contaminants in plasma electrolytic oxidation coatings |
| 11/18/2014 | US8888951 Plasma processing apparatus and electrode for same |
| 11/18/2014 | US8888950 Apparatus for plasma processing and method for plasma processing |
| 11/18/2014 | US8888949 Plasma processing equipment and gas distribution apparatus thereof |
| 11/13/2014 | US20140335698 Component of a plasma processing apparatus having a protective in situ formed layer on a plasma exposed surface |
| 11/13/2014 | US20140335288 Plasma processing device and plasma processing method |
| 11/13/2014 | US20140335287 Atomic layer deposition apparatus and atomic layer deposition method |
| 11/13/2014 | US20140333915 Radiation Source |
| 11/13/2014 | US20140332735 Complex oxide sintered body, sputtering target, transparent conductive oxide film, and method for producing same |
| 11/13/2014 | US20140332699 Ion Beam Sample Preparation Apparatus and Methods |
| 11/13/2014 | US20140332696 Low contamination scanner for gcib system |
| 11/13/2014 | US20140332685 Detecting high atomic number materials with cosmic ray muon tomography |
| 11/13/2014 | US20140332684 Electron Beam Interference Device and Electron Beam Interferometry |
| 11/13/2014 | US20140332605 Plasma processing equipment and gas distribution apparatus thereof |
| 11/13/2014 | US20140332498 Substrate holder, substrate supporting apparatus, substrate processing apparatus, and substrate processing method using the same |
| 11/13/2014 | US20140332497 Plasma processing apparatus and plasma processing method |
| 11/13/2014 | US20140332376 Sputtering system and method using counterweight |
| 11/13/2014 | US20140332375 Assembly for feeding in hf current for tubular cathodes |
| 11/13/2014 | US20140332370 Filtered Cathodic Arc Deposition Apparatus and Method |
| 11/13/2014 | US20140332369 Multidirectional racetrack rotary cathode for pvd array applications |
| 11/13/2014 | US20140332161 Apparatus for spatial and temporal control of temperature on a substrate |
| 11/11/2014 | US8885973 Method for determining distortions in a particle-optical apparatus |
| 11/11/2014 | US8884524 Apparatus and methods for improving reliability of RF grounding |
| 11/11/2014 | US8884520 Impedance matching apparatus |
| 11/11/2014 | US8884255 Data path for lithography apparatus |
| 11/11/2014 | US8884254 Charged particle beam writing apparatus |
| 11/11/2014 | US8884253 System for magnetic shielding |
| 11/11/2014 | US8884249 Device for sterilizing closures for containers |
| 11/11/2014 | US8884248 Forming a vitrified sample for electron microscopy |
| 11/11/2014 | US8884247 System and method for ex situ analysis of a substrate |
| 11/11/2014 | US8884246 Charged particle optical system and scribing apparatus |
| 11/11/2014 | US8884245 Corrector for the correction of chromatic aberrations in a particle-optical apparatus |
| 11/11/2014 | US8884244 Dual mode ion implanter |
| 11/11/2014 | US8884225 Sample observing device and sample observing method |
| 11/11/2014 | US8884224 Charged particle beam imaging assembly and imaging method thereof |
| 11/11/2014 | US8884223 Methods and apparatus for measurement of relative critical dimensions |
| 11/11/2014 | US8884181 Method of generating low-energy secondary electrons for applications in biological sciences, radiochemistry, and chemistry of polymers and physics of radiotherapy |
| 11/11/2014 | US8884180 Over-voltage protection during arc recovery for plasma-chamber power supplies |
| 11/11/2014 | US8884178 Methods and apparatus for igniting and sustaining plasma |
| 11/11/2014 | US8883618 Method and device for the treatment of a semiconductor substrate |
| 11/11/2014 | US8883375 Method and system for forming a pattern using charged particle beam lithography with multiple exposure passes |
| 11/11/2014 | US8883269 Thin film deposition using microwave plasma |
| 11/11/2014 | US8883257 Method for manufacturing gas barrier thin film-coated plastic container |
| 11/11/2014 | US8883246 Plasma activated chemical vapour deposition method and apparatus therefor |
| 11/11/2014 | US8883025 Plasma processing apparatus and plasma processing method |
| 11/11/2014 | US8883024 Using vacuum ultra-violet (VUV) data in radio frequency (RF) sources |
| 11/11/2014 | US8882976 Magnetron unit moving apparatus for preventing magnetization and magnetron sputtering equipment having the same |
| 11/11/2014 | US8882962 Plasma processing apparatus |
| 11/06/2014 | US20140329390 Plasma treatment method and plasma treatment device |
| 11/06/2014 | US20140329095 Method and Apparatus for Producing a Reflection-Reducing Layer on a Substrate |
| 11/06/2014 | US20140328747 Zinc oxide sputtering target and method for producing same |
| 11/06/2014 | US20140327358 Method of controlling an ion implanter in plasma immersion mode |
| 11/06/2014 | US20140327357 Compact electromagnetic plasma ignition device |
| 11/06/2014 | US20140326901 Extraction electrode assembly voltage modulation in an ion implantation system |
| 11/06/2014 | US20140326897 Gas field ionization ion source and ion beam device |
| 11/06/2014 | US20140326896 Method and apparatus for enhanced lifetime and performance of ion source in an ion implantation system |
| 11/06/2014 | US20140326895 Permanent Magnet Based High Performance Multi-Axis Immersion Electron Lens Array with Low Axial Leakage Field |
| 11/06/2014 | US20140326879 Charged particle beam apparatus permitting high-resolution and high-contrast observation |
| 11/06/2014 | US20140326878 Phase shift method for a tem |
| 11/06/2014 | US20140326877 Source for Selectively Providing Positively or Negatively Charged Particles for a Focusing Column |
| 11/06/2014 | US20140326876 Method of using a phase plate in a transmission electron microscope |
| 11/06/2014 | US20140326874 Printed circuit board multipole units used for ion transportation |
| 11/06/2014 | US20140326594 Extended lifetime ion source |
| 11/06/2014 | US20140326409 Plasma processing apparatus and method |
| 11/06/2014 | US20140326277 Apparatus and method for plasma treatment of surfaces |
| 11/04/2014 | US8881067 Method and apparatus for monitoring cross-sectional shape of a pattern formed on a semiconductor device |
| 11/04/2014 | US8880374 Charged particle beam device |
| 11/04/2014 | US8880356 Method and system for spectrum data analysis |
| 11/04/2014 | US8880227 Component temperature control by coolant flow control and heater duty cycle control |
| 11/04/2014 | US8878434 Inductively-coupled plasma device |
| 11/04/2014 | US8878422 Device for producing an electron beam |
| 11/04/2014 | US8878148 Method and apparatus of pretreatment of an electron gun chamber |
| 11/04/2014 | US8878147 Method and apparatus for in situ preparation of serial planar surfaces for microscopy |
| 11/04/2014 | US8878144 Electron microscope and sample holder |
| 11/04/2014 | US8878143 Electron beam lithography device and lithographic method |
| 11/04/2014 | US8878141 Drawing apparatus, and method of manufacturing article |
| 11/04/2014 | US8878130 Scanning electron microscope and scanning transmission electron microscope |
| 11/04/2014 | US8878129 Pattern measurement apparatus and pattern measurement method |
| 11/04/2014 | US8877472 Electron beam irradiation processing of biomass and saccharification thereof |
| 11/04/2014 | US8877467 Processing biomass |