| Patents for H01J 37 - Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof (46,866) |
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| 07/12/2007 | US20070158592 Ion beam delivery equipment and an ion beam delivery method |
| 07/12/2007 | US20070158591 Method and apparatus for processing a micro sample |
| 07/12/2007 | US20070158590 Focused ion beam processing method |
| 07/12/2007 | US20070158564 Method and apparatus for processing a micro sample |
| 07/12/2007 | US20070158561 Single stage charged particle beam energy width reduction system for charged particle beam system |
| 07/12/2007 | US20070158305 Apparatus and method for plasma treating a substrate |
| 07/12/2007 | US20070158180 Magnetron sputtering method and magnetron sputtering apparatus |
| 07/12/2007 | US20070158177 Monitoring the coating area density of a predetermined layer thickness in a simple manner with the aid of the integral measuring technique, x-ray fluorescence, of an an auxiliary substrate arranged between the first coating source and an area into which a substrate to be coated is to be received |
| 07/12/2007 | US20070158027 Plasma treatment device |
| 07/12/2007 | DE10359508B4 Verfahren und Vorrichtung zum Magnetronsputtern Method and apparatus for magnetron sputtering |
| 07/12/2007 | DE102007001044A1 Elektronenstrahl-Bestrahlungssystem Electron beam exposure system |
| 07/12/2007 | DE102005063142A1 Transmission electron microscope, has image recording unit attached to projection chamber, and forming photo image derived from electron image of sample, on screen, and user central level and ray axis running at right angle to each other |
| 07/12/2007 | DE10102493B4 Rohrförmiges Target und Verfahren zur Herstellung eines solchen Targets Tubular target and process for producing such a target |
| 07/11/2007 | EP1805778A2 Systems and methods for ion beam focusing |
| 07/11/2007 | EP1616224B1 Micromachining process |
| 07/11/2007 | EP1536910A4 Radial pulsed arc discharge gun for synthesizing nanopowders |
| 07/11/2007 | EP1212611B1 Electron density measurement and plasma process control system using changes in the resonant frequency of an open resonator containing the plasma |
| 07/11/2007 | CN2922117Y Crystal chip platform angle adjusting device |
| 07/11/2007 | CN2922115Y Long-life ion source heating electronic gun filament fixing device |
| 07/11/2007 | CN2922114Y Filament lead-out rod isolating structure |
| 07/11/2007 | CN1998069A Method of plasma etch endpoint detection using a V-I probe diagnostics |
| 07/11/2007 | CN1998062A Methods for stable and repeatable plasma ion implantation |
| 07/11/2007 | CN1998059A Non-axisymmetric charged-particle beam system |
| 07/11/2007 | CN1997773A Method for the plasma cleaning of the surface of a material coated with an organic substance and the installation for carrying out said method |
| 07/11/2007 | CN1996547A Electronic optical focusing, deflexion and signals collection method for the turning gear immerged object lens |
| 07/11/2007 | CN1996546A The real-time control system and control method for the ion source in gas |
| 07/11/2007 | CN1326224C Interferometric endpoint detection in a substrate etching process |
| 07/11/2007 | CN1326190C Stacked RF excitation coil for inductive plasma processor |
| 07/10/2007 | US7242485 Displacement gauge and displacement measuring method |
| 07/10/2007 | US7242015 Patterned wafer inspection method and apparatus therefor |
| 07/10/2007 | US7242014 Charged particle beam drawing equipment, method of adjusting aperture mask, and method of manufacturing semiconductor device |
| 07/10/2007 | US7242013 Method for depositing a film using a charged particle beam, method for performing selective etching using the same, and charged particle beam equipment therefor |
| 07/10/2007 | US7241996 Charged particle beam apparatus |
| 07/10/2007 | US7241995 Electron microscope equipped with magnetic microprobe |
| 07/10/2007 | US7241993 Inspection system by charged particle beam and method of manufacturing devices using the system |
| 07/10/2007 | US7241991 Region-of-interest based electron beam metrology |
| 07/10/2007 | US7241542 Process for controlling the proximity effect correction |
| 07/10/2007 | US7241428 Highly efficient compact capacitance coupled plasma reactor/generator and method |
| 07/10/2007 | US7241397 Honeycomb optical window deposition shield and method for a plasma processing system |
| 07/10/2007 | US7241361 Magnetically enhanced, inductively coupled plasma source for a focused ion beam system |
| 07/09/2007 | WO2007100978A2 Aberration-correcting cathode lens microscopy instrument |
| 07/09/2007 | CA2636239A1 Aberration-correcting cathode lens microscopy instrument |
| 07/05/2007 | WO2007075509A2 Methods and apparatus for downstream dissociation of gases |
| 07/05/2007 | WO2007056369A3 Batch photoresist dry strip and ash system and process |
| 07/05/2007 | WO2005079360A3 Advanced optics for rapidly patterned lasser profiles in analytical spectrometry |
| 07/05/2007 | US20070153263 Method and apparatus for performing limited area spectral analysis |
| 07/05/2007 | US20070152174 Focused ion beam apparatus and aperture |
| 07/05/2007 | US20070152173 Ion implantation apparatus and ion implanting method |
| 07/05/2007 | US20070152151 Method and sample for radiation microscopy including a particle beam channel formed in the sample source |
| 07/05/2007 | US20070152150 Charged particle beam apparatus |
| 07/05/2007 | US20070151956 Plasma processing device and ashing method |
| 07/05/2007 | DE19781667B4 Plasmaerzeugungsverfahren und -gerät mit einer induktiv gekoppelten Plasmaquelle Plasma generation method and apparatus using an inductively coupled plasma source |
| 07/05/2007 | DE102005061687A1 Verfahren und Vorrichtung zur Abstandsmessung Method and apparatus for measuring distance |
| 07/05/2007 | DE102005061663A1 Ionenimplantationsvorrichtung, Verfahren zur Steuerung einer Ionenimplantationsvorrichtung sowie Abbremseinrichtung An ion implantation apparatus, method of controlling an ion implantation apparatus, as well as braking means |
| 07/04/2007 | EP1804275A1 Sputter device with a tubular cathode and process of operating the sputter device |
| 07/04/2007 | EP1804274A2 Plasma processing apparatus |
| 07/04/2007 | EP1804273A1 Method and equipment for specimen preparation |
| 07/04/2007 | EP1804272A2 Method for determining the aberration coefficients of the aberration function of a particle-opticle lens. |
| 07/04/2007 | EP1803144A1 An end-block for a rotatable target sputtering apparatus |
| 07/04/2007 | EP1803143A2 Electrode device for plasma treatment of the inner surfaces of a container and treatment method thereby |
| 07/04/2007 | EP1803142A1 Apparatus for generating high-current electrical discharges |
| 07/04/2007 | EP1803141A1 Microreactor for a transmission electron microscope and heating element and method for the manufacture thereof |
| 07/04/2007 | EP1803140A2 Device and method for milling of material using ions |
| 07/04/2007 | EP1543175A4 High peak power plasma pulsed supply with arc handling |
| 07/04/2007 | CN1993806A Impurity introducing method |
| 07/04/2007 | CN1992169A System and method for implanting a wafer with an ion beam |
| 07/04/2007 | CN1992142A Tapered carbon nano tube and electronic source used for the same |
| 07/04/2007 | CN1324931C Plasma generation and processing with multiple radiation sources |
| 07/04/2007 | CN1324648C Apparatus and method to confine plasma and reduce flow resistance in plasma reactor |
| 07/04/2007 | CN1324641C Magnet array in conjunction with rotating magnetron for plasma sputtering |
| 07/04/2007 | CN1324114C Plasma-assisted joining |
| 07/03/2007 | US7240307 Pattern size correcting device and pattern size correcting method |
| 07/03/2007 | US7239934 System and method for delivering writing data of a semiconductor device and fabricating a semiconductor device |
| 07/03/2007 | US7239148 Method and device for measuring surface potential distribution |
| 07/03/2007 | US7238956 Device for controlling an apparatus generating a charged particle beam |
| 07/03/2007 | US7238953 Specimen holder for an electron microscope and method for reducing thermal drift in a microscope |
| 07/03/2007 | US7238952 Metal ion emission device and process for producing the same, ion beam irradiation device, processing apparatus and analyzing apparatus provided with emission device |
| 07/03/2007 | US7238939 Small electron gun |
| 07/03/2007 | US7238616 Photo-assisted method for semiconductor fabrication |
| 07/03/2007 | US7238597 Boron ion delivery system |
| 07/03/2007 | US7238294 Procedure for etching of materials at the surface with focussed electron beam induced chemical reactions at said surface |
| 07/03/2007 | CA2305938C Filtered cathodic arc deposition method and apparatus |
| 06/28/2007 | WO2007071719A1 Method of manufacturing at least one sputter-coated substrate and sputter source |
| 06/28/2007 | WO2007071074A1 Excimer radiation lamp assembly, and source module and fluid treatment system containing same |
| 06/28/2007 | WO2007071043A2 Excimer radiation lamp assembly, and source module and fluid treatment system containing same |
| 06/28/2007 | WO2007044344A3 Method and apparatus for cylindrical magnetron sputtering using multiple electron drift paths |
| 06/28/2007 | WO2006110253A3 Quantitative transmission/emission detector system and methods of detecting concealed radiation sources |
| 06/28/2007 | US20070148364 RF power (Bottom RF) from a radio-frequency power source 12 is turned off (t5) and the supply of a He gas 14 to a back face of a wafer W is stopped (t5) when an end point detector 17 (EPD) detects an end point (t5), and a high-voltage DC power source 13 (HV) is turned off (t6) under the condition |
| 06/28/2007 | US20070146697 Apparatus and method for testing defects |
| 06/28/2007 | US20070146696 Apparatus and method for testing defects |
| 06/28/2007 | US20070145302 Method and apparatus for specimen fabrication |
| 06/28/2007 | US20070145301 Method and apparatus for specimen fabrication |
| 06/28/2007 | US20070145300 Method and apparatus for specimen fabrication |
| 06/28/2007 | US20070145299 Method and apparatus for specimen fabrication |
| 06/28/2007 | US20070145298 Ion beam angle measurement systems and methods for ion implantation systems |
| 06/28/2007 | US20070145023 Toroidal Low-Field Reactive Gas and Plasma Source Having a Dielectric Vacuum Vessel |
| 06/28/2007 | US20070144671 Shower plate, plasma processing apparatus, and product manufacturing method |
| 06/28/2007 | US20070144670 Vacuum apparatus including a particle monitoring unit, particle monitoring method and program, and window member for use in the particle monitoring |
| 06/28/2007 | DE102006021565A1 Magnetic field system for a cathode unit, is produced using one or more cluster magnetron cathodes |
| 06/27/2007 | EP1801946A1 Method and device of arc detection in a plasma process |